JP2014506960A5 - - Google Patents

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Publication number
JP2014506960A5
JP2014506960A5 JP2013553963A JP2013553963A JP2014506960A5 JP 2014506960 A5 JP2014506960 A5 JP 2014506960A5 JP 2013553963 A JP2013553963 A JP 2013553963A JP 2013553963 A JP2013553963 A JP 2013553963A JP 2014506960 A5 JP2014506960 A5 JP 2014506960A5
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Japan
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carried out
advantageous embodiments
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JP2013553963A
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English (en)
Japanese (ja)
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JP6117116B2 (ja
JP2014506960A (ja
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Priority claimed from DE102011004441.8A external-priority patent/DE102011004441B4/de
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Publication of JP2014506960A5 publication Critical patent/JP2014506960A5/ja
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JP2013553963A 2011-02-21 2012-02-20 基体のコーティングのための方法および装置 Active JP6117116B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011004441.8A DE102011004441B4 (de) 2011-02-21 2011-02-21 Verfahren und Vorrichtung zur Beschichtung von auf Transformationstemperatur temperierten Glassubstraten
DE102011004441.8 2011-02-21
PCT/EP2012/052860 WO2012113750A1 (de) 2011-02-21 2012-02-20 Verfahren und vorrichtung zur beschichtung von substraten

Publications (3)

Publication Number Publication Date
JP2014506960A JP2014506960A (ja) 2014-03-20
JP2014506960A5 true JP2014506960A5 (enExample) 2015-03-12
JP6117116B2 JP6117116B2 (ja) 2017-04-19

Family

ID=45774172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013553963A Active JP6117116B2 (ja) 2011-02-21 2012-02-20 基体のコーティングのための方法および装置

Country Status (8)

Country Link
US (1) US20140087546A1 (enExample)
EP (1) EP2678461B1 (enExample)
JP (1) JP6117116B2 (enExample)
KR (1) KR101945003B1 (enExample)
CN (1) CN103415646B (enExample)
DE (2) DE102011004441B4 (enExample)
TW (1) TWI460876B (enExample)
WO (1) WO2012113750A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
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CN104694882A (zh) * 2015-03-19 2015-06-10 中国建材国际工程集团有限公司 用于基板镀膜的工艺方法
CN106929824A (zh) * 2015-12-29 2017-07-07 中国建材国际工程集团有限公司 清洁覆层设施中基底运输机构的方法和设备以及覆层设施
CN106517809B (zh) * 2016-11-08 2019-03-22 苏州蓝锐纳米科技有限公司 一种ar镀膜液涂布光伏玻璃的辊筒镀膜装置
US20180202041A1 (en) * 2017-01-18 2018-07-19 GM Global Technology Operations LLC Method and system for manufacturing a stainless steel substrate with a corrosion resistant coating
CN108109943B (zh) * 2017-12-15 2020-05-19 安徽省繁昌县皖南阀门铸造有限公司 一种涂布设备的热处理腔室
CN109576646B (zh) * 2018-12-21 2024-05-31 上海祖强能源有限公司 一种镀膜装置和镀膜方法
CN113394148B (zh) * 2021-06-15 2022-09-20 深圳市创一智能装备有限公司 一种太阳能电池的布料装置
DE102021125463A1 (de) 2021-09-30 2023-03-30 Heliatek Gmbh Verfahren zum indirekten thermischen Erwärmen eines Substrats
CN114042589B (zh) * 2021-10-15 2023-04-21 山东泉为新能源科技有限公司 高分子材料增强太阳能电池原材性能的处理设备
CN118231299B (zh) * 2024-05-20 2024-08-13 沈阳芯达科技有限公司 一种复合热板加热装置及其方法

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GB2143518B (en) * 1983-05-13 1986-10-22 Glaverbel Thermal conditioning of hot glass ribbon prior to coating with metal or metal oxide
GB2142621B (en) * 1983-06-17 1987-03-18 Glaverbel Coating hot glass with metals or metal compounds especially oxides
DE4132882C2 (de) * 1991-10-03 1996-05-09 Antec Angewandte Neue Technolo Verfahren zur Herstellung von pn CdTe/CdS-Dünnschichtsolarzellen
DE4442824C1 (de) * 1994-12-01 1996-01-25 Siemens Ag Solarzelle mit Chalkopyrit-Absorberschicht
JPH0925575A (ja) * 1995-07-10 1997-01-28 Chugai Ro Co Ltd Ｉｔｏ膜の成膜方法
US6423565B1 (en) * 2000-05-30 2002-07-23 Kurt L. Barth Apparatus and processes for the massproduction of photovotaic modules
JP4768147B2 (ja) * 2001-04-27 2011-09-07 Ｎｅｃ液晶テクノロジー株式会社 液晶表示装置の製造装置
JP4704605B2 (ja) * 2001-05-23 2011-06-15 淳二 城戸 連続蒸着装置、蒸着装置及び蒸着方法
AU2002349822B2 (en) * 2001-10-05 2007-11-15 Solar Systems & Equipments S.R.L. A process for large-scale production of CdTe/CdS thin film solar cells
ITMI20012628A1 (it) 2001-12-13 2003-06-13 Eurosolare Spa Forno di cottura di dispositivi fotovoltaici
JP2003292154A (ja) * 2002-04-04 2003-10-15 Noritake Co Ltd 厚膜印刷基板用熱処理装置および搬送ローラ
JP2003306226A (ja) * 2002-04-12 2003-10-28 Shibaura Mechatronics Corp 基板の処理装置及び処理方法
JP2005256094A (ja) * 2004-03-11 2005-09-22 Seiko Epson Corp 成膜装置
CN101636522B (zh) * 2007-03-02 2011-11-30 欧瑞康太阳能股份公司(特吕巴赫) 真空涂覆装置
KR100897548B1 (ko) * 2007-05-14 2009-05-15 세메스 주식회사 기판 반송 장치 및 상기 장치에 사용되는 기판 가이드 유닛
JP2009105130A (ja) * 2007-10-22 2009-05-14 Canon Inc 光起電力素子の製造方法
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KR101252948B1 (ko) * 2008-08-05 2013-04-15 가부시키가이샤 알박 진공 처리 장치, 진공 처리 방법
US20100055826A1 (en) * 2008-08-26 2010-03-04 General Electric Company Methods of Fabrication of Solar Cells Using High Power Pulsed Magnetron Sputtering
KR20100075336A (ko) * 2008-12-24 2010-07-02 진중 김 대면적 구리,인디움,갈륨,셀레니움 화합물 태양전지의 광흡수층 연속 하향식 증착 장비
TW201104882A (en) * 2009-07-24 2011-02-01 Auria Solar Co Ltd Thin film solar cell and manufacturing method thereof
JP2011044426A (ja) * 2009-07-24 2011-03-03 Nippon Electric Glass Co Ltd 太陽電池用導電膜付ガラス基板
CN102473607A (zh) * 2009-08-06 2012-05-23 住友电气工业株式会社 膜沉积装置
US8303779B2 (en) * 2009-12-16 2012-11-06 Primestar Solar, Inc. Methods for forming a transparent conductive oxide layer on a substrate
US8361232B2 (en) * 2010-04-29 2013-01-29 Primestar Solar, Inc. Vapor deposition apparatus and process for continuous indirect deposition of a thin film layer on a substrate

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