JP6155384B2 - 特定の形状を有する研磨粒子およびこのような粒子の形成方法 - Google Patents
特定の形状を有する研磨粒子およびこのような粒子の形成方法 Download PDFInfo
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/04—Zonally-graded surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0054—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impressing abrasive powder in a matrix
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0072—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D2203/00—Tool surfaces formed with a pattern
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Description
多種多様な方法を用いて成形研磨粒子を形成することができる。例えば、成形研磨粒子は押出成形、成形、スクリーン印刷、ロール、溶融、加圧成形、鋳造、セグメント化、分割、およびこれらの組み合わせ等の技術を使用して形成されてよい。特定の場合には、成形研磨粒子は、セラミック材料および液体を含んでよい混合物から形成されてよい。特定の場合には、混合物はセラミック粉末材料および液体から形成されるゲルであってよく、ゲルは未処理(すなわち、焼成されていない)状態においてさえ所与の形状を実質的に保持する能力を有する形状安定材料として特徴付けられ得る。一実施形態によると、ゲルは、離散粒子の一体化ネットワークとしてのセラミック粉末材料から形成することができる。
成形研磨粒子はさまざまな形状を有するように形成することができる。概して、成形研磨粒子は、形成プロセスにて使用される成形要素に近い形状を有するように形成されてよい。例えば、成形研磨粒子は三次元の任意の二次元、特に粒子の長さと幅によって規定される次元で見たときに所定の二次元形状を有してよい。いくつかの例示的二次元形状としては、多角形、楕円形、数字、ギリシャ文字、アルファベット文字、ロシア文字、漢字、多角形の組み合わせを含む複雑な形状、およびこれらの組み合わせを挙げることができる。特定の場合には、成形研磨粒子は、二次元の多角形形状、例えば、三角形、長方形、四辺形、五角形、六角形、七角形、八角形、九角形、十角形、およびこれらの組み合わせを有し得る。
図1Aは、一実施形態による研磨物品の一部の平面図である。図示されているように、研磨物品100は裏材101を含むことができる。裏材101は、有機材料、無機材料、およびこれらの組み合わせを含むことができる。特定の場合には、裏材101は織布材料を含むことができる。しかし、裏材101は不織布材料でできていてもよい。特に好適な裏材材料としては、ポリマー類を含む有機材料、詳細には、ポリエステル、ポリウレタン、ポリプロピレン、ポリイミド、例えば、DuPont社製KAPTON、および紙を挙げることができる。いくつかの好適な無機材料としては、金属、合金、詳細には、銅、アルミニウム、鋼およびこれらの組み合わせの箔を挙げることができる。研磨物品100は、本明細書でさらに詳細に記述される、例えば接着剤層(例えば、メイクコート、サイズコート、フロントフィル等)等のその他の構成要素を含むことができると理解されよう。
φ=n*α、r=定数、H=h*n,・・・(1.1)
式中、nは円筒底部から数えた芽鱗の順番であり、
φ、r、およびHは、n番目の芽鱗の円筒座標であり、
αは、2つの連続する芽鱗間の開度(例えば、137.5281°等一定であると考えられる)であり、
hは、2つの連続する芽鱗間の(円筒の主軸に沿って図った)垂直距離である。
上記は所定の分布の成形研磨粒子を有する実施形態の研磨物品について記載された。以下では本明細書における実施形態のかかる研磨物品を形成するために使用される各種方法について記載する。本明細書で記載される任意の方法およびシステムが組み合わされて使用され、一実施形態による研磨物品の形成を容易にできることが理解されよう。
一実施形態において、接着剤層をスクリーン印刷プロセスによって適用することができる。スクリーン印刷プロセスは、不連続接着剤層適用プロセス、半連続接着剤層適用プロセス、連続接着剤層適用プロセス、またはこれらの組み合わせであることができる。一実施形態では、適用プロセスは、回転スクリーンの使用を含む。特定の実施形態では、回転スクリーンは、シリンダまたはドラムの壁に複数の開口が配置された中空シリンダまたはドラムの形態であることができる。開口または開口の組み合わせは、別個の接触領域または別個の接触領域の組み合わせの所望の位置に対応可能である。別個の接触領域は、1つ以上の別個の接着剤領域を含むことができる。特定の実施形態では、接触領域は、複数の別個の接着剤領域を含む。接着剤領域は非シャドウイングパターンの形態で配置できる。
図31は、図32に示すような研磨物品を製造する方法3100のフローチャートを示す。ステップ3101にて、接着剤層を裏材に適用する。接着剤層は、メイク層3202(すなわち、メイク樹脂)に対応するポリマー結合剤組成物(すなわち、ポリマー樹脂)であり得る。メイク層3202は、裏材3206の主表面3204上の複数の別個の領域、例えば、別個の接触領域または別個の接着剤領域3208に配置される。別個の接着剤領域はランダムな、半ランダムな、または整然とした分布を提供するように配置できる。例示的な分布は図25、図26、図27、および図32に示すような非シャドウイング分布である。研磨粒子3210のメイク樹脂からなる別個の接着剤領域への配置(適用)を次にステップ3101で行う。ステップ3105にて、メイク樹脂を少なくとも部分的な程度から完全な程度まで硬化させて、研磨物品を提供する。所望により、鉱物粉末等の機能性粉末を被覆された裏材全体に適用し、その後メイク樹脂を含まない領域から除去することができる。所望により、次に、サイズコート3212(すなわち、サイズ樹脂)を優先的に研磨粒子およびメイク樹脂の上に適用することができる。サイズコートは、裏材の開放領域3214(すなわち、メイク樹脂が適用されてない領域)と接触できるか、メイク樹脂が適用された領域と接触できるか、またはこれらの組み合わせが可能である。特定の実施形態では、サイズ樹脂が、完全にメイク樹脂を被覆せず、またメイク樹脂を超えて延在しないように、メイク樹脂上に適用できる。所望により、次に、サイズ樹脂の硬化を行い研磨物品を提供する。一実施形態において、接着剤層を裏材に、特にメイク層として適用する場合、メイク樹脂は、好適な添加剤および充填剤を含有することができるが、まったく研磨粒子を含有しない(すなわち、メイク樹脂は研磨スラリーではない)。ある特定の実施形態では、接着樹脂はメイク樹脂であり、まったく研磨粒子を含有しない。さらに、別個の接着剤領域は、不連続な非シャドウイング分布を有するメイクコートのように不連続な非シャドウイング分布として配置できるが、サイズコート上に所望により適用される任意のスーパーサイズコートが連続していてもまたは不連続であってもよいのと同様に、メイクコート上に所望により適用される任意のサイズコートは連続していてもまたは不連続であってもよいことに留意されたい。特定の実施形態では、サイズコートまたはスーパーサイズコートは両方とも不連続であり、サイズコートおよびスーパーサイズコートがメイクコートの分布に合致するように適用される。別の特定の実施形態では、サイズコートまたはスーパーサイズコートは両方とも不連続であり、サイズコートおよびスーパーサイズコートがメイクコートの分布に部分的に合致するように適用される。別の特定の実施形態では、連続的なサイズコートは不連続なメイクコートの上に適用され、そのサイズコートの上に不連続なスーパーサイズコートが適用される。別の特定の実施形態では、不連続なサイズコートが不連続なメイクコートの上に(メイクコートに合致するか、または部分的に合致して)適用され、連続的なスーパーサイズコートがそのサイズコートの上に適用される。
一実施形態では、接着剤層は、実質的に均一な厚さを有することができる。厚さは研磨粒子のd50高さ未満であることができる。厚さは、研磨粒子の高さの50%未満、例えば、45%未満、例えば、40%未満、例えば、35%未満、例えば、30%未満、例えば、25%未満、例えば、20%未満、例えば、15%未満、例えば、10%未満、例えば、5%未満、例えば、4%未満、例えば、3%未満、例えば、2%未満、例えば、1%未満、例えば、0.5%未満であることができる。
上述の接着剤適用方法を使用して、別個の接着剤領域に1つ以上の望ましい配向特性を与えることができるか、または別個の接着剤領域の1つ以上の望ましい所定の分布を確立できる。別個の接着剤領域間の所定の分布はさらに、別個の接着剤領域それぞれの所定の配向特性のうち少なくとも1つにより規定できる。例示的な所定の配向特性としては、所定の回転配向、所定の横方向配向、所定の縦方向配向、所定の垂直配向およびこれらの組み合わせを挙げることができる。
前述したように、接着剤接触領域は、接着剤接触領域が配置される裏材の横軸に平行な横方向平面に沿って測定したときの2つの隣接する接着剤接触領域の間の最小距離として定義される、横方向空間により互いに離間されてよい。一実施形態では、*接着剤接触領域間の横方向間隔は、高度の制御(すなわち、高確度、高精度、低変動性)を示すことができる。一実施形態では、隣接する接着剤接触領域の横方向間隔の差が0または許容可能な程度の小さい値になるように、接着剤接触領域のかなりの数(50%超)は「標的に」適用される。一実施形態において、隣接する接着剤接触領域の横方向間隔の少なくとも約55%、例えば、少なくとも約60%、少なくとも約65%、少なくとも約68%、少なくとも約70%、少なくとも約75%、少なくとも約80%、少なくとも約85%、少なくとも約90%、少なくとも約95%、少なくとも約%、少なくとも約98%、少なくとも約99%、少なくとも約99.5%、またはさらには約100%(測定したすべての値は許容可能限度内である)は、平均の2.5標準偏差内である。別の実施形態では、隣接する接着剤接触領域の横方向間隔のサンプル集団の少なくとも約65%は、平均の2.5標準偏差内、例えば、平均の2.25標準偏差内、2.0標準偏差内、1.75標準偏差内、1.5標準偏差内、1.25標準偏差内、または1.0標準偏差内になる。上述の割合の組み合わせおよび平均からの偏差を使用することによって代替的範囲を構成できることが理解されよう。
前述したように、接着剤接触領域は、接着剤接触領域が配置される裏材の縦軸に平行な縦方向平面に沿って測定したときの2つの隣接する接着剤接触領域の間の最小距離として定義される、縦方向空間により互いに離間されてよい。一実施形態では、*接着剤接触領域間の縦方向間隔は、高度の制御(すなわち、高確度、高精度、低変動性)を示すことができる。一実施形態では、隣接する接着剤接触領域の縦方向間隔の差が0または許容可能な程度の小さい値になるように、接着剤接触領域のかなりの数(50%超)は「標的に」適用される。一実施形態において、隣接する接着剤接触領域間の縦方向間隔の少なくとも約55%、例えば、少なくとも約60%、少なくとも約65%、少なくとも約68%、少なくとも約70%、少なくとも約75%、少なくとも約80%、少なくとも約85%、少なくとも約90%、少なくとも約95%、少なくとも約%、少なくとも約98%、少なくとも約99%、少なくとも約99.5%、またはさらには約100%(測定したすべての値は許容可能限度内である)は、平均の2.5標準偏差内である。別の実施形態では、隣接する接着剤接触領域の縦方向間隔のサンプル集団の少なくとも約65%は、平均の2.5標準偏差内、例えば、平均の2.25標準偏差内、2.0標準偏差内、1.75標準偏差内、1.5標準偏差内、1.25標準偏差内、または1.0標準偏差内になる。上述の割合の組み合わせおよび平均からの偏差を使用することによって代替的範囲を構成できることが理解されよう。
研削試験を行って、研削方向に対する成形砥粒の配向の効果を評価する。本試験では、第1の組の成形研磨粒子(サンプルA)は研削方向に対して正面配向で配向される。少し図3Bを見てみると、成形研磨粒子102は、正面配向研削方向385を有するため、主表面363は研削方向に略垂直な平面を規定し、より詳細には、成形研磨粒子102の二等分軸231は研削方向385に略平行である。サンプルAは、オーステナイトステンレス鋼の加工品に対して正面配向でホルダに取り付けられた。ホイール速度は22m/s、加工速度は16m/sで維持された。切削深さは0〜30ミクロンの間で選択できる。各試験は、8インチ長の加工品上を15回通過することからなる。各試験にて、10の繰り返しサンプルが試験され、結果を分析し平均した。引っかき傷の長さの始まりから終わりまでの溝の断面積の変化を測定して、グリットの摩耗を求めた。
5つのサンプルを分析して、成形研磨粒子の配向を比較する。3つのサンプル(サンプルS1、S2およびS3)は一実施形態に従って作成される。サンプルS1はテンプレートで接触プロセスを使用して製造された。研磨粒子は、所望の所定の研磨粒子分布を有するテンプレートによって所定位置に配置され保持される。連続的なメイクコートを有する裏材基材が研磨粒子に接触したため、研磨粒子は所望の所定の研磨粒子分布にてメイクコートに付着した。サンプルS2およびS3は、連続的静電投射プロセスを使用して作成された。成形研磨粒子を不連続なメイクコートを有する裏材基材に投射した。メイクコートはあらかじめ所定の分布の非シャドウイングパターンの別個の円形接着剤接触領域(本明細書ではメイクコート「スポット」とも呼ばれる)として適用された。パターンは、本明細書に記載される式1.1に従う葉序パターン(パイナップルパターンとも呼ばれる)であった。S2およびS3用のメイクコートは、裏材材料の表面上に分布する17,000個の円形接着剤接触領域を含んでいた。研磨材サンプルS2およびS3用のメイク重量は約0.84ポンド/リームであった。サンプルS2およびS3用のグレイン重量は約17.7ポンド/リームであった。S2およびS3サンプルの画像を図37に示す。画像解析を行って、パターンに関する種々の空間特性を決定した。接着剤接触領域(すなわち、メイクコートスポット)の平均サイズは約1.097mm2であった。メイクコートスポット間の隣接間隔は約2.238mmであった。メイクコートで覆われた面積とメイクコートで覆われていない面積との比は0.1763であった(すなわち、裏材表面の約17.6%がメイクコートで覆われていた)。
別の本発明の被覆研磨材の実施形態をS2およびS3と同様にして準備した。メイクコートは、パイナップルパターンに従う不連続な非シャドウイング分布に従って適用されたが、別個の接着剤接触領域の合計数は10,000個であった。メイク重量はほぼ1.6lb/rmであり、グレイン重量は約19.2lb/rmであった。実施例2にて上述したような成形研磨粒子(Cubitron II)をその後、メイクコート接触領域に適用した。本発明の被覆研磨材は19グレイン/cm2の研磨粒子密度(砥粒密度)を有していた。上記の実施例2と同様にしてX線解析を行い、本発明の実施形態および従来の比較例の被覆研磨材製品の成形研磨粒子の配向を評価した。図35Aは比較製品の例示である。図35Bは本発明の実施形態の例示である。配向解析の結果のグラフ表示を図36で示す。本発明の実施形態は驚くべきことに、改善された直立位置にある砥粒の量、89%を有していたのに対し、比較例は、直立位置にある砥粒はわずか72%であった。
裏材の少なくとも一部分上に不連続な分布で配置される接着剤層と
を含む被覆研磨物品であって、
不連続な分布は、接着剤接触領域のそれぞれの間に少なくとも1つの横方向間隔または縦方向間隔を有する複数の接着剤接触領域を含み、
少なくとも1つの研磨粒子は接着剤接触領域の大部分に配置され、研磨粒子は先端を有し、研磨粒子のそれぞれの間に少なくとも1つの横方向間隔または縦方向間隔があり、
研磨粒子の先端間の横方向間隔および縦方向間隔のうち少なくとも1つの少なくとも65%は、平均の2.5標準偏差内である、被覆研磨物品。
第1の位置で第1の接着剤接触領域と結合される第1の成形研磨粒子と、
第2の接着剤接触領域と結合される第2の成形研磨粒子とを含み、
第1の成形研磨粒子および第2の成形研磨粒子は、互いに対して制御された非シャドウイング配置にて配置され、制御された非シャドウイング配置は、所定の回転配向、所定の横方向配向、および所定の縦方向配向のうち少なくとも2つを含む、項目2に記載の被覆研磨粒子。
第2の接着剤層は第1の接着剤層よりも小さな表面積を覆い、第1の接着剤層を超えては延びない、項目1に記載の被覆研磨物品。
連続的なスクリーン印刷プロセスを使用して接着剤組成物を裏材に適用することと、
少なくとも1つの研磨粒子を別個の接着剤接触領域のそれぞれに配置することと、
結合剤組成物を硬化させることとを含み、
接着剤組成物は、接着剤接触領域のそれぞれの間に横方向間隔または縦方向間隔のうち少なくとも1つを有する複数の接着剤接触領域を含む不連続な分布として適用され、研磨粒子は先端を有し、研磨粒子のそれぞれの間に横方向間隔または縦方向間隔のうち少なくとも1つがある、方法。
所定の分布にて裏材に配置されるメイクコートと、
複数の成形研磨粒子と
を含む被覆研磨物品であって、
所定の分布は、不連続なパターンの複数の別個の接触領域を含み、
複数の成形研磨粒子の少なくとも1つの成形研磨粒子は、別個の接触領域のそれぞれに配置され、メイク重量対グレイン重量の比は1:40〜1:1の範囲内である、被覆研磨物品。
所定の分布にて裏材に配置されるメイクコートと、
複数の成形研磨粒子と
を含む被覆研磨物品であって、
所定の分布は、不連続なパターンの複数の別個の接触領域を含み、
複数の成形研磨粒子の少なくとも1つの成形研磨粒子は、別個の接触領域のそれぞれに配置され、
別個の接触領域の数は1000〜40,000の範囲であり、
成形研磨粒子の50%超は直立位置にある、被覆研磨物品。
Claims (15)
- 裏材と、
前記裏材の少なくとも一部分上に不連続な分布で配置されるメイクコート層と
別個の接着剤領域の大部分に配置される少なくとも1つの成形研磨粒子とを含む被覆研磨物品であって、
前記不連続な分布は、前記接着剤領域のそれぞれの間に横方向間隔または縦方向間隔の少なくとも1つを有する複数の前記別個の接着剤領域を含み、
前記成形研磨粒子は、互いに対して制御された非シャドウイング配置にて配置され、前記制御された非シャドウイング配置は、前記成形研磨粒子のそれぞれの間の少なくとも1つの横方向間隔または縦方向間隔を含み、前記成形研磨粒子は、所定の回転配向、所定の横方向配向、および所定の縦方向配向のうち少なくとも2つを有し、
前記複数の別個の接着剤領域は、非対称パターンを含み、
前記成形研磨粒子は、先端を有し、かつ、多角形、三角形、長方形、四辺形、五角形、六角形、七角形、八角形、九角形、十角形、およびこれらの組み合わせからなる群から選択される所定の二次元形状を有し、
前記成形研磨粒子の先端間の横方向間隔および縦方向間隔のうち少なくとも1つの少なくとも65%は、平均から標準偏差の2.5倍内であり、
前記成形研磨粒子の先端の少なくとも80%は側面配向である、被覆研磨物品。 - 別個の接着剤領域の前記不連続な分布は、非シャドウイングパターンである、請求項1に記載の被覆研磨物品。
- 前記別個の接着剤領域間の前記横方向間隔および前記縦方向間隔のうち少なくとも1つの少なくとも65%は、平均から標準偏差の2.5倍内である、請求項1に記載の被覆研磨物品。
- 前記別個の接着剤領域のそれぞれは、前記少なくとも1つの成形研磨粒子のd50高さ未満の実質的に均一な厚さを有する、請求項1に記載の被覆研磨物品。
- 前記別個の接着剤領域のそれぞれの幅は前記少なくとも1つの研磨粒子のd50幅に実質的に等しい、請求項4に記載の被覆研磨物品。
- 前記メイクコート層に不連続な分布で配置されるサイズコート層をさらに含み、
前記サイズコート層は前記メイクコート層よりも小さな表面積を覆い、前記メイクコート層を超えては延びない、請求項1に記載の被覆研磨物品。 - 少なくとも1つの成形研磨粒子は各接着剤領域に配置される、請求項1に記載の被覆研磨物品。
- 連続的なスクリーン印刷プロセスを使用してメイクコートを裏材に適用することと、
少なくとも1つの成形研磨粒子を別個の接着剤領域のそれぞれに配置することと
前記メイクコートを硬化させることと
を含む被覆研磨物品を製造する方法であって、
前記メイクコートは、前記別個の接着剤領域のそれぞれの間に横方向間隔または縦方向間隔のうち少なくとも1つを有する複数の別個の接着剤領域を含む不連続な分布として適用され、
前記成形研磨粒子は先端を有し、かつ、多角形、三角形、長方形、四辺形、五角形、六角形、七角形、八角形、九角形、十角形、およびこれらの組み合わせからなる群から選択される所定の二次元形状を有し、前記成形研磨粒子のそれぞれの間に横方向間隔または縦方向間隔のうち少なくとも1つがあり、
複数の別個の接着剤領域は、非対称パターンを含み、
前記少なくとも1つの成形研磨粒子を前記別個の接着剤領域のそれぞれに配置することが、第1の位置で第1の別個の接着剤領域と結合される第1の成形研磨粒子と、第2の別個の接着剤領域と結合される第2の成形研磨粒子とを含み、
前記第1の成形研磨粒子と前記第2の成形研磨粒子とは、互いに対して制御された非シャドウイング配置にて配置され、前記制御された非シャドウイング配置は、所定の回転配向、所定の横方向配向、および所定の縦方向配向のうち少なくとも2つを含み、
前記メイクコートの前記複数の別個の接着剤領域の不連続な分布は、非対称パターンを含み、
前記成形研磨粒子の先端の少なくとも80%は側面配向である、方法。 - 前記研磨粒子の先端間の横方向間隔および縦方向間隔のうち少なくとも1つの少なくとも65%は、平均から標準偏差の2.5倍内である、請求項8に記載の方法。
- 裏材と、
所定の分布にて前記裏材に配置されるメイクコートと、
複数の成形研磨粒子と
を含む、被覆研磨物品であって、
前記所定の分布は、不連続なパターンの複数の別個の領域を含み、
前記複数の成形研磨粒子の少なくとも1つの成形研磨粒子は、前記別個の領域のそれぞれに配置され、
メイクコートの量対成形研磨粒子の量の比は1:40〜1:1の範囲内である、被覆研磨物品。 - 前記別個の領域は、前記成形研磨粒子の平均長さの0.5〜3倍の範囲内の隣接間隔を有する、請求項1に記載の被覆研磨物品。
- 前記別個の領域は、0.2mm〜2.2mmの範囲内の隣接間隔を有する、請求項1に記載の被覆研磨物品。
- 前記不連続なメイクコートは、前記裏材の少なくとも1%〜95%を覆う、請求項1に記載の被覆研磨物品。
- 前記別個の領域は、0.3mm〜20mmの範囲内の平均直径を有する、請求項1に記載の被覆研磨物品。
- 前記裏材の4%〜85%が露出している、請求項1に記載の被覆研磨物品。
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EP2978566A1 (en) | 2016-02-03 |
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US20230135441A1 (en) | 2023-05-04 |
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US20200262031A1 (en) | 2020-08-20 |
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MX2020013934A (es) | 2021-03-09 |
CA2984232C (en) | 2021-07-20 |
CA2907372A1 (en) | 2014-10-02 |
CN107685296A (zh) | 2018-02-13 |
US9457453B2 (en) | 2016-10-04 |
CN105073343A (zh) | 2015-11-18 |
KR20150133796A (ko) | 2015-11-30 |
US11590632B2 (en) | 2023-02-28 |
US20140290147A1 (en) | 2014-10-02 |
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US20160375556A1 (en) | 2016-12-29 |
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CA2907372C (en) | 2017-12-12 |
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