JP1684469S - 基板処理装置用天井ヒータ - Google Patents
基板処理装置用天井ヒータInfo
- Publication number
- JP1684469S JP1684469S JP2020020257F JP2020020257F JP1684469S JP 1684469 S JP1684469 S JP 1684469S JP 2020020257 F JP2020020257 F JP 2020020257F JP 2020020257 F JP2020020257 F JP 2020020257F JP 1684469 S JP1684469 S JP 1684469S
- Authority
- JP
- Japan
- Prior art keywords
- substrate processing
- processing equipment
- ceiling heater
- ceiling
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Abstract
本願物品は、基板を処理する基板処理装置において、基板処理装置の処理室を加熱するためのヒータユニットの天井部に設置される天井ヒータである。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020020257F JP1684469S (ja) | 2020-09-24 | 2020-09-24 | 基板処理装置用天井ヒータ |
TW110301195F TWD217778S (zh) | 2020-09-24 | 2021-03-09 | 基板處理裝置用置頂式加熱器 |
US29/773,979 USD959393S1 (en) | 2020-09-24 | 2021-03-12 | Ceiling heater for substrate processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020020257F JP1684469S (ja) | 2020-09-24 | 2020-09-24 | 基板処理装置用天井ヒータ |
Publications (1)
Publication Number | Publication Date |
---|---|
JP1684469S true JP1684469S (ja) | 2021-05-10 |
Family
ID=75801969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020020257F Active JP1684469S (ja) | 2020-09-24 | 2020-09-24 | 基板処理装置用天井ヒータ |
Country Status (3)
Country | Link |
---|---|
US (1) | USD959393S1 (ja) |
JP (1) | JP1684469S (ja) |
TW (1) | TWD217778S (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP1684468S (ja) * | 2020-09-24 | 2021-05-10 | 基板処理装置用天井ヒータ | |
USD1006768S1 (en) * | 2021-01-07 | 2023-12-05 | Solaero Technologies Corp. | Semiconductor wafer for mosaic solar cell fabrication |
USD1002596S1 (en) * | 2021-12-14 | 2023-10-24 | Advanide Holdings Pte. Ltd. | RFID inlay |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2417977A (en) * | 1943-03-04 | 1947-03-25 | French Jeannette | Cook stove and range |
USD312127S (en) * | 1988-02-10 | 1990-11-13 | Redring Electric Limited | Electric heater element for use in a radiant heater for a glass ceramic hob |
USD312126S (en) * | 1988-02-10 | 1990-11-13 | Redring Electric Limited | Electric heater element for use in a radiant heater for a glass ceramic hob |
USD323385S (en) * | 1990-02-10 | 1992-01-21 | Ceramaspeed Limited | Radiant stove heater |
AU112298S (en) * | 1990-07-15 | 1991-09-30 | E G O Elektro Gerate Blanc U Fischer | A set of radiant heaters |
WO2003009346A2 (en) * | 2001-07-15 | 2003-01-30 | Applied Materials,Inc. | Processing system |
JP4276813B2 (ja) * | 2002-03-26 | 2009-06-10 | 株式会社日立国際電気 | 熱処理装置および半導体製造方法 |
JP2004200619A (ja) * | 2002-12-20 | 2004-07-15 | Kyocera Corp | ウエハ支持部材 |
JP4380236B2 (ja) * | 2003-06-23 | 2009-12-09 | 東京エレクトロン株式会社 | 載置台及び熱処理装置 |
USD517743S1 (en) * | 2003-12-09 | 2006-03-21 | Le Creuset Of America, Inc. | Hotpad |
WO2006060134A2 (en) * | 2004-11-15 | 2006-06-08 | Cree, Inc. | Restricted radiated heating assembly for high temperature processing |
USD541486S1 (en) * | 2005-07-22 | 2007-04-24 | Le Creuset Of America, Inc. | Hotpad |
USD589471S1 (en) * | 2006-09-28 | 2009-03-31 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD601521S1 (en) * | 2006-09-28 | 2009-10-06 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD616389S1 (en) * | 2008-10-20 | 2010-05-25 | Ebara Corporation | Vacuum contact pad |
WO2011094279A1 (en) * | 2010-01-26 | 2011-08-04 | The Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations | Planar labyrinth micromixer systems and methods |
USD625558S1 (en) * | 2010-02-05 | 2010-10-19 | Chef'n Corporation | Trivet |
US9267739B2 (en) * | 2012-07-18 | 2016-02-23 | Applied Materials, Inc. | Pedestal with multi-zone temperature control and multiple purge capabilities |
US9719629B2 (en) * | 2014-04-08 | 2017-08-01 | Plansee Se | Supporting system for a heating element and heating system |
JP1541874S (ja) * | 2015-03-16 | 2016-01-18 | ||
JP1560719S (ja) * | 2015-12-01 | 2016-10-11 | ||
JP1581406S (ja) | 2016-10-14 | 2017-07-18 | ||
WO2018100850A1 (ja) * | 2016-12-01 | 2018-06-07 | 株式会社日立国際電気 | 基板処理装置、天井ヒータおよび半導体装置の製造方法 |
USD887358S1 (en) * | 2018-12-06 | 2020-06-16 | Lofelt Gmbh | Motor membrane |
USD921431S1 (en) * | 2019-04-01 | 2021-06-08 | Veeco Instruments, Inc. | Multi-filament heater assembly |
JP1651623S (ja) * | 2019-07-18 | 2020-01-27 | ||
USD922340S1 (en) * | 2019-11-11 | 2021-06-15 | Asia Vita Components Co., Ltd. | Radiating fin |
USD922341S1 (en) * | 2019-11-11 | 2021-06-15 | Asia Vital Components Co., Ltd. | Radiating fin |
-
2020
- 2020-09-24 JP JP2020020257F patent/JP1684469S/ja active Active
-
2021
- 2021-03-09 TW TW110301195F patent/TWD217778S/zh unknown
- 2021-03-12 US US29/773,979 patent/USD959393S1/en active Active
Also Published As
Publication number | Publication date |
---|---|
USD959393S1 (en) | 2022-08-02 |
TWD217778S (zh) | 2022-03-21 |
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