JP2001523768A - 有機薄膜の低圧蒸着 - Google Patents

有機薄膜の低圧蒸着

Info

Publication number
JP2001523768A
JP2001523768A JP2000521253A JP2000521253A JP2001523768A JP 2001523768 A JP2001523768 A JP 2001523768A JP 2000521253 A JP2000521253 A JP 2000521253A JP 2000521253 A JP2000521253 A JP 2000521253A JP 2001523768 A JP2001523768 A JP 2001523768A
Authority
JP
Japan
Prior art keywords
organic
reaction chamber
substrate
tube
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000521253A
Other languages
English (en)
Other versions
JP2001523768A5 (ja
Inventor
フォレスト、スチーブン、アール
バーロウズ、ポール
バン、ブラディミール、エス
Original Assignee
ザ、トラスティーズ オブ プリンストン ユニバーシティ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ザ、トラスティーズ オブ プリンストン ユニバーシティ filed Critical ザ、トラスティーズ オブ プリンストン ユニバーシティ
Publication of JP2001523768A publication Critical patent/JP2001523768A/ja
Publication of JP2001523768A5 publication Critical patent/JP2001523768A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30—Coordination compounds
    • H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
    • H10K85/324—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight
    • H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S261/00—Gas and liquid contact apparatus
    • Y10S261/65—Vaporizers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

(57)【要約】 基体５８上に有機薄膜を形成する方法であって、その方法は、複数の有機前駆物質（１４、４８）を気相で与え、前記複数の有機前駆物質（１４、４８）を減圧下で反応させる工程を有する。そのような方法により製造された薄膜及びそのような方法を実施するのに用いられる装置も含む。本方法は、有機発光デバイスの形成及び他のディスプレイ関連技術によく適している。

Description

【発明の詳細な説明】
【０００１】 （技術分野） 本発明は、光学的品質の薄膜を製造することに関し、特に非線形光学デバイス
及び有機発光デバイスで利用されるそのような薄膜の低圧製造に関する。
【０００２】 （背景技術） 有機エレクトロルミネッセンスの分野は、急速に成長しつつある技術分野であ
る。ディスプレイへの潜在的な用途に刺激されて、有機発光デバイス（ＯＬＥＤ
）は、３％を越える外部量子効率を達成し、ビデオ輝度で１０，０００時間の程
度の作動寿命を達成することができる。低分子とポリマーの両方をベースとする
ＯＬＥＤが知られているが、ポリマーベースのデバイスは回転蒸着法により簡単
で安価に製造できる一般的利点を有する。これに対し、低分子によるデバイスは
、通常真空中での熱的蒸発により製造されており、それは通常回転蒸着よりも高
価な方法である。ＯＬＥＤ構造及び処理方法の例は、公開されたＰＣＴ出願ＷＯ
９６／１９７９２（言及することによって本明細書に組み入れる）に与えられ
ている。
【０００３】 有機蒸着(organic vapor phase deposition)（ＯＶＰＤ）を使用することによ
り、ディスプレイ等の多くの潜在的光学的デバイス用途を持つ低分子量の有機層
の低コストで大規模な蒸着が進歩してきた。ＯＶＰＤ法はホレスト(Forrest)等 の米国特許第５，５５４，２２０号明細書、Ｓ．Ｒ．ホレスト等の「有機蒸着に
より成長させた有機塩薄膜の強力な二次調波発生及び長距離構造配列」(Intense
Second Harmonic Generation and Long-Range Structural Ordering in Thin F
ilms of an Organic Salt Grown by Organic Vapor Phase Deposition)、68 App
l. Phys. Lett., 1326 (1996）、及びＰ．Ｅ．バローズ(Burrows)等の「有機蒸 着：大きな光学的非線形性を持つ有機薄膜の新規な成長方法」(Organic Vapor P
hase Deposition: a New Method for the Growth of Organic Thin Films with
Large Optical Non-linearities)、156 J. of Crystal Growth 91 (1995)（それ
らは言及することによって本明細書に組み入れる）に記載されている。
【０００４】 ＯＶＰＤ法は原料物質を基体へ運ぶためにキャリヤガスを用い、この場合ガス
が凝縮して希望の薄膜を形成する。例えば、ＯＶＰＤ法を用いて、揮発性前駆物
質、沃化４′−ジメチルアミノ−Ｎ−メチル−４−スチルバゾリウム（ＤＡＳＩ
）及びメチルｐ−トルエンスルホネート（メチルトシレート、ＭＴ）をキャリヤ
ーガスにより加熱された基体へ運ぶことにより、光学的に非線形の有機（ＮＬＯ
）塩、４′−ジメチルアミノ−Ｎ−メチル−４−スチルバゾリウムトシレート（
ＤＡＳＩ）の膜を蒸着してきた。この方法ではＤＡＳＩが熱分解して４−ジメチ
ルアミノ−４−スチルバゾール（ＤＡＳ）を形成し、それが次にＭＴと反応して
基体上にＤＡＳＴを形成する。
【０００５】 著しく異なった蒸気圧を持つ材料を制御して同時蒸着することができるため、
ＯＶＰＤは多成分薄膜の正確な化学量論的成長を行うための唯一の方法であると
考えられている。しかし、ＯＶＰＤ法は大気圧で行われ、大気圧又はその近くで
成長する膜は屡々粗く、気相核生成及び拡散律速成長過程により不均一な表面形
態を有する。
【０００６】 （発明の開示） 本発明は、優れた表面特性を有する有機薄膜を製造するために低圧蒸着法を用
いる。一つの態様として、本発明は、基体上に有機薄膜を形成する方法において
、複数の有機前駆物質を与え、然も前記有機前駆物質は気相になっており、前記
基体を存在させて減圧で前記複数の有機前駆物質を反応させて前記基体上に薄膜
を形成する諸工程からなる方法にある。別の態様として、本発明は、そのような
方法により製造された有機膜を包含する。更に別の態様として、本発明は、大気
の常態値以下の圧力で有機前駆物質の反応を促進して基体上に有機膜を形成する
ように設計された装置を含む。
【０００７】 本発明の一つの利点は、そのような膜の各成分の量を正確精密に制御すること
ができる多成分有機薄膜を与えることである。
【０００８】 本発明の別の利点は、滑らかな表面を有する均一な有機薄膜を与えることであ
る。
【０００９】 本発明の更に別な利点は、有機発光材料及び光学的に非線形の有機塩の薄膜を
成長させる低圧有機蒸着法及び装置を与えることである。
【００１０】 本発明の更に別な利点は、有機発光材料及び光学的非線形の有機塩の薄膜を形
成させる低圧有機分子ビーム蒸着法及び装置を与えることである。
【００１１】 本発明のさらに別な利点は、大きな基体領域に亙って有機材料を均一に蒸着す
る方法及び装置を与えることである。
【００１２】 （詳細な説明） 本発明は、大気の常態値以下の圧力で基体上に有機薄膜を成長させるための方
法及び装置を与える。本発明の方法は、ここでは低圧有機蒸着（ＬＰＯＶＰＤ）
として規定する。本発明のＬＰＯＶＰＤ法は、多成分有機薄膜の蒸着を正確精密
に制御することができる。更に、本発明の薄膜は、表面粗さが小さいと言った優
れた表面性を特徴とする。
【００１３】 本発明の態様によるＬＰＯＶＰＤ反応器１０を図１に模式的に示す。反応器１
０は、反応管１２のような反応室及び反応室中へ伸びる配管を有する。反応管１
２は、実験装置では、例えば、１０ｃｍの直径及び約４５ｃｍの長さのような適
当な大きさを有する円筒である。反応管１２は、ガラス又は石英のような適当な
材料から作られている。坩堝１４のような開口容器には第一有機前駆物質材料が
入っており、反応管１２の一方の端２０に近い管３６内に配置されている。別法
として、坩堝１４は直接反応管１２上に置かれているか、又はその中の棚又は管
に配置されている。坩堝１４は、実質的に反応管１２を取り巻く多領域加熱器／
冷却器１８により加熱又は冷却される。坩堝１４の温度制御により、坩堝１４内
の第一有機前駆物質材料の熱分解又は蒸発を与えることになる。不活性キャリヤ
ガスの調節した流れ３０を、管３６を通って反応室中へ送り、それにより第一有
機前駆物質の蒸気を反応管１２に沿ってその排出端２２の方へ流す。不活性キャ
リヤガスは、窒素、ヘリウム、アルゴン、クリプトン、キセノン、ネオン等の不
活性ガスである。水素、アンモニア、メタン等の還元性を持つガスも多くの有機
材料に対しては不活性である。これらの還元性ガスを使用することにより、望ま
しくない過剰の反応物の燃焼を助ける付加的利点が屡々得られる。
【００１４】 不活性ガスは、タンク２４から、調節バルブ２６を通り、配管２８へ入り、少
なくとも二つの流路３０及び３８を通って反応管１２中へ送られる。一つの流路
３０は、直列に接続された圧力調節器３２、流量計３４、及び高速切り替えバル
ブ３５を有し、そこからキャリヤガスが反応管１２の端２０中へ送られる。第二
流路３８は、直列に接続された圧力調節器４０、流量計４２に、及び高速切り替
えバルブ３９を有し、そこからキャリヤガスがバブラー(bubbler)４６中へ流れ 、そのバブラーには第二有機前駆物質材料４８が入っている。第二有機前駆物質
材料４８の温度制御をし易くするため、バブラー４６は容器５２内の浴５０内に
部分的に浸漬されている。タンク２４からの不活性ガスは、第二有機前駆物質４
８を気泡として通り、配管５４を通って第二有機前駆物質４８の蒸気を反応管１
２中へ運ぶ。この工程中、管５４は、気化した第二有機前駆物質４８がバブラー
から反応室へ移動する間に再び凝縮しないように充分高い温度に維持されなけれ
ばならない。
【００１５】 反応管１２中へ入る前駆物質の量は、キャリヤガスの温度及び流量、及び反応
物の温度のような処理パラメータにより制御される。ＬＰＯＶＰＤ法は、前駆物
質又は反応物の蒸気圧又は化学的性質とは無関係に、圧力質量流量制御器を用い
てそれらの正確な計量を与える。本発明の方法は、このようにして希望の膜の製
造に必要な比率で非常に異なった特性を持つ材料の組合せを可能にする。
【００１６】 前駆物質の流れは、高速切り替えバルブ３５及び３９を用いることにより、殆
ど瞬間的にオン・オフの切り替えを行うことができる。これらのバルブは前駆物
質流を反応器１２又はバイパス管（図示せず）中へ送り、どの時間においても異
なった前駆物質流が反応器１２中へ入り、異なった組成及び特性の膜を蒸着する
ことができる。バルブ３９は、バブラー４６へ入るキャリヤガスの調節も行う。
バルブ３５及び３９は、このようにして反応器１２中へ入る反応物の流れを迅速
に変化し、成長する膜の性質及び組成を変化させ得る。従って、例えば、各文字
が異なった分子層又は組成を表すものとして、ＡＢＡＢ、ＡＢＣＡＢＣ、ＡＢＡ
ＢＣＡＢ、及びＡＢＣＤＡＢＣＤ−型の膜を成長させることができる。
【００１７】 真空ポンプ６６及び制御スロットルバルブ６８を、反応器１０の排気管６２の
所に取付ける。基体５８上に蒸着しなかった有機蒸気の殆どは、ポンプ６６より
上流に配置されたトラップ６４中で凝縮する。トラップ６４には、例えば液体窒
素又は中性フルオロカーボンオイルが入っている。スロットルバルブ６８は反応
器１０中の圧力を調節する。適当な圧力ゲージを反応器に取付け（図示せず）、
反応器中に希望の圧力を維持するように制御スロットルバルブ６８に電気的フィ
ードバックを行う。
【００１８】 真空ポンプ６６は、反応管１２中に約０．００１〜１００トールの圧力を与え
る。受容体層、供与体層、及び単一成分層のいかなる組合せに対しても、実際の
圧力は、前駆物質材料を蒸発するために必要な温度、前駆物質材料の凝縮を防ぐ
壁温度、及び反応領域温度勾配に関連して実験的に決定する。圧力の最適選択は
、各蒸着される有機層の要件に特有のものである。例えば、トリス−（８−ヒド
ロキシキノリン）アルミニウム（Ａｌｑ3)又はＮ，Ｎ′−ジフェニル−Ｎ，Ｎ−
ビス（３−メチルフェニル） １，１′−ビフェニル−４，４′ジアミン（ＴＰ
Ｄ）等の単一成分層の蒸着のための最適圧力は約０．１〜１０トールである。
【００１９】 本発明の薄膜を蒸着する基体は、半導体及び光学デバイスを製造する場合に一
般に使用される材料から選択されるのが典型的である。例えば、そのような材料
には、ガラス、石英、珪素、砒化ガリウム及び他のIII−Ｖ半導体、アルミニウ ム、金及び他の貴金属及び卑金属、ポリマー膜、二酸化珪素及び窒化珪素、イン
ジウム錫酸化物等が含まれる。高品質の光学的薄膜のためには、蒸着した有機膜
と結晶性相互作用を与えてエピタキシャル成長を起こす基体を用いるのが好まし
い。そのようなエピタキシャル成長を達成するためには、蒸着すべき膜と同様な
結晶構造を有する非極性有機物で基体を被覆することが屡々必要である。
【００２０】 更に、有機薄膜を基体５８上に蒸着する場合、基体の温度を制御することが屡
々好ましい。基体温度の独立した制御は、例えば、水、ガス、フレオングリセリ
ン、液体窒素等の物質を循環させるためのチャンネルを有する温度制御ブロック
６０を基体５８と接触させることにより達成する。基体は、ブロック６０上又は
その近くに配置した抵抗又は輻射線加熱器を使用することにより加熱することも
できる。
【００２１】 図１の反応器２０は、付加的前駆物質を反応器２０中へ供給するように多重バ
ブラー４６Ｎを含ませるように拡大し得る。同様に、多重キャリヤガス流路３０
Ｎを用いて坩堝１４Ｎからの更に付加的前駆物質を送る。別法として、坩堝１４
、１４Ｎは、付加的前駆物質を処理するため反応管１２中の棚上又は管中に垂直
方向に重ねることもできる。蒸着すべき有機膜により、一つ以上の流路３０及び
３８を単独又は組合せて用い、必要な前駆物質材料を与えることができる。
【００２２】 本発明の方法を用いて、極めて多種の有機薄膜を蒸気前駆物質の反応により蒸
着することができる。ここで用いる「反応」とは、前駆物質反応物が明確な反応
生成物を形成する化学反応を意味するか、又は別法としてそれは前駆物質材料の
組合せ又は混合物を単に意味するか、又は前駆物質材料が供与体・受容体、又は
ゲスト・ホストの関係を形成する場合を意味する。例えば、本発明に従い、列挙
した前駆物質の反応により薄膜として次のＮＬＯ物質が形成される：
【００２３】
【表１】
【００２４】 ＯＬＥＤを製造するのに用いられる発光材料に特に関連した別の例では、前駆
物質は、例えば、テトラチスファルバレン(tetrathisferlvalene)(ＴＦＦ）及び
７，７，８，８−テトラシアノキノジメタン（ＴＣＮＱ）からなる。混合工程は
、基体上に蒸着する電荷移動錯体ＴＴＦ−ＴＣＮＱを与える結果になる。ＯＬＥ
Ｄに関する別の例では、４−（ジシアノメチレン）−２−メチル−６−（ｐ−ジ
メチルアミノスチリル）−４Ｈ−ピラン（ＤＣＭ）を大きな流量のキャリヤーガ
ス流中に添加し、一方、Ａｌｑ3を低流量のキャリヤガス中に添加する。次にこ れらの流れを中心反応管中で混合し、それによりホストマトリックス膜中のゲス
ト分子を希望通りに希釈し、単一の発光層を形成する。Ａｌｑ3ホスト中の他の ゲスト分子の例は、５，１０，１５，２０−テトラフェニル−２１Ｈ，２３Ｈ−
ホルフィン（ＴＰＰ）、ルブレン(Rubrene)、ＤＣＭ２、クマリン等である。別 法として、効率的な広範な色の変化を達成するため、単一ホスト中に多種ドーパ
ントを添加してもよい。
【００２５】 別の例として、Ａｌｑ3、ビス−（８−ヒドロキシキノリン）アルミニウムオ キシフェニル〔（Ａｌｑ2)′−ＯＰｈ〕等の発光層（ＥＬ）の表面上に積層した
ＴＰＤ、α−４，４′−ビス［Ｎ−（１−ナフチル）−Ｎ−フェニル−アミノ］
ビフェニル（α−ＮＰＤ）、又はＭＴＤＡＴＡ等のホール輸送層（ＨＴＬ）、又
はこれらの層のドープした組合せからなる二相発光デバイスは、連続的にＨＴＬ
及びＥＬを希望の厚さに成長させることにより形成する。次にそれら有機層の上
に付加的層を成長させるか、又はトリメチル・インジウム、トリメチル・ガリウ
ム等のような有機金属原料を用いて金属接点(コンタクト，contact)層を成長さ せる。
【００２６】 図１に関して述べた装置及び方法の外に、本発明は、図２に示すような低圧反
応器７０及び方法を包含する。反応器７０は、改良した超高真空室７１及びバル
ブ７２に接続されたターボ分子ポンプ等の真空ポンプ（図示せず）を有する。室
７１中の典型的な室基底圧力は１０-3〜１０-11トールである。反応器７０を用 いた有機層蒸着法は、有機分子ビーム蒸着（ＯＭＶＤ）と呼ばれている。ＬＰＯ
ＶＰＤ及びＯＭＶＤの両方共有機層を蒸着するのに減圧を用いているが、これら
の方法の原理的差は、後者では分子平均自由行程が室７０の大きさに匹敵するか
、又はそれより大きいことである。比較として、ＬＰＯＶＰＤの平均自由行程は
、ガス反応器の大きさよりもかなり短い。従って、ＯＭＶＤはインジェクタから
基体へ高度に配向した「分子ビーム」の形成を可能にし、成長膜厚さ、純度及び
形態の正確な速度論的制御を可能にする。
【００２７】 バブラー７４が、第一前駆物質材料７５を入れるために配備されている。バブ
ラー７４は容器７６中に入れられ、温度制御浴８０中に浸漬されている。高純度
不活性キャリヤガス７８が第一前駆物質７５を気泡として通り、各蒸気を加熱さ
れた配管７９を通ってインジェクタ８２により真空室７１中へ運ぶ。室７１中に
入ると、前駆物質蒸気は分子ビーム８３を形成し、それが基体８５に衝突する。
基体８５には、例えば、冷却剤入口８１のような温度を制御するための手段が配
備されている。
【００２８】 場合により、真空室７１には少なくとも一つのクヌーセン又はＫ−セル８６が
配備されており、その中には第二前駆物質材料８８が入っている。Ｋ−セル８６
は、真空中で蒸発物を流出させるための均一に加熱され、制御された炉である。
例えば、Ｋ−セル８６はＤＡＳＩ又は他の前駆物質を分解するまで加熱され、得
られたＤＡＳを昇華し、それを分子ビーム８９として反応器７０中へ注入する。
別法として、Ｋ−セル８６は、単にＡｌｑ3等の単一成分物質を昇華するだけで ある。別法として、Ｋ−セル８６には、加熱によりガス流中に昇華又は蒸発され
る分子物質の濃度を希釈するのに用いられるキャリヤガス入口が取付けてある。
この希釈方法は、浴８０及びクヌーセン・セル８６の温度の外、バブラー７４へ
のキャリヤガス７８の流れを制御することにより、ＤＣＭ−Ａｌｑ3等のゲスト ・ホスト系の正確なドーピング量を達成するのに特に有用である。
【００２９】 有機薄膜を蒸着させるため基体８５に物質ビーム８３及び８９を衝突させ、薄
膜の厚さを石英結晶９３により監視する。試料ホールダ９０は回転して前駆物質
材料の均一な蒸着及び反応を確実に与える。前駆物質材料の蒸着は、更に分子ビ
ーム８３及び８９を遮断するのに用いられるシャッタ８７により制御する。
【００３０】 場合により反応器７０は冷却囲い９１も有し、それは、真空室７１の圧力を、
再蒸発された前駆物質材料のための最小値に維持するのに役立つ。前駆物質材料
が移動して互いに汚染することがないように隔壁９２を配備するのも好ましい。
【００３１】 反応器７０には、図１に示すＬＰＯＶＰＤ反応器の付属品と同じもの、例えば
、高速切り替えバルブ、バイパス導管等の多くのものが配備されている。反応器
７０には、多重クヌーセンセル及びバブラーを、基体８５の上に複数の前駆物質
材料を蒸着するために取付けることができる。反応器７０は、試料導入のための
「ロード・ロック(load-lock)」を有するのが好ましい。ロード・ロック９４は ドア９５及び真空ポンプ９６を有し、室７１の圧力を低下することなく、試料の
交換を与えることができる。
【００３２】 図１の装置は、場合により、図３に説明する例によって示すように、大面積基
体上に有機層を連続的に蒸着できるように修正する。図３の装置は、導入室１４
６、有機層蒸着室１５０及び１５２、接点蒸着室１５４、及び取出し室１５６の
ような複数の真空室を有する。例として、各蒸着室は図１のＬＰＯＶＰＤ反応器
１０である。基体１３７はコンベヤベルト１４８に乗せて室１５０、１５２、１
５４及び１５６の各々を通って運ぶ。図３に示した態様では、室１５０、１５２
及び１５４は、夫々輻射熱源１５８、１６０及び１６２を有し、有機蒸気の凝縮
を防ぐ。図３には唯二つの有機層蒸着室１５０及び１５２しか示されていないが
、希望に応じて付加的室を配備する。導入室１４６から有機層蒸着室１５０及び
１５２へ、また接点蒸着室１５４から取出し室１５６へ送られる間に、基体１３
７は空気遮断部（図示せず）を通過し、室１５０、１５２及び１５４の中の真空
を低下しないようにしてある。ＯＬＥＤに関する例として、室１５０及び１５２
を夫々ＴＰＤ及びＡｌｑ3の蒸着のために用い、室１５４をＭｇ：Ａｇ接点層を 蒸着するために用いる。
【００３３】 図３の例の室１５０、１５２、及び１５４の各々には、図４Ａ及び４Ｂに詳細
に示すように、有機前駆物質材料の蒸着のための反応物ガス分配器（ＲＧＤ）１
０８が含まれている。ＲＧＤ１０８は、図１及び２の有機前駆物質導入機構の代
替物として用いられ、ガスカーテン、１２０、１２０′、１２０″及び１２０″
′を与えるのに用いられる。ＲＧＤ１０８は、多種有機前駆物質を蒸着する場合
に、それら前駆物質が基体上に蒸着されるまで分離されているのを確実にし、そ
れにより前駆物質の反応を行わせることができる。ＲＧＤ１０８には、加熱器１
２２、第二キャリヤガス入口１１２及びガスマニホルド１３２が含まれる。加熱
器１２２は、有機前駆物質材料の凝縮が速過ぎるのを防ぐ。ＲＧＤ１０８の上に
は第一キャリヤガス入口１１４及び分配器板１１０が存在する。第一キャリヤガ
ス入口１１４は、例えば、ＭＴ等の一般に低揮発性第一有機前駆物質を通常運ぶ
ガスを供給する。第一キャリヤガスは、例えば、ワイヤ網、ガラスフィルタ材料
、又は多孔質ステンレス鋼板である分配器板１１０を通って反応室へ入る。分配
器板１１０を通って流れるキャリヤガスのカラムは、ＲＧＤ１０８により陰にな
っている。ＲＧＤ１０８は、例えばＤＡＳ等の一般に低い蒸気圧の第二有機前駆
物質の平面状ガスカーテン１２０を与える。第二有機前駆物質を含む第二キャリ
ヤガスは、入口１１２から入り、ガスマニホルド１３２の中へ送られる。マニホ
ルド１３２は、環状空洞１２６中へ第二キャリヤガスを供給するための並んだ孔
１３４を有する中空管であり、その環状空洞はマニホルド１３２を取り巻いてい
る。第二キャリヤガスはスリット１３６を通ってＲＧＤ１０８を出、それによっ
て平面状カーテンの形態をそれに与える。
【００３４】 例として、カーテン１２０はＴＰＤ蒸気からなり、カーテン１２０′はＡｌｑ 3 蒸気からなり、カーテン１２０″は、伝導性表面を生ずるポリピロール(polypy
role)、金属有機化合物等の蒸気からなる。もし望むならば、ＯＬＥＤにより発 する光の色の制御又は調節を、Ａｌｑ3層の適当なドーピングにより行うことが でき、室１５２中の付加的ＲＧＤデバイス１０８によりドーパント蒸気のカーテ
ン１２０″′を与える。
【００３５】 図１、図２又は図３の装置は、場合により図５に示すような「ロール対ロール
」基体搬送装置を用いることにより修正する。図５に示す搬送装置は、大面積可
撓性基体上に有機薄膜を蒸着するのに適している。例えば、基体１８０はポリマ
ーシート又は金属箔からなり、ロール１８１からロール１８２へ送る。基体１８
０への有機前駆物質の蒸着は、基体１８０がロール１８１から解かれた時に行わ
れ、従って図１の反応室へ露出されるか、又は図２及び３の分子ビーム又はカー
テンに夫々露出された時に行われる。ロール１８１及び１８２は、速度可変モー
タ等の適当な手段により駆動する。基体１８０がロール１８１からロール１８２
へ送られる速度は、基体１８０上に形成される有機膜の厚さを決定する。
【００３６】 本発明を、次の諸例に関連して更に記述するが、本発明は、それら諸例に限定
されるものではない。
【００３７】 例１ 図１の装置を用い、インジウム錫酸化物（ＩＴＯ）の透明層で予め被覆したガ
ラス及び可撓性ポリエステル基体を用いて、有機発光材料の層を成長させた。Ｉ
ＴＯは装置のアノードを形成し、ガラス及びポリエステル基体に対し、夫々１７
００Å及び１２００Åの厚さを持ち、夫々１０Ω及び６０Ωのアノード抵抗を与
えた。ガラス基体は超音波浴中の洗剤溶液及び脱イオン水で濯ぎ、次に１，１，
１−トリクロロエタン中で沸騰させ、アセトンで濯ぎ、最後に２−プロパノール
で濯くことにより清浄にした。可撓性基体は、有機溶媒に曝すことによる損傷を
避けるため、洗剤及び２−プロパノール溶液だけで濯ぐことにより清浄にした。
【００３８】 ガラス基体を反応管１２中の、温度が約２２０℃になる位置に置いた。ＩＴＯ
表面上に蒸着した第一層はＴＰＤ、ホール輸送材料であった。特に、ＴＰＤ蒸気
を窒素キャリヤガスにより坩堝１４から基体２８へ運んだ。ＴＰＤ成長条件には
、２００±５℃の原料温度、１００ｓｃｃｍの窒素キャリヤガス流量、０．５０
トールの反応器圧力、及び２０分の成長時間が含まれる。１００ｓｃｃｍの窒素
流量で、装置のレイノルズ数は〜５００であり、層流領域内に充分入る操作であ
ることを示していた。ＴＰＤ層は１００〜３００Åの厚さに成長させた。
【００３９】 蒸着後、ＴＰＤ坩堝近くの温度を低下し、対応する窒素流を遮断した。次にＡ
ｌｑ3の電子輸送層を、別の窒素導管を開けて坩堝１４ＮからＡｌｑ3蒸気を室１
２中へ運ぶことにより成長させた。Ａｌｑ3成長条件には、２４７±８℃の原料 温度、５０ｓｃｃｍの窒素流量、０．６５トールの圧力、及び１０分の成長時間
が含まれる。ＴＰＤ及びＡｌｑ3の両方の蒸着中、水冷されたステンレス鋼基体 ホールダを用いて基体を１５℃に維持した。ＴＰＤ層は７００〜１１００Åの厚
さに成長させた。
【００４０】 Ａｌｑ3 層を蒸着した後、基体を反応器から取り出し、Ｍｇ：Ａｇ頂部接点を
加熱蒸着により適用した。接点（コンタクト）は、１０００Åの厚さの保護Ａｇ
層を蒸着させて完成した。
【００４１】 蒸着中、低い圧力を使用することにより、滑らかで均一な表面を有する有機層
を与える結果になった。例えば、ＴＰＤ及びＡｌｑ3 層を原子力顕微鏡で測定し
て、夫々６〜８Å及び９〜１１ÅのＲＭＳ粗さを持っていた。得られたＯＬＥＤ
装置は、低電圧でＩ∝Ｖ、高電圧でＩ∝Ｖ9である電流・電圧特性を示した。Ｉ 対Ｖのパワー法則依存性(power law dependence of I on V)が変化するターン・
オン(turn-on)電圧、ＶTは約６Ｖであった。
【００４２】 例２ ＮＬＯ膜を、図１に示す装置を用いて製造した。シリコーン油浴５０により約
８０〜１００℃に温度を維持した３０ｃｍ3バブラー４６中にＭＴ４８を入れた 。窒素ガスを用いてＭＴ４８に気泡として通し、それによりＭＴ蒸気をガラス管
５４を通って反応管１２中へ、坩堝１４を約５ｃｍ越えた位置の所から導入した
。その坩堝は反応管１２の床上に置かれており、ＤＡＳＩが入っていた。反応管
１２中の圧力を約１０-2トールに維持した。ＤＡＳ蒸気はＭＴ蒸気と反応し、基
体ブロック６０上に支持された基体５８上にＤＡＳＴの固体膜を形成した。過剰
の未反応ＭＴ蒸気及び揮発性副反応生成物を排出管６２から排出した。かくして
形成したＤＡＳＴ膜は、例えば、光学的スイッチとして有用である。
【００４３】 本発明は、低圧蒸着法を用いて優れた表面特性及び正確精密な組成を有する有
機薄膜を製造する。本発明の種々の態様をここに示し記述してきたが、それらは
限定的意味を持たない。例えば、当業者はこれらの態様に或る修正を認めること
ができるであろうが、それら修正は特許請求の範囲の本質及び範囲に含まれる。
【００４４】 ここに記載した本発明は、次の係属中の出願に関連して用いることができる：
「高信頼性、高効率、集積可能な有機発光デバイス及びその製法」(High Reliab
ility, High Efficiency, Integratable Organic Light Emitting Devices and
Methods of Producing Same)、シリアル番号０８／７７４，１１９（１９９６年
１２月２３日出願）；「多色ＬＥＤのための新規な材料」(Novel Materials for
Multicolor LED's)、シリアル番号０８／８５０，２６４（１９９７年５月２日
出願）；「有機遊離ラジカルに基づく電子輸送及び発光層」(Electron Transpor
ting and Light Emitting Layers Based on Organic Free Radicals)、シリアル
番号０８／７７４，１２０（１９９６年１２月２３日出願）；「多色表示デバイ
ス」(Multicolor Display Devices)、シリアル番号０８／７７２，３３３（１９
９６年１２月２３日出願）；「赤色光有機発光デバイス（ＬＥＤ）」(Red-Emitt
ing Organic Light Emitting Devices (LED's)）、シリアル番号０８／７７４，
０８７（１９９６年１２月２３日出願）；「積層有機発光デバイスのための駆動
回路」(Driving Circuit For Stacked Organic Light Emitting Devices)、シリ
アル番号０８／７９２，０５０（１９９７年２月３日出願）；「高効率有機発光
デバイス構造体」(High Efficiency Organic Light Emitting Device Sturcture
s)、シリアル番号０８／７７２，３３２（１９９６年１２月２３日出願）；「真
空蒸着した非ポリマー可撓性有機発光デバイス」(Vacuum Deposited, Non-Polym
eric Flexible Organic Light Emitting Devices)、シリアル番号０８／７８９ ，３１９（１９９７年１月２３日出願）；「メサピクセル構造を有するディスプ
レイ」(Displays Having Mesa Pixel Configuration)、シリアル番号０８／７９
４，５９５（１９９７年２月３日出願）；「積層有機発光デバイス」(Stacked O
rganic Light Emitting Devices)、シリアル番号０８／７９２，０４８（１９９
７年２月３日出願）；「高コントラスト透明有機発光デバイス表示器」(High Co
ntrast Transparent Organic Light Emitting Device Display)シリアル番号０ ８／８２１，３８０（１９９７年３月２０日出願）；「ホスト物質として５−ヒ
ドロキシ−キノキサリンの金属錯体を含む有機発光デバイス」(Organic Light E
mitting Devices Containing A Metal Complex of 5-Hydroxy-Quinoxaline as A
Host Materials)、シリアル番号０８／８３８，０９９（１９９７年４月１５日
出願）；「大きな輝度を有する発光デバイス」(Light Emitting Devices Having
High Brightness)、シリアル番号０８／８４４，３５３（１９９７年４月１８ 日出願）；「有機半導体レーザ」(Organic Semiconductor Laser)、シリアル番 号６０／０４６，０６１（１９９７年５月９日出願）；「有機半導体レーザ」(O
rganic Semiconductor Laser)、シリアル番号０８／８５９，４６８（１９９７ 年５月１９日出願）；「飽和天然色積層有機発光デバイス」(Saturated Full Co
lor Stacked Organic Light Emitting Devices)、シリアル番号０８／８５８， ９９４（１９９７年５月２０日出願）；「ホール注入促進層を有する有機発光デ
バイス」(An Organic Light Emitting Device Containing a Hole Injection En
hancement Layer)、シリアル番号０８／８６５，４９１（１９９７年５月２９日
出願）；「伝導性層のプラズマ処理」(Plasma Treatment of Conductive Layers
)、シリアル番号ＰＣＴ／ＵＳ９７／１０２５２（１９９７年６月１２日出願） ；「有機多色ディスプレイを製造するための薄膜パターン化」(Patterning of T
hin Films for the Fabrication of Organic Multi-color Displays)、シリアル
番号ＰＣＴ／ＵＳ９７／１０２８９／（１９９７年６月１２日出願）；「二重ヘ
テロ構造赤外線及び垂直空洞表面発光有機レーザ」(Double Heterostructure In
frared and Vertical Cavity Surface Emitting Organic Lasers)、シリアル番 号６０／０５３，１７６（１９９７年７月１８日出願）；「オレッド含有熱安定
性不斉電荷キャリヤ材料」(Oleds Containing Thermally Stable Asymmetric Ch
arge Carrier Materials)、シリアル番号０８／９２９，０２９（１９９７年９ 月８日出願）；「オレッド積層体を有する発光デバイス及び燐光体周波数逓降変
換器」(Light Emitting Device with Stack of Oleds and Phosphor Downconver
ter)、シリアル番号０８／９２５，４０３（１９９７年９月９日出願）；「有機
発光デバイス中のインジウム錫酸化物層を蒸着するための改良方法」(An Improv
ed Method for Depositing Indium Tin Oxide Layers in Organic Light Emitti
ng Devices)、シリアル番号０８／９２８，８００（１９９７年９月１２日出願 ）；「オレッドの発光層中のアズラクトン関連ドーパント」(Azlactone-Related
Dopants in the Emissive Layer of an Oled)、シリアル番号０８／９４８，１
３０（１９９７年１０月９日出願）；「非金属カソードを用いた高透明性有機発
光デバイス」(A Highly Transparent Organic Light Emitting Device Employin
g A Non-Metallic Cathode)、（１９９７年１１月３日出願）、代理人書類番号 １００２０／４０（暫定出願）、及び「非金属カソードを用いた高透明性有機発
光デバイス」(A Highly Transparent Organic Light Emitting Device Employin
g A Non-Metallic Cathode)、（１９９７年１１月５日出願）、代理人書類番号 １００２０／４４、各係属中の出願は、言及することによって本明細書に組み入
れる。本発明は、係属中の米国特許出願シリアル番号０８／３５４，６７４、０
８／６１３，２０７、０８／６３２，３２２、及び０８／６９３，３５９、及び
暫定特許出願シリアル番号６０／０１０，０１３、０６／０２４，００１、及び
６０／０２５，５０１（これらの各々は言及することによってその全体を本明細
書に組み入れる）の各々の主題に関連して用いることもできる。
【図面の簡単な説明】
【図１】 本発明の態様によるＬＰＯＶＰＤ反応器の図である。
【図２】 本発明の態様によるＯＭＶＤ反応器の図である。
【図３】 本発明の態様に従い、基体上に有機材料を連続的に低圧蒸着するための装置の
図である。
【図４Ａ】 本発明の態様に従う反応物ガス分配器の平面図及び断面図である。
【図４Ｂ】 本発明の態様に従う反応物ガス分配器の平面図及び断面図である。
【図５】 本発明の態様によるロール対ロール基体搬送機構の側面図である。
【手続補正書】
【提出日】平成１２年５月１９日（２０００．５．１９）
【手続補正１】
【補正対象書類名】明細書
【補正対象項目名】特許請求の範囲
【補正方法】変更
【補正内容】
【特許請求の範囲】
───────────────────────────────────────────────────── フロントページの続き (81)指定国 ＥＰ(ＡＴ，ＢＥ，ＣＨ，ＣＹ， ＤＥ，ＤＫ，ＥＳ，ＦＩ，ＦＲ，ＧＢ，ＧＲ，ＩＥ，Ｉ Ｔ，ＬＵ，ＭＣ，ＮＬ，ＰＴ，ＳＥ)，ＯＡ(ＢＦ，ＢＪ ，ＣＦ，ＣＧ，ＣＩ，ＣＭ，ＧＡ，ＧＮ，ＧＷ，ＭＬ， ＭＲ，ＮＥ，ＳＮ，ＴＤ，ＴＧ)，ＡＰ(ＧＨ，ＧＭ，Ｋ Ｅ，ＬＳ，ＭＷ，ＳＤ，ＳＺ，ＵＧ，ＺＷ)，ＥＡ(ＡＭ ，ＡＺ，ＢＹ，ＫＧ，ＫＺ，ＭＤ，ＲＵ，ＴＪ，ＴＭ) ，ＡＬ，ＡＭ，ＡＴ，ＡＵ，ＡＺ，ＢＡ，ＢＢ，ＢＧ， ＢＲ，ＢＹ，ＣＡ，ＣＨ，ＣＮ，ＣＵ，ＣＺ，ＤＥ，Ｄ Ｋ，ＥＥ，ＥＳ，ＦＩ，ＧＢ，ＧＤ，ＧＥ，ＧＨ，ＧＭ ，ＨＲ，ＨＵ，ＩＤ，ＩＬ，ＩＳ，ＪＰ，ＫＥ，ＫＧ， ＫＰ，ＫＲ，ＫＺ，ＬＣ，ＬＫ，ＬＲ，ＬＳ，ＬＴ，Ｌ Ｕ，ＬＶ，ＭＤ，ＭＧ，ＭＫ，ＭＮ，ＭＷ，ＭＸ，ＮＯ ，ＮＺ，ＰＬ，ＰＴ，ＲＯ，ＲＵ，ＳＤ，ＳＥ，ＳＧ， ＳＩ，ＳＫ，ＳＬ，ＴＪ，ＴＭ，ＴＲ，ＴＴ，ＵＡ，Ｕ Ｇ，ＵＺ，ＶＮ，ＹＵ，ＺＷ (72)発明者 バン、ブラディミール、エス アメリカ合衆国 ニュージャージー、プリ ンストン、ザ グレート ロード 1061 Ｆターム(参考） 3K007 AB03 BA07 CA01 CA06 CB01 DA00 DB03 EB00 FA01 4K030 AA09 AA16 AA24 BA61 EA01 EA06 GA06 GA12 GA14 JA09 KA09 KA23 KA26 KA28 KA39 KA41 LA01 LA18

Claims (43)

    【特許請求の範囲】
  1. 【請求項１】 基体上に有機薄膜を形成する方法において、 複数の有機前駆物質を気相で与え、 基体を存在させて、大気の常態値以下の圧力で前記複数の有機前駆物質を反応
    させ、該基体上に薄膜を形成する、 諸工程を有する、上記方法。
  2. 【請求項２】 基体を反応室中に配置する、請求項１記載の方法。
  3. 【請求項３】 複数の有機前駆物質の一つを、反応工程前に反応室中へ輸送
    する工程を更に有する、請求項２記載の方法。
  4. 【請求項４】 輸送工程が、不活性ガスを用いて、輸送された有機前駆物質
    を反応室へ運ぶ工程を含む、請求項３記載の方法。
  5. 【請求項５】 不活性ガスを、窒素、アルゴン、ヘリウム、ネオン、クリプ
    トン及びキセノンからなる群から選択する、請求項４記載の方法。
  6. 【請求項６】 複数の有機前駆物質の少なくとも一つを、ＭＴ、ＤＡＳＩ、
    ＭＭ、ＭfＭ、ＤＡＳＴｈ、ＭｅＯＳＩ、ＤＡＳ（Ｅｔ）Ｉ、ＤＡＳ（Ｅｔ）Ｏ Ｈ、トルエンスルホン酸アセチル、ＭＡf、ＴＴＦ、ＴＣＮＱ、ＤＣＭ、Ａｌｑ3 、ＴＰＰ、ＴＰＤ、α−ＮＰＤ、ＭＴＤＡＴＡ、及び（Ａｌｑ2）′−ＯＰｈか らなる群から選択する、請求項１記載の方法。
  7. 【請求項７】 輸送工程前に、輸送される有機前駆物質を気化する工程を更
    に有する、請求項３記載の方法。
  8. 【請求項８】 気化工程が、輸送される有機前駆物質をバブラーへ導入する
    工程を含み；輸送工程が、前記バブラーに不活性ガスを通して前記輸送される有
    機前駆物質を反応室中に運ぶ工程を含む；請求項７記載の方法。
  9. 【請求項９】 気化工程が、輸送される有機前駆物質を開口容器中へ入れて
    、該開口容器を加熱する工程を含み；しかも、輸送工程が、前記開口容器上に不
    活性ガスを送り、前記輸送される有機前駆物質を反応室中に運ぶ工程を含む；請
    求項７記載の方法。
  10. 【請求項１０】 気化工程が、 反応室中へ伸びているクヌーセン・セルの中へ、輸送される有機前駆物質を導
    入し、次いで 該クヌーセン・セルを加熱する、 諸工程を含む、請求項７記載の方法。
  11. 【請求項１１】 基体を、回転試料ホールダに取付ける、請求項１記載の方
    法。
  12. 【請求項１２】 大気圧の常態値以下の圧力が約１０-11〜１０2トールの範
    囲内にある、請求項１記載の方法。
  13. 【請求項１３】 請求項１に記載の方法により製造された有機膜。
  14. 【請求項１４】 膜が発光材料を含む、請求項１３記載の有機膜。
  15. 【請求項１５】 膜が光学的非線形の材料を含む請求項１３記載の有機膜。
  16. 【請求項１６】 基体上に有機薄膜を形成する装置において、 反応室、 前記反応室を実質的に取り巻く加熱器、 前記反応室中へ伸びる配管、及び 前記反応室へ取付けられた真空ポンプ、 を具えた上記装置。
  17. 【請求項１７】 反応室が反応管を有する、請求項１６記載の装置。
  18. 【請求項１８】 加熱器が多領域加熱器／冷却器である、請求項１６記載の
    装置。
  19. 【請求項１９】 配管が、 第一端部及び、反応室中へ伸びる第二端部を有する管、及び 前記管の第一端部に接続されたガス源、 を有する、請求項１６記載の装置。
  20. 【請求項２０】 管の内部に配置された開口容器であって、有機前駆物質材
    料を保持するための該開口容器を更に具えた、請求項１９記載の装置。
  21. 【請求項２１】 管が圧力調節器及びバルブを有する、請求項２０記載の装
    置。
  22. 【請求項２２】 配管が、 第一端部及び第二端部を有する第一管であって、第一管の第二端部が反応室中
    へ伸びている第一管、 第一管の第一端部に接続された、有機前駆物質材料を入れるためのバブラー、 第一端部及び第二端部を有する第二管であって、第二管の第二端部が前記バブ
    ラーに接続されている第二管、並びに 第二管の第一端部に接続されたガス源、 を有する、請求項１６に記載の装置。
  23. 【請求項２３】 第二管が圧力調節器及びバルブを有する、請求項２２に記
    載の装置。
  24. 【請求項２４】 基体と接触し、中にチャンネルを有する温度制御ブロック
    を更に具えた、請求項１６記載の装置。
  25. 【請求項２５】 反応室に取付けられたトラップを更に具えた、請求項１６
    記載の装置。
  26. 【請求項２６】 第一ロールと第二ロールとの間に基体を通すため、反応室
    内に第一ロール及び第二ロールを更に具えた、請求項１６記載の装置。
  27. 【請求項２７】 基体上に有機薄膜を形成するための装置において、 反応室、 前記反応室中へ伸びるクヌーセン・セル、 基体に接続され、回転可能な試料ホールダ、及び 前記反応室に取付けられた真空ポンプ、 を具えた上記装置。
  28. 【請求項２８】 反応室中へ伸びる配管を更に具え、然も、該配管が、 第一端部及び第二端部を有する第一管であって、第一管の第二端部が前記反応
    室中へ伸びている第一管、 第一管の第一端部に接続された、有機前駆物質材料を入れるためのバブラー、 第一端部及び第二端部を有する第二管であって、第二管の第二端部が前記バブ
    ラーに接続されている第二管、並びに 第二管の第一端部に接続されたガス源、 を有する、請求項２７記載の装置。
  29. 【請求項２９】 第一管が加熱されている、請求項２７記載の装置。
  30. 【請求項３０】 反応室中に冷却された囲いを更に具えた、請求項２７記載
    の装置。
  31. 【請求項３１】 薄膜の厚さを検出するセンサを更に具えた、請求項２７記
    載の装置。
  32. 【請求項３２】 センサが石英結晶である、請求項３１記載の装置。
  33. 【請求項３３】 反応室へ接続されたロード・ロックを更に具えた、請求項
    ２７記載の装置。
  34. 【請求項３４】 真空ポンプがターボ分子ポンプである、請求項２７記載の
    装置。
  35. 【請求項３５】 第一ロールと第二ロールとの間に基体を通すため、反応室
    中に第一ロール及び第二ロールを更に具えた、請求項２７記載の装置。
  36. 【請求項３６】 基体上に有機薄膜を形成するための装置において、 複数の真空室で、導入室及び有機層蒸着室を含めた複数の真空室、並びに 前記複数の真空室を通過するコンベアベルトで、その上に基体を有するコンベ
    アベルト、 を具えた上記装置。
  37. 【請求項３７】 有機層蒸着室が反応物ガス分配器を有する、請求項３６記
    載の装置。
  38. 【請求項３８】 有機層蒸着室が加熱器を有する、請求項３６記載の装置。
  39. 【請求項３９】 接触蒸着室を更に具えた、請求項３６記載の装置。
  40. 【請求項４０】 基体上に有機薄膜を形成するための装置において、 反応器、 前記反応器を加熱するための手段、 前記反応室へ有機前駆物質材料の蒸気を導入するための手段、及び 前記反応室中の圧力を大気圧より低く低下するための手段、 を具えた上記装置。
  41. 【請求項４１】 ＯＬＥＤを製造するための方法において、 複数の有機前駆物質を気相で与え、次いで 前記複数の有機層を大気の常態値以下の圧力で反応させる、 諸工程を有する、上記方法。
  42. 【請求項４２】 有機前駆物質が発光材料である、請求項４１記載の方法。
  43. 【請求項４３】 反応工程が発光物質を形成する結果を与える、請求項４１
    記載の方法。
JP2000521253A 1997-11-17 1998-11-16 有機薄膜の低圧蒸着 Withdrawn JP2001523768A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/972,156 US6337102B1 (en) 1997-11-17 1997-11-17 Low pressure vapor phase deposition of organic thin films
US08/972,156 1997-11-17
PCT/US1998/024424 WO1999025894A1 (en) 1997-11-17 1998-11-16 Low pressure vapor phase deposition of organic thin films

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2009138382A Division JP4890592B2 (ja) 1997-11-17 2009-06-09 有機薄膜の低圧蒸着
JP2010050397A Division JP5371837B2 (ja) 1997-11-17 2010-03-08 有機薄膜の低圧気相蒸着

Publications (2)

Publication Number Publication Date
JP2001523768A true JP2001523768A (ja) 2001-11-27
JP2001523768A5 JP2001523768A5 (ja) 2006-01-12

Family

ID=25519260

Family Applications (5)

Application Number Title Priority Date Filing Date
JP2000521253A Withdrawn JP2001523768A (ja) 1997-11-17 1998-11-16 有機薄膜の低圧蒸着
JP2009138382A Expired - Lifetime JP4890592B2 (ja) 1997-11-17 2009-06-09 有機薄膜の低圧蒸着
JP2010050397A Expired - Lifetime JP5371837B2 (ja) 1997-11-17 2010-03-08 有機薄膜の低圧気相蒸着
JP2013104840A Withdrawn JP2013177692A (ja) 1997-11-17 2013-05-17 有機薄膜の低圧気相蒸着
JP2016035497A Pending JP2016104913A (ja) 1997-11-17 2016-02-26 有機薄膜の低圧気相蒸着

Family Applications After (4)

Application Number Title Priority Date Filing Date
JP2009138382A Expired - Lifetime JP4890592B2 (ja) 1997-11-17 2009-06-09 有機薄膜の低圧蒸着
JP2010050397A Expired - Lifetime JP5371837B2 (ja) 1997-11-17 2010-03-08 有機薄膜の低圧気相蒸着
JP2013104840A Withdrawn JP2013177692A (ja) 1997-11-17 2013-05-17 有機薄膜の低圧気相蒸着
JP2016035497A Pending JP2016104913A (ja) 1997-11-17 2016-02-26 有機薄膜の低圧気相蒸着

Country Status (8)

Country Link
US (7) US6337102B1 (ja)
EP (1) EP1032722B1 (ja)
JP (5) JP2001523768A (ja)
KR (2) KR100585286B1 (ja)
AU (1) AU1412499A (ja)
DE (1) DE69827293T2 (ja)
TW (1) TW575699B (ja)
WO (1) WO1999025894A1 (ja)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002033190A (ja) * 2000-05-12 2002-01-31 Semiconductor Energy Lab Co Ltd 発光装置の作製方法
JP2003133068A (ja) * 2001-10-25 2003-05-09 Nec Corp 発光表示装置の製造方法およびそれを適用した発光表示装置の製造装置
US6776847B2 (en) 2001-12-12 2004-08-17 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus and film formation method and cleaning method
JP2006080506A (ja) * 2004-08-13 2006-03-23 Semiconductor Energy Lab Co Ltd 半導体装置の製造方法
WO2007029558A1 (ja) * 2005-09-06 2007-03-15 Tohoku University 成膜用材料及び成膜用材料の推定方法
JP2007533165A (ja) * 2004-04-13 2007-11-15 ザ、トラスティーズ オブ プリンストン ユニバーシティ バルクヘテロ接合を有する光電子装置の製造方法
WO2009034938A1 (ja) 2007-09-10 2009-03-19 Ulvac, Inc. 有機材料蒸気発生装置、成膜源、成膜装置
JP2009238756A (ja) * 1997-11-17 2009-10-15 Trustees Of Princeton Univ 有機薄膜の低圧蒸着
JP2009302045A (ja) * 2008-05-13 2009-12-24 Silver Seiko Ltd 有機エレクトロルミネッセンス素子の製造装置及び有機エレクトロルミネッセンス素子
WO2010007981A1 (ja) * 2008-07-18 2010-01-21 東京エレクトロン株式会社 成膜装置及び粉体気化装置
JP2010165620A (ja) * 2009-01-19 2010-07-29 Konica Minolta Holdings Inc 有機エレクトロルミネッセンス素子の製造方法
KR101125556B1 (ko) * 2009-10-28 2012-03-22 주식회사 에스에프에이 유기물 증착 장치
US8181666B2 (en) 2008-02-26 2012-05-22 Ulvac, Inc. Switch valve
JP2012528245A (ja) * 2009-05-26 2012-11-12 アイメック 有機材料層を基板上に形成する方法
US8420169B2 (en) 2007-09-10 2013-04-16 Ulvac, Inc. Method of manufacturing organic thin film
JP2013214777A (ja) * 2004-04-13 2013-10-17 Trustees Of Princeton Univ バルクヘテロ接合を有する光電子装置の製造方法
KR20140053980A (ko) * 2011-06-22 2014-05-08 아익스트론 에스이 기상 증착 시스템 및 공급 헤드
US9150953B2 (en) 2004-08-13 2015-10-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device including organic semiconductor

Families Citing this family (1025)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6303238B1 (en) * 1997-12-01 2001-10-16 The Trustees Of Princeton University OLEDs doped with phosphorescent compounds
US6209118B1 (en) * 1998-01-21 2001-03-27 Micron Technology, Inc. Method for modifying an integrated circuit
US6830828B2 (en) 1998-09-14 2004-12-14 The Trustees Of Princeton University Organometallic complexes as phosphorescent emitters in organic LEDs
US7001536B2 (en) * 1999-03-23 2006-02-21 The Trustees Of Princeton University Organometallic complexes as phosphorescent emitters in organic LEDs
JP3682465B2 (ja) * 1999-03-31 2005-08-10 独立行政法人産業技術総合研究所 樹脂成形物表面層の改質方法およびそのための装置および表面層が改質された樹脂成形物、および樹脂成形物表面層の着色方法およびそのための装置および表面層が着色された樹脂成形物、および表面層の改質により機能性を付与された樹脂成形物
US6537607B1 (en) * 1999-12-17 2003-03-25 Texas Instruments Incorporated Selective deposition of emissive layer in electroluminescent displays
CA2330067C (en) * 2000-01-07 2005-04-26 Paul Hammonds Scale prediction probe
DE10007059A1 (de) * 2000-02-16 2001-08-23 Aixtron Ag Verfahren und Vorrichtung zur Herstellung von beschichteten Substraten mittels Kondensationsbeschichtung
US6913713B2 (en) * 2002-01-25 2005-07-05 Konarka Technologies, Inc. Photovoltaic fibers
SG125891A1 (en) * 2000-09-08 2006-10-30 Semiconductor Energy Lab Light emitting device, method of manufacturing thesame, and thin film forming apparatus
DE10048759A1 (de) * 2000-09-29 2002-04-11 Aixtron Gmbh Verfahren und Vorrichtung zum Abscheiden insbesondere organischer Schichten im Wege der OVPD
TW463522B (en) * 2000-11-07 2001-11-11 Helix Technology Inc Manufacturing method for organic light emitting diode
US20030129299A1 (en) * 2000-11-16 2003-07-10 Swanson Leland S. Selective deposition of emissive layer in electroluminescent displays
DE10057134A1 (de) * 2000-11-17 2002-05-23 Aixtron Ag Verfahren zum Abscheiden von insbesondere kristallinen Schichten sowie Vorrichtung zur Durchführung des Verfahrens
EP2400046A1 (en) * 2001-03-30 2011-12-28 Technologies and Devices International Inc. Method and apparatus for growing submicron group III nitride structures utilizing HVPE techniques
DE10128091C1 (de) 2001-06-11 2002-10-02 Applied Films Gmbh & Co Kg Vorrichtung für die Beschichtung eines flächigen Substrats
US6784016B2 (en) 2001-06-21 2004-08-31 The Trustees Of Princeton University Organic light-emitting devices with blocking and transport layers
US20060011135A1 (en) * 2001-07-06 2006-01-19 Dmitriev Vladimir A HVPE apparatus for simultaneously producing multiple wafers during a single epitaxial growth run
US6936357B2 (en) * 2001-07-06 2005-08-30 Technologies And Devices International, Inc. Bulk GaN and ALGaN single crystals
US20070032046A1 (en) * 2001-07-06 2007-02-08 Dmitriev Vladimir A Method for simultaneously producing multiple wafers during a single epitaxial growth run and semiconductor structure grown thereby
US7501023B2 (en) * 2001-07-06 2009-03-10 Technologies And Devices, International, Inc. Method and apparatus for fabricating crack-free Group III nitride semiconductor materials
US6613143B1 (en) * 2001-07-06 2003-09-02 Technologies And Devices International, Inc. Method for fabricating bulk GaN single crystals
US6984934B2 (en) 2001-07-10 2006-01-10 The Trustees Of Princeton University Micro-lens arrays for display intensity enhancement
US20030026601A1 (en) * 2001-07-31 2003-02-06 The Arizona Board Of Regents On Behalf Of The University Of Arizona Vapor deposition and in-situ purification of organic molecules
WO2003022008A1 (en) * 2001-08-29 2003-03-13 The Trustees Of Princeton University Organic light emitting devices having carrier transporting layers comprising metal complexes
EP1421827B1 (en) * 2001-08-29 2012-02-22 The Trustees Of Princeton University Organic light emitting devices having carrier blocking layers comprising metal complexes
EP2275587B1 (en) 2001-09-04 2020-03-18 The Trustees of Princeton University Process for organic vapor jet deposition
US6734038B2 (en) * 2001-09-04 2004-05-11 The Trustees Of Princeton University Method of manufacturing high-mobility organic thin films using organic vapor phase deposition
US6716656B2 (en) 2001-09-04 2004-04-06 The Trustees Of Princeton University Self-aligned hybrid deposition
US7431968B1 (en) * 2001-09-04 2008-10-07 The Trustees Of Princeton University Process and apparatus for organic vapor jet deposition
US7744957B2 (en) * 2003-10-23 2010-06-29 The Trustees Of Princeton University Method and apparatus for depositing material
US8535759B2 (en) * 2001-09-04 2013-09-17 The Trustees Of Princeton University Method and apparatus for depositing material using a dynamic pressure
US7404862B2 (en) * 2001-09-04 2008-07-29 The Trustees Of Princeton University Device and method for organic vapor jet deposition
US6641730B2 (en) * 2001-10-03 2003-11-04 B. J. Services Company, Integrated debris management system
US6835469B2 (en) 2001-10-17 2004-12-28 The University Of Southern California Phosphorescent compounds and devices comprising the same
WO2003047316A1 (en) * 2001-11-29 2003-06-05 The Trustees Of Princeton University Increased emission efficiency in organic light-emitting devices on high-index substrates
US6863997B2 (en) * 2001-12-28 2005-03-08 The Trustees Of Princeton University White light emitting OLEDs from combined monomer and aggregate emission
US6869695B2 (en) 2001-12-28 2005-03-22 The Trustees Of Princeton University White light emitting OLEDs from combined monomer and aggregate emission
TWI262034B (en) * 2002-02-05 2006-09-11 Semiconductor Energy Lab Manufacturing system, manufacturing method, method of operating a manufacturing apparatus, and light emitting device
US7025442B2 (en) * 2002-02-11 2006-04-11 Ran Yaron Laser ink jet printer
TWI286044B (en) 2002-02-22 2007-08-21 Semiconductor Energy Lab Light-emitting device and method of manufacturing the same, and method of operating manufacturing apparatus
SG113448A1 (en) * 2002-02-25 2005-08-29 Semiconductor Energy Lab Fabrication system and a fabrication method of a light emitting device
TW589919B (en) * 2002-03-29 2004-06-01 Sanyo Electric Co Method for vapor deposition and method for making display device
US6951694B2 (en) * 2002-03-29 2005-10-04 The University Of Southern California Organic light emitting devices with electron blocking layers
AU2003224977A1 (en) * 2002-04-19 2003-11-03 Mattson Technology, Inc. System for depositing a film onto a substrate using a low vapor pressure gas precursor
US6774019B2 (en) * 2002-05-17 2004-08-10 International Business Machines Corporation Incorporation of an impurity into a thin film
JP4292777B2 (ja) * 2002-06-17 2009-07-08 ソニー株式会社 薄膜形成装置
US20030230238A1 (en) * 2002-06-03 2003-12-18 Fotios Papadimitrakopoulos Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM)
JP2004014311A (ja) * 2002-06-07 2004-01-15 Sony Corp 有機薄膜の形成方法
US20030230980A1 (en) * 2002-06-18 2003-12-18 Forrest Stephen R Very low voltage, high efficiency phosphorescent oled in a p-i-n structure
US7061175B2 (en) * 2002-08-16 2006-06-13 Universal Display Corporation Efficiency transparent cathode
US6916554B2 (en) * 2002-11-06 2005-07-12 The University Of Southern California Organic light emitting materials and devices
JP4578970B2 (ja) 2002-08-16 2010-11-10 ザ ユニバーシティ オブ サザン カリフォルニア アニオン性リガンドを有する有機発光材料
AU2003263929A1 (en) * 2002-08-16 2004-03-03 The University Of Southern California Organic light emitting materials and devices
US7663300B2 (en) * 2002-08-16 2010-02-16 Universal Display Corporation Organic light emitting devices for illumination
US7067170B2 (en) * 2002-09-23 2006-06-27 Eastman Kodak Company Depositing layers in OLED devices using viscous flow
US6911671B2 (en) * 2002-09-23 2005-06-28 Eastman Kodak Company Device for depositing patterned layers in OLED displays
KR100473806B1 (ko) * 2002-09-28 2005-03-10 한국전자통신연구원 유기물 박막 및 유기물 소자를 위한 대면적 유기물 기상증착 장치 및 제조 방법
US7049636B2 (en) * 2002-10-28 2006-05-23 Universal Display Corporation Device including OLED controlled by n-type transistor
US20040086743A1 (en) * 2002-11-06 2004-05-06 Brown Cory S. Organometallic compounds for use in electroluminescent devices
US6858327B2 (en) 2002-11-08 2005-02-22 Universal Display Corporation Organic light emitting materials and devices
US6687266B1 (en) * 2002-11-08 2004-02-03 Universal Display Corporation Organic light emitting materials and devices
US6982179B2 (en) * 2002-11-15 2006-01-03 University Display Corporation Structure and method of fabricating organic devices
US20040096570A1 (en) * 2002-11-15 2004-05-20 Michael Weaver Structure and method of fabricating organic devices
US6891326B2 (en) * 2002-11-15 2005-05-10 Universal Display Corporation Structure and method of fabricating organic devices
TW595251B (en) * 2002-12-09 2004-06-21 Univ Nat Cheng Kung Method for manufacturing organic light-emitting diodes
JP5072184B2 (ja) * 2002-12-12 2012-11-14 株式会社半導体エネルギー研究所 成膜方法
US8222072B2 (en) * 2002-12-20 2012-07-17 The Trustees Of Princeton University Methods of fabricating devices by low pressure cold welding
US20040144321A1 (en) * 2003-01-28 2004-07-29 Eastman Kodak Company Method of designing a thermal physical vapor deposition system
WO2004079434A2 (en) * 2003-02-28 2004-09-16 Northwestern University Vapor deposited electro-optic films self-assembled through hydrogen bonding
US6995445B2 (en) * 2003-03-14 2006-02-07 The Trustees Of Princeton University Thin film organic position sensitive detectors
KR101391117B1 (ko) 2003-03-24 2014-04-30 유니버시티 오브 써던 캘리포니아 Ｉｒ의 페닐-피라졸 착물
US7465678B2 (en) * 2003-03-28 2008-12-16 The Trustees Of Princeton University Deformable organic devices
US20050227389A1 (en) * 2004-04-13 2005-10-13 Rabin Bhattacharya Deformable organic devices
US7090928B2 (en) 2003-04-01 2006-08-15 The University Of Southern California Binuclear compounds
US6902833B2 (en) * 2003-04-01 2005-06-07 University Of Southern California Materials and structures for enhancing the performance or organic light emitting devices
US20040199052A1 (en) 2003-04-01 2004-10-07 Scimed Life Systems, Inc. Endoscopic imaging system
US20040209116A1 (en) * 2003-04-21 2004-10-21 Xiaofan Ren Organic light emitting devices with wide gap host materials
US20040209115A1 (en) * 2003-04-21 2004-10-21 Thompson Mark E. Organic light emitting devices with wide gap host materials
US7029765B2 (en) * 2003-04-22 2006-04-18 Universal Display Corporation Organic light emitting devices having reduced pixel shrinkage
JP4179041B2 (ja) * 2003-04-30 2008-11-12 株式会社島津製作所 有機ｅｌ用保護膜の成膜装置、製造方法および有機ｅｌ素子
TWI224473B (en) * 2003-06-03 2004-11-21 Chin-Hsin Chen Doped co-host emitter system in organic electroluminescent devices
US7053412B2 (en) * 2003-06-27 2006-05-30 The Trustees Of Princeton University And Universal Display Corporation Grey scale bistable display
US7211823B2 (en) 2003-07-10 2007-05-01 Universal Display Corporation Organic light emitting device structure for obtaining chromaticity stability
US6885025B2 (en) * 2003-07-10 2005-04-26 Universal Display Corporation Organic light emitting device structures for obtaining chromaticity stability
US6837939B1 (en) 2003-07-22 2005-01-04 Eastman Kodak Company Thermal physical vapor deposition source using pellets of organic material for making OLED displays
US7018723B2 (en) * 2003-07-25 2006-03-28 The University Of Southern California Materials and structures for enhancing the performance of organic light emitting devices
US7198859B2 (en) * 2003-07-25 2007-04-03 Universal Display Corporation Materials and structures for enhancing the performance of organic light emitting devices
US20050025993A1 (en) 2003-07-25 2005-02-03 Thompson Mark E. Materials and structures for enhancing the performance of organic light emitting devices
US7179543B2 (en) * 2003-10-06 2007-02-20 The Trustees Of Princeton University Doping of organic opto-electronic devices to extend reliability
US6972431B2 (en) * 2003-11-26 2005-12-06 Trustees Of Princeton University Multilayer organic photodetectors with improved performance
US7061011B2 (en) * 2003-11-26 2006-06-13 The Trustees Of Princeton University Bipolar organic devices
US7070867B2 (en) * 2003-12-05 2006-07-04 The University Of Southern California OLEDs having n-type doping
US20050137459A1 (en) * 2003-12-17 2005-06-23 Scimed Life Systems, Inc. Medical device with OLED illumination light source
US20050164031A1 (en) * 2004-01-26 2005-07-28 Thompson Mark E. Dual emitting dyads of heavy metal complexes as broad band emitters for organic LEDs
US7279232B2 (en) * 2004-01-26 2007-10-09 Universal Display Corporation Electroluminescent stability
US7151339B2 (en) * 2004-01-30 2006-12-19 Universal Display Corporation OLED efficiency by utilization of different doping concentrations within the device emissive layer
US6893939B1 (en) 2004-02-25 2005-05-17 Eastman Kodak Company Thermal physical vapor deposition source with minimized internal condensation effects
US7045952B2 (en) * 2004-03-04 2006-05-16 Universal Display Corporation OLEDs with mixed host emissive layer
US7708859B2 (en) * 2004-04-30 2010-05-04 Lam Research Corporation Gas distribution system having fast gas switching capabilities
US20050244580A1 (en) * 2004-04-30 2005-11-03 Eastman Kodak Company Deposition apparatus for temperature sensitive materials
US20070066038A1 (en) * 2004-04-30 2007-03-22 Lam Research Corporation Fast gas switching plasma processing apparatus
US7279704B2 (en) 2004-05-18 2007-10-09 The University Of Southern California Complexes with tridentate ligands
US7393599B2 (en) 2004-05-18 2008-07-01 The University Of Southern California Luminescent compounds with carbene ligands
US7445855B2 (en) * 2004-05-18 2008-11-04 The University Of Southern California Cationic metal-carbene complexes
US7655323B2 (en) * 2004-05-18 2010-02-02 The University Of Southern California OLEDs utilizing macrocyclic ligand systems
US7582365B2 (en) * 2005-01-10 2009-09-01 Universal Display Corporation Reversibly reducible metal complexes as electron transporting materials for OLEDs
US7601436B2 (en) 2004-05-18 2009-10-13 The University Of Southern California Carbene metal complexes as OLED materials
US7154114B2 (en) * 2004-05-18 2006-12-26 Universal Display Corporation Cyclometallated iridium carbene complexes for use as hosts
US7491823B2 (en) * 2004-05-18 2009-02-17 The University Of Southern California Luminescent compounds with carbene ligands
US20070190247A1 (en) * 2004-05-18 2007-08-16 Mecharonics Co., Ltd. Method for forming organic light-emitting layer
US7534505B2 (en) * 2004-05-18 2009-05-19 The University Of Southern California Organometallic compounds for use in electroluminescent devices
US7598388B2 (en) * 2004-05-18 2009-10-06 The University Of Southern California Carbene containing metal complexes as OLEDs
US20050275056A1 (en) * 2004-05-26 2005-12-15 Stephen Forrest Organic heterojunction bipolar transistor
US7220687B2 (en) * 2004-06-25 2007-05-22 Applied Materials, Inc. Method to improve water-barrier performance by changing film surface morphology
US7214600B2 (en) * 2004-06-25 2007-05-08 Applied Materials, Inc. Method to improve transmittance of an encapsulating film
JP5848862B2 (ja) 2004-06-25 2016-01-27 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ カプセル化膜の遮水性能の改善
US8540843B2 (en) 2004-06-30 2013-09-24 Lam Research Corporation Plasma chamber top piece assembly
US7780791B2 (en) * 2004-06-30 2010-08-24 Lam Research Corporation Apparatus for an optimized plasma chamber top piece
US20060000551A1 (en) * 2004-06-30 2006-01-05 Saldana Miguel A Methods and apparatus for optimal temperature control in a plasma processing system
US20060008670A1 (en) * 2004-07-06 2006-01-12 Chun Lin Organic light emitting materials and devices
US7709100B2 (en) * 2004-07-07 2010-05-04 Universal Display Corporation Electroluminescent efficiency
WO2006014599A2 (en) 2004-07-07 2006-02-09 Universal Display Corporation Stable and efficient electroluminescent materials
US20060008671A1 (en) * 2004-07-07 2006-01-12 Raymond Kwong Electroluminescent efficiency
CN1725521B (zh) * 2004-07-16 2010-10-27 国际商业机器公司 光电子器件及其制造方法
US7194173B2 (en) * 2004-07-16 2007-03-20 The Trustees Of Princeton University Organic devices having a fiber structure
US20060088728A1 (en) * 2004-10-22 2006-04-27 Raymond Kwong Arylcarbazoles as hosts in PHOLEDs
US20060099344A1 (en) * 2004-11-09 2006-05-11 Eastman Kodak Company Controlling the vaporization of organic material
US7465475B2 (en) 2004-11-09 2008-12-16 Eastman Kodak Company Method for controlling the deposition of vaporized organic material
DE102004054893A1 (de) * 2004-11-12 2006-05-24 Micronas Gmbh Verfahren und Schaltungsanordnung zur Kanalfilterung analog oder digital modulierter TV-Signale
TW200634801A (en) * 2004-11-17 2006-10-01 Hitachi Maxell Optical information-recording medium
US20080308037A1 (en) * 2007-06-14 2008-12-18 Massachusetts Institute Of Technology Method and apparatus for thermal jet printing
US8986780B2 (en) 2004-11-19 2015-03-24 Massachusetts Institute Of Technology Method and apparatus for depositing LED organic film
US8128753B2 (en) 2004-11-19 2012-03-06 Massachusetts Institute Of Technology Method and apparatus for depositing LED organic film
US7252859B2 (en) * 2004-11-19 2007-08-07 Eastman Kodak Company Organic materials for an evaporation source
US7776456B2 (en) 2004-12-03 2010-08-17 Universal Display Corporation Organic light emitting devices with an emissive region having emissive and non-emissive layers and method of making
JP4560394B2 (ja) * 2004-12-13 2010-10-13 長州産業株式会社 薄膜形成用分子供給装置
US7431807B2 (en) * 2005-01-07 2008-10-07 Universal Display Corporation Evaporation method using infrared guiding heater
JP4235619B2 (ja) * 2005-02-14 2009-03-11 キヤノン株式会社 有機発光素子の製造方法
US20060251921A1 (en) * 2005-05-06 2006-11-09 Stephen Forrest OLEDs utilizing direct injection to the triplet state
US7683536B2 (en) * 2005-03-31 2010-03-23 The Trustees Of Princeton University OLEDs utilizing direct injection to the triplet state
US20060222886A1 (en) * 2005-04-04 2006-10-05 Raymond Kwong Arylpyrene compounds
US9070884B2 (en) 2005-04-13 2015-06-30 Universal Display Corporation Hybrid OLED having phosphorescent and fluorescent emitters
US7807275B2 (en) 2005-04-21 2010-10-05 Universal Display Corporation Non-blocked phosphorescent OLEDs
US9051344B2 (en) * 2005-05-06 2015-06-09 Universal Display Corporation Stability OLED materials and devices
US8586204B2 (en) 2007-12-28 2013-11-19 Universal Display Corporation Phosphorescent emitters and host materials with improved stability
US7902374B2 (en) * 2005-05-06 2011-03-08 Universal Display Corporation Stability OLED materials and devices
US7851072B2 (en) * 2005-05-19 2010-12-14 Universal Display Corporation Stable and efficient electroluminescent materials
WO2006130598A2 (en) 2005-05-31 2006-12-07 Universal Display Corporation Triphenylene hosts in phosphorescent light emitting diodes
US7474048B2 (en) * 2005-06-01 2009-01-06 The Trustees Of Princeton University Fluorescent filtered electrophosphorescence
US20060273713A1 (en) * 2005-06-02 2006-12-07 Eastman Kodak Company Process for making an organic light-emitting device
US20060275542A1 (en) * 2005-06-02 2006-12-07 Eastman Kodak Company Deposition of uniform layer of desired material
US8148891B2 (en) * 2005-10-04 2012-04-03 Universal Display Corporation Electron impeding layer for high efficiency phosphorescent OLEDs
US20070103066A1 (en) * 2005-11-04 2007-05-10 D Andrade Brian W Stacked OLEDs with a reflective conductive layer
US8021763B2 (en) * 2005-11-23 2011-09-20 The Trustees Of Princeton University Phosphorescent OLED with interlayer
US7645483B2 (en) * 2006-01-17 2010-01-12 Eastman Kodak Company Two-dimensional aperture array for vapor deposition
EP2987450B1 (en) 2006-02-07 2019-06-05 Boston Scientific Limited Medical device light source
US8142909B2 (en) * 2006-02-10 2012-03-27 Universal Display Corporation Blue phosphorescent imidazophenanthridine materials
KR20210130847A (ko) 2006-02-10 2021-11-01 유니버셜 디스플레이 코포레이션 시클로금속화 이미다조[1,2-ｆ]페난트리딘 및 디이미다조[1,2-ａ:1',2'-ｃ]퀴나졸린 리간드, 및 이의 등전자성 및 벤즈고리화된 유사체의 금속 착체
EP2378586B1 (en) 2006-04-13 2012-11-21 The University of Southern California Organic electronic devices using phthalimide compounds
US7579773B2 (en) * 2006-06-05 2009-08-25 The Trustees Of Princeton University Organic light-emitting device with a phosphor-sensitized fluorescent emission layer
JP5051869B2 (ja) * 2006-06-14 2012-10-17 東京エレクトロン株式会社 発光素子および発光素子の製造方法
DE202007018948U1 (de) 2006-07-18 2009-12-31 University Of Southern California, Los Angeles Elektroden mit Nanoröhrchen für organische optoelektronische Einrichtung
US7724796B2 (en) * 2006-08-29 2010-05-25 The Trustees Of Princeton University Organic laser
US7710017B2 (en) * 2006-09-08 2010-05-04 Universal Display Corporation Organic light emitting device having a transparent microcavity
US7598381B2 (en) * 2006-09-11 2009-10-06 The Trustees Of Princeton University Near-infrared emitting organic compounds and organic devices using the same
US7800295B2 (en) * 2006-09-15 2010-09-21 Universal Display Corporation Organic light emitting device having a microcavity
US8647435B1 (en) 2006-10-11 2014-02-11 Ostendo Technologies, Inc. HVPE apparatus and methods for growth of p-type single crystal group III nitride materials
US8945722B2 (en) * 2006-10-27 2015-02-03 The University Of Southern California Materials and architectures for efficient harvesting of singlet and triplet excitons for white light emitting OLEDs
US8519130B2 (en) * 2006-12-08 2013-08-27 Universal Display Corporation Method for synthesis of iriduim (III) complexes with sterically demanding ligands
US8778508B2 (en) * 2006-12-08 2014-07-15 Universal Display Corporation Light-emitting organometallic complexes
KR101263005B1 (ko) * 2006-12-19 2013-05-08 비코 인스트루먼츠 인코포레이티드 증착 장치 및 방법
US7879401B2 (en) * 2006-12-22 2011-02-01 The Regents Of The University Of Michigan Organic vapor jet deposition using an exhaust
KR101118808B1 (ko) * 2006-12-28 2012-03-22 유니버셜 디스플레이 코포레이션 긴 수명의 인광 유기 발광 소자(ｏｌｅｄ) 구조체
JP5020650B2 (ja) * 2007-02-01 2012-09-05 東京エレクトロン株式会社 蒸着装置、蒸着方法および蒸着装置の製造方法
KR101634508B1 (ko) 2007-03-08 2016-06-28 유니버셜 디스플레이 코포레이션 인광성 물질
US9130177B2 (en) 2011-01-13 2015-09-08 Universal Display Corporation 5-substituted 2 phenylquinoline complexes materials for light emitting diode
US20130032785A1 (en) 2011-08-01 2013-02-07 Universal Display Corporation Materials for organic light emitting diode
WO2008111850A2 (en) * 2007-03-15 2008-09-18 Universitetet I Oslo Synthesis of molecular metalorganic compounds
EP2132802B1 (en) 2007-03-30 2013-01-09 The Regents of the University of Michigan Oled with improved light outcoupling
US7993763B2 (en) * 2007-05-10 2011-08-09 Universal Display Corporation Organometallic compounds having host and dopant functionalities
US8556389B2 (en) 2011-02-04 2013-10-15 Kateeva, Inc. Low-profile MEMS thermal printhead die having backside electrical connections
KR102073400B1 (ko) * 2007-08-08 2020-02-05 유니버셜 디스플레이 코포레이션 인광성 발광 다이오드의 단일 트리페닐렌 발색단
KR101565724B1 (ko) 2007-08-08 2015-11-03 유니버셜 디스플레이 코포레이션 트리페닐렌기를 포함하는 벤조 융합 티오펜 또는 벤조 융합 푸란 화합물
US8440021B2 (en) 2007-08-16 2013-05-14 The Regents Of The University Of Michigan Apparatus and method for deposition for organic thin films
WO2009037155A1 (en) * 2007-09-20 2009-03-26 Basf Se Electroluminescent device
US7858144B2 (en) * 2007-09-26 2010-12-28 Eastman Kodak Company Process for depositing organic materials
DE102008010041A1 (de) * 2007-09-28 2009-04-02 Osram Opto Semiconductors Gmbh Schichtabscheidevorrichtung und Verfahren zu deren Betrieb
US8067100B2 (en) 2007-10-04 2011-11-29 Universal Display Corporation Complexes with tridentate ligands
US8383249B2 (en) * 2007-10-04 2013-02-26 Universal Display Corporation Complexes with tridentate ligands
US20090243468A1 (en) * 2007-10-16 2009-10-01 Thompson Mark E Arylimino-isoindoline complexes for use in organic light emitting diodes
US20100234478A1 (en) * 2007-10-29 2010-09-16 Base Se Process for preparation of conducting polymers
US8476822B2 (en) 2007-11-09 2013-07-02 Universal Display Corporation Saturated color organic light emitting devices
US8815411B2 (en) * 2007-11-09 2014-08-26 The Regents Of The University Of Michigan Stable blue phosphorescent organic light emitting devices
US20090153034A1 (en) * 2007-12-13 2009-06-18 Universal Display Corporation Carbazole-containing materials in phosphorescent light emittinig diodes
WO2009085344A2 (en) 2007-12-28 2009-07-09 Universal Display Corporation Dibenzothiophene-containing materials in phosphorescent light emitting diodes
US8221905B2 (en) * 2007-12-28 2012-07-17 Universal Display Corporation Carbazole-containing materials in phosphorescent light emitting diodes
US8040053B2 (en) * 2008-02-09 2011-10-18 Universal Display Corporation Organic light emitting device architecture for reducing the number of organic materials
US7858507B2 (en) * 2008-02-13 2010-12-28 The Regents Of The University Of Michigan Method and system for creating photosensitive array with integrated backplane
KR100922758B1 (ko) * 2008-02-20 2009-10-21 삼성모바일디스플레이주식회사 유기 발광 소자
DE102008011185A1 (de) 2008-02-27 2009-09-03 Osram Opto Semiconductors Gmbh Verfahren zur Herstellung einer dotierten organischen halbleitenden Schicht
CN101965228B (zh) * 2008-02-29 2013-10-16 株式会社康井精机 复合材料板的制造装置
KR101557517B1 (ko) * 2008-03-19 2015-10-06 더 리젠츠 오브 더 유니버시티 오브 미시간 적외선을 검출하기 위한 유기 박막
GB0810532D0 (en) * 2008-06-10 2008-07-09 Oled T Ltd Method of making an oled
US9048344B2 (en) 2008-06-13 2015-06-02 Kateeva, Inc. Gas enclosure assembly and system
US11975546B2 (en) 2008-06-13 2024-05-07 Kateeva, Inc. Gas enclosure assembly and system
US9604245B2 (en) 2008-06-13 2017-03-28 Kateeva, Inc. Gas enclosure systems and methods utilizing an auxiliary enclosure
US8383202B2 (en) 2008-06-13 2013-02-26 Kateeva, Inc. Method and apparatus for load-locked printing
US12018857B2 (en) 2008-06-13 2024-06-25 Kateeva, Inc. Gas enclosure assembly and system
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
US8899171B2 (en) 2008-06-13 2014-12-02 Kateeva, Inc. Gas enclosure assembly and system
KR20160140980A (ko) 2008-06-30 2016-12-07 유니버셜 디스플레이 코포레이션 황 함유 그룹을 포함하는 정공 수송 물질
JP5591800B2 (ja) 2008-06-30 2014-09-17 ユニバーサル・ディスプレイ・コーポレーション トリフェニレンを含有するホール輸送材料
EP2313472B1 (en) 2008-07-18 2012-08-15 Basf Se Azapyrenes for electronic applications
WO2010027583A1 (en) 2008-09-03 2010-03-11 Universal Display Corporation Phosphorescent materials
JP5698135B2 (ja) * 2008-09-04 2015-04-08 ユニバーサル ディスプレイ コーポレイション 白色燐光有機発光装置
EP2161272A1 (en) 2008-09-05 2010-03-10 Basf Se Phenanthrolines
TWI482756B (zh) 2008-09-16 2015-05-01 Universal Display Corp 磷光物質
US8426035B2 (en) * 2008-09-25 2013-04-23 Universal Display Corporation Organoselenium materials and their uses in organic light emitting devices
US20100225252A1 (en) 2008-10-01 2010-09-09 Universal Display Corporation Novel amoled display architecture
US8827488B2 (en) 2008-10-01 2014-09-09 Universal Display Corporation OLED display architecture
US9385167B2 (en) 2008-10-01 2016-07-05 Universal Display Corporation OLED display architecture
US8053770B2 (en) * 2008-10-14 2011-11-08 Universal Display Corporation Emissive layer patterning for OLED
US8766291B2 (en) 2008-10-28 2014-07-01 The Regents Of The University Of Michigan Stacked white OLED having separate red, green and blue sub-elements
DE102008054052A1 (de) 2008-10-30 2010-05-06 Osram Opto Semiconductors Gmbh Organisches, strahlungsemittierendes Bauelement und Verfahren zur Herstellung eines solchen
CN102272261B (zh) * 2008-11-11 2014-02-26 通用显示公司 磷光发射体
US8815415B2 (en) 2008-12-12 2014-08-26 Universal Display Corporation Blue emitter with high efficiency based on imidazo[1,2-f] phenanthridine iridium complexes
KR101932823B1 (ko) 2008-12-12 2018-12-27 유니버셜 디스플레이 코포레이션 도핑된 정공 수송층을 통한 ｏｌｅｄ 안정성 향상
US20100154710A1 (en) * 2008-12-18 2010-06-24 Scott Wayne Priddy In-vacuum deposition of organic materials
EP2204467B1 (en) 2008-12-23 2014-05-07 Applied Materials, Inc. Method and apparatus for depositing mixed layers
US9127349B2 (en) 2008-12-23 2015-09-08 Applied Materials, Inc. Method and apparatus for depositing mixed layers
US20100188457A1 (en) * 2009-01-05 2010-07-29 Madigan Connor F Method and apparatus for controlling the temperature of an electrically-heated discharge nozzle
US9067947B2 (en) * 2009-01-16 2015-06-30 Universal Display Corporation Organic electroluminescent materials and devices
US8310150B2 (en) * 2009-02-04 2012-11-13 The Regents Of The University Of Michigan Light emitting device with high outcoupling
TW201100973A (en) * 2009-02-22 2011-01-01 Mapper Lithography Ip Bv A method and arrangement for realizing a vacuum in a vacuum chamber
US8709615B2 (en) 2011-07-28 2014-04-29 Universal Display Corporation Heteroleptic iridium complexes as dopants
US11910700B2 (en) 2009-03-23 2024-02-20 Universal Display Corporation Heteroleptic iridium complexes as dopants
US8722205B2 (en) 2009-03-23 2014-05-13 Universal Display Corporation Heteroleptic iridium complex
WO2010110871A2 (en) * 2009-03-25 2010-09-30 Veeco Instruments Inc. Deposition of high vapor pressure materials
US20100244735A1 (en) * 2009-03-26 2010-09-30 Energy Focus, Inc. Lighting Device Supplying Temporally Appropriate Light
US8569744B2 (en) * 2009-03-30 2013-10-29 Universal Display Corporation OLED display architecture
CN105820192B (zh) 2009-04-06 2020-04-07 通用显示公司 包含新的配体结构的金属配合物
TWI638808B (zh) * 2009-04-28 2018-10-21 美商環球展覽公司 具有甲基-ｄ３取代之銥錯合物
EP2425470A2 (en) * 2009-05-01 2012-03-07 Kateeva, Inc. Method and apparatus for organic vapor printing
TWI541234B (zh) * 2009-05-12 2016-07-11 環球展覽公司 用於有機發光二極體之２－氮雜聯伸三苯材料
US8586203B2 (en) 2009-05-20 2013-11-19 Universal Display Corporation Metal complexes with boron-nitrogen heterocycle containing ligands
TWI472639B (zh) 2009-05-22 2015-02-11 Samsung Display Co Ltd 薄膜沉積設備
TWI475124B (zh) 2009-05-22 2015-03-01 Samsung Display Co Ltd 薄膜沉積設備
US8882920B2 (en) 2009-06-05 2014-11-11 Samsung Display Co., Ltd. Thin film deposition apparatus
US8882921B2 (en) 2009-06-08 2014-11-11 Samsung Display Co., Ltd. Thin film deposition apparatus
CN102482574B (zh) 2009-06-18 2014-09-24 巴斯夫欧洲公司 用作场致发光器件的空穴传输材料的菲并唑化合物
KR101117719B1 (ko) 2009-06-24 2012-03-08 삼성모바일디스플레이주식회사 박막 증착 장치
KR101127575B1 (ko) 2009-08-10 2012-03-23 삼성모바일디스플레이주식회사 증착 가림막을 가지는 박막 증착 장치
JP5328726B2 (ja) 2009-08-25 2013-10-30 三星ディスプレイ株式會社 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法
US9496315B2 (en) * 2009-08-26 2016-11-15 Universal Display Corporation Top-gate bottom-contact organic transistor
US9017826B2 (en) 2009-08-26 2015-04-28 The University Of Southern California Visible/near-infrared porphyrin-tape/C60 organic photodetectors
JP5677785B2 (ja) 2009-08-27 2015-02-25 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
US8696815B2 (en) 2009-09-01 2014-04-15 Samsung Display Co., Ltd. Thin film deposition apparatus
US20110097495A1 (en) * 2009-09-03 2011-04-28 Universal Display Corporation Organic vapor jet printing with chiller plate
US8801856B2 (en) * 2009-09-08 2014-08-12 Universal Display Corporation Method and system for high-throughput deposition of patterned organic thin films
US8466455B2 (en) * 2009-09-17 2013-06-18 Universal Display Corporation Device structure
CN102549792B (zh) 2009-10-13 2015-11-25 巴斯夫欧洲公司 生产有机太阳能电池和有机光检测器用光活性层的混合物
US8876975B2 (en) 2009-10-19 2014-11-04 Samsung Display Co., Ltd. Thin film deposition apparatus
US8545996B2 (en) 2009-11-02 2013-10-01 The University Of Southern California Ion-pairing soft salts based on organometallic complexes and their applications in organic light emitting diodes
US8580394B2 (en) 2009-11-19 2013-11-12 Universal Display Corporation 3-coordinate copper(I)-carbene complexes
WO2011062857A2 (en) 2009-11-20 2011-05-26 Universal Display Corporation Oleds with low-index islands to enhance outcoupling of light
US8330152B2 (en) * 2009-12-02 2012-12-11 Universal Display Corporation OLED display architecture with improved aperture ratio
KR101084184B1 (ko) 2010-01-11 2011-11-17 삼성모바일디스플레이주식회사 박막 증착 장치
KR101174875B1 (ko) 2010-01-14 2012-08-17 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
US8288187B2 (en) * 2010-01-20 2012-10-16 Universal Display Corporation Electroluminescent devices for lighting applications
KR101193186B1 (ko) 2010-02-01 2012-10-19 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
WO2011096923A1 (en) 2010-02-03 2011-08-11 Universal Display Corporation Organic light emitting device with conducting cover
US9156870B2 (en) * 2010-02-25 2015-10-13 Universal Display Corporation Phosphorescent emitters
US9175211B2 (en) * 2010-03-03 2015-11-03 Universal Display Corporation Phosphorescent materials
KR101156441B1 (ko) 2010-03-11 2012-06-18 삼성모바일디스플레이주식회사 박막 증착 장치
US8334545B2 (en) * 2010-03-24 2012-12-18 Universal Display Corporation OLED display architecture
KR101910331B1 (ko) 2010-03-25 2018-10-19 유니버셜 디스플레이 코포레이션 용액 처리 가능한 도핑된 트리아릴아민 정공 주입 물질
US8450730B2 (en) 2010-03-31 2013-05-28 The Regents Of The University Of Michigan Light emitting device having peripheral emissive region
KR101202348B1 (ko) 2010-04-06 2012-11-16 삼성디스플레이 주식회사 박막 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
US8227801B2 (en) 2010-04-26 2012-07-24 Universal Display Corporation Bicarbzole containing compounds for OLEDs
US8968887B2 (en) 2010-04-28 2015-03-03 Universal Display Corporation Triphenylene-benzofuran/benzothiophene/benzoselenophene compounds with substituents joining to form fused rings
EP2564438B1 (en) 2010-04-28 2016-10-19 Universal Display Corporation Depositing premixed materials
US8894458B2 (en) 2010-04-28 2014-11-25 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9073948B2 (en) 2010-05-14 2015-07-07 Universal Display Corporation Azaborine compounds as host materials and dopants for PHOLEDs
US8564001B2 (en) 2010-05-21 2013-10-22 Universal Display Corporation Organic light emitting device lighting panel
US8673458B2 (en) 2010-06-11 2014-03-18 Universal Display Corporation Delayed fluorescence OLED
US8742657B2 (en) 2010-06-11 2014-06-03 Universal Display Corporation Triplet-Triplet annihilation up conversion (TTA-UC) for display and lighting applications
KR101223723B1 (ko) 2010-07-07 2013-01-18 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101626646B1 (ko) 2010-07-22 2016-06-01 유니버셜 디스플레이 코포레이션 유기 증기 제트 인쇄
WO2012016074A1 (en) 2010-07-29 2012-02-02 University Of Southern California Co-deposition methods for the fabrication of organic optoelectronic devices
KR101673017B1 (ko) 2010-07-30 2016-11-07 삼성디스플레이 주식회사 박막 증착 장치 및 이를 이용한 유기 발광 표시장치의 제조 방법
KR101753172B1 (ko) 2010-08-20 2017-07-04 유니버셜 디스플레이 코포레이션 Ｏｌｅｄ를 위한 바이카르바졸 화합물
US20120049168A1 (en) 2010-08-31 2012-03-01 Universal Display Corporation Cross-Linked Charge Transport Layer Containing an Additive Compound
US8932734B2 (en) 2010-10-08 2015-01-13 Universal Display Corporation Organic electroluminescent materials and devices
KR101738531B1 (ko) 2010-10-22 2017-05-23 삼성디스플레이 주식회사 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101723506B1 (ko) 2010-10-22 2017-04-19 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR20120045865A (ko) 2010-11-01 2012-05-09 삼성모바일디스플레이주식회사 유기층 증착 장치
US8269317B2 (en) 2010-11-11 2012-09-18 Universal Display Corporation Phosphorescent materials
US20120138906A1 (en) 2010-12-07 2012-06-07 The University of Southern California USC Stevens Institute for Innovation Capture agents for unsaturated metal complexes
KR20120065789A (ko) 2010-12-13 2012-06-21 삼성모바일디스플레이주식회사 유기층 증착 장치
KR101760897B1 (ko) 2011-01-12 2017-07-25 삼성디스플레이 주식회사 증착원 및 이를 구비하는 유기막 증착 장치
US9698140B2 (en) 2011-01-12 2017-07-04 Universal Display Corporation OLED lighting device with short tolerant structure
CN103348477B (zh) 2011-01-12 2017-02-08 环球展览公司 具有短路容许结构的oled照明装置
US10008677B2 (en) 2011-01-13 2018-06-26 Universal Display Corporation Materials for organic light emitting diode
US8415031B2 (en) 2011-01-24 2013-04-09 Universal Display Corporation Electron transporting compounds
US8563737B2 (en) 2011-02-23 2013-10-22 Universal Display Corporation Methods of making bis-tridentate carbene complexes of ruthenium and osmium
US8748011B2 (en) 2011-02-23 2014-06-10 Universal Display Corporation Ruthenium carbene complexes for OLED material
CN111732611B (zh) 2011-02-23 2022-08-23 通用显示公司 新型的四齿铂络合物
US9005772B2 (en) 2011-02-23 2015-04-14 Universal Display Corporation Thioazole and oxazole carbene metal complexes as phosphorescent OLED materials
US8492006B2 (en) 2011-02-24 2013-07-23 Universal Display Corporation Germanium-containing red emitter materials for organic light emitting diode
US8883322B2 (en) 2011-03-08 2014-11-11 Universal Display Corporation Pyridyl carbene phosphorescent emitters
WO2012121237A1 (ja) * 2011-03-09 2012-09-13 コニカミノルタホールディングス株式会社 蒸着装置及び薄膜形成方法
US8664970B2 (en) 2011-03-14 2014-03-04 Universal Display Corporation Method for accelerated lifetesting of large area OLED lighting panels
US8902245B2 (en) 2011-04-07 2014-12-02 Universal Display Corporation Method for driving quad-subpixel display
US8580399B2 (en) 2011-04-08 2013-11-12 Universal Display Corporation Substituted oligoazacarbazoles for light emitting diodes
CN103229325B (zh) 2011-04-08 2018-02-16 卡帝瓦公司 用于利用面式滚筒印制的方法和设备
US8866416B2 (en) 2011-05-04 2014-10-21 Universal Display Corporation Illumination source using LEDs and OLEDs
US8981640B2 (en) 2011-05-11 2015-03-17 Universal Display Corporation Simplified patterned light panel
US8564192B2 (en) 2011-05-11 2013-10-22 Universal Display Corporation Process for fabricating OLED lighting panels
US8927308B2 (en) 2011-05-12 2015-01-06 Universal Display Corporation Method of forming bus line designs for large-area OLED lighting
US8432095B2 (en) 2011-05-11 2013-04-30 Universal Display Corporation Process for fabricating metal bus lines for OLED lighting panels
WO2012155099A1 (en) 2011-05-12 2012-11-15 Universal Display Corporation Flexible lighting devices
US8907560B2 (en) 2011-05-12 2014-12-09 Universal Display Corporation Dynamic OLED lighting
US8773013B2 (en) 2011-05-12 2014-07-08 Universal Display Corporation Three dimensional OLED lamps
US8795850B2 (en) 2011-05-19 2014-08-05 Universal Display Corporation Phosphorescent heteroleptic phenylbenzimidazole dopants and new synthetic methodology
US9212197B2 (en) 2011-05-19 2015-12-15 Universal Display Corporation Phosphorescent heteroleptic phenylbenzimidazole dopants
KR101840654B1 (ko) 2011-05-25 2018-03-22 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
US8748012B2 (en) 2011-05-25 2014-06-10 Universal Display Corporation Host materials for OLED
KR101852517B1 (ko) 2011-05-25 2018-04-27 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101857992B1 (ko) 2011-05-25 2018-05-16 삼성디스플레이 주식회사 패터닝 슬릿 시트 어셈블리, 유기막 증착 장치, 유기 발광 표시 장치 제조 방법 및 유기 발광 표시 장치
KR101857249B1 (ko) 2011-05-27 2018-05-14 삼성디스플레이 주식회사 패터닝 슬릿 시트 어셈블리, 유기막 증착 장치, 유기 발광 표시장치제조 방법 및 유기 발광 표시 장치
US10158089B2 (en) 2011-05-27 2018-12-18 Universal Display Corporation Organic electroluminescent materials and devices
WO2012166101A1 (en) 2011-05-27 2012-12-06 Universal Display Corporation Oled having multi-component emissivie layer
US10079349B2 (en) 2011-05-27 2018-09-18 Universal Display Corporation Organic electroluminescent materials and devices
CN102558034B (zh) * 2011-06-07 2016-05-18 中国科学院福建物质结构研究所 一种有机三阶非线性光学材料4-(4-二甲基氨基苯乙烯基)甲基吡啶三氟磺酸盐及其合成方法
EP2718302B1 (en) 2011-06-08 2017-02-01 Universal Display Corporation Heteroleptic iridium carbene complexes and light emitting device using them
US8659036B2 (en) 2011-06-17 2014-02-25 Universal Display Corporation Fine tuning of emission spectra by combination of multiple emitter spectra
US8884316B2 (en) 2011-06-17 2014-11-11 Universal Display Corporation Non-common capping layer on an organic device
US9305810B2 (en) 2011-06-30 2016-04-05 Applied Materials, Inc. Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery
KR101826068B1 (ko) 2011-07-04 2018-02-07 삼성디스플레이 주식회사 유기층 증착 장치
US9252377B2 (en) 2011-07-14 2016-02-02 Universal Display Corporation Inorganic hosts in OLEDs
US9397310B2 (en) 2011-07-14 2016-07-19 Universal Display Corporation Organice electroluminescent materials and devices
US9023420B2 (en) 2011-07-14 2015-05-05 Universal Display Corporation Composite organic/inorganic layer for organic light-emitting devices
US8502445B2 (en) 2011-07-18 2013-08-06 Universal Display Corporation RGBW OLED display for extended lifetime and reduced power consumption
TWI561527B (en) 2011-07-25 2016-12-11 Universal Display Corp Tetradentate platinum complexes
US9783564B2 (en) 2011-07-25 2017-10-10 Universal Display Corporation Organic electroluminescent materials and devices
US8409729B2 (en) 2011-07-28 2013-04-02 Universal Display Corporation Host materials for phosphorescent OLEDs
US8926119B2 (en) 2011-08-04 2015-01-06 Universal Display Corporation Extendable light source with variable light emitting area
US9705092B2 (en) 2011-08-05 2017-07-11 Universal Display Corporation Phosphorescent organic light emitting devices combined with hole transport material having high operating stability
US9318536B2 (en) 2011-08-09 2016-04-19 Universal Display Corporation Light emitters with series connection
US8552420B2 (en) 2011-08-09 2013-10-08 Universal Display Corporation OLED light panel with controlled brightness variation
US8764239B2 (en) 2011-08-16 2014-07-01 Universal Display Corporation Dynamic stretchable OLED lamp
US9493698B2 (en) 2011-08-31 2016-11-15 Universal Display Corporation Organic electroluminescent materials and devices
US9184420B2 (en) 2011-09-23 2015-11-10 Universal Display Corporation Digitized OLED light source
WO2013048419A1 (en) 2011-09-29 2013-04-04 Universal Display Corporation LAMP WITH MULTIPLE FLEXIBLE OLEDs
US9123667B2 (en) 2011-10-04 2015-09-01 Universal Display Corporation Power-efficient RGBW OLED display
US9231227B2 (en) 2011-10-28 2016-01-05 Universal Display Corporation OLED display architecture
KR101976104B1 (ko) 2011-11-01 2019-05-09 유니버셜 디스플레이 코포레이션 저휘도에서의 ｏｌｅｄ 디바이스 효율 감소
US8652656B2 (en) 2011-11-14 2014-02-18 Universal Display Corporation Triphenylene silane hosts
US9193745B2 (en) 2011-11-15 2015-11-24 Universal Display Corporation Heteroleptic iridium complex
US9490120B2 (en) 2011-11-18 2016-11-08 First Solar, Inc. Vapor transport deposition method and system for material co-deposition
US9217004B2 (en) 2011-11-21 2015-12-22 Universal Display Corporation Organic light emitting materials
US9512355B2 (en) 2011-12-09 2016-12-06 Universal Display Corporation Organic light emitting materials
US20130146875A1 (en) 2011-12-13 2013-06-13 Universal Display Corporation Split electrode for organic devices
US9461254B2 (en) 2012-01-03 2016-10-04 Universal Display Corporation Organic electroluminescent materials and devices
US8987451B2 (en) 2012-01-03 2015-03-24 Universal Display Corporation Synthesis of cyclometallated platinum(II) complexes
US9163174B2 (en) 2012-01-04 2015-10-20 Universal Display Corporation Highly efficient phosphorescent materials
KR102012047B1 (ko) 2012-01-06 2019-08-19 유니버셜 디스플레이 코포레이션 효율이 큰 인광 물질
US8969592B2 (en) 2012-01-10 2015-03-03 Universal Display Corporation Heterocyclic host materials
US10211413B2 (en) 2012-01-17 2019-02-19 Universal Display Corporation Organic electroluminescent materials and devices
US8969116B2 (en) 2012-01-23 2015-03-03 Universal Display Corporation Selective OLED vapor deposition using electric charges
KR20130089039A (ko) * 2012-02-01 2013-08-09 삼성디스플레이 주식회사 증착 소스, 증착 장치 및 유기 발광 표시 장치 제조 방법
US9118017B2 (en) 2012-02-27 2015-08-25 Universal Display Corporation Host compounds for red phosphorescent OLEDs
US20130273239A1 (en) * 2012-03-13 2013-10-17 Universal Display Corporation Nozzle design for organic vapor jet printing
US9386657B2 (en) 2012-03-15 2016-07-05 Universal Display Corporation Organic Electroluminescent materials and devices
US9054323B2 (en) 2012-03-15 2015-06-09 Universal Display Corporation Secondary hole transporting layer with diarylamino-phenyl-carbazole compounds
US9312511B2 (en) 2012-03-16 2016-04-12 Universal Display Corporation Edge barrier film for electronic devices
US8933468B2 (en) 2012-03-16 2015-01-13 Princeton University Office of Technology and Trademark Licensing Electronic device with reduced non-device edge area
KR101389011B1 (ko) * 2012-03-28 2014-04-24 주식회사 유니텍스 소스 컨테이너 및 기상 증착용 반응로
US8836223B2 (en) 2012-04-18 2014-09-16 Universal Display Corporation OLED panel with fuses
US8723209B2 (en) 2012-04-27 2014-05-13 Universal Display Corporation Out coupling layer containing particle polymer composite
EP2844781A4 (en) * 2012-05-02 2016-01-13 Basf Se METHOD FOR DEPOSITION OF ORGANIC MATTER
US9184399B2 (en) 2012-05-04 2015-11-10 Universal Display Corporation Asymmetric hosts with triaryl silane side chains
US9773985B2 (en) 2012-05-21 2017-09-26 Universal Display Corporation Organic electroluminescent materials and devices
US9655199B2 (en) 2012-05-30 2017-05-16 Universal Display Corporation Four component phosphorescent OLED for cool white lighting application
US9741968B2 (en) 2012-05-30 2017-08-22 Universal Display Corporation Luminaire and individually replaceable components
US9670404B2 (en) 2012-06-06 2017-06-06 Universal Display Corporation Organic electroluminescent materials and devices
US9991463B2 (en) 2012-06-14 2018-06-05 Universal Display Corporation Electronic devices with improved shelf lives
US9502672B2 (en) 2012-06-21 2016-11-22 Universal Display Corporation Organic electroluminescent materials and devices
US9725476B2 (en) 2012-07-09 2017-08-08 Universal Display Corporation Silylated metal complexes
US9231218B2 (en) 2012-07-10 2016-01-05 Universal Display Corporation Phosphorescent emitters containing dibenzo[1,4]azaborinine structure
US9210810B2 (en) 2012-07-12 2015-12-08 Universal Display Corporation Method of fabricating flexible devices
US9540329B2 (en) 2012-07-19 2017-01-10 Universal Display Corporation Organic electroluminescent materials and devices
US9059412B2 (en) 2012-07-19 2015-06-16 Universal Display Corporation Transition metal complexes containing substituted imidazole carbene as ligands and their application in OLEDs
US9663544B2 (en) 2012-07-25 2017-05-30 Universal Display Corporation Organic electroluminescent materials and devices
US9318710B2 (en) 2012-07-30 2016-04-19 Universal Display Corporation Organic electroluminescent materials and devices
US9246036B2 (en) 2012-08-20 2016-01-26 Universal Display Corporation Thin film deposition
US9978958B2 (en) 2012-08-24 2018-05-22 Universal Display Corporation Phosphorescent emitters with phenylimidazole ligands
US8728858B2 (en) 2012-08-27 2014-05-20 Universal Display Corporation Multi-nozzle organic vapor jet printing
US8952362B2 (en) 2012-08-31 2015-02-10 The Regents Of The University Of Michigan High efficiency and brightness fluorescent organic light emitting diode by triplet-triplet fusion
US8940568B2 (en) 2012-08-31 2015-01-27 Universal Display Corporation Patterning method for OLEDs
US10957870B2 (en) 2012-09-07 2021-03-23 Universal Display Corporation Organic light emitting device
US9379169B2 (en) 2012-09-14 2016-06-28 Universal Display Corporation Very high resolution AMOLED display
US9170665B2 (en) 2012-09-14 2015-10-27 Universal Display Corporation Lifetime OLED display
US9412947B2 (en) 2012-09-14 2016-08-09 Universal Display Corporation OLED fabrication using laser transfer
US9257665B2 (en) 2012-09-14 2016-02-09 Universal Display Corporation Lifetime OLED display
US8957579B2 (en) 2012-09-14 2015-02-17 Universal Display Corporation Low image sticking OLED display
US9287513B2 (en) 2012-09-24 2016-03-15 Universal Display Corporation Organic electroluminescent materials and devices
US9312505B2 (en) 2012-09-25 2016-04-12 Universal Display Corporation Organic electroluminescent materials and devices
US10862073B2 (en) 2012-09-25 2020-12-08 The Trustees Of Princeton University Barrier film for electronic devices and substrates
US9577221B2 (en) 2012-09-26 2017-02-21 Universal Display Corporation Three stack hybrid white OLED for enhanced efficiency and lifetime
US9252363B2 (en) 2012-10-04 2016-02-02 Universal Display Corporation Aryloxyalkylcarboxylate solvent compositions for inkjet printing of organic layers
US8764255B2 (en) 2012-10-10 2014-07-01 Universal Display Corporation Semi-rigid electronic device with a flexible display
US9120290B2 (en) 2012-10-10 2015-09-01 Universal Display Corporation Flexible screen backed with rigid ribs
US9385340B2 (en) 2012-10-19 2016-07-05 Universal Display Corporation Transparent display and illumination device
US9385172B2 (en) 2012-10-19 2016-07-05 Universal Display Corporation One-way transparent display
US9384691B2 (en) 2012-10-19 2016-07-05 Universal Display Corporation Transparent display and illumination device
US8692241B1 (en) 2012-11-08 2014-04-08 Universal Display Corporation Transition metal complexes containing triazole and tetrazole carbene ligands
US8946697B1 (en) 2012-11-09 2015-02-03 Universal Display Corporation Iridium complexes with aza-benzo fused ligands
US9685617B2 (en) 2012-11-09 2017-06-20 Universal Display Corporation Organic electronuminescent materials and devices
US9634264B2 (en) 2012-11-09 2017-04-25 Universal Display Corporation Organic electroluminescent materials and devices
US9748500B2 (en) 2015-01-15 2017-08-29 Universal Display Corporation Organic light emitting materials
US10069090B2 (en) 2012-11-20 2018-09-04 Universal Display Corporation Organic electroluminescent materials and devices
US9653709B2 (en) * 2012-11-20 2017-05-16 The Regents Of The University Of Michigan Optoelectronic device formed with controlled vapor flow
US9190623B2 (en) 2012-11-20 2015-11-17 Universal Display Corporation Organic electroluminescent materials and devices
US9512136B2 (en) 2012-11-26 2016-12-06 Universal Display Corporation Organic electroluminescent materials and devices
US9166175B2 (en) 2012-11-27 2015-10-20 Universal Display Corporation Organic electroluminescent materials and devices
US9196860B2 (en) 2012-12-04 2015-11-24 Universal Display Corporation Compounds for triplet-triplet annihilation upconversion
US8716484B1 (en) 2012-12-05 2014-05-06 Universal Display Corporation Hole transporting materials with twisted aryl groups
US9209411B2 (en) 2012-12-07 2015-12-08 Universal Display Corporation Organic electroluminescent materials and devices
US9653691B2 (en) 2012-12-12 2017-05-16 Universal Display Corporation Phosphorescence-sensitizing fluorescence material system
US9159945B2 (en) 2012-12-13 2015-10-13 Universal Display Corporation System and method for matching electrode resistances in OLED light panels
US8766531B1 (en) 2012-12-14 2014-07-01 Universal Display Corporation Wearable display
US20140166990A1 (en) 2012-12-17 2014-06-19 Universal Display Corporation Manufacturing flexible organic electronic devices
US8912018B2 (en) 2012-12-17 2014-12-16 Universal Display Corporation Manufacturing flexible organic electronic devices
US20140166989A1 (en) 2012-12-17 2014-06-19 Universal Display Corporation Manufacturing flexible organic electronic devices
US9502681B2 (en) 2012-12-19 2016-11-22 Universal Display Corporation System and method for a flexible display encapsulation
US10304906B2 (en) 2013-01-18 2019-05-28 Universal Display Corporation High resolution low power consumption OLED display with extended lifetime
US10229956B2 (en) 2013-01-18 2019-03-12 Universal Display Corporation High resolution low power consumption OLED display with extended lifetime
US10580832B2 (en) 2013-01-18 2020-03-03 Universal Display Corporation High resolution low power consumption OLED display with extended lifetime
US9385168B2 (en) 2013-01-18 2016-07-05 Universal Display Corporation High resolution low power consumption OLED display with extended lifetime
US10243023B2 (en) 2013-01-18 2019-03-26 Universal Display Corporation Top emission AMOLED displays using two emissive layers
US9590017B2 (en) 2013-01-18 2017-03-07 Universal Display Corporation High resolution low power consumption OLED display with extended lifetime
US9424772B2 (en) 2013-01-18 2016-08-23 Universal Display Corporation High resolution low power consumption OLED display with extended lifetime
US9252397B2 (en) 2013-02-07 2016-02-02 Universal Display Corporation OVJP for printing graded/stepped organic layers
US10400163B2 (en) 2013-02-08 2019-09-03 Universal Display Corporation Organic electroluminescent materials and devices
US9178184B2 (en) 2013-02-21 2015-11-03 Universal Display Corporation Deposition of patterned organic thin films
US10367154B2 (en) 2013-02-21 2019-07-30 Universal Display Corporation Organic electroluminescent materials and devices
EP3882254B1 (en) 2013-02-21 2023-10-04 Universal Display Corporation Phosphorescent homoleptic tris-[deuterated-2(2-pyridinyl)phenyl]-iridium complexes for use in light-emitting devices
US8927749B2 (en) 2013-03-07 2015-01-06 Universal Display Corporation Organic electroluminescent materials and devices
US9000459B2 (en) 2013-03-12 2015-04-07 Universal Display Corporation OLED display architecture having some blue subpixel components replaced with non-emissive volume containing via or functional electronic component and method of manufacturing thereof
US9419225B2 (en) 2013-03-14 2016-08-16 Universal Display Corporation Organic electroluminescent materials and devices
US9018660B2 (en) 2013-03-25 2015-04-28 Universal Display Corporation Lighting devices
US10514136B2 (en) 2013-03-25 2019-12-24 Universal Display Corporation Lighting devices
US9997712B2 (en) 2013-03-27 2018-06-12 Universal Display Corporation Organic electroluminescent materials and devices
KR102052075B1 (ko) 2013-03-28 2020-01-09 삼성디스플레이 주식회사 증착 장치, 이를 이용한 박막 형성 방법, 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
KR20140118551A (ko) 2013-03-29 2014-10-08 삼성디스플레이 주식회사 증착 장치, 유기 발광 표시 장치 제조 방법 및 유기 발광 표시 장치
KR102037376B1 (ko) 2013-04-18 2019-10-29 삼성디스플레이 주식회사 패터닝 슬릿 시트, 이를 구비하는 증착장치, 이를 이용한 유기발광 디스플레이 장치 제조방법 및 유기발광 디스플레이 장치
US8979291B2 (en) 2013-05-07 2015-03-17 Universal Display Corporation Lighting devices including transparent organic light emitting device light panels and having independent control of direct to indirect light
US9537106B2 (en) 2013-05-09 2017-01-03 Universal Display Corporation Organic electroluminescent materials and devices
US9865672B2 (en) 2013-05-15 2018-01-09 Universal Display Corporation Macro-image OLED lighting system
US9484546B2 (en) 2013-05-15 2016-11-01 Universal Display Corporation OLED with compact contact design and self-aligned insulators
US9041297B2 (en) 2013-05-20 2015-05-26 Universal Display Corporation Large area lighting system with wireless control
US10468633B2 (en) 2013-06-05 2019-11-05 Universal Display Corporation Microlens array architectures for enhanced light outcoupling from an OLED array
US9093658B2 (en) 2013-06-07 2015-07-28 Universal Display Corporation Pre-stressed flexible OLED
US9735373B2 (en) 2013-06-10 2017-08-15 Universal Display Corporation Organic electroluminescent materials and devices
US9673401B2 (en) 2013-06-28 2017-06-06 Universal Display Corporation Organic electroluminescent materials and devices
US9818967B2 (en) 2013-06-28 2017-11-14 Universal Display Corporation Barrier covered microlens films
US10199581B2 (en) 2013-07-01 2019-02-05 Universal Display Corporation Organic electroluminescent materials and devices
US10121975B2 (en) 2013-07-03 2018-11-06 Universal Display Corporation Organic electroluminescent materials and devices
US9761807B2 (en) 2013-07-15 2017-09-12 Universal Display Corporation Organic light emitting diode materials
US9324949B2 (en) 2013-07-16 2016-04-26 Universal Display Corporation Organic electroluminescent materials and devices
US9553274B2 (en) 2013-07-16 2017-01-24 Universal Display Corporation Organic electroluminescent materials and devices
US9224958B2 (en) 2013-07-19 2015-12-29 Universal Display Corporation Organic electroluminescent materials and devices
US20150028290A1 (en) 2013-07-25 2015-01-29 Universal Display Corporation Heteroleptic osmium complex and method of making the same
US9823482B2 (en) 2013-08-19 2017-11-21 Universal Display Corporation Autostereoscopic displays
US10074806B2 (en) 2013-08-20 2018-09-11 Universal Display Corporation Organic electroluminescent materials and devices
US9831437B2 (en) 2013-08-20 2017-11-28 Universal Display Corporation Organic electroluminescent materials and devices
US9932359B2 (en) 2013-08-30 2018-04-03 University Of Southern California Organic electroluminescent materials and devices
US9374872B2 (en) 2013-08-30 2016-06-21 Universal Display Corporation Intelligent dimming lighting
US10199582B2 (en) 2013-09-03 2019-02-05 University Of Southern California Organic electroluminescent materials and devices
US8981363B1 (en) 2013-09-03 2015-03-17 Universal Display Corporation Flexible substrate for OLED device
US9735378B2 (en) 2013-09-09 2017-08-15 Universal Display Corporation Organic electroluminescent materials and devices
US9748503B2 (en) 2013-09-13 2017-08-29 Universal Display Corporation Organic electroluminescent materials and devices
US20150090960A1 (en) 2013-09-30 2015-04-02 Universal Display Corporation Methods to Fabricate Flexible OLED Lighting Devices
US10003034B2 (en) 2013-09-30 2018-06-19 Universal Display Corporation Organic electroluminescent materials and devices
US9496522B2 (en) 2013-12-13 2016-11-15 Universal Display Corporation OLED optically coupled to curved substrate
US9831447B2 (en) 2013-10-08 2017-11-28 Universal Display Corporation Organic electroluminescent materials and devices
US9293712B2 (en) 2013-10-11 2016-03-22 Universal Display Corporation Disubstituted pyrene compounds with amino group containing ortho aryl group and devices containing the same
JP6396147B2 (ja) 2013-10-22 2018-09-26 ユニバーサル ディスプレイ コーポレイション 有機エレクトロルミネセンス材料、及びデバイス
US9853229B2 (en) 2013-10-23 2017-12-26 University Of Southern California Organic electroluminescent materials and devices
US20150115250A1 (en) 2013-10-29 2015-04-30 Universal Display Corporation Organic electroluminescent materials and devices
US9306179B2 (en) 2013-11-08 2016-04-05 Universal Display Corporation Organic electroluminescent materials and devices
US9647218B2 (en) 2013-11-14 2017-05-09 Universal Display Corporation Organic electroluminescent materials and devices
US10033000B2 (en) 2013-11-15 2018-07-24 Universal Display Corporation Organic electroluminescent materials and devices
US9142778B2 (en) * 2013-11-15 2015-09-22 Universal Display Corporation High vacuum OLED deposition source and system
EP2874195B1 (en) 2013-11-15 2017-05-03 Universal Display Corporation Organic electroluminescent materials and devices
US10056565B2 (en) 2013-11-20 2018-08-21 Universal Display Corporation Organic electroluminescent materials and devices
US9130195B2 (en) 2013-11-22 2015-09-08 Universal Display Corporation Structure to enhance light extraction and lifetime of OLED devices
WO2015081289A1 (en) 2013-11-27 2015-06-04 The Regents Of The University Of Michigan Devices combining thin film inorganic leds with organic leds and fabrication thereof
US9390649B2 (en) 2013-11-27 2016-07-12 Universal Display Corporation Ruggedized wearable display
US10644251B2 (en) 2013-12-04 2020-05-05 Universal Display Corporation Organic electroluminescent materials and devices
US9876173B2 (en) 2013-12-09 2018-01-23 Universal Display Corporation Organic electroluminescent materials and devices
US10355227B2 (en) 2013-12-16 2019-07-16 Universal Display Corporation Metal complex for phosphorescent OLED
US9666822B2 (en) 2013-12-17 2017-05-30 The Regents Of The University Of Michigan Extended OLED operational lifetime through phosphorescent dopant profile management
US10839734B2 (en) 2013-12-23 2020-11-17 Universal Display Corporation OLED color tuning by driving mode variation
US9847496B2 (en) 2013-12-23 2017-12-19 Universal Display Corporation Organic electroluminescent materials and devices
US9397314B2 (en) 2013-12-23 2016-07-19 Universal Display Corporation Thin-form light-enhanced substrate for OLED luminaire
KR101878084B1 (ko) 2013-12-26 2018-07-12 카티바, 인크. 전자 장치의 열 처리를 위한 장치 및 기술
US10135008B2 (en) 2014-01-07 2018-11-20 Universal Display Corporation Organic electroluminescent materials and devices
US9978961B2 (en) 2014-01-08 2018-05-22 Universal Display Corporation Organic electroluminescent materials and devices
EP3975229A1 (en) 2014-01-21 2022-03-30 Kateeva, Inc. Apparatus and techniques for electronic device encapsulation
US9755159B2 (en) 2014-01-23 2017-09-05 Universal Display Corporation Organic materials for OLEDs
US9935277B2 (en) 2014-01-30 2018-04-03 Universal Display Corporation Organic electroluminescent materials and devices
US9590194B2 (en) 2014-02-14 2017-03-07 Universal Display Corporation Organic electroluminescent materials and devices
US9847497B2 (en) 2014-02-18 2017-12-19 Universal Display Corporation Organic electroluminescent materials and devices
US10003033B2 (en) 2014-02-18 2018-06-19 Universal Display Corporation Organic electroluminescent materials and devices
US10707423B2 (en) 2014-02-21 2020-07-07 Universal Display Corporation Organic electroluminescent materials and devices
US9647217B2 (en) 2014-02-24 2017-05-09 Universal Display Corporation Organic electroluminescent materials and devices
US9502656B2 (en) 2014-02-24 2016-11-22 Universal Display Corporation Organic electroluminescent materials and devices
US10403825B2 (en) 2014-02-27 2019-09-03 Universal Display Corporation Organic electroluminescent materials and devices
US9673407B2 (en) 2014-02-28 2017-06-06 Universal Display Corporation Organic electroluminescent materials and devices
US9590195B2 (en) 2014-02-28 2017-03-07 Universal Display Corporation Organic electroluminescent materials and devices
US9181270B2 (en) 2014-02-28 2015-11-10 Universal Display Corporation Method of making sulfide compounds
US9190620B2 (en) 2014-03-01 2015-11-17 Universal Display Corporation Organic electroluminescent materials and devices
WO2015134017A1 (en) 2014-03-05 2015-09-11 Universal Display Corporation Phosphorescent oled devices
US9853247B2 (en) 2014-03-11 2017-12-26 The Regents Of The University Of Michigan Electrophosphorescent organic light emitting concentrator
US9397309B2 (en) 2014-03-13 2016-07-19 Universal Display Corporation Organic electroluminescent devices
US10208026B2 (en) 2014-03-18 2019-02-19 Universal Display Corporation Organic electroluminescent materials and devices
US9748504B2 (en) 2014-03-25 2017-08-29 Universal Display Corporation Organic electroluminescent materials and devices
US10749123B2 (en) 2014-03-27 2020-08-18 Universal Display Corporation Impact resistant OLED devices
US10910590B2 (en) 2014-03-27 2021-02-02 Universal Display Corporation Hermetically sealed isolated OLED pixels
US9661709B2 (en) 2014-03-28 2017-05-23 Universal Display Corporation Integrated LED/OLED lighting system
US9929353B2 (en) 2014-04-02 2018-03-27 Universal Display Corporation Organic electroluminescent materials and devices
US9691993B2 (en) 2014-04-09 2017-06-27 Universal Display Corporation Organic electroluminescent materials and devices
US9331299B2 (en) 2014-04-11 2016-05-03 Universal Display Corporation Efficient white organic light emitting diodes with high color quality
US10008679B2 (en) 2014-04-14 2018-06-26 Universal Display Corporation Organic electroluminescent materials and devices
US9905785B2 (en) 2014-04-14 2018-02-27 Universal Display Corporation Organic electroluminescent materials and devices
US10256427B2 (en) 2014-04-15 2019-04-09 Universal Display Corporation Efficient organic electroluminescent devices
US9450198B2 (en) 2014-04-15 2016-09-20 Universal Display Corporation Organic electroluminescent materials and devices
US9337441B2 (en) 2014-04-15 2016-05-10 Universal Display Corporation OLED lighting panel and methods for fabricating thereof
US9380675B2 (en) 2014-04-17 2016-06-28 Universal Display Corporation Energy saving OLED lighting system and method
US9741941B2 (en) 2014-04-29 2017-08-22 Universal Display Corporation Organic electroluminescent materials and devices
CN110265326B (zh) 2014-04-30 2024-03-08 科迪华公司 用于衬底涂覆的气垫设备和技术
US10457699B2 (en) 2014-05-02 2019-10-29 Universal Display Corporation Organic electroluminescent materials and devices
US10301338B2 (en) 2014-05-08 2019-05-28 Universal Display Corporation Organic electroluminescent materials and devices
US10636983B2 (en) 2014-05-08 2020-04-28 Universal Display Corporation Organic electroluminescent materials and devices
US10403830B2 (en) 2014-05-08 2019-09-03 Universal Display Corporation Organic electroluminescent materials and devices
JP6759108B2 (ja) 2014-05-08 2020-09-23 ユニバーサル ディスプレイ コーポレイション 安定化されたイミダゾフェナントリジン材料
US9876192B2 (en) 2014-05-12 2018-01-23 Universal Display Corporation Barrier composition and properties
US9572232B2 (en) 2014-05-15 2017-02-14 Universal Display Corporation Biosensing electronic devices
US9640781B2 (en) 2014-05-22 2017-05-02 Universal Display Corporation Devices to increase OLED output coupling efficiency with a high refractive index substrate
US9997716B2 (en) 2014-05-27 2018-06-12 Universal Display Corporation Organic electroluminescent materials and devices
US10700134B2 (en) 2014-05-27 2020-06-30 Universal Display Corporation Low power consumption OLED display
WO2015183954A1 (en) 2014-05-27 2015-12-03 Universal Display Corporation High resolution low power consumption oled display with extended lifetime
US9929365B2 (en) 2014-05-28 2018-03-27 The Regents Of The University Of Michigan Excited state management
US10461260B2 (en) 2014-06-03 2019-10-29 Universal Display Corporation Organic electroluminescent materials and devices
US11220737B2 (en) 2014-06-25 2022-01-11 Universal Display Corporation Systems and methods of modulating flow during vapor jet deposition of organic materials
US11267012B2 (en) 2014-06-25 2022-03-08 Universal Display Corporation Spatial control of vapor condensation using convection
EP2960059B1 (en) 2014-06-25 2018-10-24 Universal Display Corporation Systems and methods of modulating flow during vapor jet deposition of organic materials
US9911931B2 (en) 2014-06-26 2018-03-06 Universal Display Corporation Organic electroluminescent materials and devices
US10115930B2 (en) 2014-07-08 2018-10-30 Universal Display Corporation Combined internal and external extraction layers for enhanced light outcoupling for organic light emitting device
US10297762B2 (en) 2014-07-09 2019-05-21 Universal Display Corporation Organic electroluminescent materials and devices
US10566546B2 (en) 2014-07-14 2020-02-18 Universal Display Corporation Organic electroluminescent materials and devices
US9929357B2 (en) 2014-07-22 2018-03-27 Universal Display Corporation Organic electroluminescent materials and devices
KR102606560B1 (ko) 2014-07-24 2023-11-24 유니버셜 디스플레이 코포레이션 향상층(들)을 갖는 oled 디바이스
US10411200B2 (en) 2014-08-07 2019-09-10 Universal Display Corporation Electroluminescent (2-phenylpyridine)iridium complexes and devices
US11108000B2 (en) 2014-08-07 2021-08-31 Unniversal Display Corporation Organic electroluminescent materials and devices
US9343695B2 (en) 2014-08-13 2016-05-17 Universal Display Corporation Method of fabricating organic light emitting device (OLED) panel of arbitrary shape
US9825243B2 (en) 2014-08-18 2017-11-21 Udc Ireland Limited Methods for fabricating OLEDs on non-uniform substrates and devices made therefrom
US9583707B2 (en) 2014-09-19 2017-02-28 Universal Display Corporation Micro-nozzle and micro-nozzle array for OVJP and method of manufacturing the same
US10043987B2 (en) 2014-09-29 2018-08-07 Universal Display Corporation Organic electroluminescent materials and devices
US10749113B2 (en) 2014-09-29 2020-08-18 Universal Display Corporation Organic electroluminescent materials and devices
US10135007B2 (en) 2014-09-29 2018-11-20 Universal Display Corporation Organic electroluminescent materials and devices
US10361375B2 (en) 2014-10-06 2019-07-23 Universal Display Corporation Organic electroluminescent materials and devices
US10854826B2 (en) 2014-10-08 2020-12-01 Universal Display Corporation Organic electroluminescent compounds, compositions and devices
US9397302B2 (en) 2014-10-08 2016-07-19 Universal Display Corporation Organic electroluminescent materials and devices
US10950803B2 (en) 2014-10-13 2021-03-16 Universal Display Corporation Compounds and uses in devices
US9484541B2 (en) 2014-10-20 2016-11-01 Universal Display Corporation Organic electroluminescent materials and devices
US10868261B2 (en) 2014-11-10 2020-12-15 Universal Display Corporation Organic electroluminescent materials and devices
US10411201B2 (en) 2014-11-12 2019-09-10 Universal Display Corporation Organic electroluminescent materials and devices
US10038151B2 (en) 2014-11-12 2018-07-31 Universal Display Corporation Organic electroluminescent materials and devices
US9871212B2 (en) 2014-11-14 2018-01-16 Universal Display Corporation Organic electroluminescent materials and devices
US9882151B2 (en) 2014-11-14 2018-01-30 Universal Display Corporation Organic electroluminescent materials and devices
US9761814B2 (en) 2014-11-18 2017-09-12 Universal Display Corporation Organic light-emitting materials and devices
US9444075B2 (en) 2014-11-26 2016-09-13 Universal Display Corporation Emissive display with photo-switchable polarization
US9843024B2 (en) 2014-12-03 2017-12-12 Universal Display Corporation Methods for fabricating OLEDs
US10177126B2 (en) 2014-12-16 2019-01-08 Universal Display Corporation Tunable OLED lighting source
US10510973B2 (en) 2014-12-17 2019-12-17 Universal Display Corporation Color-stable organic light emitting diode stack
US11145837B2 (en) 2014-12-17 2021-10-12 Universal Display Corporation Color stable organic light emitting diode stack
US9450195B2 (en) 2014-12-17 2016-09-20 Universal Display Corporation Organic electroluminescent materials and devices
US9761842B2 (en) 2014-12-19 2017-09-12 The Regents Of The University Of Michigan Enhancing light extraction of organic light emitting diodes via nanoscale texturing of electrode surfaces
US10253252B2 (en) 2014-12-30 2019-04-09 Universal Display Corporation Organic electroluminescent materials and devices
US10636978B2 (en) 2014-12-30 2020-04-28 Universal Display Corporation Organic electroluminescent materials and devices
US9312499B1 (en) 2015-01-05 2016-04-12 Universal Display Corporation Organic electroluminescent materials and devices
US9406892B2 (en) 2015-01-07 2016-08-02 Universal Display Corporation Organic electroluminescent materials and devices
US10038167B2 (en) 2015-01-08 2018-07-31 The Regents Of The University Of Michigan Thick-ETL OLEDs with sub-ITO grids with improved outcoupling
US10418569B2 (en) 2015-01-25 2019-09-17 Universal Display Corporation Organic electroluminescent materials and devices
US9711730B2 (en) 2015-01-25 2017-07-18 Universal Display Corporation Organic electroluminescent materials and devices
US10644247B2 (en) 2015-02-06 2020-05-05 Universal Display Corporation Organic electroluminescent materials and devices
US10355222B2 (en) 2015-02-06 2019-07-16 Universal Display Corporation Organic electroluminescent materials and devices
US10418562B2 (en) 2015-02-06 2019-09-17 Universal Display Corporation Organic electroluminescent materials and devices
US10177316B2 (en) 2015-02-09 2019-01-08 Universal Display Corporation Organic electroluminescent materials and devices
US10144867B2 (en) 2015-02-13 2018-12-04 Universal Display Corporation Organic electroluminescent materials and devices
US10680183B2 (en) 2015-02-15 2020-06-09 Universal Display Corporation Organic electroluminescent materials and devices
US9929361B2 (en) 2015-02-16 2018-03-27 Universal Display Corporation Organic electroluminescent materials and devices
US11056657B2 (en) 2015-02-27 2021-07-06 University Display Corporation Organic electroluminescent materials and devices
US10600966B2 (en) 2015-02-27 2020-03-24 Universal Display Corporation Organic electroluminescent materials and devices
US10686143B2 (en) 2015-03-05 2020-06-16 Universal Display Corporation Organic electroluminescent materials and devices
KR102354019B1 (ko) 2015-03-06 2022-01-21 유니버셜 디스플레이 코포레이션 고효율 oled 소자를 위한 신규 기판 및 공정
US10270046B2 (en) 2015-03-06 2019-04-23 Universal Display Corporation Organic electroluminescent materials and devices
US9780316B2 (en) 2015-03-16 2017-10-03 Universal Display Corporation Organic electroluminescent materials and devices
US9911928B2 (en) 2015-03-19 2018-03-06 Universal Display Corporation Organic electroluminescent materials and devices
US9871214B2 (en) 2015-03-23 2018-01-16 Universal Display Corporation Organic electroluminescent materials and devices
US10529931B2 (en) 2015-03-24 2020-01-07 Universal Display Corporation Organic Electroluminescent materials and devices
US10297770B2 (en) 2015-03-27 2019-05-21 Universal Display Corporation Organic electroluminescent materials and devices
US10147360B2 (en) 2015-03-31 2018-12-04 Universal Display Corporation Rugged display device architecture
US11495749B2 (en) 2015-04-06 2022-11-08 Universal Display Corporation Organic electroluminescent materials and devices
US11818949B2 (en) 2015-04-06 2023-11-14 Universal Display Corporation Organic electroluminescent materials and devices
US20160293855A1 (en) 2015-04-06 2016-10-06 Universal Display Corporation Organic Electroluminescent Materials and Devices
US9899457B2 (en) 2015-04-24 2018-02-20 Universal Display Corporation Flexible OLED display having increased lifetime
KR102584846B1 (ko) 2015-05-05 2023-10-04 유니버셜 디스플레이 코포레이션 유기 전계발광 재료 및 디바이스
US10777749B2 (en) 2015-05-07 2020-09-15 Universal Display Corporation Organic electroluminescent materials and devices
US10403826B2 (en) 2015-05-07 2019-09-03 Universal Display Corporation Organic electroluminescent materials and devices
US9478758B1 (en) 2015-05-08 2016-10-25 Universal Display Corporation Organic electroluminescent materials and devices
US9859510B2 (en) 2015-05-15 2018-01-02 Universal Display Corporation Organic electroluminescent materials and devices
US10256411B2 (en) 2015-05-21 2019-04-09 Universal Display Corporation Organic electroluminescent materials and devices
US10109799B2 (en) 2015-05-21 2018-10-23 Universal Display Corporation Organic electroluminescent materials and devices
US10033004B2 (en) 2015-06-01 2018-07-24 Universal Display Corporation Organic electroluminescent materials and devices
US10418568B2 (en) 2015-06-01 2019-09-17 Universal Display Corporation Organic electroluminescent materials and devices
US10818853B2 (en) 2015-06-04 2020-10-27 University Of Southern California Organic electroluminescent materials and devices
US11925102B2 (en) 2015-06-04 2024-03-05 Universal Display Corporation Organic electroluminescent materials and devices
US9978965B2 (en) 2015-06-17 2018-05-22 Universal Display Corporation Rollable OLED display
US9947895B2 (en) 2015-06-17 2018-04-17 Universal Display Corporation Flexible AMOLED display
US10243162B2 (en) 2015-06-17 2019-03-26 Universal Display Corporation Close illumination system
US9496523B1 (en) 2015-06-19 2016-11-15 Universal Display Corporation Devices and methods to improve light outcoupling from an OLED array
US10825997B2 (en) 2015-06-25 2020-11-03 Universal Display Corporation Organic electroluminescent materials and devices
US10686159B2 (en) 2015-06-26 2020-06-16 Universal Display Corporation OLED devices having improved efficiency
WO2017006810A1 (ja) * 2015-07-03 2017-01-12 シャープ株式会社 蒸着装置および蒸着方法
US10873036B2 (en) 2015-07-07 2020-12-22 Universal Display Corporation Organic electroluminescent materials and devices
US9899631B2 (en) 2015-07-08 2018-02-20 Universal Display Corporation Flexible multilayer scattering substrate used in OLED
US9978956B2 (en) 2015-07-15 2018-05-22 Universal Display Corporation Organic electroluminescent materials and devices
CN105154829B (zh) * 2015-07-28 2018-04-24 昆明物理研究所 一种低应力的各向同性有机物填充的装置及方法
US11127905B2 (en) 2015-07-29 2021-09-21 Universal Display Corporation Organic electroluminescent materials and devices
US11018309B2 (en) 2015-08-03 2021-05-25 Universal Display Corporation Organic electroluminescent materials and devices
US11522140B2 (en) 2015-08-17 2022-12-06 Universal Display Corporation Organic electroluminescent materials and devices
US10522769B2 (en) 2015-08-18 2019-12-31 Universal Display Corporation Organic electroluminescent materials and devices
US9947728B2 (en) 2015-08-25 2018-04-17 Universal Display Corporation Hybrid MEMS OLED display
US10181564B2 (en) 2015-08-26 2019-01-15 Universal Display Corporation Organic electroluminescent materials and devices
US10361381B2 (en) 2015-09-03 2019-07-23 Universal Display Corporation Organic electroluminescent materials and devices
US11706972B2 (en) 2015-09-08 2023-07-18 Universal Display Corporation Organic electroluminescent materials and devices
US11302872B2 (en) 2015-09-09 2022-04-12 Universal Display Corporation Organic electroluminescent materials and devices
US10263050B2 (en) 2015-09-18 2019-04-16 Universal Display Corporation Hybrid display
US9818804B2 (en) 2015-09-18 2017-11-14 Universal Display Corporation Hybrid display
US10770664B2 (en) 2015-09-21 2020-09-08 Universal Display Corporation Organic electroluminescent materials and devices
US20170092880A1 (en) 2015-09-25 2017-03-30 Universal Display Corporation Organic electroluminescent materials and devices
US10847728B2 (en) 2015-10-01 2020-11-24 Universal Display Corporation Organic electroluminescent materials and devices
US10593892B2 (en) 2015-10-01 2020-03-17 Universal Display Corporation Organic electroluminescent materials and devices
US10991895B2 (en) 2015-10-06 2021-04-27 Universal Display Corporation Organic electroluminescent materials and devices
US10704144B2 (en) 2015-10-12 2020-07-07 Universal Display Corporation Apparatus and method for printing multilayer organic thin films from vapor phase in an ultra-pure gas ambient
US10566534B2 (en) 2015-10-12 2020-02-18 Universal Display Corporation Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP)
US10509145B2 (en) 2015-10-15 2019-12-17 Electronics And Telecommunications Research Institute Optical device and methods for manufacturing the same
US10388892B2 (en) 2015-10-29 2019-08-20 Universal Display Corporation Organic electroluminescent materials and devices
US10388893B2 (en) 2015-10-29 2019-08-20 Universal Display Corporation Organic electroluminescent materials and devices
US10177318B2 (en) 2015-10-29 2019-01-08 Universal Display Corporation Organic electroluminescent materials and devices
US10290816B2 (en) 2015-11-16 2019-05-14 The Regents Of The University Of Michigan Organic electroluminescent materials and devices
US10998507B2 (en) 2015-11-23 2021-05-04 Universal Display Corporation Organic electroluminescent materials and devices
US10476010B2 (en) 2015-11-30 2019-11-12 Universal Display Corporation Organic electroluminescent materials and devices
US10957861B2 (en) 2015-12-29 2021-03-23 Universal Display Corporation Organic electroluminescent materials and devices
US11024808B2 (en) 2015-12-29 2021-06-01 Universal Display Corporation Organic electroluminescent materials and devices
US10135006B2 (en) 2016-01-04 2018-11-20 Universal Display Corporation Organic electroluminescent materials and devices
US10707427B2 (en) 2016-02-09 2020-07-07 Universal Display Corporation Organic electroluminescent materials and devices
US10457864B2 (en) 2016-02-09 2019-10-29 Universal Display Corporation Organic electroluminescent materials and devices
US20170229663A1 (en) 2016-02-09 2017-08-10 Universal Display Corporation Organic electroluminescent materials and devices
US10600967B2 (en) 2016-02-18 2020-03-24 Universal Display Corporation Organic electroluminescent materials and devices
US10170701B2 (en) 2016-03-04 2019-01-01 Universal Display Corporation Controlled deposition of materials using a differential pressure regime
US11094891B2 (en) 2016-03-16 2021-08-17 Universal Display Corporation Organic electroluminescent materials and devices
US9692955B1 (en) 2016-03-21 2017-06-27 Universal Display Corporation Flash optimized using OLED display
US10276809B2 (en) 2016-04-05 2019-04-30 Universal Display Corporation Organic electroluminescent materials and devices
US11168391B2 (en) 2016-04-11 2021-11-09 Universal Display Corporation Nozzle exit contours for pattern composition
US11014386B2 (en) 2016-04-11 2021-05-25 Universal Display Corporation Actuation mechanism for accurately controlling distance in OVJP printing
US10236456B2 (en) 2016-04-11 2019-03-19 Universal Display Corporation Organic electroluminescent materials and devices
US10566552B2 (en) 2016-04-13 2020-02-18 Universal Display Corporation Organic electroluminescent materials and devices
US11081647B2 (en) 2016-04-22 2021-08-03 Universal Display Corporation Organic electroluminescent materials and devices
US10483498B2 (en) 2016-04-22 2019-11-19 Universal Display Corporation High efficiency vapor transport sublimation source using baffles coated with source material
US11228002B2 (en) 2016-04-22 2022-01-18 Universal Display Corporation Organic electroluminescent materials and devices
US11228003B2 (en) 2016-04-22 2022-01-18 Universal Display Corporation Organic electroluminescent materials and devices
US10522776B2 (en) 2016-05-23 2019-12-31 Universal Display Corporation OLED device structures
US10840458B2 (en) 2016-05-25 2020-11-17 Universal Display Corporation Organic electroluminescent materials and devices
US10460663B2 (en) 2016-05-31 2019-10-29 Universal Display Corporation Architecture for very high resolution AMOLED display backplane
US10468609B2 (en) 2016-06-02 2019-11-05 Universal Display Corporation Organic electroluminescent materials and devices
US10686140B2 (en) 2016-06-20 2020-06-16 Universal Display Corporation Organic electroluminescent materials and devices
US10727423B2 (en) 2016-06-20 2020-07-28 Universal Display Corporation Organic electroluminescent materials and devices
US10672997B2 (en) 2016-06-20 2020-06-02 Universal Display Corporation Organic electroluminescent materials and devices
US11482683B2 (en) 2016-06-20 2022-10-25 Universal Display Corporation Organic electroluminescent materials and devices
US10862054B2 (en) 2016-06-20 2020-12-08 Universal Display Corporation Organic electroluminescent materials and devices
US10651403B2 (en) 2016-06-20 2020-05-12 Universal Display Corporation Organic electroluminescent materials and devices
US10957866B2 (en) 2016-06-30 2021-03-23 Universal Display Corporation Organic electroluminescent materials and devices
US9929360B2 (en) 2016-07-08 2018-03-27 Universal Display Corporation Organic electroluminescent materials and devices
US10680184B2 (en) 2016-07-11 2020-06-09 Universal Display Corporation Organic electroluminescent materials and devices
US10720587B2 (en) 2016-07-19 2020-07-21 Universal Display Corporation Organic electroluminescent materials and devices
US10153443B2 (en) 2016-07-19 2018-12-11 Universal Display Corporation Organic electroluminescent materials and devices
US10756141B2 (en) 2016-07-28 2020-08-25 Universal Display Corporation Very high resolution stacked OLED display
CN112941465A (zh) 2016-07-29 2021-06-11 环球展览公司 沉积喷嘴
US10229960B2 (en) 2016-08-02 2019-03-12 Universal Display Corporation OLED displays with variable display regions
US10483489B2 (en) 2016-08-12 2019-11-19 Universal Display Corporation Integrated circular polarizer and permeation barrier for flexible OLEDs
US10205105B2 (en) 2016-08-15 2019-02-12 Universal Display Corporation Organic electroluminescent materials and devices
US10608186B2 (en) 2016-09-14 2020-03-31 Universal Display Corporation Organic electroluminescent materials and devices
US10505127B2 (en) 2016-09-19 2019-12-10 Universal Display Corporation Organic electroluminescent materials and devices
US10680187B2 (en) 2016-09-23 2020-06-09 Universal Display Corporation Organic electroluminescent materials and devices
US11183642B2 (en) 2016-10-03 2021-11-23 Universal Display Corporation Organic electroluminescent materials and devices
US11189804B2 (en) 2016-10-03 2021-11-30 Universal Display Corporation Organic electroluminescent materials and devices
US11196010B2 (en) 2016-10-03 2021-12-07 Universal Display Corporation Organic electroluminescent materials and devices
US11127906B2 (en) 2016-10-03 2021-09-21 Universal Display Corporation Organic electroluminescent materials and devices
US11081658B2 (en) 2016-10-03 2021-08-03 Universal Display Corporation Organic electroluminescent materials and devices
US20180097202A1 (en) 2016-10-03 2018-04-05 Regents Of The University Of Michigan Enhanced oled outcoupling by suppressing surface plasmon modes
US11011709B2 (en) 2016-10-07 2021-05-18 Universal Display Corporation Organic electroluminescent materials and devices
US11239432B2 (en) 2016-10-14 2022-02-01 Universal Display Corporation Organic electroluminescent materials and devices
US10608185B2 (en) 2016-10-17 2020-03-31 Univeral Display Corporation Organic electroluminescent materials and devices
US11751426B2 (en) 2016-10-18 2023-09-05 Universal Display Corporation Hybrid thin film permeation barrier and method of making the same
US10236458B2 (en) 2016-10-24 2019-03-19 Universal Display Corporation Organic electroluminescent materials and devices
US20180130956A1 (en) 2016-11-09 2018-05-10 Universal Display Corporation Organic electroluminescent materials and devices
US10340464B2 (en) 2016-11-10 2019-07-02 Universal Display Corporation Organic electroluminescent materials and devices
US10680188B2 (en) 2016-11-11 2020-06-09 Universal Display Corporation Organic electroluminescent materials and devices
US10897016B2 (en) 2016-11-14 2021-01-19 Universal Display Corporation Organic electroluminescent materials and devices
US10662196B2 (en) 2016-11-17 2020-05-26 Universal Display Corporation Organic electroluminescent materials and devices
US10964893B2 (en) 2016-11-17 2021-03-30 Universal Display Corporation Organic electroluminescent materials and devices
US10833276B2 (en) 2016-11-21 2020-11-10 Universal Display Corporation Organic electroluminescent materials and devices
US10153445B2 (en) 2016-11-21 2018-12-11 Universal Display Corporation Organic electroluminescent materials and devices
US11223032B2 (en) 2016-11-29 2022-01-11 Universal Display Corporation Thin film barrier structure
US11555048B2 (en) 2016-12-01 2023-01-17 Universal Display Corporation Organic electroluminescent materials and devices
US11548905B2 (en) 2016-12-15 2023-01-10 Universal Display Corporation Organic electroluminescent materials and devices
US10490753B2 (en) 2016-12-15 2019-11-26 Universal Display Corporation Organic electroluminescent materials and devices
US11545636B2 (en) 2016-12-15 2023-01-03 Universal Display Corporation Organic electroluminescent materials and devices
US10811618B2 (en) 2016-12-19 2020-10-20 Universal Display Corporation Organic electroluminescent materials and devices
US11152579B2 (en) 2016-12-28 2021-10-19 Universal Display Corporation Organic electroluminescent materials and devices
US10783823B2 (en) 2017-01-04 2020-09-22 Universal Display Corporation OLED device with controllable brightness
US11201298B2 (en) 2017-01-09 2021-12-14 Universal Display Corporation Organic electroluminescent materials and devices
US11780865B2 (en) 2017-01-09 2023-10-10 Universal Display Corporation Organic electroluminescent materials and devices
US10804475B2 (en) 2017-01-11 2020-10-13 Universal Display Corporation Organic electroluminescent materials and devices
US11545637B2 (en) 2017-01-13 2023-01-03 Universal Display Corporation Organic electroluminescent materials and devices
US10629820B2 (en) 2017-01-18 2020-04-21 Universal Display Corporation Organic electroluminescent materials and devices
US11053268B2 (en) 2017-01-20 2021-07-06 Universal Display Corporation Organic electroluminescent materials and devices
US10964904B2 (en) 2017-01-20 2021-03-30 Universal Display Corporation Organic electroluminescent materials and devices
US11765968B2 (en) 2017-01-23 2023-09-19 Universal Display Corporation Organic electroluminescent materials and devices
US11050028B2 (en) 2017-01-24 2021-06-29 Universal Display Corporation Organic electroluminescent materials and devices
US10978647B2 (en) 2017-02-15 2021-04-13 Universal Display Corporation Organic electroluminescent materials and devices
US10844084B2 (en) 2017-02-22 2020-11-24 Universal Display Corporation Organic electroluminescent materials and devices
US10745431B2 (en) 2017-03-08 2020-08-18 Universal Display Corporation Organic electroluminescent materials and devices
US10741780B2 (en) 2017-03-10 2020-08-11 Universal Display Corporation Organic electroluminescent materials and devices
US10672998B2 (en) 2017-03-23 2020-06-02 Universal Display Corporation Organic electroluminescent materials and devices
US10873037B2 (en) 2017-03-28 2020-12-22 Universal Display Corporation Organic electroluminescent materials and devices
US10910577B2 (en) 2017-03-28 2021-02-02 Universal Display Corporation Organic electroluminescent materials and devices
US11158820B2 (en) 2017-03-29 2021-10-26 Universal Display Corporation Organic electroluminescent materials and devices
US11056658B2 (en) 2017-03-29 2021-07-06 Universal Display Corporation Organic electroluminescent materials and devices
US10844085B2 (en) 2017-03-29 2020-11-24 Universal Display Corporation Organic electroluminescent materials and devices
US10862046B2 (en) 2017-03-30 2020-12-08 Universal Display Corporation Organic electroluminescent materials and devices
US11139443B2 (en) 2017-03-31 2021-10-05 Universal Display Corporation Organic electroluminescent materials and devices
US11276829B2 (en) 2017-03-31 2022-03-15 Universal Display Corporation Organic electroluminescent materials and devices
KR102369676B1 (ko) 2017-04-10 2022-03-04 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
US10777754B2 (en) 2017-04-11 2020-09-15 Universal Display Corporation Organic electroluminescent materials and devices
US11038117B2 (en) 2017-04-11 2021-06-15 Universal Display Corporation Organic electroluminescent materials and devices
US10975113B2 (en) 2017-04-21 2021-04-13 Universal Display Corporation Organic electroluminescent materials and devices
US11084838B2 (en) 2017-04-21 2021-08-10 Universal Display Corporation Organic electroluminescent materials and device
US11101434B2 (en) 2017-04-21 2021-08-24 Universal Display Corporation Organic electroluminescent materials and devices
US11038137B2 (en) 2017-04-28 2021-06-15 Universal Display Corporation Organic electroluminescent materials and devices
US10910570B2 (en) 2017-04-28 2021-02-02 Universal Display Corporation Organic electroluminescent materials and devices
US11117897B2 (en) 2017-05-01 2021-09-14 Universal Display Corporation Organic electroluminescent materials and devices
US10941170B2 (en) 2017-05-03 2021-03-09 Universal Display Corporation Organic electroluminescent materials and devices
US11201299B2 (en) 2017-05-04 2021-12-14 Universal Display Corporation Organic electroluminescent materials and devices
US10870668B2 (en) 2017-05-05 2020-12-22 Universal Display Corporation Organic electroluminescent materials and devices
US10818840B2 (en) 2017-05-05 2020-10-27 Universal Display Corporation Segmented print bar for large-area OVJP deposition
US20180323373A1 (en) 2017-05-05 2018-11-08 Universal Display Corporation Capacitive sensor for positioning in ovjp printing
US10862055B2 (en) 2017-05-05 2020-12-08 Universal Display Corporation Organic electroluminescent materials and devices
US10930864B2 (en) 2017-05-10 2021-02-23 Universal Display Corporation Organic electroluminescent materials and devices
US10822362B2 (en) 2017-05-11 2020-11-03 Universal Display Corporation Organic electroluminescent materials and devices
US10944060B2 (en) 2017-05-11 2021-03-09 Universal Display Corporation Organic electroluminescent materials and devices
US10790455B2 (en) 2017-05-18 2020-09-29 Universal Display Corporation Organic electroluminescent materials and devices
US10944062B2 (en) 2017-05-18 2021-03-09 Universal Display Corporation Organic electroluminescent materials and devices
US10934293B2 (en) 2017-05-18 2021-03-02 Universal Display Corporation Organic electroluminescent materials and devices
US11038115B2 (en) 2017-05-18 2021-06-15 Universal Display Corporation Organic electroluminescent materials and device
US10840459B2 (en) 2017-05-18 2020-11-17 Universal Display Corporation Organic electroluminescent materials and devices
US11946131B2 (en) 2017-05-26 2024-04-02 Universal Display Corporation Sublimation cell with time stability of output vapor pressure
US11201288B2 (en) 2017-05-26 2021-12-14 Universal Display Corporation Generalized organic vapor jet depositor capable of high resolution printing and method for OVJP printing
US10930862B2 (en) 2017-06-01 2021-02-23 Universal Display Corporation Organic electroluminescent materials and devices
US11814403B2 (en) 2017-06-23 2023-11-14 Universal Display Corporation Organic electroluminescent materials and devices
US11802136B2 (en) 2017-06-23 2023-10-31 Universal Display Corporation Organic electroluminescent materials and devices
US11725022B2 (en) 2017-06-23 2023-08-15 Universal Display Corporation Organic electroluminescent materials and devices
US10968226B2 (en) 2017-06-23 2021-04-06 Universal Display Corporation Organic electroluminescent materials and devices
US11758804B2 (en) 2017-06-23 2023-09-12 Universal Display Corporation Organic electroluminescent materials and devices
US11174259B2 (en) 2017-06-23 2021-11-16 Universal Display Corporation Organic electroluminescent materials and devices
US20180370999A1 (en) 2017-06-23 2018-12-27 Universal Display Corporation Organic electroluminescent materials and devices
US11495757B2 (en) 2017-06-23 2022-11-08 Universal Display Corporation Organic electroluminescent materials and devices
US11552261B2 (en) 2017-06-23 2023-01-10 Universal Display Corporation Organic electroluminescent materials and devices
US11678565B2 (en) 2017-06-23 2023-06-13 Universal Display Corporation Organic electroluminescent materials and devices
US11608321B2 (en) 2017-06-23 2023-03-21 Universal Display Corporation Organic electroluminescent materials and devices
US11832510B2 (en) 2017-06-23 2023-11-28 Universal Display Corporation Organic electroluminescent materials and devices
US11469382B2 (en) 2017-07-12 2022-10-11 Universal Display Corporation Organic electroluminescent materials and devices
US11228010B2 (en) 2017-07-26 2022-01-18 Universal Display Corporation Organic electroluminescent materials and devices
US11765970B2 (en) 2017-07-26 2023-09-19 Universal Display Corporation Organic electroluminescent materials and devices
US11239433B2 (en) 2017-07-26 2022-02-01 Universal Display Corporation Organic electroluminescent materials and devices
US11322691B2 (en) 2017-07-26 2022-05-03 Universal Display Corporation Organic electroluminescent materials and devices
US11917843B2 (en) 2017-07-26 2024-02-27 Universal Display Corporation Organic electroluminescent materials and devices
US11968883B2 (en) 2017-07-26 2024-04-23 Universal Display Corporation Organic electroluminescent materials and devices
US11678499B2 (en) 2017-07-27 2023-06-13 Universal Display Corporation Use of singlet-triplet gap hosts for increasing stability of blue phosphorescent emission
US11744141B2 (en) 2017-08-09 2023-08-29 Universal Display Corporation Organic electroluminescent materials and devices
US11744142B2 (en) 2017-08-10 2023-08-29 Universal Display Corporation Organic electroluminescent materials and devices
US11508913B2 (en) 2017-08-10 2022-11-22 Universal Display Corporation Organic electroluminescent materials and devices
US11910699B2 (en) 2017-08-10 2024-02-20 Universal Display Corporation Organic electroluminescent materials and devices
US11349083B2 (en) 2017-08-10 2022-05-31 Universal Display Corporation Organic electroluminescent materials and devices
US11723269B2 (en) 2017-08-22 2023-08-08 Universal Display Corporation Organic electroluminescent materials and devices
US11462697B2 (en) 2017-08-22 2022-10-04 Universal Display Corporation Organic electroluminescent materials and devices
US10600981B2 (en) 2017-08-24 2020-03-24 Universal Display Corporation Exciplex-sensitized fluorescence light emitting system
US11437591B2 (en) 2017-08-24 2022-09-06 Universal Display Corporation Organic electroluminescent materials and devices
US11605791B2 (en) 2017-09-01 2023-03-14 Universal Display Corporation Organic electroluminescent materials and devices
US11444249B2 (en) 2017-09-07 2022-09-13 Universal Display Corporation Organic electroluminescent materials and devices
US11696492B2 (en) 2017-09-07 2023-07-04 Universal Display Corporation Organic electroluminescent materials and devices
US11424420B2 (en) 2017-09-07 2022-08-23 Universal Display Corporation Organic electroluminescent materials and devices
US10608188B2 (en) 2017-09-11 2020-03-31 Universal Display Corporation Organic electroluminescent materials and devices
US11778897B2 (en) 2017-09-20 2023-10-03 Universal Display Corporation Organic electroluminescent materials and devices
DE102017122886A1 (de) * 2017-10-02 2019-04-04 Aixtron Se Verfahren zur Herstellung einer leuchtenden Pixelanordnung
US11910702B2 (en) 2017-11-07 2024-02-20 Universal Display Corporation Organic electroluminescent devices
US11183646B2 (en) 2017-11-07 2021-11-23 Universal Display Corporation Organic electroluminescent materials and devices
US11214587B2 (en) 2017-11-07 2022-01-04 Universal Display Corporation Organic electroluminescent materials and devices
US10770690B2 (en) 2017-11-15 2020-09-08 The Regents Of The University Of Michigan OLED with minimal plasmonic losses
US11168103B2 (en) 2017-11-17 2021-11-09 Universal Display Corporation Organic electroluminescent materials and devices
US11362311B2 (en) 2017-11-17 2022-06-14 The Regents Of The University Of Michigan Sub-electrode microlens array for organic light emitting devices
US11362310B2 (en) 2017-11-20 2022-06-14 The Regents Of The University Of Michigan Organic light-emitting devices using a low refractive index dielectric
US10777125B2 (en) 2017-11-27 2020-09-15 Universal Display Corporation Multi-mode OLED display
US11825735B2 (en) 2017-11-28 2023-11-21 Universal Display Corporation Organic electroluminescent materials and devices
US20190161504A1 (en) 2017-11-28 2019-05-30 University Of Southern California Carbene compounds and organic electroluminescent devices
US10770673B2 (en) 2017-11-28 2020-09-08 The Regents Of The University Of Michigan Highly reliable stacked white organic light emitting device
EP3492480B1 (en) 2017-11-29 2021-10-20 Universal Display Corporation Organic electroluminescent materials and devices
US11937503B2 (en) 2017-11-30 2024-03-19 Universal Display Corporation Organic electroluminescent materials and devices
US11139444B2 (en) 2017-12-12 2021-10-05 Universal Display Corporation Organic electroluminescent devices containing a near-infrared down-conversion layer
US11145692B2 (en) 2017-12-12 2021-10-12 Universal Display Corporation Hybrid wearable organic light emitting diode (OLED) illumination devices
US10998531B2 (en) 2017-12-12 2021-05-04 Universal Display Corporation Segmented OVJP print bar
US11233204B2 (en) 2017-12-14 2022-01-25 Universal Display Corporation Organic electroluminescent materials and devices
US10971687B2 (en) 2017-12-14 2021-04-06 Universal Display Corporation Organic electroluminescent materials and devices
US11233205B2 (en) 2017-12-14 2022-01-25 Universal Display Corporation Organic electroluminescent materials and devices
US10992252B2 (en) 2017-12-19 2021-04-27 Universal Display Corporation Integrated photovoltaic window and light source
US11081659B2 (en) 2018-01-10 2021-08-03 Universal Display Corporation Organic electroluminescent materials and devices
US11700765B2 (en) 2018-01-10 2023-07-11 Universal Display Corporation Organic electroluminescent materials and devices
US11515493B2 (en) 2018-01-11 2022-11-29 Universal Display Corporation Organic electroluminescent materials and devices
US11271177B2 (en) 2018-01-11 2022-03-08 Universal Display Corporation Organic electroluminescent materials and devices
US11108027B2 (en) 2018-01-11 2021-08-31 Universal Display Corporation Printed metal gasket
US11588140B2 (en) 2018-01-12 2023-02-21 Universal Display Corporation Organic vapor jet print head for depositing thin film features with high thickness uniformity
US10654272B2 (en) 2018-01-12 2020-05-19 Universal Display Corporation Valved micronozzle array for high temperature MEMS application
US11845764B2 (en) 2018-01-26 2023-12-19 Universal Display Corporation Organic electroluminescent materials and devices
US11542289B2 (en) 2018-01-26 2023-01-03 Universal Display Corporation Organic electroluminescent materials and devices
US11367840B2 (en) 2018-01-26 2022-06-21 Universal Display Corporation Organic electroluminescent materials and devices
US11033924B2 (en) 2018-01-31 2021-06-15 Universal Display Corporation Organic vapor jet print head with orthogonal delivery and exhaust channels
US11957050B2 (en) 2018-02-09 2024-04-09 Universal Display Corporation Organic electroluminescent materials and devices
US11239434B2 (en) 2018-02-09 2022-02-01 Universal Display Corporation Organic electroluminescent materials and devices
US11180519B2 (en) 2018-02-09 2021-11-23 Universal Display Corporation Organic electroluminescent materials and devices
US11342509B2 (en) 2018-02-09 2022-05-24 Universal Display Corporation Organic electroluminescent materials and devices
US11104988B2 (en) 2018-02-22 2021-08-31 Universal Display Corporation Modular confined organic print head and system
US11557733B2 (en) 2018-03-12 2023-01-17 Universal Display Corporation Organic electroluminescent materials and devices
US11165028B2 (en) 2018-03-12 2021-11-02 Universal Display Corporation Organic electroluminescent materials and devices
US11142538B2 (en) 2018-03-12 2021-10-12 Universal Display Corporation Organic electroluminescent materials and devices
US11217757B2 (en) 2018-03-12 2022-01-04 Universal Display Corporation Host materials for electroluminescent devices
US11279722B2 (en) 2018-03-12 2022-03-22 Universal Display Corporation Organic electroluminescent materials and devices
US10916704B2 (en) 2018-04-03 2021-02-09 Universal Display Corporation Vapor jet printing
US11062205B2 (en) 2018-04-06 2021-07-13 Universal Display Corporation Hybrid neuromorphic computing display
US11390639B2 (en) 2018-04-13 2022-07-19 Universal Display Corporation Organic electroluminescent materials and devices
US11882759B2 (en) 2018-04-13 2024-01-23 Universal Display Corporation Organic electroluminescent materials and devices
US11616203B2 (en) 2018-04-17 2023-03-28 Universal Display Corporation Organic electroluminescent materials and devices
US11515494B2 (en) 2018-05-04 2022-11-29 Universal Display Corporation Organic electroluminescent materials and devices
US11342513B2 (en) 2018-05-04 2022-05-24 Universal Display Corporation Organic electroluminescent materials and devices
US11753427B2 (en) 2018-05-04 2023-09-12 Universal Display Corporation Organic electroluminescent materials and devices
US11793073B2 (en) 2018-05-06 2023-10-17 Universal Display Corporation Host materials for electroluminescent devices
US11552278B2 (en) 2018-05-08 2023-01-10 Universal Display Corporation Integrated photobiomodulation device
US11450822B2 (en) 2018-05-25 2022-09-20 Universal Display Corporation Organic electroluminescent materials and devices
US11459349B2 (en) 2018-05-25 2022-10-04 Universal Display Corporation Organic electroluminescent materials and devices
US11716900B2 (en) 2018-05-30 2023-08-01 Universal Display Corporation Host materials for electroluminescent devices
US11296283B2 (en) 2018-06-04 2022-04-05 Universal Display Corporation Organic electroluminescent materials and devices
US11925103B2 (en) 2018-06-05 2024-03-05 Universal Display Corporation Organic electroluminescent materials and devices
US11339182B2 (en) 2018-06-07 2022-05-24 Universal Display Corporation Organic electroluminescent materials and devices
US20190386256A1 (en) 2018-06-18 2019-12-19 Universal Display Corporation Sequential material sources for thermally challenged OLED materials
US11121320B2 (en) 2018-06-18 2021-09-14 Universal Display Corporation Organic vapor jet print head with redundant groups of depositors
US11552159B2 (en) 2018-06-18 2023-01-10 Universal Display Corporation OLED display with all organic thin film layers patterned
US11228004B2 (en) 2018-06-22 2022-01-18 Universal Display Corporation Organic electroluminescent materials and devices
US11261207B2 (en) 2018-06-25 2022-03-01 Universal Display Corporation Organic electroluminescent materials and devices
US11753425B2 (en) 2018-07-11 2023-09-12 Universal Display Corporation Organic electroluminescent materials and devices
EP3824492A4 (en) 2018-07-18 2022-04-20 Massachusetts Institute of Technology ALTERNATE MULTI-SOURCE VAPOR TRANSPORT DEPOSITION
US10797112B2 (en) 2018-07-25 2020-10-06 Universal Display Corporation Energy efficient OLED TV
US20200075870A1 (en) 2018-08-22 2020-03-05 Universal Display Corporation Organic electroluminescent materials and devices
US11233203B2 (en) 2018-09-06 2022-01-25 Universal Display Corporation Organic electroluminescent materials and devices
US11485706B2 (en) 2018-09-11 2022-11-01 Universal Display Corporation Organic electroluminescent materials and devices
US11718634B2 (en) 2018-09-14 2023-08-08 Universal Display Corporation Organic electroluminescent materials and devices
US11903305B2 (en) 2018-09-24 2024-02-13 Universal Display Corporation Organic electroluminescent materials and devices
US10879487B2 (en) 2018-10-04 2020-12-29 Universal Display Corporation Wearable OLED illumination device
US11495752B2 (en) 2018-10-08 2022-11-08 Universal Display Corporation Organic electroluminescent materials and devices
US11469383B2 (en) 2018-10-08 2022-10-11 Universal Display Corporation Organic electroluminescent materials and devices
US11476430B2 (en) 2018-10-15 2022-10-18 Universal Display Corporation Organic electroluminescent materials and devices
US11515482B2 (en) 2018-10-23 2022-11-29 Universal Display Corporation Deep HOMO (highest occupied molecular orbital) emitter device structures
US11469384B2 (en) 2018-11-02 2022-10-11 Universal Display Corporation Organic electroluminescent materials and devices
US11825736B2 (en) 2018-11-19 2023-11-21 Universal Display Corporation Organic electroluminescent materials and devices
US11963441B2 (en) 2018-11-26 2024-04-16 Universal Display Corporation Organic electroluminescent materials and devices
US11672165B2 (en) 2018-11-28 2023-06-06 Universal Display Corporation Organic electroluminescent materials and devices
US11672176B2 (en) 2018-11-28 2023-06-06 Universal Display Corporation Host materials for electroluminescent devices
US11706980B2 (en) 2018-11-28 2023-07-18 Universal Display Corporation Host materials for electroluminescent devices
US11690285B2 (en) 2018-11-28 2023-06-27 Universal Display Corporation Electroluminescent devices
US11889708B2 (en) 2019-11-14 2024-01-30 Universal Display Corporation Organic electroluminescent materials and devices
US11716899B2 (en) 2018-11-28 2023-08-01 Universal Display Corporation Organic electroluminescent materials and devices
US11201313B2 (en) 2018-11-29 2021-12-14 Universal Display Corporation Enhanced outcoupling from surface plasmon modes in corrugated OLEDs
US11217762B2 (en) 2018-11-30 2022-01-04 Universal Display Corporation Surface-plasmon-pumped light emitting devices
US11623936B2 (en) 2018-12-11 2023-04-11 Universal Display Corporation Organic electroluminescent materials and devices
US11834459B2 (en) 2018-12-12 2023-12-05 Universal Display Corporation Host materials for electroluminescent devices
US11737349B2 (en) 2018-12-12 2023-08-22 Universal Display Corporation Organic electroluminescent materials and devices
US11895853B2 (en) 2019-01-17 2024-02-06 The Regents Of The University Of Michigan Organic photovoltaic device having a lateral charge transport channel
US11088325B2 (en) 2019-01-18 2021-08-10 Universal Display Corporation Organic vapor jet micro-print head with multiple gas distribution orifice plates
US11349099B2 (en) 2019-01-25 2022-05-31 The Regents Of The University Of Michigan Method of fabricating a light emitting device having a polymer film with a specified surface rouggness
US11342526B2 (en) 2019-01-29 2022-05-24 The Regents Of The University Of Michigan Hybrid organic light emitting device
US11780829B2 (en) 2019-01-30 2023-10-10 The University Of Southern California Organic electroluminescent materials and devices
US11812624B2 (en) 2019-01-30 2023-11-07 The University Of Southern California Organic electroluminescent materials and devices
US11683973B2 (en) 2019-01-31 2023-06-20 Universal Display Corporation Use of thin film metal with stable native oxide for solder wetting control
US20200251664A1 (en) 2019-02-01 2020-08-06 Universal Display Corporation Organic electroluminescent materials and devices
US11325932B2 (en) 2019-02-08 2022-05-10 Universal Display Corporation Organic electroluminescent materials and devices
US11370809B2 (en) 2019-02-08 2022-06-28 Universal Display Corporation Organic electroluminescent materials and devices
US11773320B2 (en) 2019-02-21 2023-10-03 Universal Display Corporation Organic electroluminescent materials and devices
US11871653B2 (en) 2019-02-22 2024-01-09 Universal Display Corporation Organic electroluminescent materials and devices
US11758807B2 (en) 2019-02-22 2023-09-12 Universal Display Corporation Organic electroluminescent materials and devices
US11512093B2 (en) 2019-03-04 2022-11-29 Universal Display Corporation Compound used for organic light emitting device (OLED), consumer product and formulation
US11739081B2 (en) 2019-03-11 2023-08-29 Universal Display Corporation Organic electroluminescent materials and devices
US11637261B2 (en) 2019-03-12 2023-04-25 Universal Display Corporation Nanopatch antenna outcoupling structure for use in OLEDs
US11139442B2 (en) 2019-03-12 2021-10-05 Universal Display Corporation Nanopatch antenna outcoupling structure for use in OLEDs
US11245086B2 (en) 2019-03-12 2022-02-08 Universal Display Corporation Nano-objects for purcell enhancement, out-coupling and engineering radiation pattern
US20200295291A1 (en) 2019-03-12 2020-09-17 Universal Display Corporation OLED WITH TRIPLET EMITTER AND EXCITED STATE LIFETIME LESS THAN 200 ns
US11056540B2 (en) 2019-03-12 2021-07-06 Universal Display Corporation Plasmonic PHOLED arrangement for displays
US11569480B2 (en) 2019-03-12 2023-01-31 Universal Display Corporation Plasmonic OLEDs and vertical dipole emitters
JP2022531068A (ja) 2019-03-13 2022-07-06 メトオックス テクノロジーズ，インコーポレイテッド 薄膜堆積用の固体前駆体フィードシステム
US11552247B2 (en) 2019-03-20 2023-01-10 The Regents Of The University Of Michigan Organic vapor jet nozzle with shutter
US11963438B2 (en) 2019-03-26 2024-04-16 The University Of Southern California Organic electroluminescent materials and devices
JP2020158491A (ja) 2019-03-26 2020-10-01 ユニバーサル ディスプレイ コーポレイション 有機エレクトロルミネセンス材料及びデバイス
US11222928B2 (en) 2019-04-01 2022-01-11 Universal Display Corporation Display architecture with reduced number of data line connections
US11639363B2 (en) 2019-04-22 2023-05-02 Universal Display Corporation Organic electroluminescent materials and devices
US11613550B2 (en) 2019-04-30 2023-03-28 Universal Display Corporation Organic electroluminescent materials and devices comprising benzimidazole-containing metal complexes
US11495756B2 (en) 2019-05-07 2022-11-08 Universal Display Corporation Organic electroluminescent materials and devices
US11560398B2 (en) 2019-05-07 2023-01-24 Universal Display Corporation Organic electroluminescent materials and devices
US11827651B2 (en) 2019-05-13 2023-11-28 Universal Display Corporation Organic electroluminescent materials and devices
US11634445B2 (en) 2019-05-21 2023-04-25 Universal Display Corporation Organic electroluminescent materials and devices
US20200373360A1 (en) 2019-05-23 2020-11-26 Universal Display Corporation Oled display panel with unpatterned emissive stack
US12010859B2 (en) 2019-05-24 2024-06-11 Universal Display Corporation Organic electroluminescent materials and devices
US11647667B2 (en) 2019-06-14 2023-05-09 Universal Display Corporation Organic electroluminescent compounds and organic light emitting devices using the same
US11920070B2 (en) 2019-07-12 2024-03-05 The University Of Southern California Luminescent janus-type, two-coordinated metal complexes
US11825687B2 (en) 2019-07-17 2023-11-21 The Regents Of The University Of Michigan Organic light emitting device
US11685754B2 (en) 2019-07-22 2023-06-27 Universal Display Corporation Heteroleptic organic electroluminescent materials
US11926638B2 (en) 2019-07-22 2024-03-12 Universal Display Corporation Organic electroluminescent materials and devices
US20210036065A1 (en) 2019-07-29 2021-02-04 Universal Display Corporation Color stable multicolor OLED device structures
US20210032278A1 (en) 2019-07-30 2021-02-04 Universal Display Corporation Organic electroluminescent materials and devices
US11708355B2 (en) 2019-08-01 2023-07-25 Universal Display Corporation Organic electroluminescent materials and devices
US11985888B2 (en) 2019-08-12 2024-05-14 The Regents Of The University Of Michigan Organic electroluminescent device
US11374181B2 (en) 2019-08-14 2022-06-28 Universal Display Corporation Organic electroluminescent materials and devices
US11930699B2 (en) 2019-08-15 2024-03-12 Universal Display Corporation Organic electroluminescent materials and devices
US20210047354A1 (en) 2019-08-16 2021-02-18 Universal Display Corporation Organic electroluminescent materials and devices
US11925105B2 (en) 2019-08-26 2024-03-05 Universal Display Corporation Organic electroluminescent materials and devices
US11937494B2 (en) 2019-08-28 2024-03-19 Universal Display Corporation Organic electroluminescent materials and devices
US11600787B2 (en) 2019-08-30 2023-03-07 Universal Display Corporation Organic electroluminescent materials and devices
US11820783B2 (en) 2019-09-06 2023-11-21 Universal Display Corporation Organic electroluminescent materials and devices
US11999886B2 (en) 2019-09-26 2024-06-04 Universal Display Corporation Organic electroluminescent materials and devices
US11864458B2 (en) 2019-10-08 2024-01-02 Universal Display Corporation Organic electroluminescent materials and devices
US11950493B2 (en) 2019-10-15 2024-04-02 Universal Display Corporation Organic electroluminescent materials and devices
US11697653B2 (en) 2019-10-21 2023-07-11 Universal Display Corporation Organic electroluminescent materials and devices
US11919914B2 (en) 2019-10-25 2024-03-05 Universal Display Corporation Organic electroluminescent materials and devices
US11765965B2 (en) 2019-10-30 2023-09-19 Universal Display Corporation Organic electroluminescent materials and devices
US20210135130A1 (en) 2019-11-04 2021-05-06 Universal Display Corporation Organic electroluminescent materials and devices
JP7488091B2 (ja) 2019-11-14 2024-05-21 ユニバーサル ディスプレイ コーポレイション 有機エレクトロルミネセンス材料及びデバイス
US11903300B2 (en) 2019-11-18 2024-02-13 Universal Display Corporation Pixel configurations for high resolution OVJP printed OLED displays
US11832504B2 (en) 2019-11-25 2023-11-28 The Regents Of The University Of Michigan System and method for organic electronic device patterning
US11292245B2 (en) 2020-01-03 2022-04-05 Trustees Of Boston University Microelectromechanical shutters for organic vapor jet printing
US20210217969A1 (en) 2020-01-06 2021-07-15 Universal Display Corporation Organic electroluminescent materials and devices
US11778895B2 (en) 2020-01-13 2023-10-03 Universal Display Corporation Organic electroluminescent materials and devices
US11917900B2 (en) 2020-01-28 2024-02-27 Universal Display Corporation Organic electroluminescent materials and devices
US20220336759A1 (en) 2020-01-28 2022-10-20 Universal Display Corporation Organic electroluminescent materials and devices
US11932660B2 (en) 2020-01-29 2024-03-19 Universal Display Corporation Organic electroluminescent materials and devices
US12018035B2 (en) 2020-03-23 2024-06-25 Universal Display Corporation Organic electroluminescent materials and devices
US11970508B2 (en) 2020-04-22 2024-04-30 Universal Display Corporation Organic electroluminescent materials and devices
US11716863B2 (en) 2020-05-11 2023-08-01 Universal Display Corporation Hybrid display architecture
US11751466B2 (en) 2020-05-11 2023-09-05 Universal Display Corporation Apparatus and method to deliver organic material via organic vapor jet printing (OVJP)
EP3937268A1 (en) 2020-07-10 2022-01-12 Universal Display Corporation Plasmonic oleds and vertical dipole emitters
US11778889B2 (en) 2020-07-20 2023-10-03 Universal Display Corporation Height measurement and control in confined spaces for vapor deposition system
US11877489B2 (en) 2020-09-29 2024-01-16 Universal Display Corporation High color gamut OLED displays
US20220112232A1 (en) 2020-10-02 2022-04-14 Universal Display Corporation Organic electroluminescent materials and devices
US12016231B2 (en) 2020-10-09 2024-06-18 Universal Display Corporation Simplified high-performance AMOLED
US20220158096A1 (en) 2020-11-16 2022-05-19 Universal Display Corporation Organic electroluminescent materials and devices
US20220165967A1 (en) 2020-11-24 2022-05-26 Universal Display Corporation Organic electroluminescent materials and devices
US20220162243A1 (en) 2020-11-24 2022-05-26 Universal Display Corporation Organic electroluminescent materials and devices
US11903302B2 (en) 2020-12-16 2024-02-13 Universal Display Corporation Organic vapor jet printing system
US20220271241A1 (en) 2021-02-03 2022-08-25 Universal Display Corporation Organic electroluminescent materials and devices
EP4060758A3 (en) 2021-02-26 2023-03-29 Universal Display Corporation Organic electroluminescent materials and devices
EP4059915A3 (en) 2021-02-26 2022-12-28 Universal Display Corporation Organic electroluminescent materials and devices
US20220298192A1 (en) 2021-03-05 2022-09-22 Universal Display Corporation Organic electroluminescent materials and devices
US20220298190A1 (en) 2021-03-12 2022-09-22 Universal Display Corporation Organic electroluminescent materials and devices
US20220298193A1 (en) 2021-03-15 2022-09-22 Universal Display Corporation Organic electroluminescent materials and devices
US20220340607A1 (en) 2021-04-05 2022-10-27 Universal Display Corporation Organic electroluminescent materials and devices
EP4075531A1 (en) 2021-04-13 2022-10-19 Universal Display Corporation Plasmonic oleds and vertical dipole emitters
US20220352478A1 (en) 2021-04-14 2022-11-03 Universal Display Corporation Organic eletroluminescent materials and devices
US20220407020A1 (en) 2021-04-23 2022-12-22 Universal Display Corporation Organic electroluminescent materials and devices
US20230006149A1 (en) 2021-04-23 2023-01-05 Universal Display Corporation Organic electroluminescent materials and devices
US20230133787A1 (en) 2021-06-08 2023-05-04 University Of Southern California Molecular Alignment of Homoleptic Iridium Phosphors
EP4151699A1 (en) 2021-09-17 2023-03-22 Universal Display Corporation Organic electroluminescent materials and devices
US20230124304A1 (en) * 2021-10-14 2023-04-20 Applied Materials, Inc. Controlled delivery of low-vapor-pressure precursor into a chamber
US20230157058A1 (en) 2021-11-12 2023-05-18 Universal Display Corporation Organic electroluminescent devices
EP4212539A1 (en) 2021-12-16 2023-07-19 Universal Display Corporation Organic electroluminescent materials and devices
EP4231804A3 (en) 2022-02-16 2023-09-20 Universal Display Corporation Organic electroluminescent materials and devices
EP4286555A1 (en) 2022-02-23 2023-12-06 Universal Display Corporation Organic vapor jet printing system
US20230292592A1 (en) 2022-03-09 2023-09-14 Universal Display Corporation Organic electroluminescent materials and devices
US20230292605A1 (en) 2022-03-09 2023-09-14 Universal Display Corporation Organic electroluminescent materials and devices
US20230337516A1 (en) 2022-04-18 2023-10-19 Universal Display Corporation Organic electroluminescent materials and devices
US20230357918A1 (en) 2022-05-09 2023-11-09 Universal Display Corporation Organic vapor jet printing system
US20230363244A1 (en) 2022-05-09 2023-11-09 Universal Display Corporation Organic vapor jet printing system
US20230389421A1 (en) 2022-05-24 2023-11-30 Universal Display Corporation Organic electroluminescent materials and devices
EP4293001A1 (en) 2022-06-08 2023-12-20 Universal Display Corporation Organic electroluminescent materials and devices
US20230413590A1 (en) 2022-06-17 2023-12-21 Universal Display Corporation Organic electroluminescent devices
US20240016051A1 (en) 2022-06-28 2024-01-11 Universal Display Corporation Organic electroluminescent materials and devices
US20240107880A1 (en) 2022-08-17 2024-03-28 Universal Display Corporation Organic electroluminescent materials and devices
US20240180025A1 (en) 2022-10-27 2024-05-30 Universal Display Corporation Organic electroluminescent materials and devices
US20240188316A1 (en) 2022-10-27 2024-06-06 Universal Display Corporation Organic electroluminescent materials and devices
US20240188419A1 (en) 2022-10-27 2024-06-06 Universal Display Corporation Organic electroluminescent materials and devices
US20240196730A1 (en) 2022-10-27 2024-06-13 Universal Display Corporation Organic electroluminescent materials and devices
US20240206208A1 (en) 2022-10-27 2024-06-20 Universal Display Corporation Organic electroluminescent materials and devices
US20240188319A1 (en) 2022-10-27 2024-06-06 Universal Display Corporation Organic electroluminescent materials and devices
EP4383990A1 (en) 2022-12-08 2024-06-12 The Regents Of The University Of Michigan Materials for optoelectronic applications
EP4386065A1 (en) 2022-12-14 2024-06-19 Universal Display Corporation Organic electroluminescent materials and devices

Family Cites Families (98)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3379803A (en) 1964-05-04 1968-04-23 Union Carbide Corp Coating method and apparatus for deposition of polymer-forming vapor under vacuum
US3901182A (en) * 1972-05-18 1975-08-26 Harris Corp Silicon source feed process
CH626407A5 (ja) * 1977-07-08 1981-11-13 Balzers Hochvakuum
US4321299A (en) * 1977-09-15 1982-03-23 Nasa Strong thin membrane structure for use as solar sail comprising substrate with reflective coating on one surface and an infra red emissivity increasing coating on the other surface
US4389973A (en) * 1980-03-18 1983-06-28 Oy Lohja Ab Apparatus for performing growth of compound thin films
US4681773A (en) 1981-03-27 1987-07-21 American Telephone And Telegraph Company At&T Bell Laboratories Apparatus for simultaneous molecular beam deposition on a plurality of substrates
JPS582294A (ja) * 1981-06-29 1983-01-07 Fujitsu Ltd 気相成長方法
EP0110882A1 (en) * 1982-06-01 1984-06-20 Massachusetts Institute Of Technology Maskless growth of patterned films
US4454835A (en) * 1982-09-13 1984-06-19 The United States Of America As Represented By The Secretary Of The Navy Internal photolysis reactor
JPS59113174A (ja) * 1982-12-17 1984-06-29 Matsushita Electric Ind Co Ltd 薄膜形成方法および薄膜形成装置
US4508760A (en) * 1983-06-10 1985-04-02 Nova Tran Corporation Method and apparatus for microencapsulation
US4569829A (en) * 1983-11-10 1986-02-11 Texas Instruments Incorporated MBE Source bakeout system
AU3994785A (en) * 1984-02-13 1985-08-27 Schmitt, J.J. 111 Method and apparatus for the gas jet deposition of conductingand dielectric thin solid films and products produced there by
JPH0642456B2 (ja) * 1984-11-21 1994-06-01 株式会社日立製作所 表面光処理方法
JPS61280610A (ja) 1985-06-06 1986-12-11 Toshiba Corp 分子線エピタキシヤル成長装置
US4773355A (en) * 1985-06-10 1988-09-27 Massachusetts Institute Of Technology Growth of epitaxial films by chemical vapor deposition
DE3682130D1 (de) * 1985-07-15 1991-11-28 Japan Res Dev Corp Verfahren zur herstellung von ultrafeinen organischen verbindungen.
JPS6251028A (ja) * 1985-08-28 1987-03-05 Hitachi Maxell Ltd 磁気記録媒体の製造方法
US4796562A (en) * 1985-12-03 1989-01-10 Varian Associates, Inc. Rapid thermal cvd apparatus
JPH0691020B2 (ja) * 1986-02-14 1994-11-14 日本電信電話株式会社 気相成長方法および装置
JPS6345362A (ja) * 1986-08-11 1988-02-26 Matsushita Electric Ind Co Ltd フタロシアニン化合物薄膜の製造方法
US4769292A (en) 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
JPS63307255A (ja) * 1987-06-08 1988-12-14 Oki Electric Ind Co Ltd 有機機能性材料薄膜の製造方法及びその製造装置
JPS6411320A (en) * 1987-07-06 1989-01-13 Toshiba Corp Photo-cvd device
GB2211209A (en) 1987-10-16 1989-06-28 Philips Electronic Associated A method of forming a defect mixed oxide
JP2654490B2 (ja) * 1987-10-30 1997-09-17 日本化成株式会社 分散型ｅｌ素子の発光層，絶縁体層形成用ペースト及び該ペーストを用いたｅｌ素子
US5174881A (en) 1988-05-12 1992-12-29 Mitsubishi Denki Kabushiki Kaisha Apparatus for forming a thin film on surface of semiconductor substrate
WO1990002215A1 (en) 1988-08-19 1990-03-08 Regents Of The University Of Minnesota Preparation of superconductive ceramic oxides using ozone
JPH0360493A (ja) * 1989-07-26 1991-03-15 Furukawa Electric Co Ltd:The バブラーとその温度制御方法
JP2648211B2 (ja) * 1989-08-10 1997-08-27 日本電信電話株式会社 酸化物薄膜の作製方法
GB2234988B (en) * 1989-08-16 1993-12-08 Qpl Limited Improvements in vacuum deposition machines
JPH03104857A (ja) * 1989-09-18 1991-05-01 Central Glass Co Ltd 含フッ素樹脂被覆ＫＢｒ板状体およびその製造法
JPH0818902B2 (ja) 1989-11-02 1996-02-28 シャープ株式会社 気相成長装置
JPH0421780A (ja) * 1990-05-14 1992-01-24 Sharp Corp 気相成長装置
US5104684A (en) * 1990-05-25 1992-04-14 Massachusetts Institute Of Technology Ion beam induced deposition of metals
JPH0445259A (ja) * 1990-06-11 1992-02-14 Ulvac Japan Ltd 成膜装置
US5080928A (en) * 1990-10-05 1992-01-14 Gte Laboratories Incorporated Method for making moisture insensitive zinc sulfide based luminescent materials
US5356673A (en) * 1991-03-18 1994-10-18 Jet Process Corporation Evaporation system and method for gas jet deposition of thin film materials
JPH05132763A (ja) * 1991-11-12 1993-05-28 Ulvac Japan Ltd 全方向同時蒸着重合装置
US5431958A (en) 1992-03-09 1995-07-11 Sharp Kabushiki Kaisha Metalorganic chemical vapor deposition of ferroelectric thin films
JPH05323400A (ja) * 1992-03-26 1993-12-07 Toray Ind Inc 有機非線形光学結晶薄膜の気相成長方法
JP2917694B2 (ja) * 1992-04-02 1999-07-12 日本電気株式会社 化合物半導体気相成長方法及びその装置
FR2691922B1 (fr) * 1992-06-03 1994-07-22 Snecma Procede et dispositif de moulage de piece en materiau composite constituee de deux secteurs.
JP2780216B2 (ja) * 1992-06-30 1998-07-30 関西日本電気株式会社 電界発光灯
DE4223762B4 (de) * 1992-07-18 2009-07-23 Khd Humboldt Wedag Gmbh Sichtereinrichtung zum Sichten von körnigem Gut und Umlaufmahlanlage mit Einschaltung einer solchen Sichtereinrichtung
JP3300069B2 (ja) * 1992-11-19 2002-07-08 パイオニア株式会社 有機エレクトロルミネッセンス素子
JP3134137B2 (ja) 1993-01-13 2001-02-13 東京エレクトロン株式会社 縦型処理装置
JPH06223970A (ja) * 1993-01-25 1994-08-12 Idemitsu Kosan Co Ltd 有機エレクトロルミネッセンス素子の製造方法
JP3015221B2 (ja) * 1993-03-24 2000-03-06 三菱電機株式会社 有機薄膜の製造方法
JP3305047B2 (ja) * 1993-07-13 2002-07-22 三菱重工業株式会社 脱硝反応器
JPH0762526A (ja) * 1993-08-19 1995-03-07 Mitsubishi Chem Corp 有機電界発光素子の製造方法
US5679152A (en) * 1994-01-27 1997-10-21 Advanced Technology Materials, Inc. Method of making a single crystals Ga*N article
US5650197A (en) * 1994-03-11 1997-07-22 Jet Process Corporation Jet vapor deposition of organic molecule guest-inorganic host thin films
EP0714557B1 (en) * 1994-05-18 1998-11-25 Koninklijke Philips Electronics N.V. Method of providing a film of conjugated, substituted or unsubstituted poly(p-phenylene vinylene) on a substrate by chemical vapour deposition (cvd), as well as a method of manufacturing an electroluminescent (el) device
US5534314A (en) * 1994-08-31 1996-07-09 University Of Virginia Patent Foundation Directed vapor deposition of electron beam evaporant
US6143433A (en) 1994-09-14 2000-11-07 Mitsui Chemicals, Inc. Organic electroluminescent device and process for producing the same
US6358631B1 (en) 1994-12-13 2002-03-19 The Trustees Of Princeton University Mixed vapor deposited films for electroluminescent devices
US5703436A (en) 1994-12-13 1997-12-30 The Trustees Of Princeton University Transparent contacts for organic devices
US5707745A (en) 1994-12-13 1998-01-13 The Trustees Of Princeton University Multicolor organic light emitting devices
KR0158780B1 (ko) * 1994-12-22 1998-11-16 가네꼬 히사시 화학 증착법에 의한 박막형성 방법 및 장치
US5554450A (en) * 1995-03-08 1996-09-10 Eastman Kodak Company Organic electroluminescent devices with high thermal stability
EP0738788B1 (en) * 1995-04-20 2003-08-13 Ebara Corporation Thin-Film vapor deposition apparatus
US5554220A (en) * 1995-05-19 1996-09-10 The Trustees Of Princeton University Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities
JP3894571B2 (ja) * 1995-06-06 2007-03-22 レイケム・コーポレイション 可撓性電極担持物品
JP3061255B2 (ja) 1995-08-18 2000-07-10 キヤノン販売株式会社 成膜方法
US5734893A (en) * 1995-09-28 1998-03-31 Ibm Corporation Progressive content-based retrieval of image and video with adaptive and iterative refinement
US6066358A (en) * 1995-11-21 2000-05-23 Applied Materials, Inc. Blanket-selective chemical vapor deposition using an ultra-thin nucleation layer
US5958510A (en) * 1996-01-08 1999-09-28 Applied Materials, Inc. Method and apparatus for forming a thin polymer layer on an integrated circuit structure
US6663713B1 (en) * 1996-01-08 2003-12-16 Applied Materials Inc. Method and apparatus for forming a thin polymer layer on an integrated circuit structure
IL125291A (en) 1996-01-11 2003-01-12 Univ Princeton Organic luminescent coating for light detectors
JPH09256142A (ja) * 1996-03-15 1997-09-30 Sony Corp 成膜装置
WO1997048115A1 (en) 1996-06-12 1997-12-18 The Trustees Of Princeton University Plasma treatment of conductive layers
US6566156B1 (en) 1996-06-12 2003-05-20 The Trustees Of Princeton University Patterning of thin films for the fabrication of organic multi-color displays
US7750175B2 (en) * 1996-06-25 2010-07-06 Northwestern University Organic light-emitting diodes and related hole transport compounds
US20050158579A1 (en) * 1996-06-25 2005-07-21 Marks Tobin J. Organic light-emitting diodes and methods for assembly and enhanced charge injection
US6048630A (en) 1996-07-02 2000-04-11 The Trustees Of Princeton University Red-emitting organic light emitting devices (OLED's)
US5844363A (en) 1997-01-23 1998-12-01 The Trustees Of Princeton Univ. Vacuum deposited, non-polymeric flexible organic light emitting devices
US5834893A (en) 1996-12-23 1998-11-10 The Trustees Of Princeton University High efficiency organic light emitting devices with light directing structures
US5861219A (en) 1997-04-15 1999-01-19 The Trustees Of Princeton University Organic light emitting devices containing a metal complex of 5-hydroxy-quinoxaline as a host material
US5986401A (en) 1997-03-20 1999-11-16 The Trustee Of Princeton University High contrast transparent organic light emitting device display
US5874803A (en) 1997-09-09 1999-02-23 The Trustees Of Princeton University Light emitting device with stack of OLEDS and phosphor downconverter
US6125226A (en) 1997-04-18 2000-09-26 The Trustees Of Princeton University Light emitting devices having high brightness
US6091195A (en) 1997-02-03 2000-07-18 The Trustees Of Princeton University Displays having mesa pixel configuration
US5998803A (en) 1997-05-29 1999-12-07 The Trustees Of Princeton University Organic light emitting device containing a hole injection enhancement layer
US6013982A (en) 1996-12-23 2000-01-11 The Trustees Of Princeton University Multicolor display devices
US5981306A (en) 1997-09-12 1999-11-09 The Trustees Of Princeton University Method for depositing indium tin oxide layers in organic light emitting devices
US6045930A (en) 1996-12-23 2000-04-04 The Trustees Of Princeton University Materials for multicolor light emitting diodes
US5811833A (en) 1996-12-23 1998-09-22 University Of So. Ca Electron transporting and light emitting layers based on organic free radicals
US6046543A (en) 1996-12-23 2000-04-04 The Trustees Of Princeton University High reliability, high efficiency, integratable organic light emitting devices and methods of producing same
US5917280A (en) 1997-02-03 1999-06-29 The Trustees Of Princeton University Stacked organic light emitting devices
US5757139A (en) 1997-02-03 1998-05-26 The Trustees Of Princeton University Driving circuit for stacked organic light emitting devices
US6111902A (en) 1997-05-09 2000-08-29 The Trustees Of Princeton University Organic semiconductor laser
US5932895A (en) 1997-05-20 1999-08-03 The Trustees Of Princeton University Saturated full color stacked organic light emitting devices
US6242115B1 (en) 1997-09-08 2001-06-05 The University Of Southern California OLEDs containing thermally stable asymmetric charge carrier materials
US5869135A (en) * 1997-10-03 1999-02-09 Massachusetts Institute Of Technology Selective chemical vapor deposition of polymers
US6030715A (en) 1997-10-09 2000-02-29 The University Of Southern California Azlactone-related dopants in the emissive layer of an OLED
US6165554A (en) * 1997-11-12 2000-12-26 Jet Process Corporation Method for hydrogen atom assisted jet vapor deposition for parylene N and other polymeric thin films
US6337102B1 (en) * 1997-11-17 2002-01-08 The Trustees Of Princeton University Low pressure vapor phase deposition of organic thin films

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009238756A (ja) * 1997-11-17 2009-10-15 Trustees Of Princeton Univ 有機薄膜の低圧蒸着
JP2002033190A (ja) * 2000-05-12 2002-01-31 Semiconductor Energy Lab Co Ltd 発光装置の作製方法
JP4597421B2 (ja) * 2000-05-12 2010-12-15 株式会社半導体エネルギー研究所 発光装置の作製方法
JP2003133068A (ja) * 2001-10-25 2003-05-09 Nec Corp 発光表示装置の製造方法およびそれを適用した発光表示装置の製造装置
US6776847B2 (en) 2001-12-12 2004-08-17 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus and film formation method and cleaning method
US7763320B2 (en) 2001-12-12 2010-07-27 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus and film formation method and cleaning method
US7316983B2 (en) 2001-12-12 2008-01-08 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus and film formation method and cleaning method
JP2013214777A (ja) * 2004-04-13 2013-10-17 Trustees Of Princeton Univ バルクヘテロ接合を有する光電子装置の製造方法
JP2007533165A (ja) * 2004-04-13 2007-11-15 ザ、トラスティーズ オブ プリンストン ユニバーシティ バルクヘテロ接合を有する光電子装置の製造方法
JP2015073124A (ja) * 2004-04-13 2015-04-16 ザ、トラスティーズ オブ プリンストン ユニバーシティ バルクヘテロ接合を有する光電子装置の製造方法
US9150953B2 (en) 2004-08-13 2015-10-06 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device including organic semiconductor
JP2006080506A (ja) * 2004-08-13 2006-03-23 Semiconductor Energy Lab Co Ltd 半導体装置の製造方法
WO2007029558A1 (ja) * 2005-09-06 2007-03-15 Tohoku University 成膜用材料及び成膜用材料の推定方法
KR101431415B1 (ko) 2005-09-06 2014-08-18 고쿠리츠다이가쿠호진 도호쿠다이가쿠 성막용 재료 및 성막용 재료의 추정 방법
US8679369B2 (en) 2005-09-06 2014-03-25 Tohoku University Film-forming material and method for predicting film-forming material
WO2009034938A1 (ja) 2007-09-10 2009-03-19 Ulvac, Inc. 有機材料蒸気発生装置、成膜源、成膜装置
US8420169B2 (en) 2007-09-10 2013-04-16 Ulvac, Inc. Method of manufacturing organic thin film
US8181666B2 (en) 2008-02-26 2012-05-22 Ulvac, Inc. Switch valve
JP2009302045A (ja) * 2008-05-13 2009-12-24 Silver Seiko Ltd 有機エレクトロルミネッセンス素子の製造装置及び有機エレクトロルミネッセンス素子
WO2010007981A1 (ja) * 2008-07-18 2010-01-21 東京エレクトロン株式会社 成膜装置及び粉体気化装置
JP2010165620A (ja) * 2009-01-19 2010-07-29 Konica Minolta Holdings Inc 有機エレクトロルミネッセンス素子の製造方法
JP2012528245A (ja) * 2009-05-26 2012-11-12 アイメック 有機材料層を基板上に形成する方法
KR101125556B1 (ko) * 2009-10-28 2012-03-22 주식회사 에스에프에이 유기물 증착 장치
JP2014524975A (ja) * 2011-06-22 2014-09-25 アイクストロン、エスイー 気相蒸着システム及び供給ヘッド
KR20140053980A (ko) * 2011-06-22 2014-05-08 아익스트론 에스이 기상 증착 시스템 및 공급 헤드
KR101711504B1 (ko) 2011-06-22 2017-03-02 아익스트론 에스이 기상 증착 시스템 및 공급 헤드

Also Published As

Publication number Publication date
AU1412499A (en) 1999-06-07
JP4890592B2 (ja) 2012-03-07
US6558736B2 (en) 2003-05-06
DE69827293T2 (de) 2006-02-02
KR20010024652A (ko) 2001-03-26
US20100104753A1 (en) 2010-04-29
EP1032722A4 (en) 2001-09-12
WO1999025894A1 (en) 1999-05-27
JP2013177692A (ja) 2013-09-09
US20070131172A1 (en) 2007-06-14
JP2009238756A (ja) 2009-10-15
EP1032722B1 (en) 2004-10-27
US20040007178A1 (en) 2004-01-15
US20010002279A1 (en) 2001-05-31
DE69827293D1 (de) 2004-12-02
US6337102B1 (en) 2002-01-08
JP5371837B2 (ja) 2013-12-18
US20020155230A1 (en) 2002-10-24
KR100585286B1 (ko) 2006-05-30
US20150114296A1 (en) 2015-04-30
JP2016104913A (ja) 2016-06-09
EP1032722A1 (en) 2000-09-06
TW575699B (en) 2004-02-11
KR20060034312A (ko) 2006-04-21
KR100606325B1 (ko) 2006-07-31
JP2010159497A (ja) 2010-07-22

Similar Documents

Publication Publication Date Title
JP4890592B2 (ja) 有機薄膜の低圧蒸着
Shtein et al. Material transport regimes and mechanisms for growth of molecular organic thin films using low-pressure organic vapor phase deposition
Baldo et al. Low pressure organic vapor phase deposition of small molecular weight organic light emitting device structures
US7722927B2 (en) Device and method for organic vapor jet deposition
US7238389B2 (en) Vaporizing fluidized organic materials
JP2001523768A5 (ja)
EP1727922A1 (en) High thickness uniformity vaporization source
US8304013B2 (en) Methods for depositing especially doped layers by means of OVPD or the like
EP2137335B1 (en) Fine control of vaporized organic material
JP2004014311A (ja) 有機薄膜の形成方法
US20150064483A1 (en) Metal deposition using organic vapor phase deposition (vpd) system
JP2004014246A (ja) 有機膜形成装置および有機膜形成方法
Hartmann et al. 50.4: First Hybrid OLED by Organic Vapor Phase Deposition and Its Advantages in Deposition Rate Control for OLED Manufacturing
Sinha et al. Reduced thermal budget processing of high-Tc superconducting thin films and related materials by MOCVD
JP2004091809A (ja) Ｃｖｄ用液体原料供給装置および酸化物超電導体の製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051109

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051109

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20060502

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20060508

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20081209

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090309

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090316

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090609

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091208

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20100309