JP1678278S - 基板処理装置用ボート - Google Patents

基板処理装置用ボート

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Publication number
JP1678278S
JP1678278S JP2020005341F JP2020005341F JP1678278S JP 1678278 S JP1678278 S JP 1678278S JP 2020005341 F JP2020005341 F JP 2020005341F JP 2020005341 F JP2020005341 F JP 2020005341F JP 1678278 S JP1678278 S JP 1678278S
Authority
JP
Japan
Prior art keywords
substrate processing
boat
processing equipment
processing apparatus
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020005341F
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English (en)
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Publication date
Application filed filed Critical
Priority to JP2020005341F priority Critical patent/JP1678278S/ja
Priority to TW109305096F priority patent/TWD218093S/zh
Priority to US29/750,438 priority patent/USD965542S1/en
Application granted granted Critical
Publication of JP1678278S publication Critical patent/JP1678278S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

本願物品は、基板処理装置に用いられ、基板処理装置の反応室内に複数の基板を水平に保持するためのボートである。
JP2020005341F 2020-03-19 2020-03-19 基板処理装置用ボート Active JP1678278S (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2020005341F JP1678278S (ja) 2020-03-19 2020-03-19 基板処理装置用ボート
TW109305096F TWD218093S (zh) 2020-03-19 2020-09-09 基板處理裝置用晶舟之部分
US29/750,438 USD965542S1 (en) 2020-03-19 2020-09-14 Boat of substrate processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020005341F JP1678278S (ja) 2020-03-19 2020-03-19 基板処理装置用ボート

Publications (1)

Publication Number Publication Date
JP1678278S true JP1678278S (ja) 2021-02-01

Family

ID=74312790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020005341F Active JP1678278S (ja) 2020-03-19 2020-03-19 基板処理装置用ボート

Country Status (3)

Country Link
US (1) USD965542S1 (ja)
JP (1) JP1678278S (ja)
TW (1) TWD218093S (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1731674S (ja) * 2022-05-30 2022-12-08
JP1731673S (ja) * 2022-05-30 2022-12-08
JP1731675S (ja) * 2022-05-30 2022-12-08

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
TWD161688S (zh) * 2012-12-27 2014-07-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD163542S (zh) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 基板處理裝置用晶舟
TWD166332S (zh) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 基板處理裝置用晶舟之部分
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
US9343304B2 (en) * 2014-09-26 2016-05-17 Asm Ip Holding B.V. Method for depositing films on semiconductor wafers
JP1537312S (ja) * 2014-11-20 2015-11-09
JP1537313S (ja) * 2014-11-20 2015-11-09
JP1537630S (ja) * 2014-11-20 2015-11-09
JP1537629S (ja) * 2014-11-20 2015-11-09
JP1563649S (ja) * 2016-02-12 2016-11-21
JP1597807S (ja) * 2017-08-21 2018-02-19
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
JP1638282S (ja) * 2018-09-20 2019-08-05
JP1640260S (ja) 2018-11-19 2019-09-02

Also Published As

Publication number Publication date
TWD218093S (zh) 2022-04-11
USD965542S1 (en) 2022-10-04

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