USD404368S - Outer tube for use in a semiconductor wafer heat processing apparatus - Google Patents

Outer tube for use in a semiconductor wafer heat processing apparatus Download PDF

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Publication number
USD404368S
USD404368S US29/082,978 US8297898F USD404368S US D404368 S USD404368 S US D404368S US 8297898 F US8297898 F US 8297898F US D404368 S USD404368 S US D404368S
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US
United States
Prior art keywords
processing apparatus
semiconductor wafer
heat processing
outer tube
wafer heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/082,978
Inventor
Tomohisa Shimazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Filing date
Publication date
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIMAZU, TOMOHISA
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Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 a perspective view of a outertube for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a top plan view thereof;
FIG. 4 a bottom plan view thereof; and,
FIG. 5 a cross-sectional view taken along line V-V in FIG. 3 .

Claims (1)

  1. I claim the ornamental design for an outertube for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/082,978 1997-08-20 1998-02-02 Outer tube for use in a semiconductor wafer heat processing apparatus Expired - Lifetime USD404368S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9-65095 1997-08-20
JP6509597 1997-08-20

Publications (1)

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USD404368S true USD404368S (en) 1999-01-19

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US29/082,978 Expired - Lifetime USD404368S (en) 1997-08-20 1998-02-02 Outer tube for use in a semiconductor wafer heat processing apparatus

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD742339S1 (en) * 2014-03-12 2015-11-03 Hitachi Kokusai Electric Inc. Reaction tube
USD748594S1 (en) * 2014-03-12 2016-02-02 Hitachi Kokusai Electric Inc. Reaction tube
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD813210S1 (en) * 2016-06-23 2018-03-20 Voxx International Corporation Antenna housing
USD813941S1 (en) * 2015-03-09 2018-03-27 Natural Machines, Inc. Capsule for dispensing flowable 3D printing medium
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD742339S1 (en) * 2014-03-12 2015-11-03 Hitachi Kokusai Electric Inc. Reaction tube
USD748594S1 (en) * 2014-03-12 2016-02-02 Hitachi Kokusai Electric Inc. Reaction tube
USD813941S1 (en) * 2015-03-09 2018-03-27 Natural Machines, Inc. Capsule for dispensing flowable 3D printing medium
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD813210S1 (en) * 2016-06-23 2018-03-20 Voxx International Corporation Antenna housing
USD845936S1 (en) 2016-06-23 2019-04-16 Voxx International Corporation Antenna housing
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication

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