TWD183004S - 半導體製造裝置之隔熱組件 - Google Patents

半導體製造裝置之隔熱組件

Info

Publication number
TWD183004S
TWD183004S TW105304349F TW105304349F TWD183004S TW D183004 S TWD183004 S TW D183004S TW 105304349 F TW105304349 F TW 105304349F TW 105304349 F TW105304349 F TW 105304349F TW D183004 S TWD183004 S TW D183004S
Authority
TW
Taiwan
Prior art keywords
heat
semiconductor manufacturing
view
insulating panels
thermal insulation
Prior art date
Application number
TW105304349F
Other languages
English (en)
Inventor
Takatomo Yamaguchi
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD183004S publication Critical patent/TWD183004S/zh

Links

Abstract

【物品用途】;本設計的物品是半導體製造裝置之隔熱組件，是設置在用來處理半導體晶圓等的基板之反應管內，用來將從基板處理區域朝爐口方向的熱能量傳播予以阻隔的隔熱組件，是設置於晶舟的下方來使用，該晶舟用來將基板保持為多層。在中空軸的上方及下方設置隔熱板，在下方的隔熱板的上下，形成有：用來將增加的隔熱板予以保持的複數個層架。;【設計說明】;後視圖與前視圖對稱、左側視圖與右側視圖對稱，均省略之。;本物品除了隔熱板之外，是為透明。
TW105304349F 2016-02-10 2016-07-28 半導體製造裝置之隔熱組件 TWD183004S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-2842F JP1564810S (zh) 2016-02-10 2016-02-10

Publications (1)

Publication Number Publication Date
TWD183004S true TWD183004S (zh) 2017-05-11

Family

ID=57406430

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105304349F TWD183004S (zh) 2016-02-10 2016-07-28 半導體製造裝置之隔熱組件

Country Status (3)

Country Link
US (1) USD818960S1 (zh)
JP (1) JP1564810S (zh)
TW (1) TWD183004S (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1611561S (zh) 2018-02-07 2018-08-20
USD979506S1 (en) * 2019-08-22 2023-02-28 Asm Ip Holding B.V. Insulator
JP1706321S (zh) * 2021-06-28 2022-01-31
JP1706320S (zh) * 2021-06-28 2022-01-31

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1775530A (en) * 1928-01-20 1930-09-09 Condit Electrical Mfg Corp High-tension bushing having insulated supports
US2884479A (en) * 1956-02-07 1959-04-28 Lapp Insulator Company Inc Electrical insulators
US3612962A (en) * 1969-09-04 1971-10-12 Alps Electric Co Ltd Variable condenser
USD246453S (en) * 1977-03-15 1977-11-22 E. F. Johnson Company Variable capacitor
USD360399S (en) * 1993-09-20 1995-07-18 Utility Solutions, Inc. Insulator for an electrical cutout
USD531132S1 (en) * 2003-12-15 2006-10-31 Mccord Neil Three-phase capacitor switch
US7078643B2 (en) * 2003-12-15 2006-07-18 Rostron Joseph R Capacitor switch with internal retracting impedance contactor
USD742829S1 (en) * 2014-04-01 2015-11-10 Abb Technology Ltd Insulator with sheds whose undersides are partly horizontal and partly sloping
JP1541104S (zh) * 2014-12-12 2016-01-12

Also Published As

Publication number Publication date
USD818960S1 (en) 2018-05-29
JP1564810S (zh) 2016-12-05

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