TWD177996S - 基板處理裝置用隔熱具 - Google Patents
基板處理裝置用隔熱具Info
- Publication number
- TWD177996S TWD177996S TW105300762F TW105300762F TWD177996S TW D177996 S TWD177996 S TW D177996S TW 105300762 F TW105300762 F TW 105300762F TW 105300762 F TW105300762 F TW 105300762F TW D177996 S TWD177996 S TW D177996S
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate processing
- processing equipment
- heat insulator
- insulator
- article
- Prior art date
Links
- 239000012212 insulator Substances 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 title abstract 3
- 239000007788 liquid Substances 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是基板處理裝置用隔熱具，主要是於基板處理裝置中，安裝在將處理液和處理氣體供給到反應管內的配管的導入端口部的周圍來使用的隔熱具。如使用狀態之參考圖剖面圖所示，在該隔熱具的內部，內裝有加熱器及熱傳導海綿。;【設計說明】;(無)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2015-18405F JP1547314S (zh) | 2015-08-21 | 2015-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD177996S true TWD177996S (zh) | 2016-09-01 |
Family
ID=55591060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105300762F TWD177996S (zh) | 2015-08-21 | 2016-02-19 | 基板處理裝置用隔熱具 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD788704S1 (zh) |
| JP (1) | JP1547314S (zh) |
| TW (1) | TWD177996S (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD806032S1 (en) * | 2016-12-20 | 2017-12-26 | Cirocomm Technology Corp. | Dielectric filter |
| USD805475S1 (en) * | 2016-12-20 | 2017-12-19 | Cirocomm Technology Corp. | Dielectric filter |
| USD805477S1 (en) * | 2016-12-20 | 2017-12-19 | Cirocomm Technology Corp. | Dielectric filter |
| USD805476S1 (en) * | 2016-12-20 | 2017-12-19 | Cirocomm Technology Corp. | Dielectric filter |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD440138S1 (en) * | 2000-03-23 | 2001-04-10 | Lane Punch Corporation | Ball lock punch retainer |
| USD599386S1 (en) * | 2006-03-09 | 2009-09-01 | Moellering David J | Punch retainer |
| USD654211S1 (en) * | 2008-04-04 | 2012-02-14 | Arnold & Richter Cine Technik GmbH & Co. Betriebs KB | Modular LED panel |
| USD613245S1 (en) * | 2009-05-29 | 2010-04-06 | Seiden Mfg. Co., Ltd. | Core for a high-frequency three-phase transformer |
| USD670247S1 (en) * | 2010-12-30 | 2012-11-06 | Sulzer Metco (Us), Inc. | Electrode insulator |
| WO2012115170A1 (ja) * | 2011-02-24 | 2012-08-30 | 株式会社日立国際電気 | 基板処理装置、基板の製造方法及び半導体装置の製造方法 |
| CN102997485A (zh) * | 2011-09-09 | 2013-03-27 | 台达电子工业股份有限公司 | 磁热交换单元 |
| TWD159320S (zh) * | 2012-09-27 | 2014-03-11 | 日本電產科寶有限公司 | 振動元件 |
| USD709323S1 (en) * | 2013-03-28 | 2014-07-22 | Bbm Technology Ltd | Preserving block |
| USD758317S1 (en) * | 2013-07-04 | 2016-06-07 | Schneider Electric Industries Sas | Terminal block |
| USD766833S1 (en) * | 2013-07-04 | 2016-09-20 | Schneider Electric Industries Sas | Terminal block |
-
2015
- 2015-08-21 JP JPD2015-18405F patent/JP1547314S/ja active Active
-
2016
- 2016-02-18 US US29/555,039 patent/USD788704S1/en active Active
- 2016-02-19 TW TW105300762F patent/TWD177996S/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| USD788704S1 (en) | 2017-06-06 |
| JP1547314S (zh) | 2016-04-04 |
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