JP2013188970A5 - - Google Patents

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Publication number
JP2013188970A5
JP2013188970A5 JP2012057668A JP2012057668A JP2013188970A5 JP 2013188970 A5 JP2013188970 A5 JP 2013188970A5 JP 2012057668 A JP2012057668 A JP 2012057668A JP 2012057668 A JP2012057668 A JP 2012057668A JP 2013188970 A5 JP2013188970 A5 JP 2013188970A5
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JP
Japan
Prior art keywords
silicon substrate
anisotropic etching
production
function
plate according
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JP2012057668A
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English (en)
Japanese (ja)
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JP2013188970A (ja
JP5725664B2 (ja
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Priority to JP2012057668A priority Critical patent/JP5725664B2/ja
Priority claimed from JP2012057668A external-priority patent/JP5725664B2/ja
Publication of JP2013188970A publication Critical patent/JP2013188970A/ja
Publication of JP2013188970A5 publication Critical patent/JP2013188970A5/ja
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Publication of JP5725664B2 publication Critical patent/JP5725664B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012057668A 2012-03-14 2012-03-14 ノズルプレートの製造方法 Expired - Fee Related JP5725664B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012057668A JP5725664B2 (ja) 2012-03-14 2012-03-14 ノズルプレートの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012057668A JP5725664B2 (ja) 2012-03-14 2012-03-14 ノズルプレートの製造方法

Publications (3)

Publication Number Publication Date
JP2013188970A JP2013188970A (ja) 2013-09-26
JP2013188970A5 true JP2013188970A5 (enExample) 2014-08-21
JP5725664B2 JP5725664B2 (ja) 2015-05-27

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ID=49389743

Family Applications (1)

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JP2012057668A Expired - Fee Related JP5725664B2 (ja) 2012-03-14 2012-03-14 ノズルプレートの製造方法

Country Status (1)

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JP (1) JP5725664B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6388389B2 (ja) * 2014-08-29 2018-09-12 キヤノン株式会社 液体吐出ヘッドの製造方法
JPWO2018047576A1 (ja) * 2016-09-12 2019-06-24 コニカミノルタ株式会社 液滴吐出ヘッド及び液滴吐出装置
JP7028178B2 (ja) * 2016-09-28 2022-03-02 コニカミノルタ株式会社 インクジェットヘッドおよびその製造方法と、インクジェットプリンタ
JP7119943B2 (ja) * 2018-11-26 2022-08-17 コニカミノルタ株式会社 ノズルプレートの製造方法及びインクジェットヘッドの製造方法
EP4316855A4 (en) * 2021-03-31 2024-05-22 Konica Minolta, Inc. NOZZLE PLATE MANUFACTURING PROCESS, NOZZLE PLATE AND LIQUID EJECTION HEAD

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001260355A (ja) * 2000-03-21 2001-09-25 Nec Corp インクジェットヘッドおよびその製造方法
US7347532B2 (en) * 2004-08-05 2008-03-25 Fujifilm Dimatix, Inc. Print head nozzle formation
JP4660683B2 (ja) * 2005-07-28 2011-03-30 セイコーエプソン株式会社 ノズルプレートの製造方法及び液滴吐出ヘッドの製造方法
JP2008114462A (ja) * 2006-11-02 2008-05-22 Seiko Epson Corp ノズル基板の製造方法、液滴吐出ヘッドの製造方法、液滴吐出装置の製造方法、ノズル基板、液滴吐出ヘッド及び液滴吐出装置
US20110020966A1 (en) * 2009-07-23 2011-01-27 Canon Kabushiki Kaisha Method for processing silicon substrate and method for producing substrate for liquid ejecting head
JP2011037053A (ja) * 2009-08-07 2011-02-24 Seiko Epson Corp ノズルプレートの製造方法
KR20120002688A (ko) * 2010-07-01 2012-01-09 삼성전기주식회사 노즐 플레이트 및 그 제조 방법, 그리고 상기 노즐 플레이트를 구비하는 잉크젯 프린터 헤드

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