TWD212772S - 基板處理裝置用吸頂式加熱器的保持板 - Google Patents
基板處理裝置用吸頂式加熱器的保持板 Download PDFInfo
- Publication number
- TWD212772S TWD212772S TW109305076F TW109305076F TWD212772S TW D212772 S TWD212772 S TW D212772S TW 109305076 F TW109305076 F TW 109305076F TW 109305076 F TW109305076 F TW 109305076F TW D212772 S TWD212772 S TW D212772S
- Authority
- TW
- Taiwan
- Prior art keywords
- processing device
- substrate processing
- holding plate
- ceiling heater
- ceiling
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 3
Images
Abstract
【物品用途】;本設計的物品是基板處理裝置用吸頂式加熱器的保持板,如「使用狀態參考圖」所示,安裝成從上方覆蓋住設置在用來加熱基板處理裝置的吸頂式加熱器之加熱線,以使加熱線之間互相絕緣。;【設計說明】;(無)
Description
本設計的物品是基板處理裝置用吸頂式加熱器的保持板,如「使用狀態參考圖」所示,安裝成從上方覆蓋住設置在用來加熱基板處理裝置的吸頂式加熱器之加熱線,以使加熱線之間互相絕緣。
(無)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019-015588 | 2019-01-31 | ||
JPD2019-15588F JP1651619S (zh) | 2019-07-11 | 2019-07-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
TWD212772S true TWD212772S (zh) | 2021-07-21 |
Family
ID=69183082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW109305076F TWD212772S (zh) | 2019-07-11 | 2019-11-13 | 基板處理裝置用吸頂式加熱器的保持板 |
Country Status (3)
Country | Link |
---|---|
US (1) | USD962184S1 (zh) |
JP (1) | JP1651619S (zh) |
TW (1) | TWD212772S (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWD227462S (zh) | 2022-06-22 | 2023-09-11 | 日商芝浦機械電子股份有限公司 | 基板保持具 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6436228B1 (en) * | 1998-05-15 | 2002-08-20 | Applied Materials, Inc. | Substrate retainer |
US6390905B1 (en) * | 2000-03-31 | 2002-05-21 | Speedfam-Ipec Corporation | Workpiece carrier with adjustable pressure zones and barriers |
US7326105B2 (en) * | 2005-08-31 | 2008-02-05 | Micron Technology, Inc. | Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces |
USD601521S1 (en) * | 2006-09-28 | 2009-10-06 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD589471S1 (en) * | 2006-09-28 | 2009-03-31 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
JP2008177248A (ja) * | 2007-01-16 | 2008-07-31 | Tokyo Seimitsu Co Ltd | 研磨ヘッド用リテーナリング |
USD649126S1 (en) * | 2008-10-20 | 2011-11-22 | Ebara Corporation | Vacuum contact pad |
USD633452S1 (en) * | 2009-08-27 | 2011-03-01 | Ebara Corporation | Elastic membrane for semiconductor wafer polishing apparatus |
USD732094S1 (en) * | 2012-07-20 | 2015-06-16 | Ivoclar Vivadent Ag | Firing plate for a dental furnace |
KR102229556B1 (ko) * | 2013-01-11 | 2021-03-18 | 어플라이드 머티어리얼스, 인코포레이티드 | 화학 기계적 폴리싱 장치 및 방법 |
US9227297B2 (en) * | 2013-03-20 | 2016-01-05 | Applied Materials, Inc. | Retaining ring with attachable segments |
USD769200S1 (en) * | 2013-05-15 | 2016-10-18 | Ebara Corporation | Elastic membrane for semiconductor wafer polishing apparatus |
USD724553S1 (en) * | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
USD716742S1 (en) * | 2013-09-13 | 2014-11-04 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
JP1541874S (zh) * | 2015-03-16 | 2016-01-18 | ||
US10174437B2 (en) * | 2015-07-09 | 2019-01-08 | Applied Materials, Inc. | Wafer electroplating chuck assembly |
JP1556433S (zh) * | 2015-10-06 | 2016-08-15 | ||
JP1560719S (zh) * | 2015-12-01 | 2016-10-11 | ||
JP1581406S (zh) * | 2016-10-14 | 2017-07-18 | ||
KR102384004B1 (ko) * | 2016-12-01 | 2022-04-06 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치, 천장 히터 및 반도체 장치의 제조 방법 |
USD859332S1 (en) * | 2017-06-29 | 2019-09-10 | Ebara Corporation | Elastic membrane for semiconductor wafer polishing |
KR20190008101A (ko) * | 2017-07-14 | 2019-01-23 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치, 기판 보지구 및 반도체 장치의 제조 방법 |
JP1651623S (zh) * | 2019-07-18 | 2020-01-27 | ||
USD940670S1 (en) * | 2019-09-26 | 2022-01-11 | Willbe S&T Co., Ltd. | Retainer ring for chemical mechanical polishing device |
-
2019
- 2019-07-11 JP JPD2019-15588F patent/JP1651619S/ja active Active
- 2019-11-13 TW TW109305076F patent/TWD212772S/zh unknown
- 2019-12-27 US US29/718,678 patent/USD962184S1/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWD227462S (zh) | 2022-06-22 | 2023-09-11 | 日商芝浦機械電子股份有限公司 | 基板保持具 |
Also Published As
Publication number | Publication date |
---|---|
USD962184S1 (en) | 2022-08-30 |
JP1651619S (zh) | 2020-01-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWD206653S (zh) | 基板處理裝置用吸頂式加熱器的保持板 | |
TWD205989S (zh) | 裝置護套 | |
TWD187001S (zh) | 基板處理裝置用頂置式加熱器 | |
TWD198494S (zh) | 電暖器 | |
MX2018007400A (es) | Componente generador de aerosol para su uso en un articulo generador de aerosol. | |
MX2015011285A (es) | Construccion de pedestal con bajo coeficiente de expansion termica maximo. | |
TWD168610S (zh) | 基座組件之部分 | |
TWD217779S (zh) | 基板處理裝置用置頂式加熱器 | |
TWD204830S (zh) | 電連接器 | |
TWD217778S (zh) | 基板處理裝置用置頂式加熱器 | |
TWD200220S (zh) | 用於半導體基板支撐裝置的基座 | |
TWD212772S (zh) | 基板處理裝置用吸頂式加熱器的保持板 | |
TWD165448S (zh) | 恆溫恆濕器之部分 | |
TWD205043S (zh) | 呼吸治療系統流體收集器 | |
TWD201061S (zh) | 通訊裝置用之底座單元之部分 | |
TWD215762S (zh) | 醫用桿裝置夾子 | |
TWD207699S (zh) | 基板處理裝置用吸頂式加熱器的保持板 | |
WO2015022507A3 (en) | Distribution device | |
TWD190862S (zh) | 頭髮照護用具的支架(二) | |
TWD207700S (zh) | 基板處理裝置用吸頂式加熱器的保持板 | |
TWD217045S (zh) | 基座支撐部 | |
TWD193476S (zh) | LED bracket | |
PL427275A1 (pl) | Energooszczędna donica | |
TWD200410S (zh) | 電連接器 | |
JP1749697S (ja) | 電気保温器 |