JP2015527941A5 - - Google Patents
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- Publication number
- JP2015527941A5 JP2015527941A5 JP2015525527A JP2015525527A JP2015527941A5 JP 2015527941 A5 JP2015527941 A5 JP 2015527941A5 JP 2015525527 A JP2015525527 A JP 2015525527A JP 2015525527 A JP2015525527 A JP 2015525527A JP 2015527941 A5 JP2015527941 A5 JP 2015527941A5
- Authority
- JP
- Japan
- Prior art keywords
- inorganic particles
- ceramic element
- major surface
- binder
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims 15
- 239000010954 inorganic particle Substances 0.000 claims 11
- 239000002243 precursor Substances 0.000 claims 7
- 239000011230 binding agent Substances 0.000 claims 6
- 239000000203 mixture Substances 0.000 claims 6
- 238000005498 polishing Methods 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 238000005245 sintering Methods 0.000 claims 2
- 229910052580 B4C Inorganic materials 0.000 claims 1
- 229910026551 ZrC Inorganic materials 0.000 claims 1
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 claims 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261678661P | 2012-08-02 | 2012-08-02 | |
| US61/678,661 | 2012-08-02 | ||
| PCT/US2013/052817 WO2014022453A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive element precursor with precisely shaped features and method of making thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015527941A JP2015527941A (ja) | 2015-09-24 |
| JP2015527941A5 true JP2015527941A5 (enExample) | 2016-09-15 |
| JP6474346B2 JP6474346B2 (ja) | 2019-02-27 |
Family
ID=50028486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015525527A Active JP6474346B2 (ja) | 2012-08-02 | 2013-07-31 | 精密に成形された形成部を有する研磨要素前駆体及びその作製方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9956664B2 (enExample) |
| EP (1) | EP2879837B1 (enExample) |
| JP (1) | JP6474346B2 (enExample) |
| KR (1) | KR102089382B1 (enExample) |
| CN (2) | CN104918751B (enExample) |
| SG (1) | SG11201500800XA (enExample) |
| TW (1) | TWI643707B (enExample) |
| WO (1) | WO2014022453A1 (enExample) |
Families Citing this family (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103370174B (zh) | 2010-12-31 | 2017-03-29 | 圣戈本陶瓷及塑料股份有限公司 | 具有特定形状的研磨颗粒和此类颗粒的形成方法 |
| WO2013003831A2 (en) | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| US8986409B2 (en) | 2011-06-30 | 2015-03-24 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particles of silicon nitride |
| BR112014007089A2 (pt) | 2011-09-26 | 2017-03-28 | Saint-Gobain Ceram & Plastics Inc | artigos abrasivos incluindo materiais de partículas abrasivas, abrasivos revestidos usando os materiais de partículas abrasivas e os métodos de formação |
| KR102187425B1 (ko) | 2011-12-30 | 2020-12-09 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
| JP5903502B2 (ja) | 2011-12-30 | 2016-04-13 | サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド | 成形研磨粒子を備える粒子材料 |
| JP5966019B2 (ja) | 2012-01-10 | 2016-08-10 | サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド | 複雑形状を有する研磨粒子およびその形成方法 |
| US8840696B2 (en) | 2012-01-10 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| US9242346B2 (en) | 2012-03-30 | 2016-01-26 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| EP4302955A3 (en) | 2012-05-23 | 2024-04-17 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
| BR112014032152B1 (pt) | 2012-06-29 | 2022-09-20 | Saint-Gobain Ceramics & Plastics, Inc | Partículas abrasivas tendo formatos particulares e artigos abrasivos |
| SG11201500802TA (en) | 2012-08-02 | 2015-04-29 | 3M Innovative Properties Co | Abrasive articles with precisely shaped features and method of making thereof |
| BR112015008144B1 (pt) | 2012-10-15 | 2022-01-04 | Saint-Gobain Abrasives, Inc. | Partículas abrasivas tendo formatos particulares e métodos para a formação de tais partículas |
| KR101818946B1 (ko) | 2012-12-31 | 2018-01-17 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 미립자 소재 및 이의 형성방법 |
| WO2014161001A1 (en) | 2013-03-29 | 2014-10-02 | Saint-Gobain Abrasives, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| CN105228820B (zh) | 2013-05-17 | 2017-08-29 | 3M创新有限公司 | 反应混合物、多孔粒子以及制备方法 |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| JP2016538149A (ja) | 2013-09-30 | 2016-12-08 | サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド | 形状化研磨粒子及び形状化研磨粒子を形成する方法 |
| KR102081045B1 (ko) | 2013-12-31 | 2020-02-26 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 형상화 연마 입자들을 포함하는 연마 물품 |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| WO2015160855A1 (en) | 2014-04-14 | 2015-10-22 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2015160854A1 (en) | 2014-04-14 | 2015-10-22 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2015184355A1 (en) | 2014-05-30 | 2015-12-03 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US20160144477A1 (en) * | 2014-11-21 | 2016-05-26 | Diane Scott | Coated compressive subpad for chemical mechanical polishing |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| WO2016161157A1 (en) | 2015-03-31 | 2016-10-06 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| US10711171B2 (en) | 2015-06-11 | 2020-07-14 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2016210057A1 (en) * | 2015-06-25 | 2016-12-29 | 3M Innovative Properties Company | Vitreous bond abrasive articles and methods of making the same |
| CN109415615A (zh) | 2016-05-10 | 2019-03-01 | 圣戈本陶瓷及塑料股份有限公司 | 磨料颗粒及其形成方法 |
| CN109462993A (zh) | 2016-05-10 | 2019-03-12 | 圣戈本陶瓷及塑料股份有限公司 | 磨料颗粒及其形成方法 |
| TWI621502B (zh) * | 2016-08-18 | 2018-04-21 | 中國砂輪企業股份有限公司 | Double chemical mechanical polishing trimming system and method thereof |
| WO2018064642A1 (en) | 2016-09-29 | 2018-04-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| KR102581481B1 (ko) | 2016-10-18 | 2023-09-21 | 삼성전자주식회사 | 화학적 기계적 연마 방법, 반도체 소자의 제조 방법, 및 반도체 제조 장치 |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10865148B2 (en) | 2017-06-21 | 2020-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| US20190351527A1 (en) * | 2018-05-17 | 2019-11-21 | Entegris, Inc. | Conditioner for chemical-mechanical-planarization pad and related methods |
| US11331767B2 (en) | 2019-02-01 | 2022-05-17 | Micron Technology, Inc. | Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods |
| US12370649B2 (en) | 2019-02-13 | 2025-07-29 | 3M Innovative Properties Company | Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof |
| WO2020242110A1 (ko) * | 2019-05-29 | 2020-12-03 | 한국생산기술연구원 | 연마면에 형성된 패턴 구조를 갖는 연마 패드, 이를 포함하는 연마 장치 및 연마 패드의 제조 방법 |
| WO2021133888A1 (en) | 2019-12-27 | 2021-07-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| US12129422B2 (en) | 2019-12-27 | 2024-10-29 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| EP4081369A4 (en) | 2019-12-27 | 2024-04-10 | Saint-Gobain Ceramics & Plastics Inc. | Abrasive articles and methods of forming same |
| WO2023130053A1 (en) | 2021-12-30 | 2023-07-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| US12508688B2 (en) | 2021-12-30 | 2025-12-30 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| WO2023130051A1 (en) | 2021-12-30 | 2023-07-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| CN114213130A (zh) * | 2022-01-24 | 2022-03-22 | 郑州嵩山硼业科技有限公司 | 一种碳化硼微晶磨料体的制备方法 |
| CN114292109A (zh) * | 2022-01-25 | 2022-04-08 | 郑州嵩山硼业科技有限公司 | 一种碳化硅微晶磨料体的制备方法 |
| CN115229670B (zh) * | 2022-05-25 | 2024-10-29 | 广东金鉴实验室科技有限公司 | 一种用于led失效检测的研磨件 |
| CN118024154A (zh) | 2022-11-04 | 2024-05-14 | 圣戈班磨料磨具有限公司 | 具有低润湿性粘合材料的固结磨具 |
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-
2013
- 2013-07-31 SG SG11201500800XA patent/SG11201500800XA/en unknown
- 2013-07-31 EP EP13826485.8A patent/EP2879837B1/en active Active
- 2013-07-31 KR KR1020157004848A patent/KR102089382B1/ko active Active
- 2013-07-31 CN CN201380041096.XA patent/CN104918751B/zh active Active
- 2013-07-31 CN CN201810131892.7A patent/CN108177094B/zh active Active
- 2013-07-31 WO PCT/US2013/052817 patent/WO2014022453A1/en not_active Ceased
- 2013-07-31 JP JP2015525527A patent/JP6474346B2/ja active Active
- 2013-07-31 US US14/418,960 patent/US9956664B2/en active Active
- 2013-08-01 TW TW102127673A patent/TWI643707B/zh active