JP1684468S - 基板処理装置用天井ヒータ - Google Patents
基板処理装置用天井ヒータInfo
- Publication number
- JP1684468S JP1684468S JP2020020256F JP2020020256F JP1684468S JP 1684468 S JP1684468 S JP 1684468S JP 2020020256 F JP2020020256 F JP 2020020256F JP 2020020256 F JP2020020256 F JP 2020020256F JP 1684468 S JP1684468 S JP 1684468S
- Authority
- JP
- Japan
- Prior art keywords
- substrate processing
- processing equipment
- ceiling heater
- ceiling
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Abstract
本願物品は、基板を処理する基板処理装置において、基板処理装置の処理室を加熱するためのヒータユニットの天井部に設置される天井ヒータである。
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020020256F JP1684468S (ja) | 2020-09-24 | 2020-09-24 | 基板処理装置用天井ヒータ |
| TW110301196F TWD217779S (zh) | 2020-09-24 | 2021-03-09 | 基板處理裝置用置頂式加熱器 |
| US29/773,972 USD980177S1 (en) | 2020-09-24 | 2021-03-12 | Ceiling heater for substrate processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020020256F JP1684468S (ja) | 2020-09-24 | 2020-09-24 | 基板処理装置用天井ヒータ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1684468S true JP1684468S (ja) | 2021-05-10 |
Family
ID=75802242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020020256F Active JP1684468S (ja) | 2020-09-24 | 2020-09-24 | 基板処理装置用天井ヒータ |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD980177S1 (ja) |
| JP (1) | JP1684468S (ja) |
| TW (1) | TWD217779S (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD1019618S1 (en) * | 2021-06-21 | 2024-03-26 | Ace Technologies Corporation | Antenna |
| USD1020711S1 (en) * | 2021-06-21 | 2024-04-02 | Ace Technologies Corporation | Antenna |
| USD1015316S1 (en) * | 2021-12-10 | 2024-02-20 | Advanide Holdings Pte. Ltd. | RFID inlay |
| USD1003281S1 (en) * | 2021-12-14 | 2023-10-31 | Advanide Holdings Pte. Ltd. | RFID inlay |
| USD1002596S1 (en) * | 2021-12-14 | 2023-10-24 | Advanide Holdings Pte. Ltd. | RFID inlay |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2417977A (en) * | 1943-03-04 | 1947-03-25 | French Jeannette | Cook stove and range |
| US3627338A (en) * | 1969-10-09 | 1971-12-14 | Sheldon Thompson | Vacuum chuck |
| USD312126S (en) * | 1988-02-10 | 1990-11-13 | Redring Electric Limited | Electric heater element for use in a radiant heater for a glass ceramic hob |
| USD323385S (en) * | 1990-02-10 | 1992-01-21 | Ceramaspeed Limited | Radiant stove heater |
| USD517743S1 (en) * | 2003-12-09 | 2006-03-21 | Le Creuset Of America, Inc. | Hotpad |
| USD541486S1 (en) * | 2005-07-22 | 2007-04-24 | Le Creuset Of America, Inc. | Hotpad |
| USD650344S1 (en) * | 2008-10-20 | 2011-12-13 | Ebara Corporation | Vacuum contact pad |
| USD616389S1 (en) * | 2008-10-20 | 2010-05-25 | Ebara Corporation | Vacuum contact pad |
| USD625558S1 (en) * | 2010-02-05 | 2010-10-19 | Chef'n Corporation | Trivet |
| JP1581406S (ja) | 2016-10-14 | 2017-07-18 | ||
| USD859331S1 (en) * | 2017-03-31 | 2019-09-10 | Ebara Corporation | Vacuum contact pad |
| USD868124S1 (en) * | 2017-12-11 | 2019-11-26 | Applied Materials, Inc. | Target profile for a physical vapor deposition chamber target |
| USD887358S1 (en) * | 2018-12-06 | 2020-06-16 | Lofelt Gmbh | Motor membrane |
| USD921431S1 (en) * | 2019-04-01 | 2021-06-08 | Veeco Instruments, Inc. | Multi-filament heater assembly |
| USD954567S1 (en) * | 2019-06-25 | 2022-06-14 | Ebara Corporation | Measurement jig |
| JP1651623S (ja) * | 2019-07-18 | 2020-01-27 | ||
| USD943539S1 (en) * | 2020-03-19 | 2022-02-15 | Applied Materials, Inc. | Confinement plate for a substrate processing chamber |
| USD947802S1 (en) * | 2020-05-20 | 2022-04-05 | Applied Materials, Inc. | Replaceable substrate carrier interfacing film |
| JP1684469S (ja) * | 2020-09-24 | 2021-05-10 | 基板処理装置用天井ヒータ |
-
2020
- 2020-09-24 JP JP2020020256F patent/JP1684468S/ja active Active
-
2021
- 2021-03-09 TW TW110301196F patent/TWD217779S/zh unknown
- 2021-03-12 US US29/773,972 patent/USD980177S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD980177S1 (en) | 2023-03-07 |
| TWD217779S (zh) | 2022-03-21 |
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