JP1537629S - - Google Patents

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Publication number
JP1537629S
JP1537629S JPD2014-25969F JP2014025969F JP1537629S JP 1537629 S JP1537629 S JP 1537629S JP 2014025969 F JP2014025969 F JP 2014025969F JP 1537629 S JP1537629 S JP 1537629S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2014-25969F
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2014-25969F priority Critical patent/JP1537629S/ja
Priority to US29/525,563 priority patent/USD791721S1/en
Priority to TW104302641F priority patent/TWD171964S/zh
Application granted granted Critical
Publication of JP1537629S publication Critical patent/JP1537629S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2014-25969F 2014-11-20 2014-11-20 Active JP1537629S (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JPD2014-25969F JP1537629S (ja) 2014-11-20 2014-11-20
US29/525,563 USD791721S1 (en) 2014-11-20 2015-04-30 Wafer boat
TW104302641F TWD171964S (zh) 2014-11-20 2015-05-18 晶圓舟之晶圓支撐爪（三）

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-25969F JP1537629S (ja) 2014-11-20 2014-11-20

Publications (1)

Publication Number Publication Date
JP1537629S true JP1537629S (ja) 2015-11-09

Family

ID=54399249

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2014-25969F Active JP1537629S (ja) 2014-11-20 2014-11-20

Country Status (3)

Country Link
US (1) USD791721S1 (ja)
JP (1) JP1537629S (ja)
TW (1) TWD171964S (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD920935S1 (en) 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1563649S (ja) * 2016-02-12 2016-11-21
CN206961808U (zh) * 2017-07-14 2018-02-02 君泰创新（北京）科技有限公司 硅片清洗工装
JP1665228S (ja) * 2019-11-28 2020-08-03
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート
JP1706322S (ja) * 2021-08-27 2022-01-31

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
JP3218164B2 (ja) * 1995-05-31 2001-10-15 東京エレクトロン株式会社 被処理体の支持ボート、熱処理装置及び熱処理方法
JP3122364B2 (ja) * 1996-02-06 2001-01-09 東京エレクトロン株式会社 ウエハボート
TW325588B (en) * 1996-02-28 1998-01-21 Asahi Glass Co Ltd Vertical wafer boat
KR19990077350A (ko) * 1996-02-29 1999-10-25 히가시 데쓰로 반도체웨이퍼의 열처리용 보트
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
KR20000002833A (ko) * 1998-06-23 2000-01-15 윤종용 반도체 웨이퍼 보트
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
JP4506125B2 (ja) * 2003-07-16 2010-07-21 信越半導体株式会社 熱処理用縦型ボート及びその製造方法
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD600222S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
TWD163542S (zh) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 基板處理裝置用晶舟
TWD166332S (zh) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 基板處理裝置用晶舟之部分
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD920935S1 (en) 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus

Also Published As

Publication number Publication date
USD791721S1 (en) 2017-07-11
TWD171964S (zh) 2015-11-21

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