TWD149223S - 電漿處理裝置用內襯材 - Google Patents

電漿處理裝置用內襯材

Info

Publication number
TWD149223S
TWD149223S TW100304782F TW100304782F TWD149223S TW D149223 S TWD149223 S TW D149223S TW 100304782 F TW100304782 F TW 100304782F TW 100304782 F TW100304782 F TW 100304782F TW D149223 S TWD149223 S TW D149223S
Authority
TW
Taiwan
Prior art keywords
plasma processing
processing device
article
inner lining
processing container
Prior art date
Application number
TW100304782F
Other languages
English (en)
Inventor
Kouki Suzuki
Daisuke Toriya
Koichi Yamazaki
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD149223S publication Critical patent/TWD149223S/zh

Links

Abstract

【物品用途】;本創作的物品是電漿處理裝置用內襯材，係構成可利用電漿在基板上進行氧化膜等之成膜和蝕刻之類的處理的電漿處理裝置之處理容器的一部分之電漿處理裝置用內襯材。;【創作特點】;從各視圖觀之，本物品的本體呈圓形環體，本體環周面上方設有等距之淺梯形突起部，本體之前、後方各設有一不同大小且由下往上凹陷之矩形缺口；如使用狀態參考圖所示，該處理容器1具有確認窗8、處理室及排氣室6，在處理容器1內，係設置有用來載置處理基板9的載置台7，該載置台7的周圍係配設有擋板3，本物品之電漿處理裝置用內襯材2係在處理容器1之內壁上，於其他電漿處理裝置用內襯材4、5之上方；具有防止因處理容器1之構成材料所產生的金屬污染之功能。
TW100304782F 2011-03-30 2011-09-09 電漿處理裝置用內襯材 TWD149223S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011007262 2011-03-30

Publications (1)

Publication Number Publication Date
TWD149223S true TWD149223S (zh) 2012-09-11

Family

ID=45991332

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100304782F TWD149223S (zh) 2011-03-30 2011-09-09 電漿處理裝置用內襯材

Country Status (2)

Country Link
US (1) USD658692S1 (zh)
TW (1) TWD149223S (zh)

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Publication number Publication date
USD658692S1 (en) 2012-05-01

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