TWD215922S - 基板處理裝置用氣體導入管 - Google Patents

基板處理裝置用氣體導入管 Download PDF

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Publication number
TWD215922S
TWD215922S TW110300516F TW110300516F TWD215922S TW D215922 S TWD215922 S TW D215922S TW 110300516 F TW110300516 F TW 110300516F TW 110300516 F TW110300516 F TW 110300516F TW D215922 S TWD215922 S TW D215922S
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TW
Taiwan
Prior art keywords
processing apparatus
gas inlet
wafer processing
inlet attachment
gas
Prior art date
Application number
TW110300516F
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English (en)
Chinese (zh)
Inventor
村田慧
Original Assignee
日商國際電氣股份有限公司
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Publication date
Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD215922S publication Critical patent/TWD215922S/zh

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TW110300516F 2020-08-18 2021-01-29 基板處理裝置用氣體導入管 TWD215922S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020017141F JP1685215S (ja) 2020-08-18 2020-08-18 基板処理装置用ガス導入管
JP2020-017141 2020-08-18

Publications (1)

Publication Number Publication Date
TWD215922S true TWD215922S (zh) 2021-12-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW110300516F TWD215922S (zh) 2020-08-18 2021-01-29 基板處理裝置用氣體導入管

Country Status (3)

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US (1) USD964443S1 (ja)
JP (1) JP1685215S (ja)
TW (1) TWD215922S (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1700780S (ja) * 2021-03-22 2021-11-29

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD203444S (zh) 2019-01-28 2020-03-21 日商國際電氣股份有限公司 基板處理裝置用氣體導入管

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3484122A (en) * 1968-01-12 1969-12-16 Herman J Schellstede Drill pipe protector and method of constructing the same
USD326272S (en) * 1988-07-25 1992-05-19 Tel Sagami Limited Heat insulating cylinder for thermal treatment of semiconductor wafers
CA142625S (en) * 2011-01-20 2012-01-25 Victaulic Co Of America Fitting
WO2013126323A1 (en) * 2012-02-23 2013-08-29 Applied Materials, Inc. Method and apparatus for precursor delivery
JP6578243B2 (ja) * 2015-07-17 2019-09-18 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ ガス供給ノズル、基板処理装置、半導体装置の製造方法およびプログラム
KR102483924B1 (ko) * 2016-02-18 2023-01-02 삼성전자주식회사 기화기 및 이를 구비하는 박막 증착 장치
JP1573205S (ja) * 2016-08-29 2020-03-23
JP1586728S (ja) * 2017-02-10 2017-09-25
USD873392S1 (en) * 2017-08-31 2020-01-21 Rotary Connections International Ltd. Drill pipe
USD872843S1 (en) * 2017-12-06 2020-01-14 Michael Stoffa, Sr. Valve attachment for a pipe
JP1624352S (ja) 2018-07-19 2019-02-12
JP1624354S (ja) * 2018-07-19 2019-02-12
JP1651622S (ja) * 2019-07-17 2020-01-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD203444S (zh) 2019-01-28 2020-03-21 日商國際電氣股份有限公司 基板處理裝置用氣體導入管

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Publication number Publication date
USD964443S1 (en) 2022-09-20
JP1685215S (ja) 2024-05-10

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