TWD163542S - 基板處理裝置用晶舟 - Google Patents

基板處理裝置用晶舟

Info

Publication number
TWD163542S
TWD163542S TW102306237F TW102306237F TWD163542S TW D163542 S TWD163542 S TW D163542S TW 102306237 F TW102306237 F TW 102306237F TW 102306237 F TW102306237 F TW 102306237F TW D163542 S TWD163542 S TW D163542S
Authority
TW
Taiwan
Prior art keywords
substrate processing
wafer boat
processing equipment
article
processing device
Prior art date
Application number
TW102306237F
Other languages
English (en)
Inventor
Kosuke Takagi
Kiyohiko Maeda
Naoki Matsumoto
Yuji Urano
Yasuaki Komae
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD163542S publication Critical patent/TWD163542S/zh

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用晶舟，用於半導體基板處理裝置的反應室內使複數個晶圓水平保持，其左右及後方柱體上形成有銷狀突起以載置晶圓。;【設計說明】
TW102306237F 2013-03-22 2013-09-18 基板處理裝置用晶舟 TWD163542S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013006365 2013-03-22

Publications (1)

Publication Number Publication Date
TWD163542S true TWD163542S (zh) 2014-10-11

Family

ID=54149935

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102306237F TWD163542S (zh) 2013-03-22 2013-09-18 基板處理裝置用晶舟

Country Status (2)

Country Link
US (1) USD739831S1 (zh)
TW (1) TWD163542S (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1537630S (zh) * 2014-11-20 2015-11-09
JP1537313S (zh) * 2014-11-20 2015-11-09
JP1537312S (zh) * 2014-11-20 2015-11-09
JP1537629S (zh) * 2014-11-20 2015-11-09
JP1563649S (zh) * 2016-02-12 2016-11-21
USD847105S1 (en) 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
JP1638282S (zh) * 2018-09-20 2019-08-05
KR102552458B1 (ko) * 2019-07-31 2023-07-06 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 기판 지지구 및 반도체 장치의 제조 방법
JP1658652S (zh) * 2019-08-07 2020-04-27
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート

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Also Published As

Publication number Publication date
USD739831S1 (en) 2015-09-29

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