JP1685215S - 基板処理装置用ガス導入管 - Google Patents

基板処理装置用ガス導入管

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Publication number
JP1685215S
JP1685215S JP2020017141F JP2020017141F JP1685215S JP 1685215 S JP1685215 S JP 1685215S JP 2020017141 F JP2020017141 F JP 2020017141F JP 2020017141 F JP2020017141 F JP 2020017141F JP 1685215 S JP1685215 S JP 1685215S
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JP
Japan
Prior art keywords
substrate processing
processing equipment
gas introduction
introduction pipe
supply nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020017141F
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English (en)
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Publication date
Application filed filed Critical
Priority to JP2020017141F priority Critical patent/JP1685215S/ja
Priority to TW110300516F priority patent/TWD215922S/zh
Priority to US29/770,855 priority patent/USD964443S1/en
Application granted granted Critical
Publication of JP1685215S publication Critical patent/JP1685215S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

本願物品は、ウエハを処理する基板処理装置の処理室内で、ガス供給ノズルを直立させて支持するとともに、当該ガス供給ノズルにガスを導入するものである。
JP2020017141F 2020-08-18 2020-08-18 基板処理装置用ガス導入管 Active JP1685215S (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2020017141F JP1685215S (ja) 2020-08-18 2020-08-18 基板処理装置用ガス導入管
TW110300516F TWD215922S (zh) 2020-08-18 2021-01-29 基板處理裝置用氣體導入管
US29/770,855 USD964443S1 (en) 2020-08-18 2021-02-17 Gas inlet attachment for wafer processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020017141F JP1685215S (ja) 2020-08-18 2020-08-18 基板処理装置用ガス導入管

Publications (1)

Publication Number Publication Date
JP1685215S true JP1685215S (ja) 2024-05-10

Family

ID=75900508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020017141F Active JP1685215S (ja) 2020-08-18 2020-08-18 基板処理装置用ガス導入管

Country Status (3)

Country Link
US (1) USD964443S1 (ja)
JP (1) JP1685215S (ja)
TW (1) TWD215922S (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1700780S (ja) * 2021-03-22 2021-11-29

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3484122A (en) * 1968-01-12 1969-12-16 Herman J Schellstede Drill pipe protector and method of constructing the same
USD326272S (en) * 1988-07-25 1992-05-19 Tel Sagami Limited Heat insulating cylinder for thermal treatment of semiconductor wafers
CA142624S (en) * 2011-01-20 2012-01-25 Victaulic Co Of America Pipe
WO2013126323A1 (en) * 2012-02-23 2013-08-29 Applied Materials, Inc. Method and apparatus for precursor delivery
JP6578243B2 (ja) * 2015-07-17 2019-09-18 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ ガス供給ノズル、基板処理装置、半導体装置の製造方法およびプログラム
KR102483924B1 (ko) * 2016-02-18 2023-01-02 삼성전자주식회사 기화기 및 이를 구비하는 박막 증착 장치
JP1573205S (ja) * 2016-08-29 2020-03-23
JP1586728S (ja) * 2017-02-10 2017-09-25
USD873392S1 (en) * 2017-08-31 2020-01-21 Rotary Connections International Ltd. Drill pipe
USD872843S1 (en) * 2017-12-06 2020-01-14 Michael Stoffa, Sr. Valve attachment for a pipe
JP1624354S (ja) * 2018-07-19 2019-02-12
JP1624352S (ja) 2018-07-19 2019-02-12
JP1648531S (ja) 2019-01-28 2019-12-23
JP1651622S (ja) * 2019-07-17 2020-01-27

Also Published As

Publication number Publication date
USD964443S1 (en) 2022-09-20
TWD215922S (zh) 2021-12-11

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