JP2015527941A5 - - Google Patents

Download PDF

Info

Publication number
JP2015527941A5
JP2015527941A5 JP2015525527A JP2015525527A JP2015527941A5 JP 2015527941 A5 JP2015527941 A5 JP 2015527941A5 JP 2015525527 A JP2015525527 A JP 2015525527A JP 2015525527 A JP2015525527 A JP 2015525527A JP 2015527941 A5 JP2015527941 A5 JP 2015527941A5
Authority
JP
Japan
Prior art keywords
inorganic particles
ceramic element
major surface
binder
mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015525527A
Other languages
English (en)
Japanese (ja)
Other versions
JP6474346B2 (ja
JP2015527941A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2013/052817 external-priority patent/WO2014022453A1/en
Publication of JP2015527941A publication Critical patent/JP2015527941A/ja
Publication of JP2015527941A5 publication Critical patent/JP2015527941A5/ja
Application granted granted Critical
Publication of JP6474346B2 publication Critical patent/JP6474346B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015525527A 2012-08-02 2013-07-31 精密に成形された形成部を有する研磨要素前駆体及びその作製方法 Active JP6474346B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261678661P 2012-08-02 2012-08-02
US61/678,661 2012-08-02
PCT/US2013/052817 WO2014022453A1 (en) 2012-08-02 2013-07-31 Abrasive element precursor with precisely shaped features and method of making thereof

Publications (3)

Publication Number Publication Date
JP2015527941A JP2015527941A (ja) 2015-09-24
JP2015527941A5 true JP2015527941A5 (enExample) 2016-09-15
JP6474346B2 JP6474346B2 (ja) 2019-02-27

Family

ID=50028486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015525527A Active JP6474346B2 (ja) 2012-08-02 2013-07-31 精密に成形された形成部を有する研磨要素前駆体及びその作製方法

Country Status (8)

Country Link
US (1) US9956664B2 (enExample)
EP (1) EP2879837B1 (enExample)
JP (1) JP6474346B2 (enExample)
KR (1) KR102089382B1 (enExample)
CN (2) CN104918751B (enExample)
SG (1) SG11201500800XA (enExample)
TW (1) TWI643707B (enExample)
WO (1) WO2014022453A1 (enExample)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2658680B1 (en) 2010-12-31 2020-12-09 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles comprising abrasive particles having particular shapes and methods of forming such articles
EP2726248B1 (en) 2011-06-30 2019-06-19 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
CN103702800B (zh) 2011-06-30 2017-11-10 圣戈本陶瓷及塑料股份有限公司 包括氮化硅磨粒的磨料制品
WO2013049239A1 (en) 2011-09-26 2013-04-04 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming
PL2797716T3 (pl) 2011-12-30 2021-07-05 Saint-Gobain Ceramics & Plastics, Inc. Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania
KR20170018102A (ko) 2011-12-30 2017-02-15 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성방법
US8840696B2 (en) 2012-01-10 2014-09-23 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
EP3705177A1 (en) 2012-01-10 2020-09-09 Saint-Gobain Ceramics & Plastics Inc. Abrasive particles having complex shapes and methods of forming same
US9242346B2 (en) 2012-03-30 2016-01-26 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
KR102197361B1 (ko) 2012-05-23 2021-01-05 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자들 및 이의 형성방법
BR112014032152B1 (pt) 2012-06-29 2022-09-20 Saint-Gobain Ceramics & Plastics, Inc Partículas abrasivas tendo formatos particulares e artigos abrasivos
CN104736299A (zh) 2012-08-02 2015-06-24 3M创新有限公司 具有精确成形特征部的研磨制品及其制造方法
FI2906392T3 (fi) 2012-10-15 2025-06-20 Saint Gobain Abrasives Inc Hiomahiukkasia, joilla on erityisiä muotoja, ja menetelmiä tällaisten hiukkasten muodostamiseksi
US9074119B2 (en) 2012-12-31 2015-07-07 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
CN105073343B (zh) 2013-03-29 2017-11-03 圣戈班磨料磨具有限公司 具有特定形状的磨粒、形成这种粒子的方法及其用途
CN105228820B (zh) 2013-05-17 2017-08-29 3M创新有限公司 反应混合物、多孔粒子以及制备方法
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
RU2643004C2 (ru) 2013-09-30 2018-01-29 Сен-Гобен Серэмикс Энд Пластикс, Инк. Формованные абразивные частицы и способы их получения
MX380754B (es) 2013-12-31 2025-03-12 Saint Gobain Abrasives Inc Artículo abrasivo que incluye partículas abrasivas perfiladas.
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
US9803119B2 (en) 2014-04-14 2017-10-31 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
BR112016023838A2 (pt) 2014-04-14 2017-08-15 Saint Gobain Ceramics artigo abrasivo incluindo partículas abrasivas moldadas
US9902045B2 (en) 2014-05-30 2018-02-27 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
US20160144477A1 (en) * 2014-11-21 2016-05-26 Diane Scott Coated compressive subpad for chemical mechanical polishing
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
CN107636109A (zh) 2015-03-31 2018-01-26 圣戈班磨料磨具有限公司 固定磨料制品和其形成方法
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
EP3307483B1 (en) 2015-06-11 2020-06-17 Saint-Gobain Ceramics&Plastics, Inc. Abrasive article including shaped abrasive particles
JP7458693B2 (ja) * 2015-06-25 2024-04-01 スリーエム イノベイティブ プロパティズ カンパニー ガラス質ボンド研磨物品及びその製造方法
WO2017197002A1 (en) 2016-05-10 2017-11-16 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles and methods of forming same
PL3455321T3 (pl) 2016-05-10 2022-12-12 Saint-Gobain Ceramics&Plastics, Inc. Sposób formowania cząstek ściernych
TWI621502B (zh) * 2016-08-18 2018-04-21 中國砂輪企業股份有限公司 Double chemical mechanical polishing trimming system and method thereof
US11230653B2 (en) 2016-09-29 2022-01-25 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
KR102581481B1 (ko) 2016-10-18 2023-09-21 삼성전자주식회사 화학적 기계적 연마 방법, 반도체 소자의 제조 방법, 및 반도체 제조 장치
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
WO2018236989A1 (en) 2017-06-21 2018-12-27 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
US20190351527A1 (en) * 2018-05-17 2019-11-21 Entegris, Inc. Conditioner for chemical-mechanical-planarization pad and related methods
US11331767B2 (en) 2019-02-01 2022-05-17 Micron Technology, Inc. Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods
EP3924146A4 (en) 2019-02-13 2022-11-09 3M Innovative Properties Company ABRASIVES WITH PRECISELY SHAPED FEATURES, ABRASIVES MADE THEREOF AND PROCESSES FOR THEIR MANUFACTURE
WO2020242110A1 (ko) * 2019-05-29 2020-12-03 한국생산기술연구원 연마면에 형성된 패턴 구조를 갖는 연마 패드, 이를 포함하는 연마 장치 및 연마 패드의 제조 방법
KR102765343B1 (ko) 2019-12-27 2025-02-13 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. 연마 물품 및 이의 형성 방법
US12129422B2 (en) 2019-12-27 2024-10-29 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
CN114845838B (zh) 2019-12-27 2024-10-25 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
CA3241421A1 (en) 2021-12-30 2023-07-06 Anthony MARTONE Abrasive articles and methods of forming same
EP4457054A4 (en) 2021-12-30 2026-01-14 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
WO2023130052A1 (en) 2021-12-30 2023-07-06 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
CN114213130A (zh) * 2022-01-24 2022-03-22 郑州嵩山硼业科技有限公司 一种碳化硼微晶磨料体的制备方法
CN114292109A (zh) * 2022-01-25 2022-04-08 郑州嵩山硼业科技有限公司 一种碳化硅微晶磨料体的制备方法
CN115229670B (zh) * 2022-05-25 2024-10-29 广东金鉴实验室科技有限公司 一种用于led失效检测的研磨件
CN118024154A (zh) 2022-11-04 2024-05-14 圣戈班磨料磨具有限公司 具有低润湿性粘合材料的固结磨具

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3765300A (en) * 1967-05-22 1973-10-16 Carborundum Co Dense carbide composite for armor and abrasives
NL8403179A (nl) * 1984-10-18 1986-05-16 Philips Nv Werkwijze voor de vervaardiging van een optische vezel voorzien van een kunststofbedekking en optische vezel met kunststofbedekking vervaardigd volgens de werkwijze.
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
JPH05177550A (ja) * 1991-12-26 1993-07-20 I N R Kenkyusho:Kk 研削砥石
JP2642573B2 (ja) * 1991-12-27 1997-08-20 日本碍子株式会社 ＳｉＣ質焼結体
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
DE69419764T2 (de) 1993-09-13 1999-12-23 Minnesota Mining And Mfg. Co., St. Paul Schleifartikel, verfahren zur herstellung desselben, verfahren zur verwendung desselben zum endbearbeiten, und herstellungswerkzeug
US5453312A (en) * 1993-10-29 1995-09-26 Minnesota Mining And Manufacturing Company Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface
JP3261687B2 (ja) 1994-06-09 2002-03-04 日本電信電話株式会社 パッドコンディショナー及びその製造方法
US5692950A (en) 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
US6021559A (en) 1996-11-01 2000-02-08 3M Innovative Properties Company Methods of making a cube corner article master mold
US6368198B1 (en) 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US6364749B1 (en) 1999-09-02 2002-04-02 Micron Technology, Inc. CMP polishing pad with hydrophilic surfaces for enhanced wetting
TW467802B (en) 1999-10-12 2001-12-11 Hunatech Co Ltd Conditioner for polishing pad and method for manufacturing the same
US6632127B1 (en) 2001-03-07 2003-10-14 Jerry W. Zimmer Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same
JP2003103464A (ja) 2001-09-28 2003-04-08 Mitsubishi Materials Corp ダイヤモンドコーティングドレッサー
US6642127B2 (en) 2001-10-19 2003-11-04 Applied Materials, Inc. Method for dicing a semiconductor wafer
US20030109204A1 (en) 2001-12-06 2003-06-12 Kinik Company Fixed abrasive CMP pad dresser and associated methods
JP2004001152A (ja) 2002-06-03 2004-01-08 Tokyo Seimitsu Co Ltd ドレッサ、ドレッシング方法、研磨装置、及び研磨方法
KR20050092743A (ko) 2003-01-15 2005-09-22 미츠비시 마테리알 가부시키가이샤 연질재 가공용 절삭 공구
US7089081B2 (en) 2003-01-31 2006-08-08 3M Innovative Properties Company Modeling an abrasive process to achieve controlled material removal
US20050025973A1 (en) 2003-07-25 2005-02-03 Slutz David E. CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
US8398466B2 (en) 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8622787B2 (en) 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
TW200726582A (en) 2005-10-04 2007-07-16 Mitsubishi Materials Corp Rotary tool for processing flexible materials
JP4624293B2 (ja) 2006-03-31 2011-02-02 株式会社ノリタケスーパーアブレーシブ Ｃｍｐパッドコンディショナー
US7410413B2 (en) * 2006-04-27 2008-08-12 3M Innovative Properties Company Structured abrasive article and method of making and using the same
US20080153398A1 (en) 2006-11-16 2008-06-26 Chien-Min Sung Cmp pad conditioners and associated methods
US8083820B2 (en) * 2006-12-22 2011-12-27 3M Innovative Properties Company Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same
US20080233845A1 (en) * 2007-03-21 2008-09-25 3M Innovative Properties Company Abrasive articles, rotationally reciprocating tools, and methods
KR20090013369A (ko) 2007-08-01 2009-02-05 주식회사 세라코리 연마입자 탈락이 방지되는 연마재
WO2009043058A2 (en) 2007-09-28 2009-04-02 Chien-Min Sung Cmp pad conditioners with mosaic abrasive segments and associated methods
US8393938B2 (en) 2007-11-13 2013-03-12 Chien-Min Sung CMP pad dressers
US20090123795A1 (en) 2007-11-13 2009-05-14 Chuah P E Christopher J Condensate drainage subsystem for an electrochemical cell system
WO2009064345A2 (en) 2007-11-14 2009-05-22 Saint-Gobain Abrasives, Inc. A chemical mechanical planarization pad conditioner and methods of forming thereof
US8080073B2 (en) 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
WO2009114413A1 (en) 2008-03-10 2009-09-17 Morgan Advanced Ceramics, Inc. Non-planar cvd diamond-coated cmp pad conditioner and method for manufacturing
KR100887979B1 (ko) 2008-03-28 2009-03-09 주식회사 세라코리 연마패드용 컨디셔닝 디스크
KR101020870B1 (ko) 2008-09-22 2011-03-09 프리시젼다이아몬드 주식회사 다이아몬드 막이 코팅된 ｃｍｐ 컨디셔너 및 그 제조방법
EP2174751B1 (de) * 2008-10-10 2014-07-23 Center for Abrasives and Refractories Research & Development C.A.R.R.D. GmbH Schleifkornagglomerate, Verfahren zu ihrer Herstellung sowie ihre Verwendung zur Herstellung von Schleifmitteln
JP2010125567A (ja) * 2008-11-28 2010-06-10 Mitsubishi Materials Corp Ｃｍｐパッドコンディショナー
WO2010063647A1 (en) * 2008-12-03 2010-06-10 Struers A/S Abrasive disc
US8764865B2 (en) 2008-12-17 2014-07-01 3M Innovative Properties Company Shaped abrasive particles with grooves
JP2010221386A (ja) 2009-03-25 2010-10-07 Mitsubishi Materials Corp 基材被覆膜、基材被覆膜の製造方法およびｃｍｐパッドコンディショナー
US8801497B2 (en) 2009-04-30 2014-08-12 Rdc Holdings, Llc Array of abrasive members with resilient support
CA2764358A1 (en) 2009-06-02 2010-12-09 Saint-Gobain Abrasives, Inc. Corrosion-resistant cmp conditioning tools and methods for making and using same
SG178605A1 (en) 2009-09-01 2012-04-27 Saint Gobain Abrasives Inc Chemical mechanical polishing conditioner
JP2011161584A (ja) 2010-02-12 2011-08-25 Shingijutsu Kaihatsu Kk 研磨工具
KR101091030B1 (ko) 2010-04-08 2011-12-09 이화다이아몬드공업 주식회사 감소된 마찰력을 갖는 패드 컨디셔너 제조방법
US20120171935A1 (en) 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
CN115625629A (zh) 2012-08-02 2023-01-20 3M创新有限公司 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法
CN104736299A (zh) 2012-08-02 2015-06-24 3M创新有限公司 具有精确成形特征部的研磨制品及其制造方法

Similar Documents

Publication Publication Date Title
JP2015527941A5 (enExample)
JP2013545840A5 (enExample)
JP2016521235A5 (enExample)
WO2013009484A3 (en) Method of making ceramic shaped abrasive particles, sol-gel composition, and ceramic shaped abrasive particles
JP2013525130A5 (enExample)
JP2015530265A5 (enExample)
PL3659547T3 (pl) Sposób i zastosowanie gęstwy do wytwarzania form ceramicznych z tlenku cyrkonu w procesie druku 3D technologią atramentową
MY191292A (en) Sinterable feedstock for use in 3d printing devices
JP2014528846A5 (enExample)
WO2014094721A3 (de) Formstoffmischungen enthaltend metalloxide des aluminiums und zirkoniums in partikulärer form
JP2014526977A5 (enExample)
JP2012106925A5 (enExample)
JP2012512045A5 (enExample)
JP2015226935A5 (enExample)
CN104692803B (zh) 耐磨复合材料预制体的制备方法
JP2017501033A5 (enExample)
CN104045360B (zh) 一种精密陶瓷饰品的成型加工方法
JP2015067473A5 (enExample)
JP2010254558A5 (enExample)
JP2015525289A5 (enExample)
JP2013512172A5 (enExample)
JP2016526521A5 (enExample)
CN103397238A (zh) 一种硬质合金拉刀
PL3620244T3 (pl) Sposób wytwarzania cząsteczkowej kompozycji ogniotrwałej do zastosowania w produkcji form i rdzeni odlewniczych, odpowiednie zastosowania oraz mieszanina regeneracyjna do obróbki cieplnej
RU2014114620A (ru) Способ получения абразивного тела (варианты)