USD711331S1 - Upper chamber liner - Google Patents

Upper chamber liner Download PDF

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Publication number
USD711331S1
USD711331S1 US29/472,048 US201329472048F USD711331S US D711331 S1 USD711331 S1 US D711331S1 US 201329472048 F US201329472048 F US 201329472048F US D711331 S USD711331 S US D711331S
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United States
Prior art keywords
upper chamber
chamber liner
view
liner
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/472,048
Inventor
Shu-Kwan Lau
Mehmet Tugrul Samir
Anzhong Chang
Paul Brillhart
Richard O. Collins
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/472,048 priority Critical patent/USD711331S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: COLLINS, RICHARD O., CHANG, ANZHONG, LAU, Shu-Kwan, SAMIR, MEHMET TUGRUL, BRILLHART, PAUL
Application granted granted Critical
Publication of USD711331S1 publication Critical patent/USD711331S1/en
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Anticipated expiration legal-status Critical

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Description

FIG. 1 is a top perspective view of an upper chamber liner showing our new design;
FIG. 2 is another top perspective view thereof;
FIG. 3 is a bottom perspective view thereof;
FIG. 4 is another bottom perspective view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a side view thereof;
FIG. 8 is another side view thereof;
FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 5;
FIG. 10 is an enlarged top view of the upper portion of FIG. 9; and,
FIG. 11 is an enlarged bottom view of the lower portion of FIG. 9.
The broken lines in the figures form no part of the claimed design.
The upper chamber liner is shown broken away in FIGS. 10 and 11 to indicate that no particular length is claimed.
All surfaces not shown, form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for an upper chamber liner, as shown and described.
US29/472,048 2013-11-07 2013-11-07 Upper chamber liner Active USD711331S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/472,048 USD711331S1 (en) 2013-11-07 2013-11-07 Upper chamber liner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/472,048 USD711331S1 (en) 2013-11-07 2013-11-07 Upper chamber liner

Publications (1)

Publication Number Publication Date
USD711331S1 true USD711331S1 (en) 2014-08-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
US29/472,048 Active USD711331S1 (en) 2013-11-07 2013-11-07 Upper chamber liner

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD736261S1 (en) * 2012-11-29 2015-08-11 Cummins Inc. Shroud
USD741823S1 (en) * 2013-07-10 2015-10-27 Hitachi Kokusai Electric Inc. Vaporizer for substrate processing apparatus
US20160033070A1 (en) * 2014-08-01 2016-02-04 Applied Materials, Inc. Recursive pumping member
USD875054S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD875053S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD875055S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD910400S1 (en) * 2019-09-04 2021-02-16 Yongkang Moyi Tools Co., Ltd. Grinder dust shroud
USD913979S1 (en) * 2019-08-28 2021-03-23 Applied Materials, Inc. Inner shield for a substrate processing chamber
USD925481S1 (en) * 2018-12-06 2021-07-20 Kokusai Electric Corporation Inlet liner for substrate processing apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD736261S1 (en) * 2012-11-29 2015-08-11 Cummins Inc. Shroud
USD741823S1 (en) * 2013-07-10 2015-10-27 Hitachi Kokusai Electric Inc. Vaporizer for substrate processing apparatus
US20160033070A1 (en) * 2014-08-01 2016-02-04 Applied Materials, Inc. Recursive pumping member
USD875054S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD875053S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD875055S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD925481S1 (en) * 2018-12-06 2021-07-20 Kokusai Electric Corporation Inlet liner for substrate processing apparatus
USD913979S1 (en) * 2019-08-28 2021-03-23 Applied Materials, Inc. Inner shield for a substrate processing chamber
USD910400S1 (en) * 2019-09-04 2021-02-16 Yongkang Moyi Tools Co., Ltd. Grinder dust shroud

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