USD823363S1 - Heater of substrate processing apparatus - Google Patents

Description

FIG. 1 is a front, top and right side perspective view of a heater of substrate processing apparatus showing our new design;

FIG. 2 is a rear, top and right side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a right side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross-sectional view thereof taken in the direction of line 9-9 in FIG. 3;

FIG. 10 is an exploded cross-sectional view thereof taken in the direction of line 10-10 in FIG. 3 in order to show aspects of the design not otherwise apparent; and,

FIG. 11 is a cross-sectional view taken in the direction of line 11-11 in FIG. 6.

The broken lines in FIGS. 9, 10, and 11 are included for the purpose of illustrating portions of the article that form no part of the claimed design. The dot-dash broken line arrows in the FIGS. 3 and 6 views are used to identify the cross section views, are for reference purposes only, and form no part of the claimed design.

Claims (1)

CLAIM
1. We claim the ornamental design for a heater of substrate processing apparatus, as shown and described.

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