JP2015527941A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2015527941A5 JP2015527941A5 JP2015525527A JP2015525527A JP2015527941A5 JP 2015527941 A5 JP2015527941 A5 JP 2015527941A5 JP 2015525527 A JP2015525527 A JP 2015525527A JP 2015525527 A JP2015525527 A JP 2015525527A JP 2015527941 A5 JP2015527941 A5 JP 2015527941A5
- Authority
- JP
- Japan
- Prior art keywords
- inorganic particles
- ceramic element
- major surface
- binder
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims 15
- 239000010954 inorganic particle Substances 0.000 claims 11
- 239000002243 precursor Substances 0.000 claims 7
- 239000011230 binding agent Substances 0.000 claims 6
- 239000000203 mixture Substances 0.000 claims 6
- 238000005498 polishing Methods 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 238000005245 sintering Methods 0.000 claims 2
- 229910052580 B4C Inorganic materials 0.000 claims 1
- 229910026551 ZrC Inorganic materials 0.000 claims 1
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 claims 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261678661P | 2012-08-02 | 2012-08-02 | |
| US61/678,661 | 2012-08-02 | ||
| PCT/US2013/052817 WO2014022453A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive element precursor with precisely shaped features and method of making thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015527941A JP2015527941A (ja) | 2015-09-24 |
| JP2015527941A5 true JP2015527941A5 (enExample) | 2016-09-15 |
| JP6474346B2 JP6474346B2 (ja) | 2019-02-27 |
Family
ID=50028486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015525527A Active JP6474346B2 (ja) | 2012-08-02 | 2013-07-31 | 精密に成形された形成部を有する研磨要素前駆体及びその作製方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9956664B2 (enExample) |
| EP (1) | EP2879837B1 (enExample) |
| JP (1) | JP6474346B2 (enExample) |
| KR (1) | KR102089382B1 (enExample) |
| CN (2) | CN108177094B (enExample) |
| SG (1) | SG11201500800XA (enExample) |
| TW (1) | TWI643707B (enExample) |
| WO (1) | WO2014022453A1 (enExample) |
Families Citing this family (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8758461B2 (en) | 2010-12-31 | 2014-06-24 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| US8840694B2 (en) | 2011-06-30 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| CN103702800B (zh) | 2011-06-30 | 2017-11-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
| EP2760639B1 (en) | 2011-09-26 | 2021-01-13 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming |
| KR102074138B1 (ko) | 2011-12-30 | 2020-02-07 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
| EP3851248B1 (en) | 2011-12-30 | 2024-04-03 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| KR101667943B1 (ko) | 2012-01-10 | 2016-10-20 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 복잡한 형상들을 가지는 연마 입자들 및 이의 성형 방법들 |
| US9242346B2 (en) | 2012-03-30 | 2016-01-26 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| KR101813466B1 (ko) | 2012-05-23 | 2017-12-29 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자들 및 이의 형성방법 |
| US10106714B2 (en) | 2012-06-29 | 2018-10-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| SG11201500802TA (en) | 2012-08-02 | 2015-04-29 | 3M Innovative Properties Co | Abrasive articles with precisely shaped features and method of making thereof |
| FI2906392T3 (fi) | 2012-10-15 | 2025-06-20 | Saint Gobain Abrasives Inc | Hiomahiukkasia, joilla on erityisiä muotoja, ja menetelmiä tällaisten hiukkasten muodostamiseksi |
| KR101818946B1 (ko) | 2012-12-31 | 2018-01-17 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 미립자 소재 및 이의 형성방법 |
| CN107685296B (zh) | 2013-03-29 | 2020-03-06 | 圣戈班磨料磨具有限公司 | 具有特定形状的磨粒、形成这种粒子的方法及其用途 |
| JP6346662B2 (ja) | 2013-05-17 | 2018-06-20 | スリーエム イノベイティブ プロパティズ カンパニー | 反応混合物、多孔質粒子及び作製方法 |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| RU2643004C2 (ru) | 2013-09-30 | 2018-01-29 | Сен-Гобен Серэмикс Энд Пластикс, Инк. | Формованные абразивные частицы и способы их получения |
| MX380754B (es) | 2013-12-31 | 2025-03-12 | Saint Gobain Abrasives Inc | Artículo abrasivo que incluye partículas abrasivas perfiladas. |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| WO2015160855A1 (en) | 2014-04-14 | 2015-10-22 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| CA2945491C (en) | 2014-04-14 | 2023-03-14 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US20160144477A1 (en) * | 2014-11-21 | 2016-05-26 | Diane Scott | Coated compressive subpad for chemical mechanical polishing |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| EP3277459B1 (en) | 2015-03-31 | 2023-08-16 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| ES2819375T3 (es) | 2015-06-11 | 2021-04-15 | Saint Gobain Ceramics & Plastics Inc | Artículo abrasivo que incluye partículas abrasivas conformadas |
| WO2016210057A1 (en) * | 2015-06-25 | 2016-12-29 | 3M Innovative Properties Company | Vitreous bond abrasive articles and methods of making the same |
| EP3455320A4 (en) | 2016-05-10 | 2019-11-20 | Saint-Gobain Ceramics&Plastics, Inc. | GRINDING PARTICLES AND METHOD FOR FORMING THEREOF |
| KR102390844B1 (ko) | 2016-05-10 | 2022-04-26 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자 및 이의 형성 방법 |
| TWI621502B (zh) * | 2016-08-18 | 2018-04-21 | 中國砂輪企業股份有限公司 | Double chemical mechanical polishing trimming system and method thereof |
| EP3519134B1 (en) | 2016-09-29 | 2024-01-17 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| KR102581481B1 (ko) | 2016-10-18 | 2023-09-21 | 삼성전자주식회사 | 화학적 기계적 연마 방법, 반도체 소자의 제조 방법, 및 반도체 제조 장치 |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2018236989A1 (en) | 2017-06-21 | 2018-12-27 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| US20190351527A1 (en) * | 2018-05-17 | 2019-11-21 | Entegris, Inc. | Conditioner for chemical-mechanical-planarization pad and related methods |
| US11331767B2 (en) | 2019-02-01 | 2022-05-17 | Micron Technology, Inc. | Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods |
| CN113439010B (zh) * | 2019-02-13 | 2024-08-27 | 3M创新有限公司 | 具有精确成形特征部的磨料元件、用其制成的磨料制品及其制造方法 |
| WO2020242110A1 (ko) * | 2019-05-29 | 2020-12-03 | 한국생산기술연구원 | 연마면에 형성된 패턴 구조를 갖는 연마 패드, 이를 포함하는 연마 장치 및 연마 패드의 제조 방법 |
| CN114845838B (zh) | 2019-12-27 | 2024-10-25 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| KR102765343B1 (ko) | 2019-12-27 | 2025-02-13 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| EP4081609A4 (en) | 2019-12-27 | 2024-06-05 | Saint-Gobain Ceramics & Plastics Inc. | Abrasive articles and methods of forming same |
| JP2025500060A (ja) | 2021-12-30 | 2025-01-07 | サンーゴバン アブレイシブズ，インコーポレイティド | 研磨物品及びそれを形成する方法 |
| CN114213130A (zh) * | 2022-01-24 | 2022-03-22 | 郑州嵩山硼业科技有限公司 | 一种碳化硼微晶磨料体的制备方法 |
| CN114292109A (zh) * | 2022-01-25 | 2022-04-08 | 郑州嵩山硼业科技有限公司 | 一种碳化硅微晶磨料体的制备方法 |
| CN115229670B (zh) * | 2022-05-25 | 2024-10-29 | 广东金鉴实验室科技有限公司 | 一种用于led失效检测的研磨件 |
| CN118024154A (zh) | 2022-11-04 | 2024-05-14 | 圣戈班磨料磨具有限公司 | 具有低润湿性粘合材料的固结磨具 |
Family Cites Families (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3765300A (en) * | 1967-05-22 | 1973-10-16 | Carborundum Co | Dense carbide composite for armor and abrasives |
| NL8403179A (nl) * | 1984-10-18 | 1986-05-16 | Philips Nv | Werkwijze voor de vervaardiging van een optische vezel voorzien van een kunststofbedekking en optische vezel met kunststofbedekking vervaardigd volgens de werkwijze. |
| US5152917B1 (en) | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
| JPH05177550A (ja) * | 1991-12-26 | 1993-07-20 | I N R Kenkyusho:Kk | 研削砥石 |
| JP2642573B2 (ja) * | 1991-12-27 | 1997-08-20 | 日本碍子株式会社 | ＳｉＣ質焼結体 |
| US5435816A (en) | 1993-01-14 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| BR9407536A (pt) | 1993-09-13 | 1997-08-26 | Minnesota Mining & Mfg | Artigo abrasivo processos de fabricação e de refino de peça em trabalho corn o mesmo ferramenta de produção para fabricação do mesmo e processo de produção de matriz mestra para formação da mesma |
| US5453312A (en) * | 1993-10-29 | 1995-09-26 | Minnesota Mining And Manufacturing Company | Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface |
| JP3261687B2 (ja) | 1994-06-09 | 2002-03-04 | 日本電信電話株式会社 | パッドコンディショナー及びその製造方法 |
| US5692950A (en) | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| US6021559A (en) | 1996-11-01 | 2000-02-08 | 3M Innovative Properties Company | Methods of making a cube corner article master mold |
| US6368198B1 (en) | 1999-11-22 | 2002-04-09 | Kinik Company | Diamond grid CMP pad dresser |
| US6364749B1 (en) | 1999-09-02 | 2002-04-02 | Micron Technology, Inc. | CMP polishing pad with hydrophilic surfaces for enhanced wetting |
| TW467802B (en) | 1999-10-12 | 2001-12-11 | Hunatech Co Ltd | Conditioner for polishing pad and method for manufacturing the same |
| US6632127B1 (en) | 2001-03-07 | 2003-10-14 | Jerry W. Zimmer | Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same |
| JP2003103464A (ja) | 2001-09-28 | 2003-04-08 | Mitsubishi Materials Corp | ダイヤモンドコーティングドレッサー |
| US6642127B2 (en) | 2001-10-19 | 2003-11-04 | Applied Materials, Inc. | Method for dicing a semiconductor wafer |
| US20030109204A1 (en) | 2001-12-06 | 2003-06-12 | Kinik Company | Fixed abrasive CMP pad dresser and associated methods |
| JP2004001152A (ja) * | 2002-06-03 | 2004-01-08 | Tokyo Seimitsu Co Ltd | ドレッサ、ドレッシング方法、研磨装置、及び研磨方法 |
| KR20050092743A (ko) | 2003-01-15 | 2005-09-22 | 미츠비시 마테리알 가부시키가이샤 | 연질재 가공용 절삭 공구 |
| US7089081B2 (en) | 2003-01-31 | 2006-08-08 | 3M Innovative Properties Company | Modeling an abrasive process to achieve controlled material removal |
| US20050025973A1 (en) | 2003-07-25 | 2005-02-03 | Slutz David E. | CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same |
| US8398466B2 (en) | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
| US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| US8622787B2 (en) | 2006-11-16 | 2014-01-07 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| TW200726582A (en) | 2005-10-04 | 2007-07-16 | Mitsubishi Materials Corp | Rotary tool for processing flexible materials |
| JP4624293B2 (ja) * | 2006-03-31 | 2011-02-02 | 株式会社ノリタケスーパーアブレーシブ | Ｃｍｐパッドコンディショナー |
| US7410413B2 (en) * | 2006-04-27 | 2008-08-12 | 3M Innovative Properties Company | Structured abrasive article and method of making and using the same |
| US20080153398A1 (en) | 2006-11-16 | 2008-06-26 | Chien-Min Sung | Cmp pad conditioners and associated methods |
| US8083820B2 (en) * | 2006-12-22 | 2011-12-27 | 3M Innovative Properties Company | Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same |
| US20080233845A1 (en) | 2007-03-21 | 2008-09-25 | 3M Innovative Properties Company | Abrasive articles, rotationally reciprocating tools, and methods |
| KR20090013369A (ko) | 2007-08-01 | 2009-02-05 | 주식회사 세라코리 | 연마입자 탈락이 방지되는 연마재 |
| WO2009043058A2 (en) | 2007-09-28 | 2009-04-02 | Chien-Min Sung | Cmp pad conditioners with mosaic abrasive segments and associated methods |
| US20090123795A1 (en) | 2007-11-13 | 2009-05-14 | Chuah P E Christopher J | Condensate drainage subsystem for an electrochemical cell system |
| US8393938B2 (en) | 2007-11-13 | 2013-03-12 | Chien-Min Sung | CMP pad dressers |
| WO2009064345A2 (en) | 2007-11-14 | 2009-05-22 | Saint-Gobain Abrasives, Inc. | A chemical mechanical planarization pad conditioner and methods of forming thereof |
| US8080073B2 (en) | 2007-12-20 | 2011-12-20 | 3M Innovative Properties Company | Abrasive article having a plurality of precisely-shaped abrasive composites |
| JP2011514848A (ja) | 2008-03-10 | 2011-05-12 | モルガン アドバンスド セラミックス， インコーポレイテッド | 非平面のｃｖｄダイヤモンド被覆ｃｍｐパッドコンディショナーおよびその製造方法 |
| KR100887979B1 (ko) | 2008-03-28 | 2009-03-09 | 주식회사 세라코리 | 연마패드용 컨디셔닝 디스크 |
| KR101020870B1 (ko) | 2008-09-22 | 2011-03-09 | 프리시젼다이아몬드 주식회사 | 다이아몬드 막이 코팅된 ｃｍｐ 컨디셔너 및 그 제조방법 |
| PT2174751E (pt) * | 2008-10-10 | 2014-08-06 | Ct For Abrasives & Refractories Res & Dev Carrd Gmbh | Aglomerados de grãos abrasivos, processo para a sua preparação, bem como a sua utilização para a preparação de agentes abrasivos |
| JP2010125567A (ja) * | 2008-11-28 | 2010-06-10 | Mitsubishi Materials Corp | Ｃｍｐパッドコンディショナー |
| WO2010063647A1 (en) | 2008-12-03 | 2010-06-10 | Struers A/S | Abrasive disc |
| BRPI0922318B1 (pt) | 2008-12-17 | 2020-09-15 | 3M Innovative Properties Company | Partículas abrasivas moldadas com sulcos |
| JP2010221386A (ja) | 2009-03-25 | 2010-10-07 | Mitsubishi Materials Corp | 基材被覆膜、基材被覆膜の製造方法およびｃｍｐパッドコンディショナー |
| US8801497B2 (en) | 2009-04-30 | 2014-08-12 | Rdc Holdings, Llc | Array of abrasive members with resilient support |
| MY155563A (en) * | 2009-06-02 | 2015-10-30 | Saint Gobain Abrasives Inc | Corrosion-resistant cmp conditioning tools and methods for making and using same |
| EP2474025A2 (en) | 2009-09-01 | 2012-07-11 | Saint-Gobain Abrasives, Inc. | Chemical mechanical polishing conditioner |
| JP2011161584A (ja) | 2010-02-12 | 2011-08-25 | Shingijutsu Kaihatsu Kk | 研磨工具 |
| KR101091030B1 (ko) | 2010-04-08 | 2011-12-09 | 이화다이아몬드공업 주식회사 | 감소된 마찰력을 갖는 패드 컨디셔너 제조방법 |
| US20120171935A1 (en) | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
| SG11201500802TA (en) | 2012-08-02 | 2015-04-29 | 3M Innovative Properties Co | Abrasive articles with precisely shaped features and method of making thereof |
| US20150224625A1 (en) | 2012-08-02 | 2015-08-13 | 3M Innovative Properties Company | Abrasive Elements with Precisely Shaped Features, Abrasive Articles Fabricated Therefrom and Methods of Making Thereof |
-
2013
- 2013-07-31 CN CN201810131892.7A patent/CN108177094B/zh active Active
- 2013-07-31 JP JP2015525527A patent/JP6474346B2/ja active Active
- 2013-07-31 WO PCT/US2013/052817 patent/WO2014022453A1/en not_active Ceased
- 2013-07-31 US US14/418,960 patent/US9956664B2/en active Active
- 2013-07-31 SG SG11201500800XA patent/SG11201500800XA/en unknown
- 2013-07-31 EP EP13826485.8A patent/EP2879837B1/en active Active
- 2013-07-31 CN CN201380041096.XA patent/CN104918751B/zh active Active
- 2013-07-31 KR KR1020157004848A patent/KR102089382B1/ko active Active
- 2013-08-01 TW TW102127673A patent/TWI643707B/zh active