USD794585S1 - Retainer ring for substrate - Google Patents
Retainer ring for substrate Download PDFInfo
- Publication number
- USD794585S1 USD794585S1 US29/560,291 US201629560291F USD794585S US D794585 S1 USD794585 S1 US D794585S1 US 201629560291 F US201629560291 F US 201629560291F US D794585 S USD794585 S US D794585S
- Authority
- US
- United States
- Prior art keywords
- retainer ring
- substrate
- view
- taken along
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2015-21985F JP1556433S (zh) | 2015-10-06 | 2015-10-06 | |
JP2015-021985 | 2015-10-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD794585S1 true USD794585S1 (en) | 2017-08-15 |
Family
ID=56612403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/560,291 Active USD794585S1 (en) | 2015-10-06 | 2016-04-05 | Retainer ring for substrate |
Country Status (3)
Country | Link |
---|---|
US (1) | USD794585S1 (zh) |
JP (1) | JP1556433S (zh) |
TW (1) | TWD179672S (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD836573S1 (en) * | 2017-01-31 | 2018-12-25 | Hitachi High-Technologies Corporation | Ring for a plasma processing apparatus |
USD845568S1 (en) * | 2015-05-14 | 2019-04-09 | Ebara Corporation | Pad holder for polishing apparatus |
USD918848S1 (en) * | 2019-07-18 | 2021-05-11 | Kokusai Electric Corporation | Retainer of ceiling heater for semiconductor fabrication apparatus |
USD940670S1 (en) * | 2019-09-26 | 2022-01-11 | Willbe S&T Co., Ltd. | Retainer ring for chemical mechanical polishing device |
USD947789S1 (en) * | 2020-05-22 | 2022-04-05 | Hosiden Corporation | Electric connection terminal |
USD962184S1 (en) * | 2019-07-11 | 2022-08-30 | Kokusai Electric Corporation | Retainer plate of top heater for wafer processing furnace |
USD962183S1 (en) * | 2019-07-11 | 2022-08-30 | Kokusai Electric Corporation | Retainer plate of top heater for wafer processing furnace |
USD981459S1 (en) * | 2021-06-16 | 2023-03-21 | Ebara Corporation | Retaining ring for substrate |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD931241S1 (en) | 2019-08-28 | 2021-09-21 | Applied Materials, Inc. | Lower shield for a substrate processing chamber |
Citations (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5944593A (en) * | 1997-09-01 | 1999-08-31 | United Microelectronics Corp. | Retainer ring for polishing head of chemical-mechanical polish machines |
US6186880B1 (en) * | 1999-09-29 | 2001-02-13 | Semiconductor Equipment Technology | Recyclable retaining ring assembly for a chemical mechanical polishing apparatus |
US6224472B1 (en) * | 1999-06-24 | 2001-05-01 | Samsung Austin Semiconductor, L.P. | Retaining ring for chemical mechanical polishing |
US6602116B1 (en) * | 1997-12-30 | 2003-08-05 | Applied Materials Inc. | Substrate retaining ring |
US6869335B2 (en) * | 2002-07-08 | 2005-03-22 | Micron Technology, Inc. | Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces |
US7029386B2 (en) * | 2004-06-10 | 2006-04-18 | R & B Plastics, Inc. | Retaining ring assembly for use in chemical mechanical polishing |
US7029375B2 (en) * | 2004-08-31 | 2006-04-18 | Tech Semiconductor Pte. Ltd. | Retaining ring structure for edge control during chemical-mechanical polishing |
US7186171B2 (en) * | 2005-04-22 | 2007-03-06 | Applied Materials, Inc. | Composite retaining ring |
USD557226S1 (en) * | 2005-08-25 | 2007-12-11 | Hitachi High-Technologies Corporation | Electrode cover for a plasma processing apparatus |
USD559993S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
US7326105B2 (en) * | 2005-08-31 | 2008-02-05 | Micron Technology, Inc. | Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces |
US7344434B2 (en) * | 2003-11-13 | 2008-03-18 | Applied Materials, Inc. | Retaining ring with shaped surface |
US7459057B2 (en) * | 1998-05-15 | 2008-12-02 | Applied Materials, Inc. | Substrate retainer |
US7819723B2 (en) * | 2007-03-22 | 2010-10-26 | Nec Electronics Corporation | Retainer ring and polishing machine |
US8298046B2 (en) * | 2009-10-21 | 2012-10-30 | SPM Technology, Inc. | Retaining rings |
US8517803B2 (en) * | 2009-09-16 | 2013-08-27 | SPM Technology, Inc. | Retaining ring for chemical mechanical polishing |
USD697038S1 (en) * | 2011-09-20 | 2014-01-07 | Tokyo Electron Limited | Baffle plate |
USD699200S1 (en) * | 2011-09-30 | 2014-02-11 | Tokyo Electron Limited | Electrode member for a plasma processing apparatus |
CN302820523S (zh) | 2014-05-14 | |||
USD729730S1 (en) * | 2013-06-06 | 2015-05-19 | Jon Simon Gillespie-Brown | Power charging ring |
USD734377S1 (en) * | 2013-03-28 | 2015-07-14 | Hirata Corporation | Top cover of a load lock chamber |
USD766849S1 (en) * | 2013-05-15 | 2016-09-20 | Ebara Corporation | Substrate retaining ring |
-
2015
- 2015-10-06 JP JPD2015-21985F patent/JP1556433S/ja active Active
-
2016
- 2016-03-31 TW TW105301716F patent/TWD179672S/zh unknown
- 2016-04-05 US US29/560,291 patent/USD794585S1/en active Active
Patent Citations (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN302820523S (zh) | 2014-05-14 | |||
US5944593A (en) * | 1997-09-01 | 1999-08-31 | United Microelectronics Corp. | Retainer ring for polishing head of chemical-mechanical polish machines |
US6602116B1 (en) * | 1997-12-30 | 2003-08-05 | Applied Materials Inc. | Substrate retaining ring |
US7459057B2 (en) * | 1998-05-15 | 2008-12-02 | Applied Materials, Inc. | Substrate retainer |
US6224472B1 (en) * | 1999-06-24 | 2001-05-01 | Samsung Austin Semiconductor, L.P. | Retaining ring for chemical mechanical polishing |
US6186880B1 (en) * | 1999-09-29 | 2001-02-13 | Semiconductor Equipment Technology | Recyclable retaining ring assembly for a chemical mechanical polishing apparatus |
US6869335B2 (en) * | 2002-07-08 | 2005-03-22 | Micron Technology, Inc. | Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces |
US7344434B2 (en) * | 2003-11-13 | 2008-03-18 | Applied Materials, Inc. | Retaining ring with shaped surface |
US7029386B2 (en) * | 2004-06-10 | 2006-04-18 | R & B Plastics, Inc. | Retaining ring assembly for use in chemical mechanical polishing |
US7029375B2 (en) * | 2004-08-31 | 2006-04-18 | Tech Semiconductor Pte. Ltd. | Retaining ring structure for edge control during chemical-mechanical polishing |
USD559993S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
US7186171B2 (en) * | 2005-04-22 | 2007-03-06 | Applied Materials, Inc. | Composite retaining ring |
USD557226S1 (en) * | 2005-08-25 | 2007-12-11 | Hitachi High-Technologies Corporation | Electrode cover for a plasma processing apparatus |
US7326105B2 (en) * | 2005-08-31 | 2008-02-05 | Micron Technology, Inc. | Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces |
US7819723B2 (en) * | 2007-03-22 | 2010-10-26 | Nec Electronics Corporation | Retainer ring and polishing machine |
US8517803B2 (en) * | 2009-09-16 | 2013-08-27 | SPM Technology, Inc. | Retaining ring for chemical mechanical polishing |
US8298046B2 (en) * | 2009-10-21 | 2012-10-30 | SPM Technology, Inc. | Retaining rings |
USD697038S1 (en) * | 2011-09-20 | 2014-01-07 | Tokyo Electron Limited | Baffle plate |
USD699200S1 (en) * | 2011-09-30 | 2014-02-11 | Tokyo Electron Limited | Electrode member for a plasma processing apparatus |
USD734377S1 (en) * | 2013-03-28 | 2015-07-14 | Hirata Corporation | Top cover of a load lock chamber |
USD766849S1 (en) * | 2013-05-15 | 2016-09-20 | Ebara Corporation | Substrate retaining ring |
USD729730S1 (en) * | 2013-06-06 | 2015-05-19 | Jon Simon Gillespie-Brown | Power charging ring |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD845568S1 (en) * | 2015-05-14 | 2019-04-09 | Ebara Corporation | Pad holder for polishing apparatus |
USD836573S1 (en) * | 2017-01-31 | 2018-12-25 | Hitachi High-Technologies Corporation | Ring for a plasma processing apparatus |
USD962184S1 (en) * | 2019-07-11 | 2022-08-30 | Kokusai Electric Corporation | Retainer plate of top heater for wafer processing furnace |
USD962183S1 (en) * | 2019-07-11 | 2022-08-30 | Kokusai Electric Corporation | Retainer plate of top heater for wafer processing furnace |
USD918848S1 (en) * | 2019-07-18 | 2021-05-11 | Kokusai Electric Corporation | Retainer of ceiling heater for semiconductor fabrication apparatus |
USD940670S1 (en) * | 2019-09-26 | 2022-01-11 | Willbe S&T Co., Ltd. | Retainer ring for chemical mechanical polishing device |
USD947789S1 (en) * | 2020-05-22 | 2022-04-05 | Hosiden Corporation | Electric connection terminal |
USD981459S1 (en) * | 2021-06-16 | 2023-03-21 | Ebara Corporation | Retaining ring for substrate |
Also Published As
Publication number | Publication date |
---|---|
JP1556433S (zh) | 2016-08-15 |
TWD179672S (zh) | 2016-11-21 |
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