CN104918751B - 具有精确成形特征部的研磨元件前体及其制造方法 - Google Patents
具有精确成形特征部的研磨元件前体及其制造方法 Download PDFInfo
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- CN104918751B CN104918751B CN201380041096.XA CN201380041096A CN104918751B CN 104918751 B CN104918751 B CN 104918751B CN 201380041096 A CN201380041096 A CN 201380041096A CN 104918751 B CN104918751 B CN 104918751B
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- Prior art keywords
- abrasive
- mixture
- inorganic particles
- ceramic
- binder
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B24B37/245—Pads with fixed abrasives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B7/00—Moulds; Cores; Mandrels
- B28B7/0064—Moulds characterised by special surfaces for producing a desired surface of a moulded article, e.g. profiled or polished moulding surfaces
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
- C04B35/634—Polymers
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3821—Boron carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/604—Pressing at temperatures other than sintering temperatures
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
- C04B2235/6587—Influencing the atmosphere by vaporising a solid material, e.g. by using a burying of sacrificial powder
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/94—Products characterised by their shape
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810131892.7A CN108177094B (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件前体及其制造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261678661P | 2012-08-02 | 2012-08-02 | |
| US61/678,661 | 2012-08-02 | ||
| PCT/US2013/052817 WO2014022453A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive element precursor with precisely shaped features and method of making thereof |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810131892.7A Division CN108177094B (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件前体及其制造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104918751A CN104918751A (zh) | 2015-09-16 |
| CN104918751B true CN104918751B (zh) | 2020-03-10 |
Family
ID=50028486
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380041096.XA Active CN104918751B (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件前体及其制造方法 |
| CN201810131892.7A Active CN108177094B (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件前体及其制造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810131892.7A Active CN108177094B (zh) | 2012-08-02 | 2013-07-31 | 具有精确成形特征部的研磨元件前体及其制造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9956664B2 (enExample) |
| EP (1) | EP2879837B1 (enExample) |
| JP (1) | JP6474346B2 (enExample) |
| KR (1) | KR102089382B1 (enExample) |
| CN (2) | CN104918751B (enExample) |
| SG (1) | SG11201500800XA (enExample) |
| TW (1) | TWI643707B (enExample) |
| WO (1) | WO2014022453A1 (enExample) |
Families Citing this family (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| PL2658680T3 (pl) | 2010-12-31 | 2021-05-31 | Saint-Gobain Ceramics & Plastics, Inc. | Wyroby ścierne zawierające cząstki ścierne o określonych kształtach i sposoby formowania takich wyrobów |
| CN103702800B (zh) | 2011-06-30 | 2017-11-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
| WO2013003831A2 (en) | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| JP5802336B2 (ja) | 2011-09-26 | 2015-10-28 | サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド | 研磨粒子材料を含む研磨製品、研磨粒子材料を使用する研磨布紙および形成方法 |
| CN104114327B (zh) | 2011-12-30 | 2018-06-05 | 圣戈本陶瓷及塑料股份有限公司 | 复合成型研磨颗粒及其形成方法 |
| CN109054745A (zh) | 2011-12-30 | 2018-12-21 | 圣戈本陶瓷及塑料股份有限公司 | 成形磨粒及其形成方法 |
| CA3056658C (en) | 2012-01-10 | 2023-07-04 | Doruk O. Yener | Abrasive particles having complex shapes and methods of forming same |
| WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| US9242346B2 (en) | 2012-03-30 | 2016-01-26 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| CN110013795A (zh) | 2012-05-23 | 2019-07-16 | 圣戈本陶瓷及塑料股份有限公司 | 成形磨粒及其形成方法 |
| BR112014032152B1 (pt) | 2012-06-29 | 2022-09-20 | Saint-Gobain Ceramics & Plastics, Inc | Partículas abrasivas tendo formatos particulares e artigos abrasivos |
| WO2014022465A1 (en) | 2012-08-02 | 2014-02-06 | 3M Innovative Properties Company | Abrasive articles with precisely shaped features and method of making thereof |
| US9440332B2 (en) | 2012-10-15 | 2016-09-13 | Saint-Gobain Abrasives, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| WO2014106173A1 (en) | 2012-12-31 | 2014-07-03 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| WO2014161001A1 (en) | 2013-03-29 | 2014-10-02 | Saint-Gobain Abrasives, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| KR102194648B1 (ko) | 2013-05-17 | 2020-12-23 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 반응 혼합물, 다공성 입자 및 제조 방법 |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| CA3114978A1 (en) | 2013-09-30 | 2015-04-02 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
| EP3089851B1 (en) | 2013-12-31 | 2019-02-06 | Saint-Gobain Abrasives, Inc. | Abrasive article including shaped abrasive particles |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| US9803119B2 (en) | 2014-04-14 | 2017-10-31 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10557067B2 (en) | 2014-04-14 | 2020-02-11 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US20160144477A1 (en) * | 2014-11-21 | 2016-05-26 | Diane Scott | Coated compressive subpad for chemical mechanical polishing |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| EP3277459B1 (en) | 2015-03-31 | 2023-08-16 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| CA3118262C (en) | 2015-06-11 | 2023-09-19 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| EP3313614B1 (en) * | 2015-06-25 | 2025-11-05 | 3M Innovative Properties Company | Methods of making vitreous bond abrasive articles |
| KR102422875B1 (ko) | 2016-05-10 | 2022-07-21 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자들 및 그 형성 방법 |
| CN118372187A (zh) | 2016-05-10 | 2024-07-23 | 圣戈本陶瓷及塑料股份有限公司 | 磨料颗粒及其形成方法 |
| TWI621502B (zh) * | 2016-08-18 | 2018-04-21 | 中國砂輪企業股份有限公司 | Double chemical mechanical polishing trimming system and method thereof |
| WO2018064642A1 (en) | 2016-09-29 | 2018-04-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| KR102581481B1 (ko) | 2016-10-18 | 2023-09-21 | 삼성전자주식회사 | 화학적 기계적 연마 방법, 반도체 소자의 제조 방법, 및 반도체 제조 장치 |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2018236989A1 (en) | 2017-06-21 | 2018-12-27 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| US20190351527A1 (en) * | 2018-05-17 | 2019-11-21 | Entegris, Inc. | Conditioner for chemical-mechanical-planarization pad and related methods |
| US11331767B2 (en) | 2019-02-01 | 2022-05-17 | Micron Technology, Inc. | Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods |
| EP3924146A4 (en) | 2019-02-13 | 2022-11-09 | 3M Innovative Properties Company | ABRASIVES WITH PRECISELY SHAPED FEATURES, ABRASIVES MADE THEREOF AND PROCESSES FOR THEIR MANUFACTURE |
| WO2020242110A1 (ko) * | 2019-05-29 | 2020-12-03 | 한국생산기술연구원 | 연마면에 형성된 패턴 구조를 갖는 연마 패드, 이를 포함하는 연마 장치 및 연마 패드의 제조 방법 |
| CN114846112A (zh) | 2019-12-27 | 2022-08-02 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| CN114867582B (zh) | 2019-12-27 | 2024-10-18 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| WO2021133888A1 (en) | 2019-12-27 | 2021-07-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| AU2022426850B2 (en) | 2021-12-30 | 2025-09-18 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| EP4457054A1 (en) | 2021-12-30 | 2024-11-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| CN114213130A (zh) * | 2022-01-24 | 2022-03-22 | 郑州嵩山硼业科技有限公司 | 一种碳化硼微晶磨料体的制备方法 |
| CN114292109A (zh) * | 2022-01-25 | 2022-04-08 | 郑州嵩山硼业科技有限公司 | 一种碳化硅微晶磨料体的制备方法 |
| CN115229670B (zh) * | 2022-05-25 | 2024-10-29 | 广东金鉴实验室科技有限公司 | 一种用于led失效检测的研磨件 |
| CN118024154A (zh) | 2022-11-04 | 2024-05-14 | 圣戈班磨料磨具有限公司 | 具有低润湿性粘合材料的固结磨具 |
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| US5549961A (en) * | 1993-10-29 | 1996-08-27 | Minnesota Mining And Manufacturing Company | Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface |
| US5692950A (en) * | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| US20090176443A1 (en) * | 2006-12-22 | 2009-07-09 | Kollodge Jeffrey S | Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same |
| WO2010063647A1 (en) * | 2008-12-03 | 2010-06-10 | Struers A/S | Abrasive disc |
| US20110183142A1 (en) * | 2008-10-10 | 2011-07-28 | Center For Abrasive And Refractories Research & Development C.A.R.R.D. Ghmbh | Abrasive grain agglomerates, process for the production thereof and the use thereof for producing abrasives |
| CN102484054A (zh) * | 2009-06-02 | 2012-05-30 | 圣戈班磨料磨具有限公司 | 耐腐蚀性cmp修整工件及其制造和使用方法 |
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|---|---|---|---|---|
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| NL8403179A (nl) * | 1984-10-18 | 1986-05-16 | Philips Nv | Werkwijze voor de vervaardiging van een optische vezel voorzien van een kunststofbedekking en optische vezel met kunststofbedekking vervaardigd volgens de werkwijze. |
| US5152917B1 (en) | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
| JPH05177550A (ja) * | 1991-12-26 | 1993-07-20 | I N R Kenkyusho:Kk | 研削砥石 |
| JP2642573B2 (ja) * | 1991-12-27 | 1997-08-20 | 日本碍子株式会社 | SiC質焼結体 |
| US5435816A (en) | 1993-01-14 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2014022453A1 (en) | 2014-02-06 |
| SG11201500800XA (en) | 2015-04-29 |
| CN108177094A (zh) | 2018-06-19 |
| EP2879837A4 (en) | 2016-05-25 |
| EP2879837A1 (en) | 2015-06-10 |
| US20150209933A1 (en) | 2015-07-30 |
| CN108177094B (zh) | 2021-01-15 |
| KR20150038332A (ko) | 2015-04-08 |
| CN104918751A (zh) | 2015-09-16 |
| KR102089382B1 (ko) | 2020-03-16 |
| US9956664B2 (en) | 2018-05-01 |
| TWI643707B (zh) | 2018-12-11 |
| JP2015527941A (ja) | 2015-09-24 |
| TW201410390A (zh) | 2014-03-16 |
| JP6474346B2 (ja) | 2019-02-27 |
| EP2879837B1 (en) | 2018-09-19 |
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