TWD168774S - 反應管之部分 - Google Patents

反應管之部分

Info

Publication number
TWD168774S
TWD168774S TW102308331D01F TW102308331D01F TWD168774S TW D168774 S TWD168774 S TW D168774S TW 102308331D01 F TW102308331D01 F TW 102308331D01F TW 102308331D01 F TW102308331D01 F TW 102308331D01F TW D168774 S TWD168774 S TW D168774S
Authority
TW
Taiwan
Prior art keywords
design
opening
article
reaction tube
gas nozzle
Prior art date
Application number
TW102308331D01F
Other languages
English (en)
Inventor
Keishin Yamazaki
Masahiro Miyake
Yasuaki Komae
Kosuke Takagi
Shinya Morita
Naonori Akae
Masato Terasaki
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD168774S publication Critical patent/TWD168774S/zh

Links

Abstract

【物品用途】;本設計的物品是反應管，為應用在基板處理裝置的反應管。;【設計說明】;本物品具有用來收容處理基板的開口，在該開口的周緣設有凸緣；本物品，是在側面具備：形成設置有氣體噴嘴之空間的略矩形狀之突出部；和排出從該氣體噴嘴被噴出的氣體的開口部，於本物品的內部，將氣體從上述氣體噴嘴供給到上述處理基板之後，從上述開口部排出，進行上述處理基板的處理。本衍生設計與原設計之外觀差異在於：如立體圖及仰視圖等所示，其圓周上的凸部之寬度設計略有所不同，因此本案與原設計案之差異些微，不影響原設計與衍生設計之近似。;圖式中以實線所示為「主張設計之部分」，以虛線所示為「不主張設計之部分」。
TW102308331D01F 2013-06-28 2013-12-24 反應管之部分 TWD168774S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013014832 2013-06-28

Publications (1)

Publication Number Publication Date
TWD168774S true TWD168774S (zh) 2015-07-01

Family

ID=52683723

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102308331D01F TWD168774S (zh) 2013-06-28 2013-12-24 反應管之部分

Country Status (2)

Country Link
US (1) USD725055S1 (zh)
TW (1) TWD168774S (zh)

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JP1605460S (zh) * 2017-08-09 2021-05-31
JP1605461S (zh) * 2017-08-10 2021-05-31
JP1605462S (zh) * 2017-08-10 2021-05-31
JP1605982S (zh) * 2017-12-27 2021-05-31
USD987054S1 (en) 2019-03-19 2023-05-23 Airius Ip Holdings, Llc Air moving device
JP1644260S (zh) * 2019-03-20 2019-10-28
GB2596757B (en) 2019-04-17 2023-09-13 Airius Ip Holdings Llc Air moving device with bypass intake
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube
USD991733S1 (en) * 2021-12-28 2023-07-11 Zhuhai Kelitong Electronic Co., Ltd. Electric milk frother
JP1731672S (ja) * 2022-03-15 2025-12-15 基板処理装置用炉
JP1731671S (ja) * 2022-03-15 2025-12-15 基板処理装置用炉
JP1731674S (ja) * 2022-05-30 2025-12-15 半導体製造装置用反応管のインナー管
JP1731673S (ja) * 2022-05-30 2025-12-15 半導体製造装置用反応管のインナー管
JP1731675S (ja) * 2022-05-30 2025-12-15 半導体製造装置用反応管のインナー管
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