USD407696S - Inner tube for use in a semiconductor wafer heat processing apparatus - Google Patents

Inner tube for use in a semiconductor wafer heat processing apparatus Download PDF

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Publication number
USD407696S
USD407696S US29/082,977 US8297798F USD407696S US D407696 S USD407696 S US D407696S US 8297798 F US8297798 F US 8297798F US D407696 S USD407696 S US D407696S
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United States
Prior art keywords
processing apparatus
semiconductor wafer
inner tube
heat processing
wafer heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/082,977
Inventor
Tomohisa Shimazu
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIMAZU, TOMOHISA
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Publication of USD407696S publication Critical patent/USD407696S/en
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Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 a perspective view of an inner tube for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a top plan view thereof; and,
FIG. 4 a cross-sectional view taken along line IV--IV in FIG. 3.

Claims (1)

  1. I claim the ornamental design for inner tube for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/082,977 1997-08-20 1998-02-02 Inner tube for use in a semiconductor wafer heat processing apparatus Expired - Lifetime USD407696S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9-65096 1997-08-20
JP6509697 1997-08-20

Publications (1)

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USD407696S true USD407696S (en) 1999-04-06

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US29/082,977 Expired - Lifetime USD407696S (en) 1997-08-20 1998-02-02 Inner tube for use in a semiconductor wafer heat processing apparatus

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Cited By (20)

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US20140345526A1 (en) * 2013-05-23 2014-11-27 Applied Materials, Inc. Coated liner assembly for a semiconductor processing chamber
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD776795S1 (en) * 2015-05-06 2017-01-17 Leonel Lucero, Jr. Tube
USD799012S1 (en) * 2014-06-24 2017-10-03 Kobe Steel, Ltd. Heat exchanger tube
USD813210S1 (en) * 2016-06-23 2018-03-20 Voxx International Corporation Antenna housing
USD926963S1 (en) * 2012-05-15 2021-08-03 Airius Ip Holdings, Llc Air moving device
US11092330B2 (en) 2013-12-19 2021-08-17 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US11105341B2 (en) 2016-06-24 2021-08-31 Airius Ip Holdings, Llc Air moving device
US11221153B2 (en) 2013-12-19 2022-01-11 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US11236766B2 (en) 2014-06-06 2022-02-01 Airius Ip Holdings Llc Columnar air moving devices, systems and methods
US11365743B2 (en) 2004-03-15 2022-06-21 Airius Ip Holdings, Llc Temperature destratification systems
USD971192S1 (en) 2019-06-03 2022-11-29 Space Exploration Technologies Corp. Antenna apparatus
USD971900S1 (en) * 2019-06-03 2022-12-06 Space Exploration Technologies Corp. Antenna apparatus
USD976242S1 (en) * 2019-06-03 2023-01-24 Space Exploration Technologies Corp. Antenna apparatus
US11598539B2 (en) 2019-04-17 2023-03-07 Airius Ip Holdings, Llc Air moving device with bypass intake
USD987054S1 (en) 2019-03-19 2023-05-23 Airius Ip Holdings, Llc Air moving device
USD991733S1 (en) * 2021-12-28 2023-07-11 Zhuhai Kelitong Electronic Co., Ltd. Electric milk frother
USD991732S1 (en) * 2022-05-30 2023-07-11 Zhuhai Kelitong Electronic Co., Ltd. Electric milk frother
USD1003834S1 (en) * 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11365743B2 (en) 2004-03-15 2022-06-21 Airius Ip Holdings, Llc Temperature destratification systems
US11703062B2 (en) 2004-03-15 2023-07-18 Airius Ip Holdings, Llc Temperature destratification systems
USD926963S1 (en) * 2012-05-15 2021-08-03 Airius Ip Holdings, Llc Air moving device
US20140345526A1 (en) * 2013-05-23 2014-11-27 Applied Materials, Inc. Coated liner assembly for a semiconductor processing chamber
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
US11092330B2 (en) 2013-12-19 2021-08-17 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US11221153B2 (en) 2013-12-19 2022-01-11 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US11713773B2 (en) 2014-06-06 2023-08-01 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US11236766B2 (en) 2014-06-06 2022-02-01 Airius Ip Holdings Llc Columnar air moving devices, systems and methods
USD799012S1 (en) * 2014-06-24 2017-10-03 Kobe Steel, Ltd. Heat exchanger tube
USD776795S1 (en) * 2015-05-06 2017-01-17 Leonel Lucero, Jr. Tube
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD845936S1 (en) 2016-06-23 2019-04-16 Voxx International Corporation Antenna housing
USD813210S1 (en) * 2016-06-23 2018-03-20 Voxx International Corporation Antenna housing
US11105341B2 (en) 2016-06-24 2021-08-31 Airius Ip Holdings, Llc Air moving device
US11421710B2 (en) 2016-06-24 2022-08-23 Airius Ip Holdings, Llc Air moving device
USD987054S1 (en) 2019-03-19 2023-05-23 Airius Ip Holdings, Llc Air moving device
US11781761B1 (en) 2019-04-17 2023-10-10 Airius Ip Holdings, Llc Air moving device with bypass intake
US11598539B2 (en) 2019-04-17 2023-03-07 Airius Ip Holdings, Llc Air moving device with bypass intake
USD976242S1 (en) * 2019-06-03 2023-01-24 Space Exploration Technologies Corp. Antenna apparatus
USD971900S1 (en) * 2019-06-03 2022-12-06 Space Exploration Technologies Corp. Antenna apparatus
USD971192S1 (en) 2019-06-03 2022-11-29 Space Exploration Technologies Corp. Antenna apparatus
USD1012070S1 (en) 2019-06-03 2024-01-23 Space Exploration Technologies Corp. Antenna apparatus
USD1003834S1 (en) * 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD991733S1 (en) * 2021-12-28 2023-07-11 Zhuhai Kelitong Electronic Co., Ltd. Electric milk frother
USD991732S1 (en) * 2022-05-30 2023-07-11 Zhuhai Kelitong Electronic Co., Ltd. Electric milk frother

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