TWD176127S - 反應管之部分 - Google Patents

反應管之部分

Info

Publication number
TWD176127S
TWD176127S TW104304590F TW104304590F TWD176127S TW D176127 S TWD176127 S TW D176127S TW 104304590 F TW104304590 F TW 104304590F TW 104304590 F TW104304590 F TW 104304590F TW D176127 S TWD176127 S TW D176127S
Authority
TW
Taiwan
Prior art keywords
design
reaction tube
case
advocated
item
Prior art date
Application number
TW104304590F
Other languages
English (en)
Inventor
Daisuke Hara
Hideto Tateno
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD176127S publication Critical patent/TWD176127S/zh

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用反應管。;【設計說明】;液體原料或氣體化原料，通過噴嘴供給至反應管內，對載置於反應管內的半導體基板進行處理。本物品本體內壁具有氣體噴嘴、熱電偶保護管，是利用焊接固定在本體上。;圖式所揭露之實線部分，為本案主張設計之部分，虛線部分為本案不主張設計之部分。;圖式所揭露之一點鏈線，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。;本物品之本體、氣體噴嘴、熱電偶保護管、排氣管及反應管凸緣全部都是透明的。
TW104304590F 2015-02-23 2015-08-21 反應管之部分 TWD176127S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-3569F JP1534828S (zh) 2015-02-23 2015-02-23

Publications (1)

Publication Number Publication Date
TWD176127S true TWD176127S (zh) 2016-06-01

Family

ID=54258268

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104304590F TWD176127S (zh) 2015-02-23 2015-08-21 反應管之部分

Country Status (3)

Country Link
US (1) USD778457S1 (zh)
JP (1) JP1534828S (zh)
TW (1) TWD176127S (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD813065S1 (en) * 2016-02-10 2018-03-20 Hitachi Kokusai Electric Inc. Gas sampling cell
JP1605982S (zh) * 2017-12-27 2021-05-31
JP1678273S (ja) * 2020-03-10 2021-02-01 反応管
JP1713188S (zh) * 2021-09-15 2022-04-21
JP1713189S (zh) * 2021-09-15 2022-04-21
JP1731789S (zh) * 2022-03-01 2022-12-09
JP1731878S (zh) * 2022-03-01 2022-12-09
JP1731877S (zh) * 2022-03-01 2022-12-09

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2167865A (en) * 1938-03-04 1939-08-01 Beecher Valentine Pipe coupling
US2761949A (en) * 1954-09-29 1956-09-04 Fluid Systems Inc Prefabricated pipe system
US3929356A (en) * 1974-11-13 1975-12-30 Gen Motors Corp Tube to block mounting assembly
US5063968A (en) * 1980-10-29 1991-11-12 Proprietary Technology, Inc. Swivelable quick connector assembly
DE3517488A1 (de) * 1985-05-15 1986-11-20 Süddeutsche Kühlerfabrik Julius Fr. Behr GmbH & Co KG, 7000 Stuttgart Rohranschluss, insbesondere fuer einen wasserkasten eines waermetauschers einer kraftfahrzeugheizung
EP0868629A4 (en) * 1995-12-22 1999-03-17 Kelsey Hayes Co QUICK COUPLING DEVICE FOR HIGH DENSITY HYDRAULIC LINES AND ANTI-BLOCKING BRAKE SYSTEM AND / OR ANTI-DRIVE LOCK CONTROL SYSTEM
US6164706A (en) * 1998-07-08 2000-12-26 Hayes, Jr.; Frank F. Sweep elbow tube connector and method of fabrication
EP1988946B1 (en) * 2006-03-02 2016-04-20 Gambro Lundia AB A hydraulic connector and a hydraulic circuit incorporating the connector
USD600659S1 (en) * 2006-09-12 2009-09-22 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD586768S1 (en) * 2006-10-12 2009-02-17 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
JP5447975B2 (ja) * 2010-06-29 2014-03-19 住友電装株式会社 ガス分配ユニット
US9404352B2 (en) * 2013-02-01 2016-08-02 Harris Corporation Transmission line segment coupler defining fluid passage ways and related methods

Also Published As

Publication number Publication date
JP1534828S (zh) 2015-10-13
USD778457S1 (en) 2017-02-07

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