CN104684686A - 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 - Google Patents
具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 Download PDFInfo
- Publication number
- CN104684686A CN104684686A CN201380040394.7A CN201380040394A CN104684686A CN 104684686 A CN104684686 A CN 104684686A CN 201380040394 A CN201380040394 A CN 201380040394A CN 104684686 A CN104684686 A CN 104684686A
- Authority
- CN
- China
- Prior art keywords
- major surface
- abrasive
- diamond
- features
- grinding element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
- B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211322368.0A CN115625629A (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261678665P | 2012-08-02 | 2012-08-02 | |
| US61/678,665 | 2012-08-02 | ||
| PCT/US2013/052828 WO2014022462A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211322368.0A Division CN115625629A (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104684686A true CN104684686A (zh) | 2015-06-03 |
Family
ID=50028490
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380040394.7A Pending CN104684686A (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 |
| CN202211322368.0A Pending CN115625629A (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211322368.0A Pending CN115625629A (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150224625A1 (enExample) |
| EP (1) | EP2879836B1 (enExample) |
| JP (2) | JP2015530265A (enExample) |
| KR (1) | KR20150039795A (enExample) |
| CN (2) | CN104684686A (enExample) |
| SG (1) | SG11201500713PA (enExample) |
| TW (1) | TWI660816B (enExample) |
| WO (1) | WO2014022462A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113439010A (zh) * | 2019-02-13 | 2021-09-24 | 3M创新有限公司 | 具有精确成形特征部的磨料元件、用其制成的磨料制品及其制造方法 |
| CN115956064A (zh) * | 2020-09-07 | 2023-04-11 | 日本碍子株式会社 | 耐火材料 |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8758461B2 (en) | 2010-12-31 | 2014-06-24 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| US8840694B2 (en) | 2011-06-30 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| CN103702800B (zh) | 2011-06-30 | 2017-11-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
| EP2760639B1 (en) | 2011-09-26 | 2021-01-13 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming |
| KR102074138B1 (ko) | 2011-12-30 | 2020-02-07 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
| EP3851248B1 (en) | 2011-12-30 | 2024-04-03 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| KR101667943B1 (ko) | 2012-01-10 | 2016-10-20 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 복잡한 형상들을 가지는 연마 입자들 및 이의 성형 방법들 |
| US9242346B2 (en) | 2012-03-30 | 2016-01-26 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| KR101813466B1 (ko) | 2012-05-23 | 2017-12-29 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자들 및 이의 형성방법 |
| US10106714B2 (en) | 2012-06-29 | 2018-10-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| SG11201500802TA (en) | 2012-08-02 | 2015-04-29 | 3M Innovative Properties Co | Abrasive articles with precisely shaped features and method of making thereof |
| CN108177094B (zh) | 2012-08-02 | 2021-01-15 | 3M创新有限公司 | 具有精确成形特征部的研磨元件前体及其制造方法 |
| FI2906392T3 (fi) | 2012-10-15 | 2025-06-20 | Saint Gobain Abrasives Inc | Hiomahiukkasia, joilla on erityisiä muotoja, ja menetelmiä tällaisten hiukkasten muodostamiseksi |
| KR101818946B1 (ko) | 2012-12-31 | 2018-01-17 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 미립자 소재 및 이의 형성방법 |
| WO2014140689A1 (en) * | 2013-03-12 | 2014-09-18 | 3M Innovative Properties Company | Bonded abrasive article |
| CN107685296B (zh) | 2013-03-29 | 2020-03-06 | 圣戈班磨料磨具有限公司 | 具有特定形状的磨粒、形成这种粒子的方法及其用途 |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| RU2643004C2 (ru) | 2013-09-30 | 2018-01-29 | Сен-Гобен Серэмикс Энд Пластикс, Инк. | Формованные абразивные частицы и способы их получения |
| MX380754B (es) | 2013-12-31 | 2025-03-12 | Saint Gobain Abrasives Inc | Artículo abrasivo que incluye partículas abrasivas perfiladas. |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| WO2015160855A1 (en) | 2014-04-14 | 2015-10-22 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| CA2945491C (en) | 2014-04-14 | 2023-03-14 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US20160144477A1 (en) * | 2014-11-21 | 2016-05-26 | Diane Scott | Coated compressive subpad for chemical mechanical polishing |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| EP3277459B1 (en) | 2015-03-31 | 2023-08-16 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| ES2819375T3 (es) | 2015-06-11 | 2021-04-15 | Saint Gobain Ceramics & Plastics Inc | Artículo abrasivo que incluye partículas abrasivas conformadas |
| KR102390844B1 (ko) | 2016-05-10 | 2022-04-26 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자 및 이의 형성 방법 |
| EP3455320A4 (en) | 2016-05-10 | 2019-11-20 | Saint-Gobain Ceramics&Plastics, Inc. | GRINDING PARTICLES AND METHOD FOR FORMING THEREOF |
| TWI621502B (zh) * | 2016-08-18 | 2018-04-21 | 中國砂輪企業股份有限公司 | Double chemical mechanical polishing trimming system and method thereof |
| EP3519134B1 (en) | 2016-09-29 | 2024-01-17 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2018236989A1 (en) | 2017-06-21 | 2018-12-27 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| CN110869206B (zh) * | 2017-07-11 | 2023-06-30 | 3M创新有限公司 | 包括可适形涂层的磨料制品和由此形成的抛光系统 |
| WO2019012389A1 (en) | 2017-07-11 | 2019-01-17 | 3M Innovative Properties Company | ABRASIVE ARTICLES COMPRISING ADAPTABLE COATINGS AND POLISHING SYSTEM MANUFACTURED THEREFROM |
| CN114845838B (zh) | 2019-12-27 | 2024-10-25 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| KR102765343B1 (ko) | 2019-12-27 | 2025-02-13 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| EP4081609A4 (en) | 2019-12-27 | 2024-06-05 | Saint-Gobain Ceramics & Plastics Inc. | Abrasive articles and methods of forming same |
| CN111546247B (zh) * | 2020-04-30 | 2022-03-25 | 郑州力弘超硬材料有限公司 | 一种用于光纤插针的金刚石磨具低温陶瓷结合剂及其制备方法 |
| WO2023060457A1 (zh) * | 2021-10-13 | 2023-04-20 | 大连理工大学 | 一种盘类平面构件柔性点阵粘接装置及适应性装夹方法 |
| JP2025500060A (ja) | 2021-12-30 | 2025-01-07 | サンーゴバン アブレイシブズ,インコーポレイティド | 研磨物品及びそれを形成する方法 |
| TWI856689B (zh) * | 2023-06-07 | 2024-09-21 | 吉而特科技股份有限公司 | 循環再使用的研磨裝置 |
Citations (12)
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| CN1174869A (zh) * | 1997-08-26 | 1998-03-04 | 汪宁 | 一种用于化学-机械抛光的抛光盘及其制造方法 |
| US6007407A (en) * | 1996-08-08 | 1999-12-28 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| US6364749B1 (en) * | 1999-09-02 | 2002-04-02 | Micron Technology, Inc. | CMP polishing pad with hydrophilic surfaces for enhanced wetting |
| US6439986B1 (en) * | 1999-10-12 | 2002-08-27 | Hunatech Co., Ltd. | Conditioner for polishing pad and method for manufacturing the same |
| JP2004291165A (ja) * | 2003-03-27 | 2004-10-21 | Mitsubishi Materials Corp | 軟質材加工用工具 |
| CN1697139A (zh) * | 2004-05-05 | 2005-11-16 | 智胜科技股份有限公司 | 单层研磨垫及其制造方法 |
| JP2006000989A (ja) * | 2004-06-18 | 2006-01-05 | Mitsubishi Materials Corp | 軟質材加工用切削工具 |
| US20070010391A1 (en) * | 2005-07-05 | 2007-01-11 | Ceradyne, Inc. | Lightweight boron carbide materials with improved mechanical properties and process for their manufacture |
| CN101306518A (zh) * | 2007-05-18 | 2008-11-19 | 三芳化学工业股份有限公司 | 研磨垫与其应用及其制造方法 |
| WO2010063647A1 (en) * | 2008-12-03 | 2010-06-10 | Struers A/S | Abrasive disc |
| JP2010125586A (ja) * | 2008-12-01 | 2010-06-10 | Mitsubishi Materials Corp | 半導体研磨布用コンディショナー及びその製造方法 |
| US20100330886A1 (en) * | 2009-06-02 | 2010-12-30 | Saint-Gobain Abrasives, Inc. | Corrosion-Resistant CMP Conditioning Tools and Methods for Making and Using Same |
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2013
- 2013-07-31 US US14/418,453 patent/US20150224625A1/en not_active Abandoned
- 2013-07-31 SG SG11201500713PA patent/SG11201500713PA/en unknown
- 2013-07-31 KR KR20157004858A patent/KR20150039795A/ko not_active Ceased
- 2013-07-31 CN CN201380040394.7A patent/CN104684686A/zh active Pending
- 2013-07-31 WO PCT/US2013/052828 patent/WO2014022462A1/en not_active Ceased
- 2013-07-31 EP EP13826255.5A patent/EP2879836B1/en active Active
- 2013-07-31 CN CN202211322368.0A patent/CN115625629A/zh active Pending
- 2013-07-31 JP JP2015525532A patent/JP2015530265A/ja active Pending
- 2013-08-01 TW TW102127669A patent/TWI660816B/zh active
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2018
- 2018-11-09 JP JP2018211596A patent/JP2019063989A/ja active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6007407A (en) * | 1996-08-08 | 1999-12-28 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| CN1174869A (zh) * | 1997-08-26 | 1998-03-04 | 汪宁 | 一种用于化学-机械抛光的抛光盘及其制造方法 |
| US6364749B1 (en) * | 1999-09-02 | 2002-04-02 | Micron Technology, Inc. | CMP polishing pad with hydrophilic surfaces for enhanced wetting |
| US6439986B1 (en) * | 1999-10-12 | 2002-08-27 | Hunatech Co., Ltd. | Conditioner for polishing pad and method for manufacturing the same |
| JP2004291165A (ja) * | 2003-03-27 | 2004-10-21 | Mitsubishi Materials Corp | 軟質材加工用工具 |
| CN1697139A (zh) * | 2004-05-05 | 2005-11-16 | 智胜科技股份有限公司 | 单层研磨垫及其制造方法 |
| JP2006000989A (ja) * | 2004-06-18 | 2006-01-05 | Mitsubishi Materials Corp | 軟質材加工用切削工具 |
| US20070010391A1 (en) * | 2005-07-05 | 2007-01-11 | Ceradyne, Inc. | Lightweight boron carbide materials with improved mechanical properties and process for their manufacture |
| CN101306518A (zh) * | 2007-05-18 | 2008-11-19 | 三芳化学工业股份有限公司 | 研磨垫与其应用及其制造方法 |
| JP2010125586A (ja) * | 2008-12-01 | 2010-06-10 | Mitsubishi Materials Corp | 半導体研磨布用コンディショナー及びその製造方法 |
| WO2010063647A1 (en) * | 2008-12-03 | 2010-06-10 | Struers A/S | Abrasive disc |
| US20100330886A1 (en) * | 2009-06-02 | 2010-12-30 | Saint-Gobain Abrasives, Inc. | Corrosion-Resistant CMP Conditioning Tools and Methods for Making and Using Same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113439010A (zh) * | 2019-02-13 | 2021-09-24 | 3M创新有限公司 | 具有精确成形特征部的磨料元件、用其制成的磨料制品及其制造方法 |
| CN115956064A (zh) * | 2020-09-07 | 2023-04-11 | 日本碍子株式会社 | 耐火材料 |
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| Publication number | Publication date |
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| JP2015530265A (ja) | 2015-10-15 |
| JP2019063989A (ja) | 2019-04-25 |
| EP2879836A1 (en) | 2015-06-10 |
| CN115625629A (zh) | 2023-01-20 |
| WO2014022462A1 (en) | 2014-02-06 |
| TW201410391A (zh) | 2014-03-16 |
| TWI660816B (zh) | 2019-06-01 |
| KR20150039795A (ko) | 2015-04-13 |
| SG11201500713PA (en) | 2015-02-27 |
| EP2879836A4 (en) | 2016-05-25 |
| EP2879836B1 (en) | 2019-11-13 |
| US20150224625A1 (en) | 2015-08-13 |
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