TWD217779S - 基板處理裝置用置頂式加熱器 - Google Patents

基板處理裝置用置頂式加熱器 Download PDF

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Publication number
TWD217779S
TWD217779S TW110301196F TW110301196F TWD217779S TW D217779 S TWD217779 S TW D217779S TW 110301196 F TW110301196 F TW 110301196F TW 110301196 F TW110301196 F TW 110301196F TW D217779 S TWD217779 S TW D217779S
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TW
Taiwan
Prior art keywords
substrate processing
processing equipment
overhead
overhead heaters
heaters
Prior art date
Application number
TW110301196F
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English (en)
Inventor
杉浦忍
小杉哲也
吉村祐哉
庄司拓人
Original Assignee
日商國際電氣股份有限公司
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Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD217779S publication Critical patent/TWD217779S/zh

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Abstract

【物品用途】;本設計的物品是基板處理裝置用置頂式加熱器，為一種在用來處理基板的基板處理裝置中，設置在用來加熱基板處理裝置之處理室之加熱單元中的頂棚部的置頂式加熱器。;【設計說明】;(無)

Description

基板處理裝置用置頂式加熱器
本設計的物品是基板處理裝置用置頂式加熱器，為一種在用來處理基板的基板處理裝置中，設置在用來加熱基板處理裝置之處理室之加熱單元中的頂棚部的置頂式加熱器。
(無)
TW110301196F 2020-09-24 2021-03-09 基板處理裝置用置頂式加熱器 TWD217779S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-020256 2020-09-24
JP2020020256F JP1684468S (ja) 2020-09-24 2020-09-24 基板処理装置用天井ヒータ

Publications (1)

Publication Number Publication Date
TWD217779S true TWD217779S (zh) 2022-03-21

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TW110301196F TWD217779S (zh) 2020-09-24 2021-03-09 基板處理裝置用置頂式加熱器

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US (1) USD980177S1 (zh)
JP (1) JP1684468S (zh)
TW (1) TWD217779S (zh)

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Publication number Priority date Publication date Assignee Title
USD1019618S1 (en) * 2021-06-21 2024-03-26 Ace Technologies Corporation Antenna
USD1020711S1 (en) * 2021-06-21 2024-04-02 Ace Technologies Corporation Antenna
USD1015316S1 (en) * 2021-12-10 2024-02-20 Advanide Holdings Pte. Ltd. RFID inlay
USD1002596S1 (en) * 2021-12-14 2023-10-24 Advanide Holdings Pte. Ltd. RFID inlay
USD1003281S1 (en) * 2021-12-14 2023-10-31 Advanide Holdings Pte. Ltd. RFID inlay
USD1113882S1 (en) 2024-07-03 2026-02-17 Advanide Holdings Pte. Ltd. RFID antenna for a biometric card

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2417977A (en) * 1943-03-04 1947-03-25 French Jeannette Cook stove and range
US3627338A (en) * 1969-10-09 1971-12-14 Sheldon Thompson Vacuum chuck
USD312126S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
USD323385S (en) * 1990-02-10 1992-01-21 Ceramaspeed Limited Radiant stove heater
USD517743S1 (en) * 2003-12-09 2006-03-21 Le Creuset Of America, Inc. Hotpad
USD541486S1 (en) * 2005-07-22 2007-04-24 Le Creuset Of America, Inc. Hotpad
USD616389S1 (en) * 2008-10-20 2010-05-25 Ebara Corporation Vacuum contact pad
USD650344S1 (en) * 2008-10-20 2011-12-13 Ebara Corporation Vacuum contact pad
USD625558S1 (en) * 2010-02-05 2010-10-19 Chef'n Corporation Trivet
JP1581406S (zh) 2016-10-14 2017-07-18
USD859331S1 (en) * 2017-03-31 2019-09-10 Ebara Corporation Vacuum contact pad
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
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USD921431S1 (en) * 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD954567S1 (en) * 2019-06-25 2022-06-14 Ebara Corporation Measurement jig
JP1651623S (zh) * 2019-07-18 2020-01-27
USD943539S1 (en) * 2020-03-19 2022-02-15 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD947802S1 (en) * 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film
JP1684469S (ja) * 2020-09-24 2021-05-10 基板処理装置用天井ヒータ

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USD980177S1 (en) 2023-03-07
JP1684468S (ja) 2021-05-10

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