TWD177999S - 基板處理裝置用隔熱具 - Google Patents

基板處理裝置用隔熱具

Info

Publication number
TWD177999S
TWD177999S TW105300765F TW105300765F TWD177999S TW D177999 S TWD177999 S TW D177999S TW 105300765 F TW105300765 F TW 105300765F TW 105300765 F TW105300765 F TW 105300765F TW D177999 S TWD177999 S TW D177999S
Authority
TW
Taiwan
Prior art keywords
substrate processing
processing equipment
heat insulator
insulator
article
Prior art date
Application number
TW105300765F
Other languages
English (en)
Inventor
Hideto Tateno
Daisuke Hara
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD177999S publication Critical patent/TWD177999S/zh

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用隔熱具，主要是於基板處理裝置中，安裝在將處理液和處理氣體供給到反應管內的配管的導入端口部的周圍來使用的隔熱具。如使用狀態之參考圖剖面圖所示，在該隔熱具的內部，內裝有加熱器及熱傳導海綿。;【設計說明】;(無)
TW105300765F 2015-08-21 2016-02-19 基板處理裝置用隔熱具 TWD177999S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-18408F JP1547097S (zh) 2015-08-21 2015-08-21

Publications (1)

Publication Number Publication Date
TWD177999S true TWD177999S (zh) 2016-09-01

Family

ID=55590864

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105300765F TWD177999S (zh) 2015-08-21 2016-02-19 基板處理裝置用隔熱具

Country Status (3)

Country Link
US (1) USD788706S1 (zh)
JP (1) JP1547097S (zh)
TW (1) TWD177999S (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD806032S1 (en) * 2016-12-20 2017-12-26 Cirocomm Technology Corp. Dielectric filter
USD805475S1 (en) * 2016-12-20 2017-12-19 Cirocomm Technology Corp. Dielectric filter
USD805476S1 (en) * 2016-12-20 2017-12-19 Cirocomm Technology Corp. Dielectric filter
USD805477S1 (en) * 2016-12-20 2017-12-19 Cirocomm Technology Corp. Dielectric filter
JP1609255S (zh) * 2017-04-03 2018-07-17
USD911285S1 (en) * 2017-05-23 2021-02-23 Jaguar Land Rover Limited Battery cell housing honeycomb

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD440138S1 (en) * 2000-03-23 2001-04-10 Lane Punch Corporation Ball lock punch retainer
USD599386S1 (en) * 2006-03-09 2009-09-01 Moellering David J Punch retainer
USD603345S1 (en) * 2008-04-04 2009-11-03 Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg Mini controller for lighting system
USD613245S1 (en) * 2009-05-29 2010-04-06 Seiden Mfg. Co., Ltd. Core for a high-frequency three-phase transformer
USD670247S1 (en) * 2010-12-30 2012-11-06 Sulzer Metco (Us), Inc. Electrode insulator
US9082694B2 (en) * 2011-02-24 2015-07-14 Hitachi Kokusai Electric Inc. Substrate processing apparatus, method for manufacturing substrate, and method for manufacturing semiconductor device
CN102997485A (zh) * 2011-09-09 2013-03-27 台达电子工业股份有限公司 磁热交换单元
TWD159320S (zh) * 2012-09-27 2014-03-11 日本電產科寶有限公司 振動元件
USD709323S1 (en) * 2013-03-28 2014-07-22 Bbm Technology Ltd Preserving block
USD758317S1 (en) * 2013-07-04 2016-06-07 Schneider Electric Industries Sas Terminal block
USD766833S1 (en) * 2013-07-04 2016-09-20 Schneider Electric Industries Sas Terminal block

Also Published As

Publication number Publication date
USD788706S1 (en) 2017-06-06
JP1547097S (zh) 2016-04-04

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