JP2015527941A5 - - Google Patents

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Publication number
JP2015527941A5
JP2015527941A5 JP2015525527A JP2015525527A JP2015527941A5 JP 2015527941 A5 JP2015527941 A5 JP 2015527941A5 JP 2015525527 A JP2015525527 A JP 2015525527A JP 2015525527 A JP2015525527 A JP 2015525527A JP 2015527941 A5 JP2015527941 A5 JP 2015527941A5
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inorganic particles
ceramic element
major surface
binder
mixture
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JP2015525527A
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Japanese (ja)
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JP6474346B2 (ja
JP2015527941A (ja
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Priority claimed from PCT/US2013/052817 external-priority patent/WO2014022453A1/en
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JP2015525527A 2012-08-02 2013-07-31 精密に成形された形成部を有する研磨要素前駆体及びその作製方法 Active JP6474346B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261678661P 2012-08-02 2012-08-02
US61/678,661 2012-08-02
PCT/US2013/052817 WO2014022453A1 (en) 2012-08-02 2013-07-31 Abrasive element precursor with precisely shaped features and method of making thereof

Publications (3)

Publication Number Publication Date
JP2015527941A JP2015527941A (ja) 2015-09-24
JP2015527941A5 true JP2015527941A5 (enExample) 2016-09-15
JP6474346B2 JP6474346B2 (ja) 2019-02-27

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JP2015525527A Active JP6474346B2 (ja) 2012-08-02 2013-07-31 精密に成形された形成部を有する研磨要素前駆体及びその作製方法

Country Status (8)

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US (1) US9956664B2 (enExample)
EP (1) EP2879837B1 (enExample)
JP (1) JP6474346B2 (enExample)
KR (1) KR102089382B1 (enExample)
CN (2) CN104918751B (enExample)
SG (1) SG11201500800XA (enExample)
TW (1) TWI643707B (enExample)
WO (1) WO2014022453A1 (enExample)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2658680B1 (en) 2010-12-31 2020-12-09 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles comprising abrasive particles having particular shapes and methods of forming such articles
WO2013003831A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
WO2013003830A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particles of silicon nitride
US9517546B2 (en) 2011-09-26 2016-12-13 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming
PL2797716T3 (pl) 2011-12-30 2021-07-05 Saint-Gobain Ceramics & Plastics, Inc. Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania
KR102074138B1 (ko) 2011-12-30 2020-02-07 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성방법
EP2802436B1 (en) 2012-01-10 2019-09-25 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having complex shapes
US8840696B2 (en) 2012-01-10 2014-09-23 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2013149209A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
KR101813466B1 (ko) 2012-05-23 2017-12-29 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자들 및 이의 형성방법
WO2014005120A1 (en) 2012-06-29 2014-01-03 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
US10710211B2 (en) 2012-08-02 2020-07-14 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
EP2906392B1 (en) 2012-10-15 2025-04-16 Saint-Gobain Abrasives, Inc. Abrasive particles having particular shapes and methods of forming such particles
CN104994995B (zh) 2012-12-31 2018-12-14 圣戈本陶瓷及塑料股份有限公司 颗粒材料及其形成方法
WO2014161001A1 (en) 2013-03-29 2014-10-02 Saint-Gobain Abrasives, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2014186328A1 (en) 2013-05-17 2014-11-20 3M Innovative Properties Company Reaction mixture, porous particles and methods of making
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
CN111978921A (zh) 2013-09-30 2020-11-24 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
KR102081045B1 (ko) 2013-12-31 2020-02-26 생-고뱅 어브레이시브즈, 인코포레이티드 형상화 연마 입자들을 포함하는 연마 물품
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
AU2015247826A1 (en) 2014-04-14 2016-11-10 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
AU2015247739B2 (en) 2014-04-14 2017-10-26 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
WO2015184355A1 (en) 2014-05-30 2015-12-03 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
US20160144477A1 (en) * 2014-11-21 2016-05-26 Diane Scott Coated compressive subpad for chemical mechanical polishing
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
US10196551B2 (en) 2015-03-31 2019-02-05 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
EP3307483B1 (en) 2015-06-11 2020-06-17 Saint-Gobain Ceramics&Plastics, Inc. Abrasive article including shaped abrasive particles
CN107787264B (zh) * 2015-06-25 2020-10-13 3M创新有限公司 玻璃状粘结磨料制品及其制造方法
EP4071224A3 (en) 2016-05-10 2023-01-04 Saint-Gobain Ceramics and Plastics, Inc. Methods of forming abrasive articles
KR102313436B1 (ko) 2016-05-10 2021-10-19 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자들 및 그 형성 방법
TWI621502B (zh) * 2016-08-18 2018-04-21 中國砂輪企業股份有限公司 Double chemical mechanical polishing trimming system and method thereof
EP4349896A3 (en) 2016-09-29 2024-06-12 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
KR102581481B1 (ko) 2016-10-18 2023-09-21 삼성전자주식회사 화학적 기계적 연마 방법, 반도체 소자의 제조 방법, 및 반도체 제조 장치
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN110719946B (zh) 2017-06-21 2022-07-15 圣戈本陶瓷及塑料股份有限公司 颗粒材料及其形成方法
US20190351527A1 (en) * 2018-05-17 2019-11-21 Entegris, Inc. Conditioner for chemical-mechanical-planarization pad and related methods
US11331767B2 (en) 2019-02-01 2022-05-17 Micron Technology, Inc. Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods
JP7645802B2 (ja) * 2019-02-13 2025-03-14 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された特徴部を有する研磨要素、同研磨要素から製造された研磨物品、及び同研磨物品の製造方法
WO2020242110A1 (ko) * 2019-05-29 2020-12-03 한국생산기술연구원 연마면에 형성된 패턴 구조를 갖는 연마 패드, 이를 포함하는 연마 장치 및 연마 패드의 제조 방법
US11926019B2 (en) 2019-12-27 2024-03-12 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
WO2021133876A1 (en) 2019-12-27 2021-07-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
EP4081370A4 (en) 2019-12-27 2024-04-24 Saint-Gobain Ceramics & Plastics Inc. ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
MX2024007593A (es) 2021-12-30 2024-08-20 Saint Gobain Abrasives Inc Artículos abrasivos y métodos de formación de los mismos.
EP4457054A4 (en) 2021-12-30 2026-01-14 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CN118591436A (zh) 2021-12-30 2024-09-03 圣戈班磨料磨具有限公司 磨料制品及其形成方法
CN114213130A (zh) * 2022-01-24 2022-03-22 郑州嵩山硼业科技有限公司 一种碳化硼微晶磨料体的制备方法
CN114292109A (zh) * 2022-01-25 2022-04-08 郑州嵩山硼业科技有限公司 一种碳化硅微晶磨料体的制备方法
CN115229670B (zh) * 2022-05-25 2024-10-29 广东金鉴实验室科技有限公司 一种用于led失效检测的研磨件
CN118024154A (zh) 2022-11-04 2024-05-14 圣戈班磨料磨具有限公司 具有低润湿性粘合材料的固结磨具

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3765300A (en) * 1967-05-22 1973-10-16 Carborundum Co Dense carbide composite for armor and abrasives
NL8403179A (nl) * 1984-10-18 1986-05-16 Philips Nv Werkwijze voor de vervaardiging van een optische vezel voorzien van een kunststofbedekking en optische vezel met kunststofbedekking vervaardigd volgens de werkwijze.
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
JPH05177550A (ja) * 1991-12-26 1993-07-20 I N R Kenkyusho:Kk 研削砥石
JP2642573B2 (ja) * 1991-12-27 1997-08-20 日本碍子株式会社 ＳｉＣ質焼結体
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
DE69419764T2 (de) 1993-09-13 1999-12-23 Minnesota Mining And Mfg. Co., St. Paul Schleifartikel, verfahren zur herstellung desselben, verfahren zur verwendung desselben zum endbearbeiten, und herstellungswerkzeug
US5453312A (en) * 1993-10-29 1995-09-26 Minnesota Mining And Manufacturing Company Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface
JP3261687B2 (ja) 1994-06-09 2002-03-04 日本電信電話株式会社 パッドコンディショナー及びその製造方法
US5692950A (en) 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
US6021559A (en) 1996-11-01 2000-02-08 3M Innovative Properties Company Methods of making a cube corner article master mold
US6368198B1 (en) 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US6364749B1 (en) 1999-09-02 2002-04-02 Micron Technology, Inc. CMP polishing pad with hydrophilic surfaces for enhanced wetting
US6439986B1 (en) 1999-10-12 2002-08-27 Hunatech Co., Ltd. Conditioner for polishing pad and method for manufacturing the same
US6632127B1 (en) 2001-03-07 2003-10-14 Jerry W. Zimmer Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same
JP2003103464A (ja) 2001-09-28 2003-04-08 Mitsubishi Materials Corp ダイヤモンドコーティングドレッサー
US6642127B2 (en) 2001-10-19 2003-11-04 Applied Materials, Inc. Method for dicing a semiconductor wafer
US20030109204A1 (en) 2001-12-06 2003-06-12 Kinik Company Fixed abrasive CMP pad dresser and associated methods
JP2004001152A (ja) 2002-06-03 2004-01-08 Tokyo Seimitsu Co Ltd ドレッサ、ドレッシング方法、研磨装置、及び研磨方法
US20060130627A1 (en) 2003-01-15 2006-06-22 Mitsubishi Materials Corporation Cutting tool for soft material
US7089081B2 (en) 2003-01-31 2006-08-08 3M Innovative Properties Company Modeling an abrasive process to achieve controlled material removal
US20050025973A1 (en) 2003-07-25 2005-02-03 Slutz David E. CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8622787B2 (en) 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8398466B2 (en) 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
TW200726582A (en) 2005-10-04 2007-07-16 Mitsubishi Materials Corp Rotary tool for processing flexible materials
JP4624293B2 (ja) 2006-03-31 2011-02-02 株式会社ノリタケスーパーアブレーシブ Ｃｍｐパッドコンディショナー
US7410413B2 (en) * 2006-04-27 2008-08-12 3M Innovative Properties Company Structured abrasive article and method of making and using the same
US20080153398A1 (en) 2006-11-16 2008-06-26 Chien-Min Sung Cmp pad conditioners and associated methods
US8083820B2 (en) * 2006-12-22 2011-12-27 3M Innovative Properties Company Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same
US20080233845A1 (en) * 2007-03-21 2008-09-25 3M Innovative Properties Company Abrasive articles, rotationally reciprocating tools, and methods
KR20090013369A (ko) 2007-08-01 2009-02-05 주식회사 세라코리 연마입자 탈락이 방지되는 연마재
KR20100087297A (ko) 2007-09-28 2010-08-04 치엔 민 성 모자이크 연마 세그먼트를 포함한 ｃｍｐ 패드 컨디셔너 및 해당 방법
KR20100106328A (ko) 2007-11-13 2010-10-01 치엔 민 성 Ｃｍｐ 패드 드레서
US20090123795A1 (en) 2007-11-13 2009-05-14 Chuah P E Christopher J Condensate drainage subsystem for an electrochemical cell system
WO2009064345A2 (en) 2007-11-14 2009-05-22 Saint-Gobain Abrasives, Inc. A chemical mechanical planarization pad conditioner and methods of forming thereof
US8080073B2 (en) 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
US20090224370A1 (en) 2008-03-10 2009-09-10 Slutz David E Non-planar cvd diamond-coated cmp pad conditioner and method for manufacturing
KR100887979B1 (ko) 2008-03-28 2009-03-09 주식회사 세라코리 연마패드용 컨디셔닝 디스크
KR101020870B1 (ko) 2008-09-22 2011-03-09 프리시젼다이아몬드 주식회사 다이아몬드 막이 코팅된 ｃｍｐ 컨디셔너 및 그 제조방법
ES2509821T3 (es) * 2008-10-10 2014-10-20 Center For Abrasives And Refractories Research & Development C.A.R.R.D. Gmbh Aglomerados de granos abrasivos, procedimiento para su producción así como su uso para la producción de agentes abrasivos
JP2010125567A (ja) * 2008-11-28 2010-06-10 Mitsubishi Materials Corp Ｃｍｐパッドコンディショナー
WO2010063647A1 (en) * 2008-12-03 2010-06-10 Struers A/S Abrasive disc
CA3012625C (en) 2008-12-17 2020-07-07 3M Innovative Properties Company Shaped abrasive particles with grooves
JP2010221386A (ja) 2009-03-25 2010-10-07 Mitsubishi Materials Corp 基材被覆膜、基材被覆膜の製造方法およびｃｍｐパッドコンディショナー
US8801497B2 (en) 2009-04-30 2014-08-12 Rdc Holdings, Llc Array of abrasive members with resilient support
EP2438609A4 (en) 2009-06-02 2016-03-09 Saint Gobain Abrasives Inc CORROSION-RESISTANT CMP CONDITIONERS AND METHOD FOR THEIR PREPARATION AND USE
EP2474025A2 (en) 2009-09-01 2012-07-11 Saint-Gobain Abrasives, Inc. Chemical mechanical polishing conditioner
JP2011161584A (ja) 2010-02-12 2011-08-25 Shingijutsu Kaihatsu Kk 研磨工具
KR101091030B1 (ko) 2010-04-08 2011-12-09 이화다이아몬드공업 주식회사 감소된 마찰력을 갖는 패드 컨디셔너 제조방법
US20120171935A1 (en) 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
US10710211B2 (en) 2012-08-02 2020-07-14 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
KR20150039795A (ko) 2012-08-02 2015-04-13 쓰리엠 이노베이티브 프로퍼티즈 컴파니 정밀하게 형상화된 특징부를 갖는 연마 요소, 그로부터 제작되는 연마 물품, 및 그의 제조 방법

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