USD405429S - Processing tube for use in a semiconductor wafer heat processing apparatus - Google Patents

Processing tube for use in a semiconductor wafer heat processing apparatus Download PDF

Info

Publication number
USD405429S
USD405429S US29/074,297 US7429797F USD405429S US D405429 S USD405429 S US D405429S US 7429797 F US7429797 F US 7429797F US D405429 S USD405429 S US D405429S
Authority
US
United States
Prior art keywords
semiconductor wafer
wafer heat
processing apparatus
tube
heat processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/074,297
Inventor
Tetsuya Hanagata
Shingo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NANAGATA, TETSUYA, WATANABE, SHINGO
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED CORRECTIVE ASSIGNMENT TO CORRECT ASSIGNOR'S NAME PREVIOUSLY RECORDED AT REEL 8834, FRAME 0976. Assignors: HANAGATA, TETSUYA, WATANABE, SHINGO
Application granted granted Critical
Publication of USD405429S publication Critical patent/USD405429S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Description

FIG. 1 a perspective view of a processing tube for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a top plan view thereof;
FIG. 4 a bottom plan view thereof;
FIG. 5 a cross sectional view thereof taken along line V-V in FIG. 2;
FIG. 6 a right side view thereof;
FIG. 7 a rear elevational view thereof;
FIG. 8 a left side view thereof;
FIG. 9 a cross sectional view thereof taken along line IX-IX in FIG. 3;
FIG. 10 a cross sectional view thereof taken along line X-X in FIG. 3; and,
FIG. 11 a reference figure showing the using state.

Claims (1)

  1. We claim the ornamental design for a processing tube for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/074,297 1997-01-31 1997-07-24 Processing tube for use in a semiconductor wafer heat processing apparatus Expired - Lifetime USD405429S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP264297 1997-01-31
JP9-2642 1997-01-31

Publications (1)

Publication Number Publication Date
USD405429S true USD405429S (en) 1999-02-09

Family

ID=71726463

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/074,297 Expired - Lifetime USD405429S (en) 1997-01-31 1997-07-24 Processing tube for use in a semiconductor wafer heat processing apparatus

Country Status (1)

Country Link
US (1) USD405429S (en)

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD742339S1 (en) * 2014-03-12 2015-11-03 Hitachi Kokusai Electric Inc. Reaction tube
USD748594S1 (en) * 2014-03-12 2016-02-02 Hitachi Kokusai Electric Inc. Reaction tube
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD772824S1 (en) * 2015-02-25 2016-11-29 Hitachi Kokusai Electric Inc. Reaction tube
USD790490S1 (en) * 2015-09-04 2017-06-27 Hitachi Kokusai Electric Inc. Reaction tube
USD791090S1 (en) * 2015-09-04 2017-07-04 Hitachi Kokusai Electric Inc. Reaction tube
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube
USD1002600S1 (en) * 2022-02-24 2023-10-24 Comptek Technologies, Llc Wireless antenna shroud
USD1002599S1 (en) * 2022-02-24 2023-10-24 Comptek Technologies, Llc Wireless access tower
USD1006801S1 (en) * 2022-02-24 2023-12-05 Comptek Technologies, Llc Wireless access point support pole
USD1011325S1 (en) * 2021-04-14 2024-01-16 Comrod Communication AS Antenna
USD1022905S1 (en) * 2022-03-01 2024-04-16 Kokusai Electric Corporation Tubular reactor
USD1022904S1 (en) * 2021-09-15 2024-04-16 Kokusai Electric Corporation Tubular reactor
USD1022906S1 (en) * 2022-03-01 2024-04-16 Kokusai Electric Corporation Tubular reactor
USD1022907S1 (en) * 2022-03-01 2024-04-16 Kokusai Electric Corporation Tubular reactor

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD742339S1 (en) * 2014-03-12 2015-11-03 Hitachi Kokusai Electric Inc. Reaction tube
USD748594S1 (en) * 2014-03-12 2016-02-02 Hitachi Kokusai Electric Inc. Reaction tube
USD772824S1 (en) * 2015-02-25 2016-11-29 Hitachi Kokusai Electric Inc. Reaction tube
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD790490S1 (en) * 2015-09-04 2017-06-27 Hitachi Kokusai Electric Inc. Reaction tube
USD791090S1 (en) * 2015-09-04 2017-07-04 Hitachi Kokusai Electric Inc. Reaction tube
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube
USD1011325S1 (en) * 2021-04-14 2024-01-16 Comrod Communication AS Antenna
USD1022904S1 (en) * 2021-09-15 2024-04-16 Kokusai Electric Corporation Tubular reactor
USD1002600S1 (en) * 2022-02-24 2023-10-24 Comptek Technologies, Llc Wireless antenna shroud
USD1002599S1 (en) * 2022-02-24 2023-10-24 Comptek Technologies, Llc Wireless access tower
USD1006801S1 (en) * 2022-02-24 2023-12-05 Comptek Technologies, Llc Wireless access point support pole
USD1022905S1 (en) * 2022-03-01 2024-04-16 Kokusai Electric Corporation Tubular reactor
USD1022906S1 (en) * 2022-03-01 2024-04-16 Kokusai Electric Corporation Tubular reactor
USD1022907S1 (en) * 2022-03-01 2024-04-16 Kokusai Electric Corporation Tubular reactor

Similar Documents

Publication Publication Date Title
USD404372S (en) Ring for use in a semiconductor wafer heat processing apparatus
USD405429S (en) Processing tube for use in a semiconductor wafer heat processing apparatus
USD404370S (en) Cap for use in a semiconductor wafer heat processing apparatus
USD396847S (en) Semiconductor device
USD411176S (en) Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404127S (en) Pessary extractor apparatus
USD405431S (en) Tube for use in a semiconductor wafer heat processing apparatus
USD405430S (en) Inner tube for use in a semiconductor wafer heat processing apparatus
USD396846S (en) Semiconductor device
USD407696S (en) Inner tube for use in a semiconductor wafer heat processing apparatus
USD382487S (en) Bottle
USD424024S (en) Quartz process tube
USD405062S (en) Processing tube for use in a semiconductor wafer heat processing apparatus
USD404015S (en) Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404369S (en) Manifold cover for use in a semiconductor wafer heat processing apparatus
USD406217S (en) Bottle rack
USD406113S (en) Processing tube for use in a semiconductor wafer heat processing apparatus
USD418485S (en) Semiconductor device
USD443161S1 (en) Rack
USD404368S (en) Outer tube for use in a semiconductor wafer heat processing apparatus
USD432505S (en) Semiconductor element
USD421969S (en) Semiconductor device
USD428859S (en) Semiconductor device