TWD182149S - 基板處理裝置之溫度測定器之部分 - Google Patents

基板處理裝置之溫度測定器之部分

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Publication number
TWD182149S
TWD182149S TW105304432F TW105304432F TWD182149S TW D182149 S TWD182149 S TW D182149S TW 105304432 F TW105304432 F TW 105304432F TW 105304432 F TW105304432 F TW 105304432F TW D182149 S TWD182149 S TW D182149S
Authority
TW
Taiwan
Prior art keywords
substrate processing
measuring device
temperature measuring
processing equipment
article
Prior art date
Application number
TW105304432F
Other languages
English (en)
Inventor
Tokunobu Akao
Motoya Takewaki
Akihiro Osaka
Masaaki Ueno
Tetsuya Kosugi
Masashi Sugishita
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD182149S publication Critical patent/TWD182149S/zh

Links

Abstract

【物品用途】;本物品是使用於可一併處理多數片的半導體晶圓等之基板的縱型基板處理裝置的溫度測定器。本物品是做成從縱型基板處理裝置的反應管之側面朝頂部延伸。將形成於位在反應管之頂部的突起部，卡合於形成在將該部分固定在頂部的外罩的孔部，藉此而被定位設置在反應管上。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。
TW105304432F 2016-02-10 2016-08-02 基板處理裝置之溫度測定器之部分 TWD182149S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-2841F JP1564809S (zh) 2016-02-10 2016-02-10

Publications (1)

Publication Number Publication Date
TWD182149S true TWD182149S (zh) 2017-04-01

Family

ID=57406418

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105304432F TWD182149S (zh) 2016-02-10 2016-08-02 基板處理裝置之溫度測定器之部分

Country Status (3)

Country Link
US (1) USD803075S1 (zh)
JP (1) JP1564809S (zh)
TW (1) TWD182149S (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1647666S (zh) * 2019-03-04 2019-12-09
JP1692912S (ja) * 2020-09-15 2021-08-16 温度センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202012003186U1 (de) * 2012-03-29 2012-04-30 Türk & Hillinger GmbH Eintauch-Temperatursensor

Also Published As

Publication number Publication date
JP1564809S (zh) 2016-12-05
USD803075S1 (en) 2017-11-21

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