USD860420S1 - Electric furnace for substrate processing apparatus - Google Patents

Electric furnace for substrate processing apparatus Download PDF

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Publication number
USD860420S1
USD860420S1 US29/656,369 US201829656369F USD860420S US D860420 S1 USD860420 S1 US D860420S1 US 201829656369 F US201829656369 F US 201829656369F US D860420 S USD860420 S US D860420S
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US
United States
Prior art keywords
processing apparatus
substrate processing
electric furnace
view
elevational view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/656,369
Inventor
Tetsuya Kosugi
Hitoshi Murata
Masaaki Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MURATA, HITOSHI, UENO, MASAAKI, KOSUGI, TETSUYA
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Description

FIG. 1 is a front, bottom and left side perspective view of an electric furnace for substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a rear elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof.
FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2 thereof; and,
FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2.
In FIG. 8, the broken lines depict unclaimed subject matter only and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for an electric furnace for substrate processing apparatus, as shown and described.
US29/656,369 2018-02-27 2018-07-12 Electric furnace for substrate processing apparatus Active USD860420S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2018-4004F JP1611565S (en) 2018-02-27 2018-02-27
JP2018-004004 2018-02-27

Publications (1)

Publication Number Publication Date
USD860420S1 true USD860420S1 (en) 2019-09-17

Family

ID=63169034

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/656,369 Active USD860420S1 (en) 2018-02-27 2018-07-12 Electric furnace for substrate processing apparatus

Country Status (3)

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US (1) USD860420S1 (en)
JP (1) JP1611565S (en)
TW (1) TWD200031S (en)

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD383525S (en) * 1995-11-21 1997-09-09 Purcell Steven J Insulated water heater for hydrotherapy baths, spas, and skid packs
US20110249960A1 (en) * 2011-01-28 2011-10-13 Poole Ventura, Inc. Heat Source Door For A Thermal Diffusion Chamber
US20120260857A1 (en) * 2011-04-18 2012-10-18 Tokyo Electron Limited Heat treatment apparatus
US20130062333A1 (en) * 2011-09-06 2013-03-14 Arsalan Emami Heater elements with enhanced cooling
US20130094840A1 (en) * 2011-10-17 2013-04-18 David E. Seitz Tankless Water Heater
US20130192522A1 (en) * 2010-12-30 2013-08-01 Poole Ventura, Inc. Thermal diffusion chamber with convection compressor
US20140178057A1 (en) * 2012-12-21 2014-06-26 Eemax, Inc. Next generation bare wire water heater
USD754066S1 (en) * 2014-03-12 2016-04-19 Mitsubishi Electric Corporation Turbine generator
USD766828S1 (en) * 2014-03-12 2016-09-20 Mitsubishi Electric Corporation Turbine generator
US20170074545A1 (en) * 2013-03-15 2017-03-16 Peter Klein High thermal transfer flow-through heat exchanger
USD790048S1 (en) * 2015-05-15 2017-06-20 Arsalan Emami Industrial heater
JP1582475S (en) 2016-10-14 2017-07-31
US20170356310A1 (en) * 2016-06-13 2017-12-14 Warren Engine Company, Inc. Energy Recovery System
US20180038649A1 (en) * 2016-08-05 2018-02-08 Sandvik Thermal Process Inc Thermal Process Device With Non-Uniform Insulation
USD823363S1 (en) * 2016-02-12 2018-07-17 Hitachi Kokusai Electric Inc. Heater of substrate processing apparatus
USD824440S1 (en) * 2016-02-12 2018-07-31 Hitachi Kokusai Electric Inc. Heater of substrate processing apparatus
US20180337027A1 (en) * 2017-05-19 2018-11-22 Applied Materials, Inc. Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD383525S (en) * 1995-11-21 1997-09-09 Purcell Steven J Insulated water heater for hydrotherapy baths, spas, and skid packs
US20130192522A1 (en) * 2010-12-30 2013-08-01 Poole Ventura, Inc. Thermal diffusion chamber with convection compressor
US20110249960A1 (en) * 2011-01-28 2011-10-13 Poole Ventura, Inc. Heat Source Door For A Thermal Diffusion Chamber
US20120260857A1 (en) * 2011-04-18 2012-10-18 Tokyo Electron Limited Heat treatment apparatus
US20130062333A1 (en) * 2011-09-06 2013-03-14 Arsalan Emami Heater elements with enhanced cooling
US20130094840A1 (en) * 2011-10-17 2013-04-18 David E. Seitz Tankless Water Heater
US20140178057A1 (en) * 2012-12-21 2014-06-26 Eemax, Inc. Next generation bare wire water heater
US20170074545A1 (en) * 2013-03-15 2017-03-16 Peter Klein High thermal transfer flow-through heat exchanger
USD766828S1 (en) * 2014-03-12 2016-09-20 Mitsubishi Electric Corporation Turbine generator
USD768079S1 (en) * 2014-03-12 2016-10-04 Mitsubishi Electric Corporation Turbine generator
USD754066S1 (en) * 2014-03-12 2016-04-19 Mitsubishi Electric Corporation Turbine generator
USD790048S1 (en) * 2015-05-15 2017-06-20 Arsalan Emami Industrial heater
USD823363S1 (en) * 2016-02-12 2018-07-17 Hitachi Kokusai Electric Inc. Heater of substrate processing apparatus
USD824440S1 (en) * 2016-02-12 2018-07-31 Hitachi Kokusai Electric Inc. Heater of substrate processing apparatus
US20170356310A1 (en) * 2016-06-13 2017-12-14 Warren Engine Company, Inc. Energy Recovery System
US20180038649A1 (en) * 2016-08-05 2018-02-08 Sandvik Thermal Process Inc Thermal Process Device With Non-Uniform Insulation
JP1582475S (en) 2016-10-14 2017-07-31
US20180337027A1 (en) * 2017-05-19 2018-11-22 Applied Materials, Inc. Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent

Also Published As

Publication number Publication date
JP1611565S (en) 2018-08-20
TWD200031S (en) 2019-10-01

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