TWD198926S - 基板處理裝置用氣體供給噴嘴 - Google Patents

基板處理裝置用氣體供給噴嘴

Info

Publication number
TWD198926S
TWD198926S TW106306048D01F TW106306048D01F TWD198926S TW D198926 S TWD198926 S TW D198926S TW 106306048D01 F TW106306048D01 F TW 106306048D01F TW 106306048D01 F TW106306048D01 F TW 106306048D01F TW D198926 S TWD198926 S TW D198926S
Authority
TW
Taiwan
Prior art keywords
design
gas supply
nozzle
substrate processing
supply nozzle
Prior art date
Application number
TW106306048D01F
Other languages
English (en)
Inventor
Yusaku Okajima
Toru Kagaya
Hiroaki Hiramatsu
Shinya Ebata
Original Assignee
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD198926S publication Critical patent/TWD198926S/zh

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用氣體供給噴嘴，是一種應用在對於在反應管內部的垂直方向上保持成多段的基板進行處理的基板處理裝置之氣體供給噴嘴。本設計，是將圓筒形的噴嘴彎折成U字狀，在噴嘴的側壁 ，以相同間隔地設置了圓形的氣體供給口。;【設計說明】;本衍生設計與原設計之外觀差異在於：如立體圖與前視圖所示，其兩者差異僅在噴嘴側壁的氣體供給口一為長條形(原設計案)與圓形(本衍生設計案) ，兩者之差異些微，不影響原設計與衍生設計之近似。
TW106306048D01F 2017-12-27 2018-04-27 基板處理裝置用氣體供給噴嘴 TWD198926S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2017-29310F JP1605945S (zh) 2017-12-27 2017-12-27

Publications (1)

Publication Number Publication Date
TWD198926S true TWD198926S (zh) 2019-08-01

Family

ID=62239177

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106306048D01F TWD198926S (zh) 2017-12-27 2018-04-27 基板處理裝置用氣體供給噴嘴

Country Status (3)

Country Link
US (1) USD889596S1 (zh)
JP (1) JP1605945S (zh)
TW (1) TWD198926S (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1644261S (zh) 2019-03-20 2019-10-28
JP1684258S (zh) * 2020-07-27 2021-04-26
JP1731676S (zh) 2022-05-30 2022-12-08

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD258309S (en) * 1978-08-14 1981-02-17 Leighton Joseph T Gas fuel burner for fireplaces
USD322470S (en) * 1988-06-28 1991-12-17 Garlich John D Wine siphon
CA2302457C (en) * 1999-04-15 2008-11-18 Thermador Corporation Burner with piloting ports
US6553986B1 (en) * 2002-04-01 2003-04-29 George C. M. Liu Burner for a gas barbecue grill
US20080171296A1 (en) * 2007-01-12 2008-07-17 Chia-Hsi Yen Flame Flashback Resistant Gas Burner
CA2647915C (en) * 2008-12-24 2015-11-24 Onward Multi-Corp Inc. Tube burner with adjustable length
USD613116S1 (en) * 2009-08-10 2010-04-06 W.C. Bradley Co. Universal fit bar burner
USD695883S1 (en) * 2012-12-11 2013-12-17 Michael Vest Gas burner
JP1534651S (zh) * 2015-01-28 2015-10-05
JP1547057S (zh) 2015-05-28 2016-04-04
USD851763S1 (en) * 2016-12-29 2019-06-18 Mathews Outdoor Products LLC Fire starter lance
JP1589673S (zh) 2017-04-14 2017-10-30

Also Published As

Publication number Publication date
JP1605945S (zh) 2018-06-04
USD889596S1 (en) 2020-07-07

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