TW575699B - Low pressure vapor phase deposition of organic thin films - Google Patents
Low pressure vapor phase deposition of organic thin films Download PDFInfo
- Publication number
- TW575699B TW575699B TW87118943A TW87118943A TW575699B TW 575699 B TW575699 B TW 575699B TW 87118943 A TW87118943 A TW 87118943A TW 87118943 A TW87118943 A TW 87118943A TW 575699 B TW575699 B TW 575699B
- Authority
- TW
- Taiwan
- Prior art keywords
- patent application
- scope
- item
- organic
- film
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title description 18
- 238000001947 vapour-phase growth Methods 0.000 title description 2
- 238000000034 method Methods 0.000 claims description 85
- 239000000758 substrate Substances 0.000 claims description 74
- 238000006243 chemical reaction Methods 0.000 claims description 60
- 239000010408 film Substances 0.000 claims description 51
- 239000002243 precursor Substances 0.000 claims description 50
- 238000000151 deposition Methods 0.000 claims description 45
- 239000012159 carrier gas Substances 0.000 claims description 40
- 239000000126 substance Substances 0.000 claims description 37
- 239000000463 material Substances 0.000 claims description 36
- 230000008021 deposition Effects 0.000 claims description 35
- 150000003384 small molecules Chemical class 0.000 claims description 33
- 229910052757 nitrogen Inorganic materials 0.000 claims description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 13
- 238000012546 transfer Methods 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 8
- -1 8-quinolinyl Chemical group 0.000 claims description 7
- 238000009833 condensation Methods 0.000 claims description 7
- 230000005494 condensation Effects 0.000 claims description 7
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229920000728 polyester Polymers 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 4
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 229910052754 neon Inorganic materials 0.000 claims description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 5
- 125000000040 m-tolyl group Chemical group [H]C1=C([H])C(*)=C([H])C(=C1[H])C([H])([H])[H] 0.000 claims 4
- 229920006254 polymer film Polymers 0.000 claims 3
- 241000208340 Araliaceae Species 0.000 claims 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims 2
- 235000003140 Panax quinquefolius Nutrition 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- 239000007983 Tris buffer Substances 0.000 claims 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 claims 2
- 235000008434 ginseng Nutrition 0.000 claims 2
- 239000012788 optical film Substances 0.000 claims 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 2
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 claims 2
- POXIZPBFFUKMEQ-UHFFFAOYSA-N 2-cyanoethenylideneazanide Chemical group [N-]=C=[C+]C#N POXIZPBFFUKMEQ-UHFFFAOYSA-N 0.000 claims 1
- HONWGFNQCPRRFM-UHFFFAOYSA-N 2-n-(3-methylphenyl)-1-n,1-n,2-n-triphenylbenzene-1,2-diamine Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C(=CC=CC=2)N(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 HONWGFNQCPRRFM-UHFFFAOYSA-N 0.000 claims 1
- ZNJRONVKWRHYBF-VOTSOKGWSA-N 4-(dicyanomethylene)-2-methyl-6-julolidyl-9-enyl-4h-pyran Chemical compound O1C(C)=CC(=C(C#N)C#N)C=C1\C=C\C1=CC(CCCN2CCC3)=C2C3=C1 ZNJRONVKWRHYBF-VOTSOKGWSA-N 0.000 claims 1
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 claims 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 1
- DTQVDTLACAAQTR-UHFFFAOYSA-M Trifluoroacetate Chemical compound [O-]C(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-M 0.000 claims 1
- 230000005587 bubbling Effects 0.000 claims 1
- 229960000956 coumarin Drugs 0.000 claims 1
- 235000001671 coumarin Nutrition 0.000 claims 1
- 230000000694 effects Effects 0.000 claims 1
- 150000004679 hydroxides Chemical class 0.000 claims 1
- PQNFLJBBNBOBRQ-UHFFFAOYSA-N indane Chemical compound C1=CC=C2CCCC2=C1 PQNFLJBBNBOBRQ-UHFFFAOYSA-N 0.000 claims 1
- 229910052743 krypton Inorganic materials 0.000 claims 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims 1
- VMVNZNXAVJHNDJ-UHFFFAOYSA-N methyl 2,2,2-trifluoroacetate Chemical compound COC(=O)C(F)(F)F VMVNZNXAVJHNDJ-UHFFFAOYSA-N 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 238000002156 mixing Methods 0.000 claims 1
- 229960000948 quinine Drugs 0.000 claims 1
- 229910052717 sulfur Inorganic materials 0.000 claims 1
- 239000011593 sulfur Substances 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 239000003039 volatile agent Substances 0.000 claims 1
- 229910052724 xenon Inorganic materials 0.000 claims 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 description 25
- 239000010410 layer Substances 0.000 description 22
- 238000005516 engineering process Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- CSJLBAMHHLJAAS-UHFFFAOYSA-N diethylaminosulfur trifluoride Substances CCN(CC)S(F)(F)F CSJLBAMHHLJAAS-UHFFFAOYSA-N 0.000 description 6
- 239000012044 organic layer Substances 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000376 reactant Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- OIRDBPQYVWXNSJ-UHFFFAOYSA-N methyl trifluoromethansulfonate Chemical compound COS(=O)(=O)C(F)(F)F OIRDBPQYVWXNSJ-UHFFFAOYSA-N 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 3
- 238000011068 loading method Methods 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- XKBVRUZEZCXYTN-RXHKLUBKSA-N 4-[[(1r,2r,4as,5r,8as)-2-hydroxy-1,4a-dimethyl-6-methylidene-5-[(2e)-2-(2-oxofuran-3-ylidene)ethyl]-3,4,5,7,8,8a-hexahydro-2h-naphthalen-1-yl]methoxy]-4-oxobutanoic acid;4-[[(1r,2r,4as,5r,8as)-1-(hydroxymethyl)-1,4a-dimethyl-6-methylidene-5-[(2e)-2-(2-oxo Chemical compound C([C@H]1[C@]2(C)CC[C@H]([C@]([C@H]2CCC1=C)(CO)C)OC(=O)CCC(O)=O)\C=C1/C=COC1=O.C([C@H]1[C@]2(C)CC[C@@H](O)[C@]([C@H]2CCC1=C)(COC(=O)CCC(O)=O)C)\C=C1/C=COC1=O XKBVRUZEZCXYTN-RXHKLUBKSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- GTCAXTIRRLKXRU-UHFFFAOYSA-N methyl carbamate Chemical compound COC(N)=O GTCAXTIRRLKXRU-UHFFFAOYSA-N 0.000 description 2
- MBABOKRGFJTBAE-UHFFFAOYSA-N methyl methanesulfonate Chemical compound COS(C)(=O)=O MBABOKRGFJTBAE-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- XOKSLPVRUOBDEW-UHFFFAOYSA-N pinane Chemical compound CC1CCC2C(C)(C)C1C2 XOKSLPVRUOBDEW-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- XFLTXYRMEZIEOG-UHFFFAOYSA-N 1,2-diphenylethenamine Chemical compound C=1C=CC=CC=1C(N)=CC1=CC=CC=C1 XFLTXYRMEZIEOG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 1
- 206010049155 Visual brightness Diseases 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 150000007857 hydrazones Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229930006728 pinane Natural products 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 125000003396 thiol group Chemical class [H]S* 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
- C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
- H10K85/324—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S261/00—Gas and liquid contact apparatus
- Y10S261/65—Vaporizers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Description
575699 五、發明說明(l) ---------- 美國政府^^ 本發明係受1 _ τ Αη 果國政府貧助,合約號碼F49620 - 92- J-05 24(普妓甘6, 室)提休斯頓大學),由美國空軍〇SR(科技研究辦公 至 八’美國政府享有本發明之特定權利。 發明範圍 ^發明係關於光學品質薄膜之製造方法,特別是使用於 非線性光學裝置與有機光發射裝置之此種薄膜的低壓製造 方法。 JL明背景 、有機电%發光乃是迅速成長之技術,因被認為是具潛力 的顯不用裝置而受到激勵,有機光發射裝置(OLEDs)可達 到額外的3%量子效率,而且在視亮度下之使用壽命可達 1 0,〇 〇 〇小時之等級。目前已知有小分子與塑膠基材之 ^肋^兩者,但高分子基底之裝置具因使用旋轉沉積技術 =有簡單與廉價之優點,相較之下,通常使用真空熱蒸發 =製造小分子裝置,其製造成本比旋轉沉積技術為高, ED結構與製造技術於本文所參考之第㈣96/19?92號 利已有提供。 〜 有機蒸氣氣相沉積(0VPD)之使用已進步到用在許多且、、既 力的光電裝置如顯示裝置之小分子量有機層能夠低價^ 尺寸的沉積,0VPD方法如本文所參考之美國專利第、 5:‘5 54’220 號,由Forrest 等;S. R. F〇rrest 等所提出之 以有機蒸氣沉積生成的有機鹽薄膜之強化第二諧波生 〜長距結構次序” 68 Appl. Phys. Lett.i 326 ( 1 9 9 6 ).575699 V. Description of the invention (l) ---------- US government ^^ The present invention is supported by 1 _ τ Αη Government of the poor country, contract number F49620-92- J-05 24 6, Room) University of Houston), the United States Air Force 〇SR (Science and Technology Research Office to the United States Government has certain rights to the invention. Scope of the invention ^ The invention relates to the manufacturing method of optical quality films, especially for non-linear optics Devices and organic light-emitting devices such as low-voltage manufacturing methods of thin films. JL bright background, organic electricity% luminescence is a fast-growing technology, and is being stimulated because it is considered a potential display device. Organic light-emitting devices (OLEDs ) Can achieve an additional 3% quantum efficiency, and the service life under visual brightness can reach the level of 10,000 hours. At present, both small molecules and plastic substrates are known, but polymers The substrate device has the advantages of simplicity and cheapness due to the use of rotary deposition technology. In contrast, vacuum thermal evaporation is usually used to manufacture small molecular devices. The manufacturing cost is higher than that of rotary deposition technology. ED structure and manufacturing technology No. ㈣96 / 19 ~ 92, which is referred to in this article, has been provided. ~ The use of organic vapor vapor deposition (0VPD) has been advanced to use in many and small photovoltaic devices such as display devices. Low-cost ^ size deposition, the 0VPD method is referred to herein as US Patent No. 5: '5 54'220, fortified by Forrest et al .; SR Forrest et al. Second harmonic generation ~ long-distance structure order "68 Appl. Phys. Lett.i 326 (1 9 9 6).
苐4頁 575699 發明說明(2) —— 及P F r ^ · bUrrows等所提出之“有機蒸氣沉積:具高光學 、会性之有機薄膜生成之新方法,,156 j. 〇f crystal Growth 9 1 ( 1 9 9 5 )均有詳述。 結^PD方法使利用載體氣體傳送原材料至基材上,氣體凝 = 所要的薄膜,例如〇VPD技術已使用於光學非線性 (Das 鹽二+曱基礦酸4,-二曱基胺基-N-曱基-4—偶氮| & I由可蒸發之先驅物一碘化4,-二曱基胺基-N-曱基 im偶ί 4-(DASI)及對—甲苯石黃酸甲基酷(曱苯續酸酯、 n /、、二由載體氣體傳送至已加熱之基材上,此時, 解成4-二甲基胺基一4_偶氮基(DAS) ’隨後DAS與 MT反應而於基材上形成DAST。 由於可控制在極端不同的蒸-氣壓下材料的共沉積,〇vpD 1 ^為=精密化學計量生成多成分薄膜的唯一方法,然而 I成大i壓Γ實施0PVD方法,薄膜在大氣壓或近大氣壓下 ά a ’a因氣相成核作用與擴散限制生成製程而使得薄膜 較為粗糖並有不均句的表面形態。成-發明概沭 本發明提供一種在次大氣壓下於基材上生成一具有優異 、面(1貝之有機薄膜的方法與裝置,一方面,本發明包括 於,材上製備有機薄膜之方法,it匕方法包含以下步驟:提 二:ί有機先驅物,而先驅物為蒸氣相狀態;纟在次大氣 =/、子在有基材下多種先驅物發生反應而於基材上形成薄 ,一另一方面,本發明包含以此一方法所製成的薄膜,另 夕方面’本發明包含一用以促進在次大氣壓下有機先驅苐 Page 575699 Description of the Invention (2) —— and PF r ^ · bUrrows et al. "Organic Vapor Deposition: A New Method for the Formation of Organic Films with High Optics and Reactivity, 156 j. 〇f crystal Growth 9 1 (199 5) are all detailed. The PD method enables the carrier gas to be used to transfer the raw materials to the substrate, and the gas condensation = the desired film. For example, the OVPD technology has been used for optical nonlinearity (Das salt + hydrazone). Mineral acid 4, -diamidinoamino-N-fluorenyl-4—azo | & I from the evaporable precursor monoiodized 4, -diamidinoamino-N-fluorenyl im 4 -(DASI) and p-toluene xanthanate methyl carbamate (pyroxybenzoate, n / ,, and di) are transferred from the carrier gas to the heated substrate, and at this time, they are decomposed into 4-dimethylamino groups. A 4_azo group (DAS) 'DAS reacts with MT to form DAST on the substrate. As the co-deposition of materials can be controlled under extremely different vapor-pressure conditions, 0vpD 1 ^ = The only method for forming a thin film, however, the IPVD method is used to implement the 0PVD method. The film is formed at atmospheric pressure or near atmospheric pressure due to gas-phase nucleation and diffusion-limited production processes. The film has a coarser sugar and uneven surface morphology. Summary of the invention The present invention provides a method and a device for generating an organic film with excellent surface area (1 shell) under subatmospheric pressure. The present invention includes a method for preparing an organic thin film on a substrate. The it method includes the following steps: Extraction two: ί organic precursors, and the precursors are in a vapor phase state; 纟 in the sub-atmosphere = /, sub-under a substrate Various precursors react to form a thin film on the substrate. On the other hand, the present invention includes a thin film made by this method, and on the other hand, the present invention includes a method for promoting organic precursors under subatmospheric pressure.
575699575699
五、發明說明(3) 物之反應以於基材表面形成有機薄膜的裝置。 、本發明之一項優點為提供一可精確控制各成分含量之多 成分有機薄膜。 f發明之另一項優點為提供一具有平滑表面之均勻的有 壯本發月之另一項優點為提供低壓有機蒸氣相沉積方法與 衣置’用來生成有機光發射材料與光學非線性鹽之薄膜。 本發明之另一項優點為提供低壓有機分子束沉積方法與 裝置’用來形成有機光發射材料與光學非線性鹽之薄膜。 本發明尚有一項優點為提供一可於大型基材面積上形成 均勻的有機材料沉積之方法與裝置。 凰例說明 - 圖1為依據本發明具體實施例之LPOVPD反應室。 圖2為依據本發明具體實施例之〇MVD反應室。 圖3表示依據本發明具體實施例之連續式低壓基材沉積 有機材料之裝置。 。圖4A與4B分別為依據本發明具體實施例之反應氣體分散 斋的平面與剖面圖。 圖5為依據本發明具體實施例之滾輪基材搬送機構的侧5. Description of the invention Device for reacting (3) substances to form an organic thin film on the surface of a substrate. An advantage of the present invention is to provide a multi-component organic thin film which can precisely control the content of each component. f Another advantage of the invention is to provide a uniform, strong and stable hair with a smooth surface. Another advantage is to provide a low-pressure organic vapor phase deposition method and set 'for generating organic light-emitting materials and optically non-linear salts. The film. Another advantage of the present invention is to provide a low-pressure organic molecular beam deposition method and apparatus' for forming a thin film of an organic light-emitting material and an optically non-linear salt. Another advantage of the present invention is to provide a method and apparatus capable of forming a uniform organic material deposition on a large substrate area. Explanation of the example-Figure 1 is a LPOVPD reaction chamber according to a specific embodiment of the present invention. FIG. 2 is a MVD reaction chamber according to a specific embodiment of the present invention. FIG. 3 shows a continuous low-pressure substrate deposition apparatus for organic materials according to an embodiment of the present invention. . 4A and 4B are a plan view and a cross-sectional view, respectively, of a reaction gas dispersion kit according to a specific embodiment of the present invention. 5 is a side view of a roller substrate conveying mechanism according to a specific embodiment of the present invention
視圖。 詳述 本發明提供一種在次大氣壓下於基材上生成一具有優異 表面性質之有機薄膜的方法與裝置,本發明之此一方法稱 之為低壓有機蒸氣沉積(LPOVPD),本發明之LPOVPD方法容view. DETAILED DESCRIPTION The present invention provides a method and apparatus for forming an organic thin film with excellent surface properties on a substrate under sub-atmospheric pressure. This method of the present invention is called low pressure organic vapor deposition (LPOVPD), and the LPOVPD method of the present invention Content
第6頁 575699 分有機薄膜 粗糙度之優 之具體實施 含反應室, 圓柱狀且有 長度為約45 或石英。— 置於圓管36 堝14直接置 上,掛禍1 4 器1 8來加熱 有機先驅物 氣流3 0流經 驅物蒸氣沿 性氣體如氮 特性之氣體 亦為惰性氣 過多反應物 槽2 4經由調 徑30與38, 器3 2、流量 此傳送至反 節器40、流 此傳送至其 的沉積,此 異表面性質 例的LPOVPD 如反應管1 2 適當的尺寸 公分,反應 内含第一有 内並放置在 於反應管1 2 利用緊密包 或冷卻,控 材料熱分解 圓管3 6並進 著反應管1 2 、氦、氬、 ,如氫、氨 體’使用此 會有額外的 節閥2 6傳送 並流入反應 計3 4以及快 應管1 2之一 量計4 2以及 中含有第二 反應室1 0 並伸入至 ,例如實 管1 2可使 機先驅物 接近反應 之上或置 圍在反應 制坩堝1 4 或昇華, 入反應室 流至排氣 氪、氤、 五、發明說明(4) 許精確控制多成 特性為如低表面 一依據本發明 示,反應室1 〇包 内,反應管1 2為 直徑為1 0公分、 適的材料如破璃 口容器如坩堝工4 端20。另外,掛 隔板或是圓管之 區域加熱/冷卻 坩堝1 4内的第一 之惰性載體氣體 ;的第-有機先 性载體氣體為惰 氣體,而具還原 有機材料而言 於燒除不兩 而要的 3性氣體從氣 至少兩個、土 t ^ ]调峨動路 3包含壓力調節 ,载體氣體每 Γ包含壓力調 ,栽體氣體經 外’本發明之薄膜 如圖1所 反應室 驗裝置之 用任何合 材料之開 管1 2的一 於其中的 管1 2之多 之溫度使 一受調節 内,所造 端2 2,惰 氖等一類 及曱烷等,對許多 類還原氣體通常對 幫助。 管件2 8,以傳送到 管1 2。一流動路徑 速切換閥3 5之系 2 0 ’另一流動路 快速切換閥3 9之系 有機先驅物材料48 575699 五、發明說明(5) ' --- 之起’包器4 6,為能幫助第二有機先驅物材料4 8之溫度控 制,將起泡器46部份浸入容器52内之液浴5〇中,來自氣槽 2 4之!^性氣體呈氣泡狀通過第二有機先驅物材料4 8後進入 反應吕1 2,在此一程序中,圓管54必須維持在足夠高的溫 度以避免已揮發之第二有機先驅物48在從起泡器流至 室時再次凝結。 ~ 、任=進入反應管12之先驅物的量藉由製程參數如溫度、 載體氣體之流量以及反應物之溫度來控制,Lp〇vpD方法使 兩壓力質量流量控制器提供精確計量,不受先驅物的墓氣 壓與化學物性所影響,因此本方法容許根據所生產的薄膜 所需要比例之特性差異明顯之材料組合。 先驅物氣流利用快速切換閥3 5與3 9可幾乎立即開與關, 此類閥導引先驅物氣流至反應室1 2或至旁通線(未顯示), 所以在任意時間内,可將不同的先驅物氣流輪入反應管工2 以得到不同組成與特性,閥39調節載體氣體流入起泡器46 的量,閥3 5與3 9容許快速變換進入反應管1 2之反應物:以 變換所生成薄膜之物性與組成,例如,可生成Α β A B、 ABCABC、ABABCAB與ABCDABCD-型態之薄膜,其中各字母代 表不同的分子層或組成。 真空泵66與控制節流閥68在排氣口 62處連接至反靡室 1 〇,大部份有機蒸氣並不沉積於基材5 8,而是;疑、纟士於安置 在真空泵66上游之捕集阱64,捕集阱64包含如液鮮氣或天 然氟碳油,節流閥68調節反應室1 〇的壓力,合適^ ^力計 連接至反應室,此壓力計附有電子回饋來控制節流闊6 8 ^Page 6 575699 Sub-organic thin film with excellent implementation of roughness. It includes a reaction chamber, cylindrical and has a length of about 45 or quartz. — Put it in the round tube 36, put the pot 14 directly on it, and hang it down 1 to 4 to 18 to heat the organic precursor stream 30 to pass the drive steam along with the gas such as nitrogen gas is also an inert gas too much reactant tank 2 4 By adjusting the diameters 30 and 38, the device 3 2. The flow is transmitted to the inverter 40, and the flow is transmitted to the deposition. The LPOVPD of this example with different surface properties, such as the reaction tube 1 2 is suitable in size, and the reaction contains the first Inside and placed in the reaction tube 1 2 Use tight packing or cooling, control the material thermal decomposition of the round tube 3 6 and enter the reaction tube 1 2, helium, argon,, such as hydrogen, ammonia. 'This will have an additional throttle valve 2 6 Transfer and flow into the reaction meter 3 4 and one of the quick response tubes 12 2 and the meter 4 2 contains the second reaction chamber 10 and extends to, for example, the solid tube 1 2 can make the precursor of the machine close to the reaction or place it. Surrounding the reaction crucible 14 or sublimation, flow into the reaction chamber to the exhaust gas 氪, 氤, Ⅴ. Description of the invention (4) Allows precise control of multiple characteristics such as low surface-according to the present invention, the reaction chamber 10 The reaction tube 1 2 is 10 cm in diameter, suitable material such as broken glass Container such as a crucible 4 end station 20. In addition, the first inert carrier gas in the heating / cooling crucible 14 in the area where the partition plate or the round tube is hung; the first organic precursor carrier gas is an inert gas, and for reducing organic materials, it is The two essential gases are at least two from the gas, the soil t ^] adjusting the moving path 3 includes pressure regulation, the carrier gas includes pressure regulation every Γ, and the carrier gas passes through the outside. The film of the present invention is shown in Figure 1. The temperature of the open pipe 12 of any material used in the laboratory inspection device is as much as the temperature of the pipe 12 which makes it regulated. The end 22, inert neon, etc., and pinane, etc., are reduced to many types. Gas usually helps. Tubes 2 to 8 are transferred to tubes 1 2. One flow path speed switching valve 3 5 is 2 0 'The other flow path fast switching valve 3 9 is an organic precursor material 48 575699 V. Description of the invention (5)' --- From the 'package 4 6 is It can help the temperature control of the second organic precursor material 48. The bubbler 46 is partially immersed in the liquid bath 50 in the container 52, and the gas from the gas tank 24 passes through the second organic precursor in a bubble form. After the material 48 enters the reaction chamber 12, the round tube 54 must be maintained at a sufficiently high temperature to prevent the volatilized second organic precursor 48 from condensing again when it flows from the bubbler to the chamber. ~ 、 Ran = The amount of precursors entering the reaction tube 12 is controlled by process parameters such as temperature, carrier gas flow rate and temperature of the reactants. The LpOVpD method enables the two pressure mass flow controllers to provide accurate measurement without being pioneered. The grave pressure of the material and the chemical properties are affected, so the method allows material combinations with significantly different characteristics according to the required ratio of the produced film. The precursor gas flow can be opened and closed almost instantly using the quick-change valves 3 5 and 39. These valves direct the precursor gas flow to the reaction chamber 12 or to the bypass line (not shown), so at any time, the Different precursors flow into the reaction plumber 2 to obtain different compositions and characteristics. The valve 39 adjusts the amount of carrier gas flowing into the bubbler 46. The valves 3 5 and 39 allow rapid change of the reactants entering the reaction tube 12: Transform the physical properties and composition of the resulting film. For example, A β AB, ABCABC, ABABCAB, and ABCDABCD-type films can be generated, where each letter represents a different molecular layer or composition. The vacuum pump 66 and the control throttle valve 68 are connected to the reverse chamber 10 at the exhaust port 62. Most of the organic vapor is not deposited on the substrate 58, but is located on the upstream of the vacuum pump 66 Trap trap 64, which contains, for example, liquid fresh gas or natural fluorocarbon oil, throttle valve 68 adjusts the pressure in the reaction chamber 10, and a suitable dynamometer is connected to the reaction chamber. This pressure gauge is provided with electronic feedback to Control throttling width 6 8 ^
第8頁Page 8
575699 五、發明說明(7) 堝14、14N在反應管12内可以隔板或圓管方式垂直堆疊來 處理額外的先驅物,根據欲沉積之有機薄膜,可單獨使用 一個或多個流通路徑3 0、3 8或其任何組合,來提供必需的 先驅物材料。 本發明之方法可用來由蒸氣先驅物反應而沉積許多不同 的有機薄膜,其中,“反應”認定為先驅物反應物形成不 同的反應產物,或亦可認為先驅物材料形成供給者一受體 或賓一主關係。例如,根據本發明,用表列的先驅物之反 應而形成下列NL 0材料之薄膜: 薄膜材料 第一先驅物 第二先驅物 甲苯磺酸45-二甲基胺基-N-甲基-4-偶氮:|(DAST) 4’- _^甲基胺基-4-偶氮 fe(DAS) - 甲基偶氮i(MT) 甲烷磺酸4’-二甲基胺基-4-甲基偶氮fe(DASM) 甲烷磺酸甲基酯(MM) 4,-二甲基胺基-4-偶氮4 (DAS) 三氟曱院磺酸4’-二甲基胺 基-4-甲基偶MS:(DASM) 三氟甲烷磺酸甲基酯 (MfM) 4,-二甲基胺基-4-偶氮fe (DAS) 甲苯磺酸4’-二甲基胺基-N-甲基-4-偶氮ft(DAST) 甲基偶氮fc(MT) 硫酚4’-二甲基胺基-4-甲 基偶氮氐(DASTh) 甲苯磺酸4’-甲氧基-4-甲 基偶氮S(MeOST) 甲基偶氮&(ΜΤ) 4,-甲氧基斗甲基偶氮fe (MeOS) 甲苯磺酸4’-二甲基胺基-N-甲基-4-偶氮 fi:(DAST) 甲基偶氮&MT) 碘化4’-二甲基胺基-4-甲 基偶氮 i(DAS(Et)I) 甲苯磺酸4’-二甲基胺基-N-甲基-4-偶氮£(DAST) 甲基偶氮:fe(MT) 氫氧化4’-二甲基胺基-4-甲基偶氮 l:(DAS(Et)OH) 甲苯磺酸4’-二甲基胺基-4-乙醯偶氮S:(DAAST) 乙醯偶氮έ(ΑΤ) 4’-—•甲基胺基-4-偶氮έ (DAS) 三氟乙酸二甲基胺基-4-乙醯偶氮fe(DASAf) 三氟甲烷磺酸甲基酯 (MAf) 4’-二甲基胺基-4-偶氮:| (DAS)575699 5. Description of the invention (7) The pots 14 and 14N can be stacked vertically in the reaction tube 12 to handle additional precursors. Depending on the organic thin film to be deposited, one or more flow paths can be used alone. 3 0, 38, or any combination thereof to provide the necessary precursor material. The method of the present invention can be used to deposit many different organic thin films by the reaction of vapor precursors. Among them, "reaction" is considered to be that the precursor reactants form different reaction products, or the precursor materials form a donor-acceptor or Bin-host relationship. For example, according to the present invention, the following precursors are used to form a thin film of the following NL 0 materials using the reaction of the listed precursors: Thin film material First precursor Second precursor Toluenesulfonic acid 45-dimethylamino-N-methyl-4 -Azo: | (DAST) 4'- _ ^ methylamino-4-azofe (DAS)-methylazoi (MT) 4'-dimethylamino-4-methyl methanesulfonic acid Azofe (DASM) methyl methanesulfonate (MM) 4, -dimethylamino-4-azo4 (DAS) trifluoromethanesulfonic acid 4'-dimethylamino-4- Methyl couple MS: (DASM) Methyl trifluoromethanesulfonate (MfM) 4, -dimethylamino-4-azofe (DAS) Toluenesulfonic acid 4'-dimethylamino-N- Methyl-4-azoft (DAST) Methylazofc (MT) Thiol 4'-dimethylamino-4-methylazohydrazone (DASTh) Toluenesulfonic acid 4'-methoxy- 4-methylazo S (MeOST) methyl azo & (MT) 4, -methoxymethyl methyl azo fe (MeOS) tosylate 4'-dimethylamino-N-methyl -4-Azofi: (DAST) Methylazo & MT) 4'-Dimethylamino-4-methylazo i (DAS (Et) I) Toluenesulfonic acid 4'-Di Methylamino-N-methyl-4-azo (DAST) methylazo: fe (MT) 4'-dihydroxide Amino-4-methylazo: 1: (DAS (Et) OH) Toluenesulfonic acid 4'-dimethylamino-4-acetamidoazo S: (DAAST) Acetylazo (ATP) 4 '-— • Methylamino-4-Azo (DAS) Trifluoroacetic Acid Dimethylamino-4-Ethylazo Azofe (DASAf) Trifluoromethanesulfonic Acid Methyl Ester (MAf) 4' -Dimethylamino-4-azo: | (DAS)
第10頁 575699 五、發明說明(8) 在另一與用來製造OLED之光發射材料較為相 中,先驅物係由如 tetrathlsferlvalene(TFF)^7^列 (卿所組成’經混合後形成沉積又 材上的电何轉移錯合物丁 TF—TCNQ。4 一(二二、基 ^基胺基苯乙稀基)—I咲。南(4加至高流甲吾 ίϋ二人ΐ 的客體分子稀釋於主體基質分子中以 形成早一冷光層,其他客體分子範5 基-21Η,23Η-卩卜吩(τρρ)、紅螢稀、dcm2、豆辛^四本 :…推雜物至單-基質達成有效的多色變=做Π c" ιιϋ中’雙層光發射袭置係由電洞傳送層 # Α α-4,4,-雙“-(卜聯苯基)-Ν-苯基-胺基] ^本基^ ^-NPD)或MTDATA,積層於光發射層("EL")如 力隹^也1本基雙—(8_羥基4啉)鋁((AlQ2),-0Ph)或其已摻 ^的組合之上所構成,HTL與EL兩者輪流生成至所要的厚 再於該有機層上生成附加層或使用如三甲基銦、 二曱基鎵寺類之有機金屬源金屬接觸層。 柄Ϊ ί Ϊ L所不之裝置與方法,本發明包含-如圖2所示之 二 μ至7〇 ’反應室70包含一已修改之超高真空室71與 允—J輪(未顯示)之真空泵連接至閥72,典型的真 ^ ^ ^至壓1〇δ—1 0_U,使用反應室7 0沉積有機層 nMvt王稱為有機分子束蒸氣沉積(0MVD),雖SLP0VPD與 均使用次大氣壓來沉積有機層,其主要的不同點為後Page 10 575699 V. Description of the invention (8) In another phase that is relatively similar to the light-emitting materials used to make OLEDs, the precursors are composed of tetrathlsferlvalene (TFF) ^ 7 ^ column (composed of the 'mixture' to form a deposit) The electro-transition complex butyl TF-TCNQ on the material. 4 I (two, two-based amino phenyl styrene)-I 咲. South (4 to the guest molecule of Gao Liujiawu ϋ ϋ two people ϋ) Diluted in the host matrix molecules to form an early luminous layer. Other guest molecules are Fan 5 radical-21Η, 23Η- 卩 phenphene (τρρ), red fluorescent dilute, dcm2, douxin ^ 4: ... The matrix achieves effective polychromatic changes = do Π c " double-layer light emission attack system by the hole transmission layer # Α α-4,4, -bis "-(biphenyl) -N-phenyl -Amine group] ^ this group ^ -NPD) or MTDATA, laminated on the light emitting layer (" EL ") such as Li 隹 ^ 1 1 base bis- (8_hydroxy4line) aluminum ((AlQ2),- 0Ph) or its combined combination, both HTL and EL are alternately formed to the desired thickness, and then additional layers are formed on the organic layer or organic materials such as trimethylindium and difluorenyl gallium are used. Metal source gold The contact layer. The device and method that the handle does not include, the present invention includes-as shown in Fig. 2, the μ to 70 'reaction chamber 70 includes a modified ultra-high vacuum chamber 71 and a Y-J wheel ( The vacuum pump is not connected to the valve 72. The typical true pressure is 10δ-1 0_U. The organic layer is deposited using reaction chamber 70. The nMvt is called organic molecular beam vapor deposition (0MVD). Although SLP0VPD and Sub-atmospheric pressure is used to deposit organic layers, the main difference is
575699 五、發明說明(9) 者’分子平均自由經相冬 之下,LPOVPD之平均Π大於反應室70的尺寸,相較 容許從注入器形L = t於氣體反應室尺寸,0_ 备&丄 円扣向性分子“束”至基材,而可精密 動悲控刮成獏的膜厚、純度盘型皞。 上來盛Ϊ第一先驅物75之起泡器74,起泡器74置於 $二…、、’亚次、:包在溫度控制液浴80中。高純度惰性載體 7' = # ί /包通過第—先驅物7 5並帶走個別蒸氣經過加熱管 進入真空室71。在真空室η内,先驅物 制如Α卻Γ| ^而撞擊基材8 5,基材8 5則為附有溫度控 釗如冷部劑入口 8 1的方式。 I Ϊ =二71 I選擇性地附加至少一個納得生(Knudsen)或 1 ” 含有第二先驅物88,κ—元件86為一均勻加熱 熱爐兩來在真空下滲透蒸發物,例如,加熱K- 則以八ίL解DASI或其他先驅物並昇華生成的das,而das 僅简:…”方式注入反應室7〇 ’另夕卜,K—元件86亦可 進入?ΠΪ氣口以稀釋分子物種因加熱而昇華或蒸發 κ |ρ之/辰又此稀釋程序對於如藉由控制液浴8 0與 —^件86的溫度以及載體氣體78至起泡器74的〇^1 〜主糸統特別有甩。 43 3 始4二θ日體3來監視,旋轉試樣承載器90以確保先驅物的 ‘ 1st Ϊ與反應,先驅物材料之沉積進一步藉由可遮斷分 子束83與89之快門87來控制。575699 V. Description of the invention (9) Under the average molecular free phase winter, the average Π of LPOVPD is larger than the size of the reaction chamber 70, compared with the allowable shape of the injector L = t to the size of the gas reaction chamber, 0_丄 円 Straightening molecules "bundle" to the substrate, and can precisely control the thickness and purity of the cymbal disc. Come up and hold the bubbler 74 of the first precursor 75, and the bubbler 74 is placed in the two sub-packages: wrapped in the temperature control liquid bath 80. The high-purity inert carrier 7 '= # ί / bag passes the first-precursor 7 5 and takes away individual vapors through a heating tube and enters the vacuum chamber 71. In the vacuum chamber η, the precursor is made such as A but | and hits the substrate 8 5, and the substrate 8 5 is a method with a temperature control device such as a cold part inlet 8 1. I Ϊ = two 71 I optionally add at least one Knudsen or 1 "containing a second precursor 88, κ-element 86 is a uniform heating furnace two to permeate the evaporate under vacuum, for example, heating K -The Das generated by the solution of DASI or other precursors and sublimation in eight liters, and the das are simply Jane: "..." into the reaction chamber 70 '. In addition, K-element 86 can also enter? ΠΪ The gas port is used to dilute or evaporate the molecular species due to heating. Κ / ρ and / or this dilution procedure is useful, for example, by controlling the temperature of the liquid bath 80 and 86, and the carrier gas 78 to the bubbler 74. 1 ~ The main system is particularly dumped. 43 3 Start 4 2 θ Day 3 to monitor, rotate the sample carrier 90 to ensure the '1st reaction and reaction of the precursor, and the deposition of the precursor material is further controlled by a shutter 87 that can block the molecular beam 83 and 89 .
575699 五、發明說明(10) 反應室7 0可u 1 7 1之壓力以、、^擇性地包含冷卻遮罩9 1來協助維持真空室 、& 1減夕先驅物材料之再蒸發,而較佳為包含隔板 y z以避免先驅你从 — 初材枓移動而彼此污染。 、* f f至7〇可加裝許多如圖1所示之LP0VPD反應室的如快 、 、閥 方通官線等類之相同附件,反應室7 0可裝設多 :元件與起泡器以用來於基材85上沉積多種先驅物材 二.至7 〇争乂佳為包含一試樣裝填用之“裝載閘,,9 4, 之‘力門95與真空泵96,以避免換料時造成真空室 、〃圖1之裝置可選擇性修改為可於大面積基材表面上連續 =積有機層,如圖3之範例說明,圖3之裝置包含多個真空 室如裝填室146、有機層沉積室150與152、接觸沉積室154 =及卸載室1 56。舉例來說,各沉積室為圖1之LPOVPD反應 至10 ’基材137以輪送帶148傳送,經過處理室15〇、152、 154與156,在圖3之具體實施例中,處理室15〇、152、與 U4分別包含輻射加熱源158、16〇與162以避免有機蒸氣的 凝結,雖然在圖3中只有2個有機層沉積室丨5 〇與丨5 2,但可 視需求加入額外的沉積室。在由裝填室丨46傳送至有機層 >儿積室1 5 0與1 5 2以及由接觸沉積室1 5 4傳送至卸載室1 5 6 時,基材1 3 7會先經過氣閉鎖(未顯示)以避免提昇沉積室 150、1 52與1 54的真空度。而關於〇LED的範例中,沉積室 150與1 52分別用來沉積TPd與Ah,沉積室154則用來沉^ Mg : Ag接點層。 、 圖3範例之沉積室150、152與丨54分別包含一沉積有機先575699 V. Description of the invention (10) The pressure in the reaction chamber 70 may be u 1 7 1 and optionally include a cooling mask 9 1 to assist in maintaining the vacuum chamber and &1; re-evaporation of the precursor materials. It is better to include a partition yz to prevent the pioneers from moving from the primary material to contaminate each other. , * Ff to 70 can be equipped with many of the same accessories such as fast,, valve side through the official line of the LP0VPD reaction chamber as shown in Figure 1, the reaction chamber 70 can be installed more: components and bubblers to It is used to deposit a variety of pioneer materials on the substrate 85. To 70, it is best to include a “loading gate, 9 4”, “force gate 95, and vacuum pump 96 for sample loading, to avoid material replacement. The vacuum chamber and the device shown in FIG. 1 can be selectively modified to continuously and organically accumulate on the surface of a large-area substrate. As shown in the example of FIG. 3, the device in FIG. 3 includes multiple vacuum chambers such as a filling chamber 146, an organic Layer deposition chambers 150 and 152, contact deposition chamber 154 = and unloading chamber 1 56. For example, each deposition chamber is conveyed by the LPOVPD reaction of FIG. 1 to 10 'substrate 137 in a carousel 148, passes through the processing chamber 15, 152, 154, and 156. In the specific embodiment of FIG. 3, the processing chambers 150, 152, and U4 contain radiant heating sources 158, 160, and 162, respectively, to avoid condensation of organic vapor, although there are only two in FIG. 3 Organic layer deposition chambers 5 0 and 5 2 but additional deposition chambers can be added as required. Transfer from the loading chamber 46 to Layer> When the child storage chambers 1 50 and 15 2 and the contact deposition chamber 1 5 4 are transferred to the unloading chamber 1 5 6, the substrate 1 3 7 will first pass through an air lock (not shown) to avoid lifting the deposition chamber. The vacuum levels of 150, 1, 52, and 1 54. In the example of OLED, the deposition chambers 150 and 152 are used to deposit TPd and Ah, respectively, and the deposition chamber 154 is used to sink the Mg: Ag contact layer. The three deposition chambers 150, 152, and 54 each contain a deposition organic
第13頁 575699 五、發明說明(11)Page 13 575699 V. Description of the invention (11)
"用之反應物氣體分散器(RGD)108,如圖4A與4B之詳 ^ RGD 108為圖1與圖2之有機先驅物傳送機構的另一種 '兩來提供氣幕UO'UO, 、120,,與 120,,,,RGD 108可確保多曹女地& … 有機先驅物之沉積,有機先驅物在維持分 人 /1"積於各許發生反應之基材上,RGD 108包 含加執哭1 ? 9° 第二載體氣體進氣口 112與氣體歧管132, 口二器122避免有機先驅物材料的過早凝結,rgd ι〇8之上 二弟一載體氣體進氣口 114與分散板11(),第一載體氣體進 =口1j 4供應载有具低揮發性如MT之第一有機先驅物的氣 _’、第一載體氣體經由分散板丨丨〇進入反應室内,分散板 11 〇為如網目、、破璃填充材料或孔狀不鏽鋼板,流經分散 板110 =氣流被RGD 108所遮蔽,RGD 108使具低蒸氣壓如 DAS之第二有機先驅物的氣體成一平面氣幕120,含有第二 有機先驅物的第二載體氣體於進氣口 112進氣並導向氣體 歧管132,氣體歧管132為一空心管,具有一排孔13,,用 ^供給第二載體氣體至環繞於氣體歧管132之環狀穴126, 第二載體氣體經由細縫丨36離開RGD 1〇8,而形成平面氣幕 的形狀。 氣幕120由TPD蒸氣所構成,氣幕丨2〇,由Uq3蒸氣所構成 以及,氣幕120’’由可產生導電表面如聚咯或有機金屬化 合物所構成’如果需要的話,控制或調節0LED之發光顏色 可由沉積室1 52之額外的RGI)裝置1〇8產生摻雜物蒸氣的氣 幕1 20’ ’ ’來調整A1 q3層的合適摻雜量。 圖1、圖2或圖3之裝置可使用一“滾輪—至_滾輪,,基材" The reactant gas disperser (RGD) 108 is used, as detailed in Figures 4A and 4B ^ RGD 108 is another 'two to provide the air curtain UO' UO of the organic precursor transfer mechanism of Figure 1 and Figure 2, 120 ,, and 120 ,,,, and RGD 108 can ensure the deposition of organic precursors and organic precursors. The organic precursors are maintained on separate substrates and are accumulated on various substrates that react. RGD 108 contains In addition, the second carrier gas inlet 112 and the gas manifold 132 and the second port 122 prevent the premature condensation of the organic precursor materials. The second carrier gas inlet 114 is above rgd 08. With the dispersion plate 11 (), the first carrier gas inlet = port 1j 4 supplies a gas carrying a first organic precursor with low volatility such as MT, and the first carrier gas enters the reaction chamber through the dispersion plate. The dispersing plate 11 〇 is a mesh, glass-filled material, or a hole-like stainless steel plate, which flows through the dispersing plate 110 = the air flow is shielded by RGD 108, which makes the gas with the second organic precursor of low vapor pressure such as DAS into A flat air curtain 120, and a second carrier gas containing a second organic precursor is introduced into the air inlet 112 and To the gas manifold 132, the gas manifold 132 is a hollow tube with a row of holes 13, and the second carrier gas is supplied to the annular cavity 126 surrounding the gas manifold 132, and the second carrier gas passes through the slit 丨36 leaves RGD 108, and forms the shape of a flat air curtain. The air curtain 120 is composed of TPD vapor, the air curtain is 20, is composed of Uq3 vapor, and the air curtain 120 `` is composed of a conductive surface such as polypyrrole or an organometallic compound. If necessary, control or adjust 0LED The luminous color can be adjusted by the additional RGI of the deposition chamber 1 52) device 10 to produce an air curtain 1 20 ′ ′ ′ of dopant vapor to adjust the appropriate doping amount of the A1 q3 layer. The device of Figure 1, Figure 2 or Figure 3 can use a "roller—to_roller,"
第14頁 575699 五、發明說明(12) 傳送系統來選擇性地修改,如圖5所千 一 統適合於大面積、彈性基材上沉積有、\圖5所示之傳送系 ⑽以高分子板或金屬薄片製成,並有由機/膜如基枓 182,於基材180上之有機先驅物沉^由凌輪“I傳,至滚輪 1 80脫離滾輪丨8 i而暴露於圖i之反應' 77別發曰生於/基材 圖3之分子束或氣幕,;袞輪181與18;用^ J 圖2與 =黑動,如變速馬達,基材180由滚輪181傳送至滾輪f f 的速度代表形成於基材180上的有機薄膜之膜厚。 明本發明進一步參照下列不受此限之範例來做進一步的說 範例1 使用圖1之裝置,有機光發射材料層生成於已預塗 化銦錫(ITO)透明層之玻璃與彈性聚酯基材,ιτ〇形成裳乳 之電極,其厚度分別為玻璃的1 7 0 0埃以及聚§旨的1 2 0 0 ^罝 :得之電極阻抗分別為10Ω與60Ω,玻璃基材以清潔劑邀 去離子水之溶液於超音波槽浴中清洗,再以hl,卜三氣/甲 烷做蒸浴,接著以丙酮沖洗,最後以異丙醇沖洗。為避免 暴露於有機溶劑所造成的損傷,彈性基材僅以清潔劑與里 丙醇沖洗。 、Page 14 575699 V. Description of the invention (12) The transmission system is selectively modified. As shown in Figure 5, the unified system is suitable for large-area, elastic substrates. The transmission system shown in Figure 5 is based on polymers. It is made of plate or metal foil, and there is a machine / membrane such as base 182, and the organic precursor on the substrate 180 is deposited by the roller "I", and the roller 1 80 is separated from the roller 丨 8 i and is exposed to Figure i The reaction '77 Don't say the molecular beam or air curtain born in / substrate Figure 3; 衮 wheels 181 and 18; use ^ J Figure 2 and = black movement, such as variable speed motor, substrate 180 is transferred by roller 181 to The speed of the roller ff represents the film thickness of the organic thin film formed on the substrate 180. It is clear that the present invention is further described with reference to the following examples that are not limited to this example. Example 1 Using the device of FIG. The glass and elastic polyester substrate that have been pre-coated with indium tin (ITO) transparent layer, ιτ〇 form the electrode of the milk, the thickness of which is 1700 angstroms of glass and 1 2 0 0 ^^ : The obtained electrode impedances are 10Ω and 60Ω respectively. The glass substrate is cleaned in a ultrasonic bath with a solution of deionized water using a detergent. Then to HL, BU three gas / methane make steam bath, followed by rinsing with acetone, and finally rinse with isopropanol. In order to avoid exposure to the damage caused by the organic solvent, the detergent and the elastic substrate only in propanol rinse.,
玻璃基材置於反應管1 2内溫度為接近220它的位置,第 層 >儿積於I T 0表面的是電洞傳送材料τ p d,特定地,τ p d 蒸氣藉由氮氣載體氣體從掛禍14載送至基材a,tpd生成 條件包含:源頭溫度為2 〇 〇 ± 5。(:,氮氣載體氣體流量為 lOOsccm,反應室壓力為0· 50托與生成時間為2〇分鐘。氮The glass substrate is placed in the reaction tube 12 where the temperature is close to 220. The first layer > on the surface of IT 0 is the hole transporting material τ pd. Specifically, τ pd vapor is suspended from the nitrogen carrier gas. The problem 14 is carried to the substrate a, and the tpd generation conditions include: the source temperature is 2000 ± 5. (:, Nitrogen carrier gas flow rate is 100 sccm, reaction chamber pressure is 0.550 Torr and generation time is 20 minutes. Nitrogen
第15頁 575699Page 15 575699
氣載體氣體流量為lOOsccm時,其系統雷諾數為〜5〇(), 不刼作是在層流區域,TPD層生成之厚度介於丨⑽_3⑽埃 产沉積之後,降低接近TPD掛堝的溫度,並關閉相關的、。 彳,九流,接著藉由打開分離的氮氣管線將蒸氣由掛瑪 14N二入至反應室12内以生成電子傳送層—,ai 件包含:源頭溫度為247 ±8t,氮氣載體氣體流量為条 5〇sccm,反應至壓力為0.65托與生成時間為1〇分鐘,在h 積TPD與Alqs二者時,使用水冷不鏽鋼基材承載器來維匕 基材贩度為15C,AlQ3層生成之厚度介於7〇〇 — η〇〇埃。 沉積ΑΙΑ層後,基材移出反應室並以熱蒸鍍一Mg:Ag丁貝 部接點,再蒸鍍一 1 0 0 0埃之保護金層而完成。 於沉積時使用低壓可使有機層具平滑且均勻的表面, 如,TPD與A1Q3層以原子力顯微鏡測量,其RMS粗糙度分 為6-8埃與9-1丨埃,所製成的叽肋裝置具有一電流—電壓 特性,其中於低電壓時I(XV,於高電壓時1工”,而[與^關 係之功率定律變化的開啟電壓VT為約6 V。 範例2 使用圖1之裝置製造一NL0膜,MT48導入至3〇立方公分之 起泡器46,其溫度藉由矽油浴5〇維持在接近8〇。—1〇〇它, 使用II氣中產生氣泡’目而載送MT蒸氣經由玻璃管 進入反應管12内含有置於反應管12底部的msi之坩堝14 丽接,近5公分^位置,反應管12的壓力維持在約1〇_2托, MS瘵氣與MT瘵氣反應而於基材58上形成MST之固體薄 膜基材5 8則以基材底板6 〇支撐著,過剩未反應之mt蒸氣When the gas carrier gas flow rate is 100 sccm, its system Reynolds number is ~ 50 (). It does not work in the laminar flow area, and the thickness of the TPD layer is between 丨 ⑽_3 and 沉积. After deposition, the temperature close to the TPD hanging pot is reduced. And close related ,. Alaska, nine streams, and then opened the separated nitrogen line from the gas 14N into the reaction chamber 12 to generate an electron transport layer, the ai parts include: the source temperature is 247 ± 8t, the nitrogen carrier gas flow rate is 50 Sccm, the reaction to a pressure of 0.65 Torr and a generation time of 10 minutes. When both the product TPD and Alqs are used, a water-cooled stainless steel substrate carrier is used to maintain the substrate turnover to 15C, and the thickness of the AlQ3 layer to be generated. Between 700-n00 Angstroms. After depositing the ΑΙΑ layer, the substrate was removed from the reaction chamber and a Mg: Ag sintered contact was thermally evaporated, and then a protective gold layer of 100 angstroms was evaporated. Using low pressure during deposition can make the organic layer have a smooth and uniform surface. For example, the TPD and A1Q3 layers are measured with an atomic force microscope, and the RMS roughness is divided into 6-8 angstroms and 9-1 丨 angular ribs. The device has a current-voltage characteristic, in which I (XV at low voltage, 1 operation at high voltage ", and the turn-on voltage VT of the power law change related to ^ is about 6 V. Example 2 Use the device of Figure 1 An NL0 film was manufactured, and MT48 was introduced into a 30 cubic centimeter bubbler 46, and its temperature was maintained at approximately 80 by a silicone oil bath 50. -1 00 It was used to generate MT using air bubbles in II gas to carry MT The vapor enters the reaction tube 12 through the glass tube, and the crucible 14 containing the msi at the bottom of the reaction tube 12 is beautifully connected to a position of about 5 cm ^. The pressure of the reaction tube 12 is maintained at about 10_2 Torr. The gas reaction forms a solid film substrate 5 of MST on the substrate 58. The substrate 5 8 is supported by the substrate bottom plate 60, and there is an excess of unreacted mt vapor.
575699 五、發明說明(14) 則由排氣管62排出,因而形成DAST膜,可以用於如井與 關之上。 、予開 本發明使用低壓沉積技術來製造具優異表面性質與精 組成之有機薄膜,雖然本發明的許多具體實施例於文^, 述,但並不受具體實施例所限,例如對熟知此項技菽 # 對具體實施例思考出修改,但仍為本發明之申嗜直 ^ 明号刊部If] 的精神與想法所涵蓋。 111 本發明與下列專利共同申請專利:“高可靠性、高效 率、整合有機光發射裝置與其製備方法”,序I ·· n > 0 8/774, 1 1 9 (專利日期·· 1 99 6年12月23日);“多色LEd 新材料”,序號:08/85 0, 2 64 (專利日期:1997年5月2之 曰);“以有機自由基為基礎之電子傳送與光發射層”, 序號:08/7 7 4, 1 20 (專利日期:! 9 9 6年12月23日)· ‘‘夕^ 顯示裝置],序號:08/ 772,333 (專利日期:1 9 9 6年12夕月巴 23曰),紅色發光有機光發射裝置(LED),,,序贫. 〇8/774,〇87(專利日期:1 99 6年12月23日);“堆^有 發射裝置用驅動電路”,序號:08/ 792, 05 0 (專利i日期: Π 9 7年2月3曰)’高效率有機光發射裝置結構,,,序 號:08/7 72, 3 32 (專利曰期:1 9 9 6年12月23 積、非高分子彈性有機光發射裝置”, 9,319(專利日期:1 9 9 7 y月23日)二‘且 年2月3日“谁田士序遽 ,(專利日期:1997 年2月3曰),堆贅有機光發射裝置,,,序铁· 0 8/ 792,046 (專利日期· 1(^7主9 曰q m 』· 1997年2月3曰);“高對比透明有575699 V. Description of the invention (14) is discharged from the exhaust pipe 62, so a DAST film is formed, which can be used in wells such as wells. The invention uses low-pressure deposition technology to produce organic thin films with excellent surface properties and fine composition. Although many specific embodiments of the present invention are described in the text, they are not limited to the specific embodiments.项 技 菽 # Thinking about modifications to the specific embodiment, but still covered by the spirit and ideas of the present invention. 111 The present invention is co-filed with the following patents: "High Reliability, High Efficiency, Integrated Organic Light Emitting Device and Preparation Method", Sequence I ·· n > 0 8/774, 1 1 9 (patent date · 1 99 December 23, 2006); "Multicolor LEd New Materials", Serial Number: 08/85 0, 2 64 (patent date: May 2, 1997); "Electron transport and light based on organic radicals "Launching layer", serial number: 08/7 7 4, 1 20 (patent date: 9 9 December 23, 2006) · "Even ^ display device], serial number: 08 / 772,333 (patent date: 1 9 9 6 December 23, 2009), red light-emitting organic light emitting device (LED) ,, and poor. 〇8 / 774, 〇87 (patent date: December 23, 1996); "Heap ^ has emission Device driving circuit ", serial number: 08/792, 05 0 (patent i date: Π February 3, 1997) 'high efficiency organic light emitting device structure ,, serial number: 08/7 72, 3 32 (patent Date: December 23, 196, "integral, non-polymer elastic organic light-emitting device", 9,319 (patent date: 197 7 y 23rd) II 'and February 3, "Who Tian Shi Xuyi, (patent Issue: February 3, 1997), Bulk Organic Light Emitting Device ,, Sequential Iron · 0 8 / 792,046 (patent date · 1 (^ 7 main 9 = qm "· February 3, 1997);" High Contrast Yes
575699 五、發明說明(15) 機光發射裝置顯示器,,,序號:〇8/821,38 0 (專利日期: 1 9 9 7年3月2 0日);“含有5 ~羥基—啉之金屬錯合物為基 質材料之有機光發射裝置”,序號:08/838, 0 9 9 (專利曰 期·· 1 9 97年8月1 5日);“具高亮度之光發射裝置”,序 號:0 8 /844, 3 53 (專利日期:1 9 9 7年4月18日);“有機半 導體雷射’序號:60/046,061(專利日期:1997年5月9 曰);“有機半導體雷射”,序號:〇 8/859,468 (專利曰 期·· 1 9 9 7年5月1 9曰);“飽和全彩堆疊有機光發射裝 置’序號:08/858,994(專利日期:1997年5月20日); 含有電洞射入強化層之有機光發射裝置”,序號·· 08/865,491(專利日期:1997年5月29日);“導電層之電 漿處理”,序號:PCT/US97 / 1 0 2 52 (專利日期:1 9 9 7年6月 1 2曰;“製造有機多彩顯示裝置之薄膜,,專利申請中,序 號·Ρ(:Τ/υ897/1〇289(專利日期·· 1997 年 6 月 12 曰);“雙 異種結構紅外線與縱向孔表面發射有機雷射,,,序號: 6 0/ 0 5 3, 1 7 6 (專利日期:1 9 9 7年7月18日);“含有熱安定 非對稱電荷載體材料之0LED ” ,序號:08/9^,029(專利 日期:199,7年9月8日);“0LED之堆疊與螢光轉換器之光 毛射裝‘置’序就· 〇 8 / 9 2 5,4 0 3 (專利日期:1 9 9 7年9月9 曰),有機光發射裝置之沉積氧化銦錫層之改良方法,, ,序號· 08/928,800(專利日期:1997年9月12日); “OLED之發光層中之阿内酯相關摻雜物,,,序號: 0 8/ 948, 1 3 0 (專利曰期:1 9 9 7年1〇月9曰);“使用非金屬 陰極之高透過有機光發射裝置,,,(專利日期·· 1 9 9 7年11 575699 五、發明說明(16)575699 V. Description of the invention (15) Display of organic light emitting device, serial number: 08/821, 38 0 (patent date: March 20, 1997); "Metal containing 5 ~ hydroxy-line Organic light emitting device with complex as matrix material ", serial number: 08/838, 09 (patent date · August 15, 1997)," light emitting device with high brightness ", serial number : 0 8/844, 3 53 (patent date: April 18, 1997); "organic semiconductor laser 'serial number: 60 / 046,061 (patent date: May 9, 1997);" organic semiconductor laser " Shooting ", serial number: 08 / 859,468 (patent date · May 19, 1997);" saturated full-color stacked organic light emitting device "serial number: 08 / 858,994 (patent date: May 1997 20th); Organic Light Emitting Device Containing Hole Penetration Enhancement Layer ", Serial No. 08 / 865,491 (patent date: May 29, 1997);" Plasma treatment of conductive layer ", Serial No .: PCT / US97 / 1 0 2 52 (Patent date: June 12, 1997; "Manufacture of thin film for organic colorful display devices, in the patent application, serial number · P (: Τ / υ897 / 1〇289 ( Date of the patent · · June 12, 1997); "Infrared light with double heterostructure and longitudinal hole surface emitting organic laser ,, serial number: 6 0/0 5 3, 1 7 6 (patent date: 1 997 7 years 7 May 18); "0LEDs containing a thermally stable asymmetric charge carrier material", serial number: 08/9 ^, 029 (patent date: September 8, 199, 7); "0LED stacking and fluorescent converter Optical fiber laser device 'setting' sequence · 〇8 / 9 25,403 (patent date: September 9, 1997), an improved method for depositing an indium tin oxide layer in an organic light emitting device, , Serial number: 08 / 928,800 (patent date: September 12, 1997); "the alactone-related dopant in the light-emitting layer of OLED,", serial number: 0 8/948, 1 3 0 (patent date: October 9, 1997); "Using a non-metallic cathode high transmission organic light emitting device ,, (patent date · 997 11 575699 V. Description of the invention (16)
月3日),代理人列表绝 金屬陰極之高透過有乂°°20/4°(暫f以及“使用非 、、有機先發射裝置,,,(專利日期:丨9 97 年月5日),代理人列表編號:j 〇〇2〇/44,各共同申請專 利案之王文於本文中列為參考,所提出之發明與案美國專 利第08/354, 674 、 08/613,207 、 08/632, 322 與08/693, 359 號以及暫定第60/010,013 、60/024,001 、60/025,501 號共 同申請專利,各共同申請專利案之全文於本文中列為參 考。May 3), the agent list has the highest transmission of metal cathodes 阴极 ° 20/4 ° (temporary f and "use of non-, organic first-emission devices ,,, (patent date: 丨 9 May 1997) , Agent list number: j 〇〇2〇 / 44, Wang Wen of each co-application patent case is incorporated herein by reference, the proposed inventions and cases US Patent Nos. 08/354, 674, 08 / 613,207, 08 / 632, 322 and 08/693, 359 and the tentative 60 / 010,013, 60 / 024,001, 60 / 025,501 jointly applied for patents, and the full text of each joint application patent is incorporated herein by reference.
第19頁Page 19
Claims (1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/972,156 US6337102B1 (en) | 1997-11-17 | 1997-11-17 | Low pressure vapor phase deposition of organic thin films |
Publications (1)
Publication Number | Publication Date |
---|---|
TW575699B true TW575699B (en) | 2004-02-11 |
Family
ID=25519260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW87118943A TW575699B (en) | 1997-11-17 | 1998-11-17 | Low pressure vapor phase deposition of organic thin films |
Country Status (8)
Country | Link |
---|---|
US (7) | US6337102B1 (en) |
EP (1) | EP1032722B1 (en) |
JP (5) | JP2001523768A (en) |
KR (2) | KR100585286B1 (en) |
AU (1) | AU1412499A (en) |
DE (1) | DE69827293T2 (en) |
TW (1) | TW575699B (en) |
WO (1) | WO1999025894A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI382098B (en) * | 2004-11-09 | 2013-01-11 | Global Oled Technology Llc | Controlling the application of vaporized organic material |
TWI596233B (en) * | 2011-06-22 | 2017-08-21 | 愛思強歐洲公司 | Vapor deposition system and supply head |
Families Citing this family (1052)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6303238B1 (en) * | 1997-12-01 | 2001-10-16 | The Trustees Of Princeton University | OLEDs doped with phosphorescent compounds |
US6337102B1 (en) * | 1997-11-17 | 2002-01-08 | The Trustees Of Princeton University | Low pressure vapor phase deposition of organic thin films |
US6209118B1 (en) * | 1998-01-21 | 2001-03-27 | Micron Technology, Inc. | Method for modifying an integrated circuit |
US6830828B2 (en) | 1998-09-14 | 2004-12-14 | The Trustees Of Princeton University | Organometallic complexes as phosphorescent emitters in organic LEDs |
US7001536B2 (en) | 1999-03-23 | 2006-02-21 | The Trustees Of Princeton University | Organometallic complexes as phosphorescent emitters in organic LEDs |
JP3682465B2 (en) * | 1999-03-31 | 2005-08-10 | 独立行政法人産業技術総合研究所 | Resin molded product surface layer modification method and apparatus therefor, and resin molded product with modified surface layer, resin molded product surface layer colored method and apparatus and surface molded resin product with colored surface layer, and Resin molded product with added functionality by modifying the surface layer |
US6537607B1 (en) * | 1999-12-17 | 2003-03-25 | Texas Instruments Incorporated | Selective deposition of emissive layer in electroluminescent displays |
US6792796B2 (en) * | 2000-01-07 | 2004-09-21 | Baker Hughes Incorporated | Scale prediction probe |
DE10007059A1 (en) * | 2000-02-16 | 2001-08-23 | Aixtron Ag | Method and device for producing coated substrates by means of condensation coating |
US6913713B2 (en) * | 2002-01-25 | 2005-07-05 | Konarka Technologies, Inc. | Photovoltaic fibers |
JP4597421B2 (en) * | 2000-05-12 | 2010-12-15 | 株式会社半導体エネルギー研究所 | Method for manufacturing light emitting device |
US7462372B2 (en) | 2000-09-08 | 2008-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device, method of manufacturing the same, and thin film forming apparatus |
DE10048759A1 (en) * | 2000-09-29 | 2002-04-11 | Aixtron Gmbh | Method and device for separating organic layers in particular by means of OVPD |
TW463522B (en) * | 2000-11-07 | 2001-11-11 | Helix Technology Inc | Manufacturing method for organic light emitting diode |
US20030129299A1 (en) * | 2000-11-16 | 2003-07-10 | Swanson Leland S. | Selective deposition of emissive layer in electroluminescent displays |
DE10057134A1 (en) * | 2000-11-17 | 2002-05-23 | Aixtron Ag | Process for depositing crystalline layers onto crystalline substrates in a process chamber of a CVD reactor comprises adjusting the kinematic viscosity of the carrier gas mixed |
JP2004525518A (en) * | 2001-03-30 | 2004-08-19 | テクノロジーズ アンド デバイス インターナショナル インコーポレイテッド | Method and apparatus for growing submicron group III nitride structures using HVPE technology |
DE10128091C1 (en) * | 2001-06-11 | 2002-10-02 | Applied Films Gmbh & Co Kg | Device for coating a flat substrate used in the production of flat TV screens with organic illuminating diodes comprises a fixed vaporizer source for vaporizing materials |
WO2003001569A2 (en) | 2001-06-21 | 2003-01-03 | The Trustees Of Princeton University | Organic light-emitting devices with blocking and transport layers |
US6613143B1 (en) * | 2001-07-06 | 2003-09-02 | Technologies And Devices International, Inc. | Method for fabricating bulk GaN single crystals |
US20060011135A1 (en) * | 2001-07-06 | 2006-01-19 | Dmitriev Vladimir A | HVPE apparatus for simultaneously producing multiple wafers during a single epitaxial growth run |
US6936357B2 (en) * | 2001-07-06 | 2005-08-30 | Technologies And Devices International, Inc. | Bulk GaN and ALGaN single crystals |
US7501023B2 (en) * | 2001-07-06 | 2009-03-10 | Technologies And Devices, International, Inc. | Method and apparatus for fabricating crack-free Group III nitride semiconductor materials |
US20070032046A1 (en) * | 2001-07-06 | 2007-02-08 | Dmitriev Vladimir A | Method for simultaneously producing multiple wafers during a single epitaxial growth run and semiconductor structure grown thereby |
US6984934B2 (en) | 2001-07-10 | 2006-01-10 | The Trustees Of Princeton University | Micro-lens arrays for display intensity enhancement |
US20030026601A1 (en) * | 2001-07-31 | 2003-02-06 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Vapor deposition and in-situ purification of organic molecules |
WO2003022008A1 (en) * | 2001-08-29 | 2003-03-13 | The Trustees Of Princeton University | Organic light emitting devices having carrier transporting layers comprising metal complexes |
ATE546844T1 (en) * | 2001-08-29 | 2012-03-15 | Univ Princeton | ORGANIC LIGHT EMITTING DEVICES WITH SUPPORT BLOCKING LAYERS WITH METAL COMPLEXES |
US6734038B2 (en) * | 2001-09-04 | 2004-05-11 | The Trustees Of Princeton University | Method of manufacturing high-mobility organic thin films using organic vapor phase deposition |
US8535759B2 (en) * | 2001-09-04 | 2013-09-17 | The Trustees Of Princeton University | Method and apparatus for depositing material using a dynamic pressure |
US6716656B2 (en) | 2001-09-04 | 2004-04-06 | The Trustees Of Princeton University | Self-aligned hybrid deposition |
US7744957B2 (en) * | 2003-10-23 | 2010-06-29 | The Trustees Of Princeton University | Method and apparatus for depositing material |
US7404862B2 (en) * | 2001-09-04 | 2008-07-29 | The Trustees Of Princeton University | Device and method for organic vapor jet deposition |
US7431968B1 (en) * | 2001-09-04 | 2008-10-07 | The Trustees Of Princeton University | Process and apparatus for organic vapor jet deposition |
WO2003020999A1 (en) | 2001-09-04 | 2003-03-13 | The Trustees Of Princeton University | Process and apparatus for organic vapor jet deposition |
US6641730B2 (en) * | 2001-10-03 | 2003-11-04 | B. J. Services Company, | Integrated debris management system |
US6835469B2 (en) | 2001-10-17 | 2004-12-28 | The University Of Southern California | Phosphorescent compounds and devices comprising the same |
JP2003133068A (en) * | 2001-10-25 | 2003-05-09 | Nec Corp | Method for manufacturing luminescent display device and device for manufacturing luminescent display device by applying it |
US7053547B2 (en) * | 2001-11-29 | 2006-05-30 | Universal Display Corporation | Increased emission efficiency in organic light-emitting devices on high-index substrates |
SG149680A1 (en) | 2001-12-12 | 2009-02-27 | Semiconductor Energy Lab | Film formation apparatus and film formation method and cleaning method |
US6869695B2 (en) | 2001-12-28 | 2005-03-22 | The Trustees Of Princeton University | White light emitting OLEDs from combined monomer and aggregate emission |
US6863997B2 (en) * | 2001-12-28 | 2005-03-08 | The Trustees Of Princeton University | White light emitting OLEDs from combined monomer and aggregate emission |
TWI275319B (en) * | 2002-02-05 | 2007-03-01 | Semiconductor Energy Lab | Manufacturing method and method of operating a manufacturing apparatus |
US7025442B2 (en) * | 2002-02-11 | 2006-04-11 | Ran Yaron | Laser ink jet printer |
TWI286044B (en) * | 2002-02-22 | 2007-08-21 | Semiconductor Energy Lab | Light-emitting device and method of manufacturing the same, and method of operating manufacturing apparatus |
SG113448A1 (en) * | 2002-02-25 | 2005-08-29 | Semiconductor Energy Lab | Fabrication system and a fabrication method of a light emitting device |
TW589919B (en) * | 2002-03-29 | 2004-06-01 | Sanyo Electric Co | Method for vapor deposition and method for making display device |
US6951694B2 (en) | 2002-03-29 | 2005-10-04 | The University Of Southern California | Organic light emitting devices with electron blocking layers |
DE10392519T5 (en) * | 2002-04-19 | 2005-08-04 | Mattson Technology Inc., Fremont | A system for depositing a film on a substrate using a low vapor pressure gas precursor |
US6774019B2 (en) * | 2002-05-17 | 2004-08-10 | International Business Machines Corporation | Incorporation of an impurity into a thin film |
JP4292777B2 (en) * | 2002-06-17 | 2009-07-08 | ソニー株式会社 | Thin film forming equipment |
US20030230238A1 (en) * | 2002-06-03 | 2003-12-18 | Fotios Papadimitrakopoulos | Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM) |
JP2004014311A (en) * | 2002-06-07 | 2004-01-15 | Sony Corp | Forming method of organic thin film |
US20030230980A1 (en) * | 2002-06-18 | 2003-12-18 | Forrest Stephen R | Very low voltage, high efficiency phosphorescent oled in a p-i-n structure |
WO2004017043A2 (en) | 2002-08-16 | 2004-02-26 | The University Of Southern California | Organic light emitting materials with anionic ligand |
US7061175B2 (en) * | 2002-08-16 | 2006-06-13 | Universal Display Corporation | Efficiency transparent cathode |
AU2003263929A1 (en) * | 2002-08-16 | 2004-03-03 | The University Of Southern California | Organic light emitting materials and devices |
US7663300B2 (en) * | 2002-08-16 | 2010-02-16 | Universal Display Corporation | Organic light emitting devices for illumination |
US6916554B2 (en) * | 2002-11-06 | 2005-07-12 | The University Of Southern California | Organic light emitting materials and devices |
US7067170B2 (en) * | 2002-09-23 | 2006-06-27 | Eastman Kodak Company | Depositing layers in OLED devices using viscous flow |
US6911671B2 (en) * | 2002-09-23 | 2005-06-28 | Eastman Kodak Company | Device for depositing patterned layers in OLED displays |
KR100473806B1 (en) * | 2002-09-28 | 2005-03-10 | 한국전자통신연구원 | Method and apparatus using large area organic vapor deposition for organic thin film and organic devices |
US7049636B2 (en) * | 2002-10-28 | 2006-05-23 | Universal Display Corporation | Device including OLED controlled by n-type transistor |
US20040086743A1 (en) * | 2002-11-06 | 2004-05-06 | Brown Cory S. | Organometallic compounds for use in electroluminescent devices |
US6687266B1 (en) | 2002-11-08 | 2004-02-03 | Universal Display Corporation | Organic light emitting materials and devices |
US6858327B2 (en) | 2002-11-08 | 2005-02-22 | Universal Display Corporation | Organic light emitting materials and devices |
US6891326B2 (en) * | 2002-11-15 | 2005-05-10 | Universal Display Corporation | Structure and method of fabricating organic devices |
US6982179B2 (en) * | 2002-11-15 | 2006-01-03 | University Display Corporation | Structure and method of fabricating organic devices |
US20040096570A1 (en) * | 2002-11-15 | 2004-05-20 | Michael Weaver | Structure and method of fabricating organic devices |
TW595251B (en) * | 2002-12-09 | 2004-06-21 | Univ Nat Cheng Kung | Method for manufacturing organic light-emitting diodes |
WO2004054325A1 (en) * | 2002-12-12 | 2004-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device, manufacturing apparatus, film-forming method, and cleaning method |
US8222072B2 (en) * | 2002-12-20 | 2012-07-17 | The Trustees Of Princeton University | Methods of fabricating devices by low pressure cold welding |
US20040144321A1 (en) * | 2003-01-28 | 2004-07-29 | Eastman Kodak Company | Method of designing a thermal physical vapor deposition system |
WO2004079434A2 (en) * | 2003-02-28 | 2004-09-16 | Northwestern University | Vapor deposited electro-optic films self-assembled through hydrogen bonding |
US6995445B2 (en) * | 2003-03-14 | 2006-02-07 | The Trustees Of Princeton University | Thin film organic position sensitive detectors |
KR101314034B1 (en) | 2003-03-24 | 2013-10-02 | 유니버시티 오브 써던 캘리포니아 | Phenyl-pyrazole complexes of ir |
US20050227389A1 (en) * | 2004-04-13 | 2005-10-13 | Rabin Bhattacharya | Deformable organic devices |
US7465678B2 (en) * | 2003-03-28 | 2008-12-16 | The Trustees Of Princeton University | Deformable organic devices |
US20040199052A1 (en) | 2003-04-01 | 2004-10-07 | Scimed Life Systems, Inc. | Endoscopic imaging system |
US6902833B2 (en) * | 2003-04-01 | 2005-06-07 | University Of Southern California | Materials and structures for enhancing the performance or organic light emitting devices |
US7090928B2 (en) * | 2003-04-01 | 2006-08-15 | The University Of Southern California | Binuclear compounds |
US20040209115A1 (en) * | 2003-04-21 | 2004-10-21 | Thompson Mark E. | Organic light emitting devices with wide gap host materials |
US20040209116A1 (en) * | 2003-04-21 | 2004-10-21 | Xiaofan Ren | Organic light emitting devices with wide gap host materials |
US7029765B2 (en) * | 2003-04-22 | 2006-04-18 | Universal Display Corporation | Organic light emitting devices having reduced pixel shrinkage |
JP4179041B2 (en) * | 2003-04-30 | 2008-11-12 | 株式会社島津製作所 | Deposition device for organic EL protective film, manufacturing method, and organic EL element |
TWI224473B (en) * | 2003-06-03 | 2004-11-21 | Chin-Hsin Chen | Doped co-host emitter system in organic electroluminescent devices |
US7053412B2 (en) * | 2003-06-27 | 2006-05-30 | The Trustees Of Princeton University And Universal Display Corporation | Grey scale bistable display |
US6885025B2 (en) * | 2003-07-10 | 2005-04-26 | Universal Display Corporation | Organic light emitting device structures for obtaining chromaticity stability |
US7211823B2 (en) | 2003-07-10 | 2007-05-01 | Universal Display Corporation | Organic light emitting device structure for obtaining chromaticity stability |
US6837939B1 (en) | 2003-07-22 | 2005-01-04 | Eastman Kodak Company | Thermal physical vapor deposition source using pellets of organic material for making OLED displays |
US7018723B2 (en) * | 2003-07-25 | 2006-03-28 | The University Of Southern California | Materials and structures for enhancing the performance of organic light emitting devices |
US7198859B2 (en) * | 2003-07-25 | 2007-04-03 | Universal Display Corporation | Materials and structures for enhancing the performance of organic light emitting devices |
US20050025993A1 (en) | 2003-07-25 | 2005-02-03 | Thompson Mark E. | Materials and structures for enhancing the performance of organic light emitting devices |
US7179543B2 (en) * | 2003-10-06 | 2007-02-20 | The Trustees Of Princeton University | Doping of organic opto-electronic devices to extend reliability |
US6972431B2 (en) * | 2003-11-26 | 2005-12-06 | Trustees Of Princeton University | Multilayer organic photodetectors with improved performance |
US7061011B2 (en) * | 2003-11-26 | 2006-06-13 | The Trustees Of Princeton University | Bipolar organic devices |
US7070867B2 (en) * | 2003-12-05 | 2006-07-04 | The University Of Southern California | OLEDs having n-type doping |
US20050137459A1 (en) | 2003-12-17 | 2005-06-23 | Scimed Life Systems, Inc. | Medical device with OLED illumination light source |
US20050164031A1 (en) * | 2004-01-26 | 2005-07-28 | Thompson Mark E. | Dual emitting dyads of heavy metal complexes as broad band emitters for organic LEDs |
US7279232B2 (en) * | 2004-01-26 | 2007-10-09 | Universal Display Corporation | Electroluminescent stability |
US7151339B2 (en) * | 2004-01-30 | 2006-12-19 | Universal Display Corporation | OLED efficiency by utilization of different doping concentrations within the device emissive layer |
US6893939B1 (en) | 2004-02-25 | 2005-05-17 | Eastman Kodak Company | Thermal physical vapor deposition source with minimized internal condensation effects |
US7045952B2 (en) * | 2004-03-04 | 2006-05-16 | Universal Display Corporation | OLEDs with mixed host emissive layer |
US7419846B2 (en) * | 2004-04-13 | 2008-09-02 | The Trustees Of Princeton University | Method of fabricating an optoelectronic device having a bulk heterojunction |
BRPI0508779A (en) * | 2004-04-13 | 2007-09-04 | Univ Princeton | method of fabrication of a mass heterojunction optoelectronic device |
US7708859B2 (en) * | 2004-04-30 | 2010-05-04 | Lam Research Corporation | Gas distribution system having fast gas switching capabilities |
US20050244580A1 (en) * | 2004-04-30 | 2005-11-03 | Eastman Kodak Company | Deposition apparatus for temperature sensitive materials |
US20070066038A1 (en) * | 2004-04-30 | 2007-03-22 | Lam Research Corporation | Fast gas switching plasma processing apparatus |
US7582365B2 (en) * | 2005-01-10 | 2009-09-01 | Universal Display Corporation | Reversibly reducible metal complexes as electron transporting materials for OLEDs |
US7655323B2 (en) * | 2004-05-18 | 2010-02-02 | The University Of Southern California | OLEDs utilizing macrocyclic ligand systems |
US7279704B2 (en) | 2004-05-18 | 2007-10-09 | The University Of Southern California | Complexes with tridentate ligands |
US7154114B2 (en) * | 2004-05-18 | 2006-12-26 | Universal Display Corporation | Cyclometallated iridium carbene complexes for use as hosts |
US7491823B2 (en) * | 2004-05-18 | 2009-02-17 | The University Of Southern California | Luminescent compounds with carbene ligands |
US7445855B2 (en) * | 2004-05-18 | 2008-11-04 | The University Of Southern California | Cationic metal-carbene complexes |
US7534505B2 (en) * | 2004-05-18 | 2009-05-19 | The University Of Southern California | Organometallic compounds for use in electroluminescent devices |
US20070190247A1 (en) * | 2004-05-18 | 2007-08-16 | Mecharonics Co., Ltd. | Method for forming organic light-emitting layer |
US7598388B2 (en) | 2004-05-18 | 2009-10-06 | The University Of Southern California | Carbene containing metal complexes as OLEDs |
US7601436B2 (en) | 2004-05-18 | 2009-10-13 | The University Of Southern California | Carbene metal complexes as OLED materials |
US7393599B2 (en) * | 2004-05-18 | 2008-07-01 | The University Of Southern California | Luminescent compounds with carbene ligands |
US20050275056A1 (en) * | 2004-05-26 | 2005-12-15 | Stephen Forrest | Organic heterojunction bipolar transistor |
US7220687B2 (en) * | 2004-06-25 | 2007-05-22 | Applied Materials, Inc. | Method to improve water-barrier performance by changing film surface morphology |
JP5848862B2 (en) | 2004-06-25 | 2016-01-27 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Improving the water shielding performance of the encapsulated membrane |
US7214600B2 (en) * | 2004-06-25 | 2007-05-08 | Applied Materials, Inc. | Method to improve transmittance of an encapsulating film |
US7780791B2 (en) * | 2004-06-30 | 2010-08-24 | Lam Research Corporation | Apparatus for an optimized plasma chamber top piece |
US20060000551A1 (en) * | 2004-06-30 | 2006-01-05 | Saldana Miguel A | Methods and apparatus for optimal temperature control in a plasma processing system |
US8540843B2 (en) | 2004-06-30 | 2013-09-24 | Lam Research Corporation | Plasma chamber top piece assembly |
US20060008670A1 (en) * | 2004-07-06 | 2006-01-12 | Chun Lin | Organic light emitting materials and devices |
US20060008671A1 (en) * | 2004-07-07 | 2006-01-12 | Raymond Kwong | Electroluminescent efficiency |
US7709100B2 (en) * | 2004-07-07 | 2010-05-04 | Universal Display Corporation | Electroluminescent efficiency |
EP3428986B1 (en) | 2004-07-07 | 2021-01-20 | Universal Display Corporation | Stable and efficient electroluminescent materials |
US7194173B2 (en) * | 2004-07-16 | 2007-03-20 | The Trustees Of Princeton University | Organic devices having a fiber structure |
CN1725521B (en) * | 2004-07-16 | 2010-10-27 | 国际商业机器公司 | Optoelectronic device and manufacturing method |
JP5264013B2 (en) * | 2004-08-13 | 2013-08-14 | 株式会社半導体エネルギー研究所 | Organic semiconductor layer deposition system |
CN100502050C (en) * | 2004-08-13 | 2009-06-17 | 株式会社半导体能源研究所 | Method for manufacturing semiconductor device |
US20060088728A1 (en) * | 2004-10-22 | 2006-04-27 | Raymond Kwong | Arylcarbazoles as hosts in PHOLEDs |
US20060099344A1 (en) | 2004-11-09 | 2006-05-11 | Eastman Kodak Company | Controlling the vaporization of organic material |
DE102004054893A1 (en) * | 2004-11-12 | 2006-05-24 | Micronas Gmbh | Method and circuit arrangement for channel filtering analog or digitally modulated TV signals |
TW200634801A (en) * | 2004-11-17 | 2006-10-01 | Hitachi Maxell | Optical information-recording medium |
US8986780B2 (en) | 2004-11-19 | 2015-03-24 | Massachusetts Institute Of Technology | Method and apparatus for depositing LED organic film |
US20080308037A1 (en) | 2007-06-14 | 2008-12-18 | Massachusetts Institute Of Technology | Method and apparatus for thermal jet printing |
US8128753B2 (en) | 2004-11-19 | 2012-03-06 | Massachusetts Institute Of Technology | Method and apparatus for depositing LED organic film |
US7252859B2 (en) * | 2004-11-19 | 2007-08-07 | Eastman Kodak Company | Organic materials for an evaporation source |
US7776456B2 (en) | 2004-12-03 | 2010-08-17 | Universal Display Corporation | Organic light emitting devices with an emissive region having emissive and non-emissive layers and method of making |
JP4560394B2 (en) * | 2004-12-13 | 2010-10-13 | 長州産業株式会社 | Molecule supply equipment for thin film formation |
US7431807B2 (en) * | 2005-01-07 | 2008-10-07 | Universal Display Corporation | Evaporation method using infrared guiding heater |
JP4235619B2 (en) * | 2005-02-14 | 2009-03-11 | キヤノン株式会社 | Manufacturing method of organic light emitting device |
US7683536B2 (en) * | 2005-03-31 | 2010-03-23 | The Trustees Of Princeton University | OLEDs utilizing direct injection to the triplet state |
US20060251921A1 (en) * | 2005-05-06 | 2006-11-09 | Stephen Forrest | OLEDs utilizing direct injection to the triplet state |
US20060222886A1 (en) * | 2005-04-04 | 2006-10-05 | Raymond Kwong | Arylpyrene compounds |
US9070884B2 (en) | 2005-04-13 | 2015-06-30 | Universal Display Corporation | Hybrid OLED having phosphorescent and fluorescent emitters |
US7807275B2 (en) * | 2005-04-21 | 2010-10-05 | Universal Display Corporation | Non-blocked phosphorescent OLEDs |
US7902374B2 (en) * | 2005-05-06 | 2011-03-08 | Universal Display Corporation | Stability OLED materials and devices |
US8586204B2 (en) * | 2007-12-28 | 2013-11-19 | Universal Display Corporation | Phosphorescent emitters and host materials with improved stability |
US9051344B2 (en) | 2005-05-06 | 2015-06-09 | Universal Display Corporation | Stability OLED materials and devices |
US7851072B2 (en) * | 2005-05-19 | 2010-12-14 | Universal Display Corporation | Stable and efficient electroluminescent materials |
KR101357475B1 (en) | 2005-05-31 | 2014-02-03 | 유니버셜 디스플레이 코포레이션 | Triphenylene hosts in phosphorescent light emitting diodes |
US7474048B2 (en) * | 2005-06-01 | 2009-01-06 | The Trustees Of Princeton University | Fluorescent filtered electrophosphorescence |
US20060275542A1 (en) * | 2005-06-02 | 2006-12-07 | Eastman Kodak Company | Deposition of uniform layer of desired material |
US20060273713A1 (en) * | 2005-06-02 | 2006-12-07 | Eastman Kodak Company | Process for making an organic light-emitting device |
CN101258260B (en) | 2005-09-06 | 2012-11-21 | 国立大学法人东北大学 | Film material and method for prediction of film material |
US8148891B2 (en) * | 2005-10-04 | 2012-04-03 | Universal Display Corporation | Electron impeding layer for high efficiency phosphorescent OLEDs |
US20070103066A1 (en) * | 2005-11-04 | 2007-05-10 | D Andrade Brian W | Stacked OLEDs with a reflective conductive layer |
US8021763B2 (en) * | 2005-11-23 | 2011-09-20 | The Trustees Of Princeton University | Phosphorescent OLED with interlayer |
US7645483B2 (en) * | 2006-01-17 | 2010-01-12 | Eastman Kodak Company | Two-dimensional aperture array for vapor deposition |
EP2987450B1 (en) * | 2006-02-07 | 2019-06-05 | Boston Scientific Limited | Medical device light source |
KR20160075833A (en) | 2006-02-10 | 2016-06-29 | 유니버셜 디스플레이 코포레이션 | METAL COMPLEXES OF CYCLOMETALLATED IMIDAZO[1,2-f]PHENANTHRIDINE AND DIIMIDAZO[1,2-A:1',2'-C]QUINAZOLINE LIGANDS AND ISOELECTRONIC AND BENZANNULATED ANALOGS THEREOF |
KR20150018591A (en) | 2006-04-13 | 2015-02-23 | 유니버시티 오브 써던 캘리포니아 | Organic electronic devices using phthalimide compounds |
US7579773B2 (en) * | 2006-06-05 | 2009-08-25 | The Trustees Of Princeton University | Organic light-emitting device with a phosphor-sensitized fluorescent emission layer |
JP5051869B2 (en) * | 2006-06-14 | 2012-10-17 | 東京エレクトロン株式会社 | Light emitting device and method for manufacturing light emitting device |
JP2010515205A (en) | 2006-07-18 | 2010-05-06 | ザ ユニバーシティ オブ サザン カリフォルニア | Organic optoelectronic device electrodes using nanotubes |
US7724796B2 (en) * | 2006-08-29 | 2010-05-25 | The Trustees Of Princeton University | Organic laser |
US7710017B2 (en) * | 2006-09-08 | 2010-05-04 | Universal Display Corporation | Organic light emitting device having a transparent microcavity |
US7598381B2 (en) * | 2006-09-11 | 2009-10-06 | The Trustees Of Princeton University | Near-infrared emitting organic compounds and organic devices using the same |
US7800295B2 (en) * | 2006-09-15 | 2010-09-21 | Universal Display Corporation | Organic light emitting device having a microcavity |
US8647435B1 (en) | 2006-10-11 | 2014-02-11 | Ostendo Technologies, Inc. | HVPE apparatus and methods for growth of p-type single crystal group III nitride materials |
US8945722B2 (en) * | 2006-10-27 | 2015-02-03 | The University Of Southern California | Materials and architectures for efficient harvesting of singlet and triplet excitons for white light emitting OLEDs |
US8778508B2 (en) * | 2006-12-08 | 2014-07-15 | Universal Display Corporation | Light-emitting organometallic complexes |
WO2008079209A1 (en) * | 2006-12-19 | 2008-07-03 | Veeco Instruments Inc. | Vapor deposition sources and methods |
US7879401B2 (en) * | 2006-12-22 | 2011-02-01 | The Regents Of The University Of Michigan | Organic vapor jet deposition using an exhaust |
JP2010515255A (en) * | 2006-12-28 | 2010-05-06 | ユニバーサル ディスプレイ コーポレイション | Long-life phosphorescent organic light-emitting device (OLED) structure |
JP5020650B2 (en) * | 2007-02-01 | 2012-09-05 | 東京エレクトロン株式会社 | Vapor deposition apparatus, vapor deposition method, and vapor deposition apparatus manufacturing method |
US9130177B2 (en) | 2011-01-13 | 2015-09-08 | Universal Display Corporation | 5-substituted 2 phenylquinoline complexes materials for light emitting diode |
US20130032785A1 (en) | 2011-08-01 | 2013-02-07 | Universal Display Corporation | Materials for organic light emitting diode |
KR101904627B1 (en) * | 2007-03-08 | 2018-10-04 | 유니버셜 디스플레이 코포레이션 | Phosphorescent materials |
WO2008111850A2 (en) * | 2007-03-15 | 2008-09-18 | Universitetet I Oslo | Synthesis of molecular metalorganic compounds |
JP5662141B2 (en) | 2007-03-30 | 2015-01-28 | ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・ミシガン | OLED with improved light outcoupling |
US7993763B2 (en) * | 2007-05-10 | 2011-08-09 | Universal Display Corporation | Organometallic compounds having host and dopant functionalities |
US8556389B2 (en) | 2011-02-04 | 2013-10-15 | Kateeva, Inc. | Low-profile MEMS thermal printhead die having backside electrical connections |
WO2008156879A1 (en) * | 2007-06-20 | 2008-12-24 | Universal Display Corporation | Blue phosphorescent imidazophenanthridine materials |
TWI647209B (en) * | 2007-08-08 | 2019-01-11 | 環球展覽公司 | Single-stranded triphenyl chromophore in a phosphorescent dipole |
WO2009021126A2 (en) | 2007-08-08 | 2009-02-12 | Universal Display Corporation | Benzo-fused thiophene or benzo-fused furan compounds comprising a triphenylene group |
US8440021B2 (en) | 2007-08-16 | 2013-05-14 | The Regents Of The University Of Michigan | Apparatus and method for deposition for organic thin films |
CN101803460B (en) * | 2007-09-10 | 2012-01-25 | 株式会社爱发科 | Organic-material vapor generator, film deposition source, and film deposition apparatus |
KR101128747B1 (en) | 2007-09-10 | 2012-03-23 | 가부시키가이샤 알박 | Process for producing thin organic film |
CN101848882B (en) * | 2007-09-20 | 2015-04-29 | 巴斯夫欧洲公司 | Electroluminescent device |
US7858144B2 (en) * | 2007-09-26 | 2010-12-28 | Eastman Kodak Company | Process for depositing organic materials |
DE102008010041A1 (en) * | 2007-09-28 | 2009-04-02 | Osram Opto Semiconductors Gmbh | Layer deposition apparatus, e.g. for epitaxial deposition of compound semiconductor layers, has segmented process gas enclosure in which substrate is moved relative to partition |
US8383249B2 (en) * | 2007-10-04 | 2013-02-26 | Universal Display Corporation | Complexes with tridentate ligands |
US8067100B2 (en) * | 2007-10-04 | 2011-11-29 | Universal Display Corporation | Complexes with tridentate ligands |
US20090243468A1 (en) * | 2007-10-16 | 2009-10-01 | Thompson Mark E | Arylimino-isoindoline complexes for use in organic light emitting diodes |
US20100234478A1 (en) * | 2007-10-29 | 2010-09-16 | Base Se | Process for preparation of conducting polymers |
US8476822B2 (en) | 2007-11-09 | 2013-07-02 | Universal Display Corporation | Saturated color organic light emitting devices |
US8815411B2 (en) * | 2007-11-09 | 2014-08-26 | The Regents Of The University Of Michigan | Stable blue phosphorescent organic light emitting devices |
WO2009073246A1 (en) * | 2007-12-06 | 2009-06-11 | Universal Display Corporation | Method for the synthesis of iridium (iii) complexes with sterically demanding ligands |
US20090153034A1 (en) * | 2007-12-13 | 2009-06-18 | Universal Display Corporation | Carbazole-containing materials in phosphorescent light emittinig diodes |
WO2009085344A2 (en) | 2007-12-28 | 2009-07-09 | Universal Display Corporation | Dibenzothiophene-containing materials in phosphorescent light emitting diodes |
US8221905B2 (en) * | 2007-12-28 | 2012-07-17 | Universal Display Corporation | Carbazole-containing materials in phosphorescent light emitting diodes |
US8040053B2 (en) * | 2008-02-09 | 2011-10-18 | Universal Display Corporation | Organic light emitting device architecture for reducing the number of organic materials |
US7858507B2 (en) * | 2008-02-13 | 2010-12-28 | The Regents Of The University Of Michigan | Method and system for creating photosensitive array with integrated backplane |
KR100922758B1 (en) * | 2008-02-20 | 2009-10-21 | 삼성모바일디스플레이주식회사 | An organic light emitting device |
JP5042354B2 (en) | 2008-02-26 | 2012-10-03 | 株式会社アルバック | Open / close valve |
DE102008011185A1 (en) | 2008-02-27 | 2009-09-03 | Osram Opto Semiconductors Gmbh | Process for producing a doped organic semiconducting layer |
US20100300351A1 (en) * | 2008-02-29 | 2010-12-02 | Yasui Seiki Co., Ltd. | Apparatus for production of composite material sheet |
CN102017214B (en) * | 2008-03-19 | 2014-03-19 | 密执安州立大学董事会 | Organic thin films for infrared detection |
JP2009302045A (en) * | 2008-05-13 | 2009-12-24 | Silver Seiko Ltd | Manufacturing apparatus for organic electroluminescent element, and organic electroluminescent element |
GB0810532D0 (en) * | 2008-06-10 | 2008-07-09 | Oled T Ltd | Method of making an oled |
US8383202B2 (en) | 2008-06-13 | 2013-02-26 | Kateeva, Inc. | Method and apparatus for load-locked printing |
US12064979B2 (en) | 2008-06-13 | 2024-08-20 | Kateeva, Inc. | Low-particle gas enclosure systems and methods |
US12018857B2 (en) | 2008-06-13 | 2024-06-25 | Kateeva, Inc. | Gas enclosure assembly and system |
US9048344B2 (en) | 2008-06-13 | 2015-06-02 | Kateeva, Inc. | Gas enclosure assembly and system |
US10434804B2 (en) | 2008-06-13 | 2019-10-08 | Kateeva, Inc. | Low particle gas enclosure systems and methods |
US8899171B2 (en) | 2008-06-13 | 2014-12-02 | Kateeva, Inc. | Gas enclosure assembly and system |
US9604245B2 (en) | 2008-06-13 | 2017-03-28 | Kateeva, Inc. | Gas enclosure systems and methods utilizing an auxiliary enclosure |
US11975546B2 (en) | 2008-06-13 | 2024-05-07 | Kateeva, Inc. | Gas enclosure assembly and system |
CN102131891B (en) | 2008-06-30 | 2014-01-29 | 通用显示公司 | Hole transport materials having a sulfur-containing group |
EP2860171B1 (en) | 2008-06-30 | 2017-02-01 | Universal Display Corporation | Hole transport materials containing triphenylene |
JP2010024498A (en) * | 2008-07-18 | 2010-02-04 | Tokyo Electron Ltd | Film-forming apparatus and powder vaporization apparatus |
US8193528B2 (en) | 2008-07-18 | 2012-06-05 | Basf Se | Azapyrenes for electronic applications |
WO2010027583A1 (en) | 2008-09-03 | 2010-03-11 | Universal Display Corporation | Phosphorescent materials |
JP5698135B2 (en) * | 2008-09-04 | 2015-04-08 | ユニバーサル ディスプレイ コーポレイション | White phosphorescent organic light emitting device |
EP2161272A1 (en) | 2008-09-05 | 2010-03-10 | Basf Se | Phenanthrolines |
US9034483B2 (en) | 2008-09-16 | 2015-05-19 | Universal Display Corporation | Phosphorescent materials |
EP2329540B1 (en) * | 2008-09-25 | 2017-01-11 | Universal Display Corporation | Organoselenium materials and their uses in organic light emitting devices |
US8827488B2 (en) | 2008-10-01 | 2014-09-09 | Universal Display Corporation | OLED display architecture |
US9385167B2 (en) | 2008-10-01 | 2016-07-05 | Universal Display Corporation | OLED display architecture |
US20100225252A1 (en) | 2008-10-01 | 2010-09-09 | Universal Display Corporation | Novel amoled display architecture |
US8053770B2 (en) * | 2008-10-14 | 2011-11-08 | Universal Display Corporation | Emissive layer patterning for OLED |
EP2345096B1 (en) | 2008-10-28 | 2018-10-17 | The Regents of the University of Michigan | Stacked white oled having separate red, green and blue sub-elements |
DE102008054052A1 (en) | 2008-10-30 | 2010-05-06 | Osram Opto Semiconductors Gmbh | Organic, radiation-emitting component and method for producing such |
KR101843201B1 (en) * | 2008-11-11 | 2018-03-28 | 유니버셜 디스플레이 코포레이션 | Phosphorescent emitters |
KR101932823B1 (en) | 2008-12-12 | 2018-12-27 | 유니버셜 디스플레이 코포레이션 | Improved oled stability via doped hole transport layer |
US8815415B2 (en) * | 2008-12-12 | 2014-08-26 | Universal Display Corporation | Blue emitter with high efficiency based on imidazo[1,2-f] phenanthridine iridium complexes |
WO2010080109A1 (en) * | 2008-12-18 | 2010-07-15 | Veeco Instruments Inc. | Vacuum deposition sources having heated effusion orifices |
US9127349B2 (en) | 2008-12-23 | 2015-09-08 | Applied Materials, Inc. | Method and apparatus for depositing mixed layers |
EP2204467B1 (en) | 2008-12-23 | 2014-05-07 | Applied Materials, Inc. | Method and apparatus for depositing mixed layers |
US20100188457A1 (en) * | 2009-01-05 | 2010-07-29 | Madigan Connor F | Method and apparatus for controlling the temperature of an electrically-heated discharge nozzle |
US9067947B2 (en) * | 2009-01-16 | 2015-06-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
JP4968268B2 (en) * | 2009-01-19 | 2012-07-04 | コニカミノルタホールディングス株式会社 | Method for manufacturing organic electroluminescence device |
US8310150B2 (en) * | 2009-02-04 | 2012-11-13 | The Regents Of The University Of Michigan | Light emitting device with high outcoupling |
TW201100973A (en) * | 2009-02-22 | 2011-01-01 | Mapper Lithography Ip Bv | A method and arrangement for realizing a vacuum in a vacuum chamber |
US11910700B2 (en) | 2009-03-23 | 2024-02-20 | Universal Display Corporation | Heteroleptic iridium complexes as dopants |
US8709615B2 (en) | 2011-07-28 | 2014-04-29 | Universal Display Corporation | Heteroleptic iridium complexes as dopants |
US8722205B2 (en) * | 2009-03-23 | 2014-05-13 | Universal Display Corporation | Heteroleptic iridium complex |
WO2010110871A2 (en) * | 2009-03-25 | 2010-09-30 | Veeco Instruments Inc. | Deposition of high vapor pressure materials |
US20100244735A1 (en) * | 2009-03-26 | 2010-09-30 | Energy Focus, Inc. | Lighting Device Supplying Temporally Appropriate Light |
US8569744B2 (en) * | 2009-03-30 | 2013-10-29 | Universal Display Corporation | OLED display architecture |
KR101726459B1 (en) | 2009-04-06 | 2017-04-12 | 유니버셜 디스플레이 코포레이션 | Metal complex comprising novel ligand structures |
TWI609855B (en) | 2009-04-28 | 2018-01-01 | 環球展覽公司 | Iridium complex with methyl-d3 substitution |
EP2425470A2 (en) * | 2009-05-01 | 2012-03-07 | Kateeva, Inc. | Method and apparatus for organic vapor printing |
TWI541234B (en) | 2009-05-12 | 2016-07-11 | 環球展覽公司 | 2-azatriphenylene materials for organic light emitting diodes |
US8586203B2 (en) | 2009-05-20 | 2013-11-19 | Universal Display Corporation | Metal complexes with boron-nitrogen heterocycle containing ligands |
JP5620146B2 (en) | 2009-05-22 | 2014-11-05 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | Thin film deposition equipment |
TWI475124B (en) | 2009-05-22 | 2015-03-01 | Samsung Display Co Ltd | Thin film deposition apparatus |
CN102449190B (en) | 2009-05-26 | 2014-08-27 | Imec公司 | Method for forming an organic material layer on a substrate |
US8882920B2 (en) | 2009-06-05 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8882921B2 (en) | 2009-06-08 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
JP5591328B2 (en) | 2009-06-18 | 2014-09-17 | ビーエーエスエフ ソシエタス・ヨーロピア | Phenanthroazole compounds as hole transport materials for electroluminescent devices |
KR101117719B1 (en) | 2009-06-24 | 2012-03-08 | 삼성모바일디스플레이주식회사 | Apparatus for thin layer deposition |
KR101127575B1 (en) | 2009-08-10 | 2012-03-23 | 삼성모바일디스플레이주식회사 | Apparatus for thin film deposition having a deposition blade |
JP5328726B2 (en) | 2009-08-25 | 2013-10-30 | 三星ディスプレイ株式會社 | Thin film deposition apparatus and organic light emitting display device manufacturing method using the same |
US9017826B2 (en) | 2009-08-26 | 2015-04-28 | The University Of Southern California | Visible/near-infrared porphyrin-tape/C60 organic photodetectors |
US9496315B2 (en) * | 2009-08-26 | 2016-11-15 | Universal Display Corporation | Top-gate bottom-contact organic transistor |
JP5677785B2 (en) | 2009-08-27 | 2015-02-25 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | Thin film deposition apparatus and organic light emitting display device manufacturing method using the same |
US8696815B2 (en) | 2009-09-01 | 2014-04-15 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US20110097495A1 (en) * | 2009-09-03 | 2011-04-28 | Universal Display Corporation | Organic vapor jet printing with chiller plate |
US8801856B2 (en) | 2009-09-08 | 2014-08-12 | Universal Display Corporation | Method and system for high-throughput deposition of patterned organic thin films |
US8466455B2 (en) * | 2009-09-17 | 2013-06-18 | Universal Display Corporation | Device structure |
AU2010305910B2 (en) | 2009-10-13 | 2015-03-12 | Basf Se | Mixtures for producing photoactive layers for organic solar cells and organic photodetectors |
US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
KR101125556B1 (en) * | 2009-10-28 | 2012-03-22 | 주식회사 에스에프에이 | Organic matter evaporation device |
US8545996B2 (en) * | 2009-11-02 | 2013-10-01 | The University Of Southern California | Ion-pairing soft salts based on organometallic complexes and their applications in organic light emitting diodes |
US8580394B2 (en) | 2009-11-19 | 2013-11-12 | Universal Display Corporation | 3-coordinate copper(I)-carbene complexes |
WO2011062857A2 (en) | 2009-11-20 | 2011-05-26 | Universal Display Corporation | Oleds with low-index islands to enhance outcoupling of light |
US8330152B2 (en) * | 2009-12-02 | 2012-12-11 | Universal Display Corporation | OLED display architecture with improved aperture ratio |
KR101084184B1 (en) | 2010-01-11 | 2011-11-17 | 삼성모바일디스플레이주식회사 | Apparatus for thin layer deposition |
KR101174875B1 (en) | 2010-01-14 | 2012-08-17 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition, method for manufacturing of organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the method |
US8288187B2 (en) * | 2010-01-20 | 2012-10-16 | Universal Display Corporation | Electroluminescent devices for lighting applications |
KR101193186B1 (en) | 2010-02-01 | 2012-10-19 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition, method for manufacturing of organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the method |
WO2011096923A1 (en) | 2010-02-03 | 2011-08-11 | Universal Display Corporation | Organic light emitting device with conducting cover |
US9156870B2 (en) * | 2010-02-25 | 2015-10-13 | Universal Display Corporation | Phosphorescent emitters |
US9175211B2 (en) | 2010-03-03 | 2015-11-03 | Universal Display Corporation | Phosphorescent materials |
KR101156441B1 (en) | 2010-03-11 | 2012-06-18 | 삼성모바일디스플레이주식회사 | Apparatus for thin layer deposition |
US8334545B2 (en) * | 2010-03-24 | 2012-12-18 | Universal Display Corporation | OLED display architecture |
WO2011119162A1 (en) | 2010-03-25 | 2011-09-29 | Universal Display Corporation | Solution processable doped triarylamine hole injection materials |
US8450730B2 (en) | 2010-03-31 | 2013-05-28 | The Regents Of The University Of Michigan | Light emitting device having peripheral emissive region |
KR101202348B1 (en) | 2010-04-06 | 2012-11-16 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
US8227801B2 (en) | 2010-04-26 | 2012-07-24 | Universal Display Corporation | Bicarbzole containing compounds for OLEDs |
US8968887B2 (en) | 2010-04-28 | 2015-03-03 | Universal Display Corporation | Triphenylene-benzofuran/benzothiophene/benzoselenophene compounds with substituents joining to form fused rings |
US8894458B2 (en) | 2010-04-28 | 2014-11-25 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
CN103026521B (en) | 2010-04-28 | 2016-11-09 | 通用显示公司 | The material of deposition premixing |
US9073948B2 (en) | 2010-05-14 | 2015-07-07 | Universal Display Corporation | Azaborine compounds as host materials and dopants for PHOLEDs |
US8564001B2 (en) | 2010-05-21 | 2013-10-22 | Universal Display Corporation | Organic light emitting device lighting panel |
US8742657B2 (en) | 2010-06-11 | 2014-06-03 | Universal Display Corporation | Triplet-Triplet annihilation up conversion (TTA-UC) for display and lighting applications |
US8673458B2 (en) | 2010-06-11 | 2014-03-18 | Universal Display Corporation | Delayed fluorescence OLED |
KR101223723B1 (en) | 2010-07-07 | 2013-01-18 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition, method for manufacturing of organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the method |
CN103003464B (en) | 2010-07-22 | 2015-03-25 | 通用显示公司 | Organic vapor jet printing |
WO2012016074A1 (en) | 2010-07-29 | 2012-02-02 | University Of Southern California | Co-deposition methods for the fabrication of organic optoelectronic devices |
KR101673017B1 (en) | 2010-07-30 | 2016-11-07 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
WO2012023947A1 (en) | 2010-08-20 | 2012-02-23 | Universal Display Corporation | Bicarbazole compounds for oleds |
US20120049168A1 (en) | 2010-08-31 | 2012-03-01 | Universal Display Corporation | Cross-Linked Charge Transport Layer Containing an Additive Compound |
US8932734B2 (en) | 2010-10-08 | 2015-01-13 | Universal Display Corporation | Organic electroluminescent materials and devices |
KR101723506B1 (en) | 2010-10-22 | 2017-04-19 | 삼성디스플레이 주식회사 | Apparatus for organic layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
KR101738531B1 (en) | 2010-10-22 | 2017-05-23 | 삼성디스플레이 주식회사 | Method for manufacturing of organic light emitting display apparatus, and organic light emitting display apparatus manufactured by the method |
KR20120045865A (en) | 2010-11-01 | 2012-05-09 | 삼성모바일디스플레이주식회사 | Apparatus for organic layer deposition |
US8269317B2 (en) | 2010-11-11 | 2012-09-18 | Universal Display Corporation | Phosphorescent materials |
US20120138906A1 (en) | 2010-12-07 | 2012-06-07 | The University of Southern California USC Stevens Institute for Innovation | Capture agents for unsaturated metal complexes |
KR20120065789A (en) | 2010-12-13 | 2012-06-21 | 삼성모바일디스플레이주식회사 | Apparatus for organic layer deposition |
WO2012097166A2 (en) | 2011-01-12 | 2012-07-19 | Universal Display Corporation | Oled lighting device with short tolerant structure |
US9698140B2 (en) | 2011-01-12 | 2017-07-04 | Universal Display Corporation | OLED lighting device with short tolerant structure |
KR101760897B1 (en) | 2011-01-12 | 2017-07-25 | 삼성디스플레이 주식회사 | Deposition source and apparatus for organic layer deposition having the same |
US10008677B2 (en) | 2011-01-13 | 2018-06-26 | Universal Display Corporation | Materials for organic light emitting diode |
US8415031B2 (en) | 2011-01-24 | 2013-04-09 | Universal Display Corporation | Electron transporting compounds |
US9005772B2 (en) | 2011-02-23 | 2015-04-14 | Universal Display Corporation | Thioazole and oxazole carbene metal complexes as phosphorescent OLED materials |
US8563737B2 (en) | 2011-02-23 | 2013-10-22 | Universal Display Corporation | Methods of making bis-tridentate carbene complexes of ruthenium and osmium |
US8748011B2 (en) | 2011-02-23 | 2014-06-10 | Universal Display Corporation | Ruthenium carbene complexes for OLED material |
TW201841932A (en) | 2011-02-23 | 2018-12-01 | 美商環球展覽公司 | Novel tetradentate platinum complexes |
US8492006B2 (en) | 2011-02-24 | 2013-07-23 | Universal Display Corporation | Germanium-containing red emitter materials for organic light emitting diode |
US8883322B2 (en) | 2011-03-08 | 2014-11-11 | Universal Display Corporation | Pyridyl carbene phosphorescent emitters |
JPWO2012121237A1 (en) * | 2011-03-09 | 2014-07-17 | コニカミノルタ株式会社 | Vapor deposition apparatus and thin film forming method |
US8664970B2 (en) | 2011-03-14 | 2014-03-04 | Universal Display Corporation | Method for accelerated lifetesting of large area OLED lighting panels |
US8902245B2 (en) | 2011-04-07 | 2014-12-02 | Universal Display Corporation | Method for driving quad-subpixel display |
WO2012138366A1 (en) | 2011-04-08 | 2012-10-11 | Kateeva, Inc. | Method and apparatus for printing using a facetted drum |
US8580399B2 (en) | 2011-04-08 | 2013-11-12 | Universal Display Corporation | Substituted oligoazacarbazoles for light emitting diodes |
US8866416B2 (en) | 2011-05-04 | 2014-10-21 | Universal Display Corporation | Illumination source using LEDs and OLEDs |
US8432095B2 (en) | 2011-05-11 | 2013-04-30 | Universal Display Corporation | Process for fabricating metal bus lines for OLED lighting panels |
US8564192B2 (en) | 2011-05-11 | 2013-10-22 | Universal Display Corporation | Process for fabricating OLED lighting panels |
US8981640B2 (en) | 2011-05-11 | 2015-03-17 | Universal Display Corporation | Simplified patterned light panel |
US8927308B2 (en) | 2011-05-12 | 2015-01-06 | Universal Display Corporation | Method of forming bus line designs for large-area OLED lighting |
US8907560B2 (en) | 2011-05-12 | 2014-12-09 | Universal Display Corporation | Dynamic OLED lighting |
US8773013B2 (en) | 2011-05-12 | 2014-07-08 | Universal Display Corporation | Three dimensional OLED lamps |
WO2012155099A1 (en) | 2011-05-12 | 2012-11-15 | Universal Display Corporation | Flexible lighting devices |
US9212197B2 (en) | 2011-05-19 | 2015-12-15 | Universal Display Corporation | Phosphorescent heteroleptic phenylbenzimidazole dopants |
US8795850B2 (en) | 2011-05-19 | 2014-08-05 | Universal Display Corporation | Phosphorescent heteroleptic phenylbenzimidazole dopants and new synthetic methodology |
KR101852517B1 (en) | 2011-05-25 | 2018-04-27 | 삼성디스플레이 주식회사 | Apparatus for organic layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
KR101857992B1 (en) | 2011-05-25 | 2018-05-16 | 삼성디스플레이 주식회사 | Patterning slit sheet assembly, apparatus for organic layer deposition, method for manufacturing organic light emitting display apparatus and organic light emitting display apparatus |
US8748012B2 (en) | 2011-05-25 | 2014-06-10 | Universal Display Corporation | Host materials for OLED |
KR101840654B1 (en) | 2011-05-25 | 2018-03-22 | 삼성디스플레이 주식회사 | Apparatus for organic layer deposition and method for manufacturing of organic light emitting display apparatus using the same |
US10158089B2 (en) | 2011-05-27 | 2018-12-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
KR101857249B1 (en) | 2011-05-27 | 2018-05-14 | 삼성디스플레이 주식회사 | Patterning slit sheet assembly, apparatus for organic layer deposition, method for manufacturing organic light emitting display apparatus and organic light emitting display apparatus |
US10079349B2 (en) | 2011-05-27 | 2018-09-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
WO2012166101A1 (en) | 2011-05-27 | 2012-12-06 | Universal Display Corporation | Oled having multi-component emissivie layer |
CN102558034B (en) * | 2011-06-07 | 2016-05-18 | 中国科学院福建物质结构研究所 | A kind of Developments of Third-order Nonlinear Optical Polymers 4-(4-dimethylamino styryl) picoline three fluoro sulfonates and synthetic method thereof |
WO2012170571A1 (en) | 2011-06-08 | 2012-12-13 | Universal Display Corporation | Heteroleptic iridium carbene complexes and light emitting device using them |
US8884316B2 (en) | 2011-06-17 | 2014-11-11 | Universal Display Corporation | Non-common capping layer on an organic device |
US8659036B2 (en) | 2011-06-17 | 2014-02-25 | Universal Display Corporation | Fine tuning of emission spectra by combination of multiple emitter spectra |
CN103620734B (en) | 2011-06-30 | 2017-02-15 | 应用材料公司 | Method and apparatus for fast gas exchange, fast gas switching and programmable gas delivery |
KR101826068B1 (en) | 2011-07-04 | 2018-02-07 | 삼성디스플레이 주식회사 | Apparatus for thin layer deposition |
US9397310B2 (en) | 2011-07-14 | 2016-07-19 | Universal Display Corporation | Organice electroluminescent materials and devices |
KR101965014B1 (en) | 2011-07-14 | 2019-04-02 | 유니버셜 디스플레이 코포레이션 | Inorganic hosts in oleds |
US9023420B2 (en) | 2011-07-14 | 2015-05-05 | Universal Display Corporation | Composite organic/inorganic layer for organic light-emitting devices |
US8502445B2 (en) | 2011-07-18 | 2013-08-06 | Universal Display Corporation | RGBW OLED display for extended lifetime and reduced power consumption |
EP2551274B1 (en) | 2011-07-25 | 2015-12-09 | Universal Display Corporation | Tetradentate platinum complexes |
US9783564B2 (en) | 2011-07-25 | 2017-10-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US8409729B2 (en) | 2011-07-28 | 2013-04-02 | Universal Display Corporation | Host materials for phosphorescent OLEDs |
US8926119B2 (en) | 2011-08-04 | 2015-01-06 | Universal Display Corporation | Extendable light source with variable light emitting area |
WO2013022419A1 (en) | 2011-08-05 | 2013-02-14 | Universal Display Corporation | Phosphorescent organic light emitting devices combined with hole transport material having high operating stability |
US8552420B2 (en) | 2011-08-09 | 2013-10-08 | Universal Display Corporation | OLED light panel with controlled brightness variation |
US9318536B2 (en) | 2011-08-09 | 2016-04-19 | Universal Display Corporation | Light emitters with series connection |
US8764239B2 (en) | 2011-08-16 | 2014-07-01 | Universal Display Corporation | Dynamic stretchable OLED lamp |
US9493698B2 (en) | 2011-08-31 | 2016-11-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9184420B2 (en) | 2011-09-23 | 2015-11-10 | Universal Display Corporation | Digitized OLED light source |
WO2013048419A1 (en) | 2011-09-29 | 2013-04-04 | Universal Display Corporation | LAMP WITH MULTIPLE FLEXIBLE OLEDs |
US9123667B2 (en) | 2011-10-04 | 2015-09-01 | Universal Display Corporation | Power-efficient RGBW OLED display |
US9231227B2 (en) | 2011-10-28 | 2016-01-05 | Universal Display Corporation | OLED display architecture |
KR101976104B1 (en) | 2011-11-01 | 2019-05-09 | 유니버셜 디스플레이 코포레이션 | Reducing oled device efficiency at low luminance |
US8652656B2 (en) | 2011-11-14 | 2014-02-18 | Universal Display Corporation | Triphenylene silane hosts |
US9193745B2 (en) | 2011-11-15 | 2015-11-24 | Universal Display Corporation | Heteroleptic iridium complex |
US9490120B2 (en) * | 2011-11-18 | 2016-11-08 | First Solar, Inc. | Vapor transport deposition method and system for material co-deposition |
US9217004B2 (en) | 2011-11-21 | 2015-12-22 | Universal Display Corporation | Organic light emitting materials |
US9512355B2 (en) | 2011-12-09 | 2016-12-06 | Universal Display Corporation | Organic light emitting materials |
US20130146875A1 (en) | 2011-12-13 | 2013-06-13 | Universal Display Corporation | Split electrode for organic devices |
US8987451B2 (en) | 2012-01-03 | 2015-03-24 | Universal Display Corporation | Synthesis of cyclometallated platinum(II) complexes |
US9461254B2 (en) | 2012-01-03 | 2016-10-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9163174B2 (en) | 2012-01-04 | 2015-10-20 | Universal Display Corporation | Highly efficient phosphorescent materials |
KR102012047B1 (en) | 2012-01-06 | 2019-08-19 | 유니버셜 디스플레이 코포레이션 | Highly efficient phosphorescent materials |
US8969592B2 (en) | 2012-01-10 | 2015-03-03 | Universal Display Corporation | Heterocyclic host materials |
US10211413B2 (en) | 2012-01-17 | 2019-02-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US8969116B2 (en) | 2012-01-23 | 2015-03-03 | Universal Display Corporation | Selective OLED vapor deposition using electric charges |
KR20130089039A (en) * | 2012-02-01 | 2013-08-09 | 삼성디스플레이 주식회사 | Deposition source, deposition apparatus and method of manufacturing organic light emitting display apparatus |
US9118017B2 (en) | 2012-02-27 | 2015-08-25 | Universal Display Corporation | Host compounds for red phosphorescent OLEDs |
US20130273239A1 (en) * | 2012-03-13 | 2013-10-17 | Universal Display Corporation | Nozzle design for organic vapor jet printing |
US9054323B2 (en) | 2012-03-15 | 2015-06-09 | Universal Display Corporation | Secondary hole transporting layer with diarylamino-phenyl-carbazole compounds |
US9386657B2 (en) | 2012-03-15 | 2016-07-05 | Universal Display Corporation | Organic Electroluminescent materials and devices |
US8933468B2 (en) | 2012-03-16 | 2015-01-13 | Princeton University Office of Technology and Trademark Licensing | Electronic device with reduced non-device edge area |
US9312511B2 (en) | 2012-03-16 | 2016-04-12 | Universal Display Corporation | Edge barrier film for electronic devices |
KR101389011B1 (en) * | 2012-03-28 | 2014-04-24 | 주식회사 유니텍스 | Source container and reactor for vapor phase deposition |
US8836223B2 (en) | 2012-04-18 | 2014-09-16 | Universal Display Corporation | OLED panel with fuses |
US8723209B2 (en) | 2012-04-27 | 2014-05-13 | Universal Display Corporation | Out coupling layer containing particle polymer composite |
WO2013164761A1 (en) | 2012-05-02 | 2013-11-07 | Basf Se | Method for the deposition of an organic material |
US9184399B2 (en) | 2012-05-04 | 2015-11-10 | Universal Display Corporation | Asymmetric hosts with triaryl silane side chains |
US9773985B2 (en) | 2012-05-21 | 2017-09-26 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9655199B2 (en) | 2012-05-30 | 2017-05-16 | Universal Display Corporation | Four component phosphorescent OLED for cool white lighting application |
US9741968B2 (en) | 2012-05-30 | 2017-08-22 | Universal Display Corporation | Luminaire and individually replaceable components |
US9670404B2 (en) | 2012-06-06 | 2017-06-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9991463B2 (en) | 2012-06-14 | 2018-06-05 | Universal Display Corporation | Electronic devices with improved shelf lives |
US9502672B2 (en) | 2012-06-21 | 2016-11-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9725476B2 (en) | 2012-07-09 | 2017-08-08 | Universal Display Corporation | Silylated metal complexes |
US9231218B2 (en) | 2012-07-10 | 2016-01-05 | Universal Display Corporation | Phosphorescent emitters containing dibenzo[1,4]azaborinine structure |
US9210810B2 (en) | 2012-07-12 | 2015-12-08 | Universal Display Corporation | Method of fabricating flexible devices |
US9540329B2 (en) | 2012-07-19 | 2017-01-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9059412B2 (en) | 2012-07-19 | 2015-06-16 | Universal Display Corporation | Transition metal complexes containing substituted imidazole carbene as ligands and their application in OLEDs |
US9663544B2 (en) | 2012-07-25 | 2017-05-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9318710B2 (en) | 2012-07-30 | 2016-04-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9246036B2 (en) | 2012-08-20 | 2016-01-26 | Universal Display Corporation | Thin film deposition |
US9978958B2 (en) | 2012-08-24 | 2018-05-22 | Universal Display Corporation | Phosphorescent emitters with phenylimidazole ligands |
US8728858B2 (en) | 2012-08-27 | 2014-05-20 | Universal Display Corporation | Multi-nozzle organic vapor jet printing |
US8940568B2 (en) | 2012-08-31 | 2015-01-27 | Universal Display Corporation | Patterning method for OLEDs |
US8952362B2 (en) | 2012-08-31 | 2015-02-10 | The Regents Of The University Of Michigan | High efficiency and brightness fluorescent organic light emitting diode by triplet-triplet fusion |
US10957870B2 (en) | 2012-09-07 | 2021-03-23 | Universal Display Corporation | Organic light emitting device |
US9257665B2 (en) | 2012-09-14 | 2016-02-09 | Universal Display Corporation | Lifetime OLED display |
US9170665B2 (en) | 2012-09-14 | 2015-10-27 | Universal Display Corporation | Lifetime OLED display |
US9379169B2 (en) | 2012-09-14 | 2016-06-28 | Universal Display Corporation | Very high resolution AMOLED display |
US8957579B2 (en) | 2012-09-14 | 2015-02-17 | Universal Display Corporation | Low image sticking OLED display |
US9412947B2 (en) | 2012-09-14 | 2016-08-09 | Universal Display Corporation | OLED fabrication using laser transfer |
US9287513B2 (en) | 2012-09-24 | 2016-03-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9312505B2 (en) | 2012-09-25 | 2016-04-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10862073B2 (en) | 2012-09-25 | 2020-12-08 | The Trustees Of Princeton University | Barrier film for electronic devices and substrates |
US9577221B2 (en) | 2012-09-26 | 2017-02-21 | Universal Display Corporation | Three stack hybrid white OLED for enhanced efficiency and lifetime |
US9252363B2 (en) | 2012-10-04 | 2016-02-02 | Universal Display Corporation | Aryloxyalkylcarboxylate solvent compositions for inkjet printing of organic layers |
US9120290B2 (en) | 2012-10-10 | 2015-09-01 | Universal Display Corporation | Flexible screen backed with rigid ribs |
US8764255B2 (en) | 2012-10-10 | 2014-07-01 | Universal Display Corporation | Semi-rigid electronic device with a flexible display |
US9385172B2 (en) | 2012-10-19 | 2016-07-05 | Universal Display Corporation | One-way transparent display |
US9384691B2 (en) | 2012-10-19 | 2016-07-05 | Universal Display Corporation | Transparent display and illumination device |
US9385340B2 (en) | 2012-10-19 | 2016-07-05 | Universal Display Corporation | Transparent display and illumination device |
US8692241B1 (en) | 2012-11-08 | 2014-04-08 | Universal Display Corporation | Transition metal complexes containing triazole and tetrazole carbene ligands |
US9634264B2 (en) | 2012-11-09 | 2017-04-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9748500B2 (en) | 2015-01-15 | 2017-08-29 | Universal Display Corporation | Organic light emitting materials |
US8946697B1 (en) | 2012-11-09 | 2015-02-03 | Universal Display Corporation | Iridium complexes with aza-benzo fused ligands |
US9685617B2 (en) | 2012-11-09 | 2017-06-20 | Universal Display Corporation | Organic electronuminescent materials and devices |
US9190623B2 (en) | 2012-11-20 | 2015-11-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9653709B2 (en) * | 2012-11-20 | 2017-05-16 | The Regents Of The University Of Michigan | Optoelectronic device formed with controlled vapor flow |
US10069090B2 (en) | 2012-11-20 | 2018-09-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9512136B2 (en) | 2012-11-26 | 2016-12-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9166175B2 (en) | 2012-11-27 | 2015-10-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9196860B2 (en) | 2012-12-04 | 2015-11-24 | Universal Display Corporation | Compounds for triplet-triplet annihilation upconversion |
US8716484B1 (en) | 2012-12-05 | 2014-05-06 | Universal Display Corporation | Hole transporting materials with twisted aryl groups |
US9209411B2 (en) | 2012-12-07 | 2015-12-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9653691B2 (en) | 2012-12-12 | 2017-05-16 | Universal Display Corporation | Phosphorescence-sensitizing fluorescence material system |
US9159945B2 (en) | 2012-12-13 | 2015-10-13 | Universal Display Corporation | System and method for matching electrode resistances in OLED light panels |
US8766531B1 (en) | 2012-12-14 | 2014-07-01 | Universal Display Corporation | Wearable display |
US20140166989A1 (en) | 2012-12-17 | 2014-06-19 | Universal Display Corporation | Manufacturing flexible organic electronic devices |
US8912018B2 (en) | 2012-12-17 | 2014-12-16 | Universal Display Corporation | Manufacturing flexible organic electronic devices |
US20140166990A1 (en) | 2012-12-17 | 2014-06-19 | Universal Display Corporation | Manufacturing flexible organic electronic devices |
US9502681B2 (en) | 2012-12-19 | 2016-11-22 | Universal Display Corporation | System and method for a flexible display encapsulation |
US10229956B2 (en) | 2013-01-18 | 2019-03-12 | Universal Display Corporation | High resolution low power consumption OLED display with extended lifetime |
US10580832B2 (en) | 2013-01-18 | 2020-03-03 | Universal Display Corporation | High resolution low power consumption OLED display with extended lifetime |
US10243023B2 (en) | 2013-01-18 | 2019-03-26 | Universal Display Corporation | Top emission AMOLED displays using two emissive layers |
US9424772B2 (en) | 2013-01-18 | 2016-08-23 | Universal Display Corporation | High resolution low power consumption OLED display with extended lifetime |
US10304906B2 (en) | 2013-01-18 | 2019-05-28 | Universal Display Corporation | High resolution low power consumption OLED display with extended lifetime |
US9590017B2 (en) | 2013-01-18 | 2017-03-07 | Universal Display Corporation | High resolution low power consumption OLED display with extended lifetime |
US9385168B2 (en) | 2013-01-18 | 2016-07-05 | Universal Display Corporation | High resolution low power consumption OLED display with extended lifetime |
US9252397B2 (en) | 2013-02-07 | 2016-02-02 | Universal Display Corporation | OVJP for printing graded/stepped organic layers |
US10400163B2 (en) | 2013-02-08 | 2019-09-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9178184B2 (en) | 2013-02-21 | 2015-11-03 | Universal Display Corporation | Deposition of patterned organic thin films |
EP3882254B1 (en) | 2013-02-21 | 2023-10-04 | Universal Display Corporation | Phosphorescent homoleptic tris-[deuterated-2(2-pyridinyl)phenyl]-iridium complexes for use in light-emitting devices |
US10367154B2 (en) | 2013-02-21 | 2019-07-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US8927749B2 (en) | 2013-03-07 | 2015-01-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9000459B2 (en) | 2013-03-12 | 2015-04-07 | Universal Display Corporation | OLED display architecture having some blue subpixel components replaced with non-emissive volume containing via or functional electronic component and method of manufacturing thereof |
US9419225B2 (en) | 2013-03-14 | 2016-08-16 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10514136B2 (en) | 2013-03-25 | 2019-12-24 | Universal Display Corporation | Lighting devices |
US9018660B2 (en) | 2013-03-25 | 2015-04-28 | Universal Display Corporation | Lighting devices |
US9997712B2 (en) | 2013-03-27 | 2018-06-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
KR102052075B1 (en) | 2013-03-28 | 2020-01-09 | 삼성디스플레이 주식회사 | Deposition apparatus, method for forming thin film using the same, organic light emitting display apparatus and method for manufacturing the same |
KR20140118551A (en) | 2013-03-29 | 2014-10-08 | 삼성디스플레이 주식회사 | Deposition apparatus, method for manufacturing organic light emitting display apparatus and organic light emitting display apparatus |
KR102037376B1 (en) | 2013-04-18 | 2019-10-29 | 삼성디스플레이 주식회사 | Patterning slit sheet, deposition apparatus comprising the same, method for manufacturing organic light emitting display apparatus using the same, organic light emitting display apparatus manufacture by the method |
US8979291B2 (en) | 2013-05-07 | 2015-03-17 | Universal Display Corporation | Lighting devices including transparent organic light emitting device light panels and having independent control of direct to indirect light |
US9537106B2 (en) | 2013-05-09 | 2017-01-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9865672B2 (en) | 2013-05-15 | 2018-01-09 | Universal Display Corporation | Macro-image OLED lighting system |
US9484546B2 (en) | 2013-05-15 | 2016-11-01 | Universal Display Corporation | OLED with compact contact design and self-aligned insulators |
US9041297B2 (en) | 2013-05-20 | 2015-05-26 | Universal Display Corporation | Large area lighting system with wireless control |
US10468633B2 (en) | 2013-06-05 | 2019-11-05 | Universal Display Corporation | Microlens array architectures for enhanced light outcoupling from an OLED array |
US9093658B2 (en) | 2013-06-07 | 2015-07-28 | Universal Display Corporation | Pre-stressed flexible OLED |
US9735373B2 (en) | 2013-06-10 | 2017-08-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9673401B2 (en) | 2013-06-28 | 2017-06-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9818967B2 (en) | 2013-06-28 | 2017-11-14 | Universal Display Corporation | Barrier covered microlens films |
US10199581B2 (en) | 2013-07-01 | 2019-02-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10121975B2 (en) | 2013-07-03 | 2018-11-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9761807B2 (en) | 2013-07-15 | 2017-09-12 | Universal Display Corporation | Organic light emitting diode materials |
US9553274B2 (en) | 2013-07-16 | 2017-01-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9324949B2 (en) | 2013-07-16 | 2016-04-26 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9224958B2 (en) | 2013-07-19 | 2015-12-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20150028290A1 (en) | 2013-07-25 | 2015-01-29 | Universal Display Corporation | Heteroleptic osmium complex and method of making the same |
US9823482B2 (en) | 2013-08-19 | 2017-11-21 | Universal Display Corporation | Autostereoscopic displays |
US9831437B2 (en) | 2013-08-20 | 2017-11-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10074806B2 (en) | 2013-08-20 | 2018-09-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9374872B2 (en) | 2013-08-30 | 2016-06-21 | Universal Display Corporation | Intelligent dimming lighting |
US9932359B2 (en) | 2013-08-30 | 2018-04-03 | University Of Southern California | Organic electroluminescent materials and devices |
US8981363B1 (en) | 2013-09-03 | 2015-03-17 | Universal Display Corporation | Flexible substrate for OLED device |
US10199582B2 (en) | 2013-09-03 | 2019-02-05 | University Of Southern California | Organic electroluminescent materials and devices |
US9735378B2 (en) | 2013-09-09 | 2017-08-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9748503B2 (en) | 2013-09-13 | 2017-08-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10003034B2 (en) | 2013-09-30 | 2018-06-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20150090960A1 (en) | 2013-09-30 | 2015-04-02 | Universal Display Corporation | Methods to Fabricate Flexible OLED Lighting Devices |
US9496522B2 (en) | 2013-12-13 | 2016-11-15 | Universal Display Corporation | OLED optically coupled to curved substrate |
US9831447B2 (en) | 2013-10-08 | 2017-11-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9293712B2 (en) | 2013-10-11 | 2016-03-22 | Universal Display Corporation | Disubstituted pyrene compounds with amino group containing ortho aryl group and devices containing the same |
JP6396147B2 (en) | 2013-10-22 | 2018-09-26 | ユニバーサル ディスプレイ コーポレイション | Organic electroluminescent material and device |
US9853229B2 (en) | 2013-10-23 | 2017-12-26 | University Of Southern California | Organic electroluminescent materials and devices |
US20150115250A1 (en) | 2013-10-29 | 2015-04-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9306179B2 (en) | 2013-11-08 | 2016-04-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9647218B2 (en) | 2013-11-14 | 2017-05-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9905784B2 (en) | 2013-11-15 | 2018-02-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP3220440A1 (en) | 2013-11-15 | 2017-09-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9142778B2 (en) * | 2013-11-15 | 2015-09-22 | Universal Display Corporation | High vacuum OLED deposition source and system |
US10056565B2 (en) | 2013-11-20 | 2018-08-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9130195B2 (en) | 2013-11-22 | 2015-09-08 | Universal Display Corporation | Structure to enhance light extraction and lifetime of OLED devices |
WO2015081289A1 (en) | 2013-11-27 | 2015-06-04 | The Regents Of The University Of Michigan | Devices combining thin film inorganic leds with organic leds and fabrication thereof |
US9390649B2 (en) | 2013-11-27 | 2016-07-12 | Universal Display Corporation | Ruggedized wearable display |
US10644251B2 (en) | 2013-12-04 | 2020-05-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9876173B2 (en) | 2013-12-09 | 2018-01-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10355227B2 (en) | 2013-12-16 | 2019-07-16 | Universal Display Corporation | Metal complex for phosphorescent OLED |
US9666822B2 (en) | 2013-12-17 | 2017-05-30 | The Regents Of The University Of Michigan | Extended OLED operational lifetime through phosphorescent dopant profile management |
US10839734B2 (en) | 2013-12-23 | 2020-11-17 | Universal Display Corporation | OLED color tuning by driving mode variation |
US9397314B2 (en) | 2013-12-23 | 2016-07-19 | Universal Display Corporation | Thin-form light-enhanced substrate for OLED luminaire |
US9847496B2 (en) | 2013-12-23 | 2017-12-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
WO2015100375A1 (en) | 2013-12-26 | 2015-07-02 | Kateeva, Inc. | Thermal treatment of electronic devices |
US10135008B2 (en) | 2014-01-07 | 2018-11-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9978961B2 (en) | 2014-01-08 | 2018-05-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
KR102669753B1 (en) | 2014-01-21 | 2024-05-28 | 카티바, 인크. | Apparatus and techniques for electronic device encapsulation |
US9755159B2 (en) | 2014-01-23 | 2017-09-05 | Universal Display Corporation | Organic materials for OLEDs |
US9935277B2 (en) | 2014-01-30 | 2018-04-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9590194B2 (en) | 2014-02-14 | 2017-03-07 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9847497B2 (en) | 2014-02-18 | 2017-12-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10003033B2 (en) | 2014-02-18 | 2018-06-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10707423B2 (en) | 2014-02-21 | 2020-07-07 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9502656B2 (en) | 2014-02-24 | 2016-11-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9647217B2 (en) | 2014-02-24 | 2017-05-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10403825B2 (en) | 2014-02-27 | 2019-09-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9673407B2 (en) | 2014-02-28 | 2017-06-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9590195B2 (en) | 2014-02-28 | 2017-03-07 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9181270B2 (en) | 2014-02-28 | 2015-11-10 | Universal Display Corporation | Method of making sulfide compounds |
US9190620B2 (en) | 2014-03-01 | 2015-11-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
WO2015134017A1 (en) | 2014-03-05 | 2015-09-11 | Universal Display Corporation | Phosphorescent oled devices |
US9853247B2 (en) | 2014-03-11 | 2017-12-26 | The Regents Of The University Of Michigan | Electrophosphorescent organic light emitting concentrator |
US9397309B2 (en) | 2014-03-13 | 2016-07-19 | Universal Display Corporation | Organic electroluminescent devices |
US10208026B2 (en) | 2014-03-18 | 2019-02-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9748504B2 (en) | 2014-03-25 | 2017-08-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10910590B2 (en) | 2014-03-27 | 2021-02-02 | Universal Display Corporation | Hermetically sealed isolated OLED pixels |
US10749123B2 (en) | 2014-03-27 | 2020-08-18 | Universal Display Corporation | Impact resistant OLED devices |
US9661709B2 (en) | 2014-03-28 | 2017-05-23 | Universal Display Corporation | Integrated LED/OLED lighting system |
US9929353B2 (en) | 2014-04-02 | 2018-03-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9691993B2 (en) | 2014-04-09 | 2017-06-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9331299B2 (en) | 2014-04-11 | 2016-05-03 | Universal Display Corporation | Efficient white organic light emitting diodes with high color quality |
US9905785B2 (en) | 2014-04-14 | 2018-02-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10008679B2 (en) | 2014-04-14 | 2018-06-26 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10256427B2 (en) | 2014-04-15 | 2019-04-09 | Universal Display Corporation | Efficient organic electroluminescent devices |
US9337441B2 (en) | 2014-04-15 | 2016-05-10 | Universal Display Corporation | OLED lighting panel and methods for fabricating thereof |
US9450198B2 (en) | 2014-04-15 | 2016-09-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9380675B2 (en) | 2014-04-17 | 2016-06-28 | Universal Display Corporation | Energy saving OLED lighting system and method |
US9741941B2 (en) | 2014-04-29 | 2017-08-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
CN110265326B (en) | 2014-04-30 | 2024-03-08 | 科迪华公司 | Air cushion apparatus and techniques for substrate coating |
US10457699B2 (en) | 2014-05-02 | 2019-10-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10301338B2 (en) | 2014-05-08 | 2019-05-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10636983B2 (en) | 2014-05-08 | 2020-04-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10403830B2 (en) | 2014-05-08 | 2019-09-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
CN111454297A (en) | 2014-05-08 | 2020-07-28 | 环球展览公司 | Stabilized imidazophenanthridine materials |
WO2015175513A1 (en) | 2014-05-12 | 2015-11-19 | Universal Display Corporation | Barrier composition and properties |
US9572232B2 (en) | 2014-05-15 | 2017-02-14 | Universal Display Corporation | Biosensing electronic devices |
US9640781B2 (en) | 2014-05-22 | 2017-05-02 | Universal Display Corporation | Devices to increase OLED output coupling efficiency with a high refractive index substrate |
US9997716B2 (en) | 2014-05-27 | 2018-06-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10700134B2 (en) | 2014-05-27 | 2020-06-30 | Universal Display Corporation | Low power consumption OLED display |
WO2015183954A1 (en) | 2014-05-27 | 2015-12-03 | Universal Display Corporation | High resolution low power consumption oled display with extended lifetime |
US9929365B2 (en) | 2014-05-28 | 2018-03-27 | The Regents Of The University Of Michigan | Excited state management |
US10461260B2 (en) | 2014-06-03 | 2019-10-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11267012B2 (en) | 2014-06-25 | 2022-03-08 | Universal Display Corporation | Spatial control of vapor condensation using convection |
EP2960059B1 (en) | 2014-06-25 | 2018-10-24 | Universal Display Corporation | Systems and methods of modulating flow during vapor jet deposition of organic materials |
US11220737B2 (en) | 2014-06-25 | 2022-01-11 | Universal Display Corporation | Systems and methods of modulating flow during vapor jet deposition of organic materials |
US9911931B2 (en) | 2014-06-26 | 2018-03-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10115930B2 (en) | 2014-07-08 | 2018-10-30 | Universal Display Corporation | Combined internal and external extraction layers for enhanced light outcoupling for organic light emitting device |
US10297762B2 (en) | 2014-07-09 | 2019-05-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10566546B2 (en) | 2014-07-14 | 2020-02-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9929357B2 (en) | 2014-07-22 | 2018-03-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9960386B2 (en) | 2014-07-24 | 2018-05-01 | Universal Display Corporation | OLED device having enhancement layer(s) |
US10411200B2 (en) | 2014-08-07 | 2019-09-10 | Universal Display Corporation | Electroluminescent (2-phenylpyridine)iridium complexes and devices |
US11108000B2 (en) | 2014-08-07 | 2021-08-31 | Unniversal Display Corporation | Organic electroluminescent materials and devices |
US9343695B2 (en) | 2014-08-13 | 2016-05-17 | Universal Display Corporation | Method of fabricating organic light emitting device (OLED) panel of arbitrary shape |
US9825243B2 (en) | 2014-08-18 | 2017-11-21 | Udc Ireland Limited | Methods for fabricating OLEDs on non-uniform substrates and devices made therefrom |
US9583707B2 (en) | 2014-09-19 | 2017-02-28 | Universal Display Corporation | Micro-nozzle and micro-nozzle array for OVJP and method of manufacturing the same |
US10135007B2 (en) | 2014-09-29 | 2018-11-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10749113B2 (en) | 2014-09-29 | 2020-08-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10043987B2 (en) | 2014-09-29 | 2018-08-07 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10361375B2 (en) | 2014-10-06 | 2019-07-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9397302B2 (en) | 2014-10-08 | 2016-07-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10854826B2 (en) | 2014-10-08 | 2020-12-01 | Universal Display Corporation | Organic electroluminescent compounds, compositions and devices |
US10950803B2 (en) | 2014-10-13 | 2021-03-16 | Universal Display Corporation | Compounds and uses in devices |
US9484541B2 (en) | 2014-10-20 | 2016-11-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10868261B2 (en) | 2014-11-10 | 2020-12-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10038151B2 (en) | 2014-11-12 | 2018-07-31 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10411201B2 (en) | 2014-11-12 | 2019-09-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9871212B2 (en) | 2014-11-14 | 2018-01-16 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9882151B2 (en) | 2014-11-14 | 2018-01-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9761814B2 (en) | 2014-11-18 | 2017-09-12 | Universal Display Corporation | Organic light-emitting materials and devices |
US9444075B2 (en) | 2014-11-26 | 2016-09-13 | Universal Display Corporation | Emissive display with photo-switchable polarization |
US9843024B2 (en) | 2014-12-03 | 2017-12-12 | Universal Display Corporation | Methods for fabricating OLEDs |
US10177126B2 (en) | 2014-12-16 | 2019-01-08 | Universal Display Corporation | Tunable OLED lighting source |
US10510973B2 (en) | 2014-12-17 | 2019-12-17 | Universal Display Corporation | Color-stable organic light emitting diode stack |
US9450195B2 (en) | 2014-12-17 | 2016-09-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11145837B2 (en) | 2014-12-17 | 2021-10-12 | Universal Display Corporation | Color stable organic light emitting diode stack |
US9761842B2 (en) | 2014-12-19 | 2017-09-12 | The Regents Of The University Of Michigan | Enhancing light extraction of organic light emitting diodes via nanoscale texturing of electrode surfaces |
US10253252B2 (en) | 2014-12-30 | 2019-04-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10636978B2 (en) | 2014-12-30 | 2020-04-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9312499B1 (en) | 2015-01-05 | 2016-04-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9406892B2 (en) | 2015-01-07 | 2016-08-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10038167B2 (en) | 2015-01-08 | 2018-07-31 | The Regents Of The University Of Michigan | Thick-ETL OLEDs with sub-ITO grids with improved outcoupling |
US9711730B2 (en) | 2015-01-25 | 2017-07-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10418569B2 (en) | 2015-01-25 | 2019-09-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10355222B2 (en) | 2015-02-06 | 2019-07-16 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10418562B2 (en) | 2015-02-06 | 2019-09-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10644247B2 (en) | 2015-02-06 | 2020-05-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10177316B2 (en) | 2015-02-09 | 2019-01-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10144867B2 (en) | 2015-02-13 | 2018-12-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10680183B2 (en) | 2015-02-15 | 2020-06-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9929361B2 (en) | 2015-02-16 | 2018-03-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11056657B2 (en) | 2015-02-27 | 2021-07-06 | University Display Corporation | Organic electroluminescent materials and devices |
US10600966B2 (en) | 2015-02-27 | 2020-03-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10686143B2 (en) | 2015-03-05 | 2020-06-16 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10270046B2 (en) | 2015-03-06 | 2019-04-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
KR102354019B1 (en) | 2015-03-06 | 2022-01-21 | 유니버셜 디스플레이 코포레이션 | Novel substrate and process for high efficiency oled devices |
US9780316B2 (en) | 2015-03-16 | 2017-10-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9911928B2 (en) | 2015-03-19 | 2018-03-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9871214B2 (en) | 2015-03-23 | 2018-01-16 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10529931B2 (en) | 2015-03-24 | 2020-01-07 | Universal Display Corporation | Organic Electroluminescent materials and devices |
US10297770B2 (en) | 2015-03-27 | 2019-05-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10147360B2 (en) | 2015-03-31 | 2018-12-04 | Universal Display Corporation | Rugged display device architecture |
US10593890B2 (en) | 2015-04-06 | 2020-03-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11818949B2 (en) | 2015-04-06 | 2023-11-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11495749B2 (en) | 2015-04-06 | 2022-11-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9899457B2 (en) | 2015-04-24 | 2018-02-20 | Universal Display Corporation | Flexible OLED display having increased lifetime |
KR102584846B1 (en) | 2015-05-05 | 2023-10-04 | 유니버셜 디스플레이 코포레이션 | Organic electroluminescent materials and devices |
US10403826B2 (en) | 2015-05-07 | 2019-09-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10777749B2 (en) | 2015-05-07 | 2020-09-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9478758B1 (en) | 2015-05-08 | 2016-10-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9859510B2 (en) | 2015-05-15 | 2018-01-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10109799B2 (en) | 2015-05-21 | 2018-10-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10256411B2 (en) | 2015-05-21 | 2019-04-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10418568B2 (en) | 2015-06-01 | 2019-09-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10033004B2 (en) | 2015-06-01 | 2018-07-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10818853B2 (en) | 2015-06-04 | 2020-10-27 | University Of Southern California | Organic electroluminescent materials and devices |
US11925102B2 (en) | 2015-06-04 | 2024-03-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10243162B2 (en) | 2015-06-17 | 2019-03-26 | Universal Display Corporation | Close illumination system |
US9947895B2 (en) | 2015-06-17 | 2018-04-17 | Universal Display Corporation | Flexible AMOLED display |
US9978965B2 (en) | 2015-06-17 | 2018-05-22 | Universal Display Corporation | Rollable OLED display |
US9496523B1 (en) | 2015-06-19 | 2016-11-15 | Universal Display Corporation | Devices and methods to improve light outcoupling from an OLED array |
US10825997B2 (en) | 2015-06-25 | 2020-11-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10686159B2 (en) | 2015-06-26 | 2020-06-16 | Universal Display Corporation | OLED devices having improved efficiency |
JPWO2017006810A1 (en) * | 2015-07-03 | 2018-03-29 | シャープ株式会社 | Vapor deposition apparatus and vapor deposition method |
US10873036B2 (en) | 2015-07-07 | 2020-12-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9899631B2 (en) | 2015-07-08 | 2018-02-20 | Universal Display Corporation | Flexible multilayer scattering substrate used in OLED |
US9978956B2 (en) | 2015-07-15 | 2018-05-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
CN105154829B (en) * | 2015-07-28 | 2018-04-24 | 昆明物理研究所 | A kind of device and method of the isotropism organic matter filling of low stress |
US11127905B2 (en) | 2015-07-29 | 2021-09-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11018309B2 (en) | 2015-08-03 | 2021-05-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11522140B2 (en) | 2015-08-17 | 2022-12-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10522769B2 (en) | 2015-08-18 | 2019-12-31 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9947728B2 (en) | 2015-08-25 | 2018-04-17 | Universal Display Corporation | Hybrid MEMS OLED display |
US10181564B2 (en) | 2015-08-26 | 2019-01-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10361381B2 (en) | 2015-09-03 | 2019-07-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11706972B2 (en) | 2015-09-08 | 2023-07-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11302872B2 (en) | 2015-09-09 | 2022-04-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10263050B2 (en) | 2015-09-18 | 2019-04-16 | Universal Display Corporation | Hybrid display |
US9818804B2 (en) | 2015-09-18 | 2017-11-14 | Universal Display Corporation | Hybrid display |
US10770664B2 (en) | 2015-09-21 | 2020-09-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20170092880A1 (en) | 2015-09-25 | 2017-03-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10847728B2 (en) | 2015-10-01 | 2020-11-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10593892B2 (en) | 2015-10-01 | 2020-03-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10991895B2 (en) | 2015-10-06 | 2021-04-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10704144B2 (en) | 2015-10-12 | 2020-07-07 | Universal Display Corporation | Apparatus and method for printing multilayer organic thin films from vapor phase in an ultra-pure gas ambient |
US10566534B2 (en) | 2015-10-12 | 2020-02-18 | Universal Display Corporation | Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP) |
DE102016119623B4 (en) | 2015-10-15 | 2021-04-22 | Electronics And Telecommunications Research Institute | Method of making an optical device |
US10388892B2 (en) | 2015-10-29 | 2019-08-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10177318B2 (en) | 2015-10-29 | 2019-01-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10388893B2 (en) | 2015-10-29 | 2019-08-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10290816B2 (en) | 2015-11-16 | 2019-05-14 | The Regents Of The University Of Michigan | Organic electroluminescent materials and devices |
US10998507B2 (en) | 2015-11-23 | 2021-05-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10476010B2 (en) | 2015-11-30 | 2019-11-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10957861B2 (en) | 2015-12-29 | 2021-03-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11024808B2 (en) | 2015-12-29 | 2021-06-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10135006B2 (en) | 2016-01-04 | 2018-11-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20170229663A1 (en) | 2016-02-09 | 2017-08-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10457864B2 (en) | 2016-02-09 | 2019-10-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10707427B2 (en) | 2016-02-09 | 2020-07-07 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10600967B2 (en) | 2016-02-18 | 2020-03-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10170701B2 (en) | 2016-03-04 | 2019-01-01 | Universal Display Corporation | Controlled deposition of materials using a differential pressure regime |
US11094891B2 (en) | 2016-03-16 | 2021-08-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9692955B1 (en) | 2016-03-21 | 2017-06-27 | Universal Display Corporation | Flash optimized using OLED display |
US10276809B2 (en) | 2016-04-05 | 2019-04-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11014386B2 (en) | 2016-04-11 | 2021-05-25 | Universal Display Corporation | Actuation mechanism for accurately controlling distance in OVJP printing |
US10236456B2 (en) | 2016-04-11 | 2019-03-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11168391B2 (en) | 2016-04-11 | 2021-11-09 | Universal Display Corporation | Nozzle exit contours for pattern composition |
US10566552B2 (en) | 2016-04-13 | 2020-02-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11228002B2 (en) | 2016-04-22 | 2022-01-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11228003B2 (en) | 2016-04-22 | 2022-01-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10483498B2 (en) | 2016-04-22 | 2019-11-19 | Universal Display Corporation | High efficiency vapor transport sublimation source using baffles coated with source material |
US11081647B2 (en) | 2016-04-22 | 2021-08-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20170324049A1 (en) | 2016-05-05 | 2017-11-09 | Universal Display Corporation | Organic Electroluminescent Materials and Devices |
US10522776B2 (en) | 2016-05-23 | 2019-12-31 | Universal Display Corporation | OLED device structures |
US10985328B2 (en) | 2016-05-25 | 2021-04-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10460663B2 (en) | 2016-05-31 | 2019-10-29 | Universal Display Corporation | Architecture for very high resolution AMOLED display backplane |
US10468609B2 (en) | 2016-06-02 | 2019-11-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11482683B2 (en) | 2016-06-20 | 2022-10-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10727423B2 (en) | 2016-06-20 | 2020-07-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10672997B2 (en) | 2016-06-20 | 2020-06-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10862054B2 (en) | 2016-06-20 | 2020-12-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10686140B2 (en) | 2016-06-20 | 2020-06-16 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10651403B2 (en) | 2016-06-20 | 2020-05-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10957866B2 (en) | 2016-06-30 | 2021-03-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US9929360B2 (en) | 2016-07-08 | 2018-03-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10680184B2 (en) | 2016-07-11 | 2020-06-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10720587B2 (en) | 2016-07-19 | 2020-07-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10153443B2 (en) | 2016-07-19 | 2018-12-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10756141B2 (en) | 2016-07-28 | 2020-08-25 | Universal Display Corporation | Very high resolution stacked OLED display |
CN109477205B (en) | 2016-07-29 | 2021-02-19 | 环球展览公司 | Deposition nozzle |
US10229960B2 (en) | 2016-08-02 | 2019-03-12 | Universal Display Corporation | OLED displays with variable display regions |
US10483489B2 (en) | 2016-08-12 | 2019-11-19 | Universal Display Corporation | Integrated circular polarizer and permeation barrier for flexible OLEDs |
US10205105B2 (en) | 2016-08-15 | 2019-02-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10608186B2 (en) | 2016-09-14 | 2020-03-31 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10505127B2 (en) | 2016-09-19 | 2019-12-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10680187B2 (en) | 2016-09-23 | 2020-06-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20180097202A1 (en) | 2016-10-03 | 2018-04-05 | Regents Of The University Of Michigan | Enhanced oled outcoupling by suppressing surface plasmon modes |
US11189804B2 (en) | 2016-10-03 | 2021-11-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11081658B2 (en) | 2016-10-03 | 2021-08-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11127906B2 (en) | 2016-10-03 | 2021-09-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11183642B2 (en) | 2016-10-03 | 2021-11-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11196010B2 (en) | 2016-10-03 | 2021-12-07 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11011709B2 (en) | 2016-10-07 | 2021-05-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11239432B2 (en) | 2016-10-14 | 2022-02-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10608185B2 (en) | 2016-10-17 | 2020-03-31 | Univeral Display Corporation | Organic electroluminescent materials and devices |
US11751426B2 (en) | 2016-10-18 | 2023-09-05 | Universal Display Corporation | Hybrid thin film permeation barrier and method of making the same |
US10236458B2 (en) | 2016-10-24 | 2019-03-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20180130956A1 (en) | 2016-11-09 | 2018-05-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10340464B2 (en) | 2016-11-10 | 2019-07-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10680188B2 (en) | 2016-11-11 | 2020-06-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10897016B2 (en) | 2016-11-14 | 2021-01-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10662196B2 (en) | 2016-11-17 | 2020-05-26 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10964893B2 (en) | 2016-11-17 | 2021-03-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10153445B2 (en) | 2016-11-21 | 2018-12-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10833276B2 (en) | 2016-11-21 | 2020-11-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11223032B2 (en) | 2016-11-29 | 2022-01-11 | Universal Display Corporation | Thin film barrier structure |
US11555048B2 (en) | 2016-12-01 | 2023-01-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11548905B2 (en) | 2016-12-15 | 2023-01-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11545636B2 (en) | 2016-12-15 | 2023-01-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10490753B2 (en) | 2016-12-15 | 2019-11-26 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10811618B2 (en) | 2016-12-19 | 2020-10-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11152579B2 (en) | 2016-12-28 | 2021-10-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10783823B2 (en) | 2017-01-04 | 2020-09-22 | Universal Display Corporation | OLED device with controllable brightness |
US11201298B2 (en) | 2017-01-09 | 2021-12-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11780865B2 (en) | 2017-01-09 | 2023-10-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10804475B2 (en) | 2017-01-11 | 2020-10-13 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11545637B2 (en) | 2017-01-13 | 2023-01-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10629820B2 (en) | 2017-01-18 | 2020-04-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10964904B2 (en) | 2017-01-20 | 2021-03-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11053268B2 (en) | 2017-01-20 | 2021-07-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11765968B2 (en) | 2017-01-23 | 2023-09-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11050028B2 (en) | 2017-01-24 | 2021-06-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10978647B2 (en) | 2017-02-15 | 2021-04-13 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10822361B2 (en) | 2017-02-22 | 2020-11-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10745431B2 (en) | 2017-03-08 | 2020-08-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10741780B2 (en) | 2017-03-10 | 2020-08-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10672998B2 (en) | 2017-03-23 | 2020-06-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10873037B2 (en) | 2017-03-28 | 2020-12-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10910577B2 (en) | 2017-03-28 | 2021-02-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11056658B2 (en) | 2017-03-29 | 2021-07-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11158820B2 (en) | 2017-03-29 | 2021-10-26 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10844085B2 (en) | 2017-03-29 | 2020-11-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10862046B2 (en) | 2017-03-30 | 2020-12-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11276829B2 (en) | 2017-03-31 | 2022-03-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11139443B2 (en) | 2017-03-31 | 2021-10-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
KR102369676B1 (en) | 2017-04-10 | 2022-03-04 | 삼성디스플레이 주식회사 | Apparatus and method for manufacturing a display apparatus |
US10777754B2 (en) | 2017-04-11 | 2020-09-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11038117B2 (en) | 2017-04-11 | 2021-06-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11101434B2 (en) | 2017-04-21 | 2021-08-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11084838B2 (en) | 2017-04-21 | 2021-08-10 | Universal Display Corporation | Organic electroluminescent materials and device |
US10975113B2 (en) | 2017-04-21 | 2021-04-13 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11038137B2 (en) | 2017-04-28 | 2021-06-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10910570B2 (en) | 2017-04-28 | 2021-02-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11117897B2 (en) | 2017-05-01 | 2021-09-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10941170B2 (en) | 2017-05-03 | 2021-03-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11201299B2 (en) | 2017-05-04 | 2021-12-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20180323373A1 (en) | 2017-05-05 | 2018-11-08 | Universal Display Corporation | Capacitive sensor for positioning in ovjp printing |
US10818840B2 (en) * | 2017-05-05 | 2020-10-27 | Universal Display Corporation | Segmented print bar for large-area OVJP deposition |
US10862055B2 (en) | 2017-05-05 | 2020-12-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10870668B2 (en) | 2017-05-05 | 2020-12-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10930864B2 (en) | 2017-05-10 | 2021-02-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10822362B2 (en) | 2017-05-11 | 2020-11-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10944060B2 (en) | 2017-05-11 | 2021-03-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10944062B2 (en) | 2017-05-18 | 2021-03-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11038115B2 (en) | 2017-05-18 | 2021-06-15 | Universal Display Corporation | Organic electroluminescent materials and device |
US10790455B2 (en) | 2017-05-18 | 2020-09-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10840459B2 (en) | 2017-05-18 | 2020-11-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10934293B2 (en) | 2017-05-18 | 2021-03-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11946131B2 (en) | 2017-05-26 | 2024-04-02 | Universal Display Corporation | Sublimation cell with time stability of output vapor pressure |
US11201288B2 (en) | 2017-05-26 | 2021-12-14 | Universal Display Corporation | Generalized organic vapor jet depositor capable of high resolution printing and method for OVJP printing |
US10930862B2 (en) | 2017-06-01 | 2021-02-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11174259B2 (en) | 2017-06-23 | 2021-11-16 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11678565B2 (en) | 2017-06-23 | 2023-06-13 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10968226B2 (en) | 2017-06-23 | 2021-04-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11758804B2 (en) | 2017-06-23 | 2023-09-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11832510B2 (en) | 2017-06-23 | 2023-11-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11608321B2 (en) | 2017-06-23 | 2023-03-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11725022B2 (en) | 2017-06-23 | 2023-08-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11802136B2 (en) | 2017-06-23 | 2023-10-31 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11552261B2 (en) | 2017-06-23 | 2023-01-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11495757B2 (en) | 2017-06-23 | 2022-11-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20180370999A1 (en) | 2017-06-23 | 2018-12-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11814403B2 (en) | 2017-06-23 | 2023-11-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11469382B2 (en) | 2017-07-12 | 2022-10-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11239433B2 (en) | 2017-07-26 | 2022-02-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11765970B2 (en) | 2017-07-26 | 2023-09-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11228010B2 (en) | 2017-07-26 | 2022-01-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11917843B2 (en) | 2017-07-26 | 2024-02-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11968883B2 (en) | 2017-07-26 | 2024-04-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11322691B2 (en) | 2017-07-26 | 2022-05-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11678499B2 (en) | 2017-07-27 | 2023-06-13 | Universal Display Corporation | Use of singlet-triplet gap hosts for increasing stability of blue phosphorescent emission |
US11744141B2 (en) | 2017-08-09 | 2023-08-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11349083B2 (en) | 2017-08-10 | 2022-05-31 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11910699B2 (en) | 2017-08-10 | 2024-02-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11744142B2 (en) | 2017-08-10 | 2023-08-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11508913B2 (en) | 2017-08-10 | 2022-11-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11462697B2 (en) | 2017-08-22 | 2022-10-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11723269B2 (en) | 2017-08-22 | 2023-08-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10600981B2 (en) | 2017-08-24 | 2020-03-24 | Universal Display Corporation | Exciplex-sensitized fluorescence light emitting system |
US11437591B2 (en) | 2017-08-24 | 2022-09-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11605791B2 (en) | 2017-09-01 | 2023-03-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11696492B2 (en) | 2017-09-07 | 2023-07-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11424420B2 (en) | 2017-09-07 | 2022-08-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11444249B2 (en) | 2017-09-07 | 2022-09-13 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10608188B2 (en) | 2017-09-11 | 2020-03-31 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11778897B2 (en) | 2017-09-20 | 2023-10-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
DE102017122886A1 (en) | 2017-10-02 | 2019-04-04 | Aixtron Se | Method for producing a luminous pixel arrangement |
US11183646B2 (en) | 2017-11-07 | 2021-11-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11910702B2 (en) | 2017-11-07 | 2024-02-20 | Universal Display Corporation | Organic electroluminescent devices |
US11214587B2 (en) | 2017-11-07 | 2022-01-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10770690B2 (en) | 2017-11-15 | 2020-09-08 | The Regents Of The University Of Michigan | OLED with minimal plasmonic losses |
US11362311B2 (en) | 2017-11-17 | 2022-06-14 | The Regents Of The University Of Michigan | Sub-electrode microlens array for organic light emitting devices |
US11168103B2 (en) | 2017-11-17 | 2021-11-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11362310B2 (en) | 2017-11-20 | 2022-06-14 | The Regents Of The University Of Michigan | Organic light-emitting devices using a low refractive index dielectric |
US10777125B2 (en) | 2017-11-27 | 2020-09-15 | Universal Display Corporation | Multi-mode OLED display |
US20190161504A1 (en) | 2017-11-28 | 2019-05-30 | University Of Southern California | Carbene compounds and organic electroluminescent devices |
US10770673B2 (en) | 2017-11-28 | 2020-09-08 | The Regents Of The University Of Michigan | Highly reliable stacked white organic light emitting device |
US11825735B2 (en) | 2017-11-28 | 2023-11-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP3492480B1 (en) | 2017-11-29 | 2021-10-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11937503B2 (en) | 2017-11-30 | 2024-03-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10998531B2 (en) | 2017-12-12 | 2021-05-04 | Universal Display Corporation | Segmented OVJP print bar |
US11145692B2 (en) | 2017-12-12 | 2021-10-12 | Universal Display Corporation | Hybrid wearable organic light emitting diode (OLED) illumination devices |
US11139444B2 (en) | 2017-12-12 | 2021-10-05 | Universal Display Corporation | Organic electroluminescent devices containing a near-infrared down-conversion layer |
US12075690B2 (en) | 2017-12-14 | 2024-08-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11233205B2 (en) | 2017-12-14 | 2022-01-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10971687B2 (en) | 2017-12-14 | 2021-04-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11233204B2 (en) | 2017-12-14 | 2022-01-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10992252B2 (en) | 2017-12-19 | 2021-04-27 | Universal Display Corporation | Integrated photovoltaic window and light source |
US11700765B2 (en) | 2018-01-10 | 2023-07-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11081659B2 (en) | 2018-01-10 | 2021-08-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11108027B2 (en) | 2018-01-11 | 2021-08-31 | Universal Display Corporation | Printed metal gasket |
US11271177B2 (en) | 2018-01-11 | 2022-03-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11515493B2 (en) | 2018-01-11 | 2022-11-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11588140B2 (en) | 2018-01-12 | 2023-02-21 | Universal Display Corporation | Organic vapor jet print head for depositing thin film features with high thickness uniformity |
US10654272B2 (en) | 2018-01-12 | 2020-05-19 | Universal Display Corporation | Valved micronozzle array for high temperature MEMS application |
US11542289B2 (en) | 2018-01-26 | 2023-01-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11367840B2 (en) | 2018-01-26 | 2022-06-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11845764B2 (en) | 2018-01-26 | 2023-12-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US12029055B2 (en) | 2018-01-30 | 2024-07-02 | The University Of Southern California | OLED with hybrid emissive layer |
US11033924B2 (en) | 2018-01-31 | 2021-06-15 | Universal Display Corporation | Organic vapor jet print head with orthogonal delivery and exhaust channels |
US11957050B2 (en) | 2018-02-09 | 2024-04-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11342509B2 (en) | 2018-02-09 | 2022-05-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11239434B2 (en) | 2018-02-09 | 2022-02-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11180519B2 (en) | 2018-02-09 | 2021-11-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11104988B2 (en) | 2018-02-22 | 2021-08-31 | Universal Display Corporation | Modular confined organic print head and system |
US11142538B2 (en) | 2018-03-12 | 2021-10-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11279722B2 (en) | 2018-03-12 | 2022-03-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11217757B2 (en) | 2018-03-12 | 2022-01-04 | Universal Display Corporation | Host materials for electroluminescent devices |
US11165028B2 (en) | 2018-03-12 | 2021-11-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11557733B2 (en) | 2018-03-12 | 2023-01-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10916704B2 (en) | 2018-04-03 | 2021-02-09 | Universal Display Corporation | Vapor jet printing |
US11062205B2 (en) | 2018-04-06 | 2021-07-13 | Universal Display Corporation | Hybrid neuromorphic computing display |
US11882759B2 (en) | 2018-04-13 | 2024-01-23 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11390639B2 (en) | 2018-04-13 | 2022-07-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11616203B2 (en) | 2018-04-17 | 2023-03-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11515494B2 (en) | 2018-05-04 | 2022-11-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11753427B2 (en) | 2018-05-04 | 2023-09-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11342513B2 (en) | 2018-05-04 | 2022-05-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11793073B2 (en) | 2018-05-06 | 2023-10-17 | Universal Display Corporation | Host materials for electroluminescent devices |
US11552278B2 (en) | 2018-05-08 | 2023-01-10 | Universal Display Corporation | Integrated photobiomodulation device |
US11450822B2 (en) | 2018-05-25 | 2022-09-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11459349B2 (en) | 2018-05-25 | 2022-10-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11716900B2 (en) | 2018-05-30 | 2023-08-01 | Universal Display Corporation | Host materials for electroluminescent devices |
US11404653B2 (en) | 2018-06-04 | 2022-08-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11925103B2 (en) | 2018-06-05 | 2024-03-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11339182B2 (en) | 2018-06-07 | 2022-05-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11552159B2 (en) | 2018-06-18 | 2023-01-10 | Universal Display Corporation | OLED display with all organic thin film layers patterned |
US11121320B2 (en) | 2018-06-18 | 2021-09-14 | Universal Display Corporation | Organic vapor jet print head with redundant groups of depositors |
US20190386256A1 (en) | 2018-06-18 | 2019-12-19 | Universal Display Corporation | Sequential material sources for thermally challenged OLED materials |
US11228004B2 (en) | 2018-06-22 | 2022-01-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11261207B2 (en) | 2018-06-25 | 2022-03-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11753425B2 (en) | 2018-07-11 | 2023-09-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
WO2020018626A1 (en) | 2018-07-18 | 2020-01-23 | Massachusetts Institute Of Technology | Alternating multi-source vapor transport deposition |
US10797112B2 (en) | 2018-07-25 | 2020-10-06 | Universal Display Corporation | Energy efficient OLED TV |
US20200075870A1 (en) | 2018-08-22 | 2020-03-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11233203B2 (en) | 2018-09-06 | 2022-01-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11485706B2 (en) | 2018-09-11 | 2022-11-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11718634B2 (en) | 2018-09-14 | 2023-08-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11903305B2 (en) | 2018-09-24 | 2024-02-13 | Universal Display Corporation | Organic electroluminescent materials and devices |
US10879487B2 (en) | 2018-10-04 | 2020-12-29 | Universal Display Corporation | Wearable OLED illumination device |
US11469383B2 (en) | 2018-10-08 | 2022-10-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11495752B2 (en) | 2018-10-08 | 2022-11-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11476430B2 (en) | 2018-10-15 | 2022-10-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11515482B2 (en) | 2018-10-23 | 2022-11-29 | Universal Display Corporation | Deep HOMO (highest occupied molecular orbital) emitter device structures |
US11469384B2 (en) | 2018-11-02 | 2022-10-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11825736B2 (en) | 2018-11-19 | 2023-11-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11963441B2 (en) | 2018-11-26 | 2024-04-16 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11690285B2 (en) | 2018-11-28 | 2023-06-27 | Universal Display Corporation | Electroluminescent devices |
US11706980B2 (en) | 2018-11-28 | 2023-07-18 | Universal Display Corporation | Host materials for electroluminescent devices |
US11672165B2 (en) | 2018-11-28 | 2023-06-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11889708B2 (en) | 2019-11-14 | 2024-01-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11716899B2 (en) | 2018-11-28 | 2023-08-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11672176B2 (en) | 2018-11-28 | 2023-06-06 | Universal Display Corporation | Host materials for electroluminescent devices |
US11201313B2 (en) | 2018-11-29 | 2021-12-14 | Universal Display Corporation | Enhanced outcoupling from surface plasmon modes in corrugated OLEDs |
US11217762B2 (en) | 2018-11-30 | 2022-01-04 | Universal Display Corporation | Surface-plasmon-pumped light emitting devices |
US11623936B2 (en) | 2018-12-11 | 2023-04-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11834459B2 (en) | 2018-12-12 | 2023-12-05 | Universal Display Corporation | Host materials for electroluminescent devices |
US11737349B2 (en) | 2018-12-12 | 2023-08-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11895853B2 (en) | 2019-01-17 | 2024-02-06 | The Regents Of The University Of Michigan | Organic photovoltaic device having a lateral charge transport channel |
US11088325B2 (en) | 2019-01-18 | 2021-08-10 | Universal Display Corporation | Organic vapor jet micro-print head with multiple gas distribution orifice plates |
US11349099B2 (en) | 2019-01-25 | 2022-05-31 | The Regents Of The University Of Michigan | Method of fabricating a light emitting device having a polymer film with a specified surface rouggness |
US11342526B2 (en) | 2019-01-29 | 2022-05-24 | The Regents Of The University Of Michigan | Hybrid organic light emitting device |
US11780829B2 (en) | 2019-01-30 | 2023-10-10 | The University Of Southern California | Organic electroluminescent materials and devices |
US11812624B2 (en) | 2019-01-30 | 2023-11-07 | The University Of Southern California | Organic electroluminescent materials and devices |
US11683973B2 (en) | 2019-01-31 | 2023-06-20 | Universal Display Corporation | Use of thin film metal with stable native oxide for solder wetting control |
US20200251664A1 (en) | 2019-02-01 | 2020-08-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11370809B2 (en) | 2019-02-08 | 2022-06-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11325932B2 (en) | 2019-02-08 | 2022-05-10 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11773320B2 (en) | 2019-02-21 | 2023-10-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11557738B2 (en) | 2019-02-22 | 2023-01-17 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11871653B2 (en) | 2019-02-22 | 2024-01-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11512093B2 (en) | 2019-03-04 | 2022-11-29 | Universal Display Corporation | Compound used for organic light emitting device (OLED), consumer product and formulation |
US11739081B2 (en) | 2019-03-11 | 2023-08-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11139442B2 (en) | 2019-03-12 | 2021-10-05 | Universal Display Corporation | Nanopatch antenna outcoupling structure for use in OLEDs |
EP3709376A1 (en) | 2019-03-12 | 2020-09-16 | Universal Display Corporation | Oled with triplet emitter and excited state lifetime less than 200 ns |
US11245086B2 (en) | 2019-03-12 | 2022-02-08 | Universal Display Corporation | Nano-objects for purcell enhancement, out-coupling and engineering radiation pattern |
US11569480B2 (en) | 2019-03-12 | 2023-01-31 | Universal Display Corporation | Plasmonic OLEDs and vertical dipole emitters |
US11637261B2 (en) | 2019-03-12 | 2023-04-25 | Universal Display Corporation | Nanopatch antenna outcoupling structure for use in OLEDs |
US11056540B2 (en) | 2019-03-12 | 2021-07-06 | Universal Display Corporation | Plasmonic PHOLED arrangement for displays |
CA3131859A1 (en) | 2019-03-13 | 2020-09-17 | Metal Oxide Technologies, Llc | Solid precursor feed system for thin film depositions |
US11552247B2 (en) | 2019-03-20 | 2023-01-10 | The Regents Of The University Of Michigan | Organic vapor jet nozzle with shutter |
US11963438B2 (en) | 2019-03-26 | 2024-04-16 | The University Of Southern California | Organic electroluminescent materials and devices |
JP2020158491A (en) | 2019-03-26 | 2020-10-01 | ユニバーサル ディスプレイ コーポレイション | Organic electroluminescent materials and devices |
US11222928B2 (en) | 2019-04-01 | 2022-01-11 | Universal Display Corporation | Display architecture with reduced number of data line connections |
US11639363B2 (en) | 2019-04-22 | 2023-05-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US12075691B2 (en) | 2019-04-30 | 2024-08-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11613550B2 (en) | 2019-04-30 | 2023-03-28 | Universal Display Corporation | Organic electroluminescent materials and devices comprising benzimidazole-containing metal complexes |
US11560398B2 (en) | 2019-05-07 | 2023-01-24 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11495756B2 (en) | 2019-05-07 | 2022-11-08 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11827651B2 (en) | 2019-05-13 | 2023-11-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11634445B2 (en) | 2019-05-21 | 2023-04-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20200373360A1 (en) | 2019-05-23 | 2020-11-26 | Universal Display Corporation | Oled display panel with unpatterned emissive stack |
US12010859B2 (en) | 2019-05-24 | 2024-06-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11647667B2 (en) | 2019-06-14 | 2023-05-09 | Universal Display Corporation | Organic electroluminescent compounds and organic light emitting devices using the same |
US11920070B2 (en) | 2019-07-12 | 2024-03-05 | The University Of Southern California | Luminescent janus-type, two-coordinated metal complexes |
US11825687B2 (en) | 2019-07-17 | 2023-11-21 | The Regents Of The University Of Michigan | Organic light emitting device |
US11926638B2 (en) | 2019-07-22 | 2024-03-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11685754B2 (en) | 2019-07-22 | 2023-06-27 | Universal Display Corporation | Heteroleptic organic electroluminescent materials |
US20210036065A1 (en) | 2019-07-29 | 2021-02-04 | Universal Display Corporation | Color stable multicolor OLED device structures |
US20210032278A1 (en) | 2019-07-30 | 2021-02-04 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11708355B2 (en) | 2019-08-01 | 2023-07-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11985888B2 (en) | 2019-08-12 | 2024-05-14 | The Regents Of The University Of Michigan | Organic electroluminescent device |
US11374181B2 (en) | 2019-08-14 | 2022-06-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11930699B2 (en) | 2019-08-15 | 2024-03-12 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20210047354A1 (en) | 2019-08-16 | 2021-02-18 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11925105B2 (en) | 2019-08-26 | 2024-03-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11937494B2 (en) | 2019-08-28 | 2024-03-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11600787B2 (en) | 2019-08-30 | 2023-03-07 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11820783B2 (en) | 2019-09-06 | 2023-11-21 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20210098717A1 (en) | 2019-09-26 | 2021-04-01 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11864458B2 (en) | 2019-10-08 | 2024-01-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11950493B2 (en) | 2019-10-15 | 2024-04-02 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11697653B2 (en) | 2019-10-21 | 2023-07-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11919914B2 (en) | 2019-10-25 | 2024-03-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11765965B2 (en) | 2019-10-30 | 2023-09-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20210135130A1 (en) | 2019-11-04 | 2021-05-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
JP7488091B2 (en) | 2019-11-14 | 2024-05-21 | ユニバーサル ディスプレイ コーポレイション | Organic electroluminescent materials and devices |
US11903300B2 (en) | 2019-11-18 | 2024-02-13 | Universal Display Corporation | Pixel configurations for high resolution OVJP printed OLED displays |
US11832504B2 (en) | 2019-11-25 | 2023-11-28 | The Regents Of The University Of Michigan | System and method for organic electronic device patterning |
US11292245B2 (en) | 2020-01-03 | 2022-04-05 | Trustees Of Boston University | Microelectromechanical shutters for organic vapor jet printing |
US20210217969A1 (en) | 2020-01-06 | 2021-07-15 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11778895B2 (en) | 2020-01-13 | 2023-10-03 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220336759A1 (en) | 2020-01-28 | 2022-10-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11917900B2 (en) | 2020-01-28 | 2024-02-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11932660B2 (en) | 2020-01-29 | 2024-03-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US12018035B2 (en) | 2020-03-23 | 2024-06-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11970508B2 (en) | 2020-04-22 | 2024-04-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11751466B2 (en) | 2020-05-11 | 2023-09-05 | Universal Display Corporation | Apparatus and method to deliver organic material via organic vapor jet printing (OVJP) |
US11716863B2 (en) | 2020-05-11 | 2023-08-01 | Universal Display Corporation | Hybrid display architecture |
US12065728B2 (en) | 2020-05-11 | 2024-08-20 | Universal Display Corporation | Apparatus and method to deliver organic material via organic vapor jet printing (OVJP) |
US12035613B2 (en) | 2020-05-26 | 2024-07-09 | Universal Display Corporation | Organic electroluminescent materials and devices |
US12052918B2 (en) | 2020-06-24 | 2024-07-30 | The Regents Of The University Of Michigan | Organic electroluminescent device comprising two-dimensional emissive layer |
EP3937268A1 (en) | 2020-07-10 | 2022-01-12 | Universal Display Corporation | Plasmonic oleds and vertical dipole emitters |
US11778889B2 (en) | 2020-07-20 | 2023-10-03 | Universal Display Corporation | Height measurement and control in confined spaces for vapor deposition system |
US12065451B2 (en) | 2020-08-19 | 2024-08-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220102441A1 (en) | 2020-09-29 | 2022-03-31 | Universal Display Corporation | High Color Gamut OLED Displays |
US20220112232A1 (en) | 2020-10-02 | 2022-04-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US12016231B2 (en) | 2020-10-09 | 2024-06-18 | Universal Display Corporation | Simplified high-performance AMOLED |
US20220158096A1 (en) | 2020-11-16 | 2022-05-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220162243A1 (en) | 2020-11-24 | 2022-05-26 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220165967A1 (en) | 2020-11-24 | 2022-05-26 | Universal Display Corporation | Organic electroluminescent materials and devices |
US11903302B2 (en) | 2020-12-16 | 2024-02-13 | Universal Display Corporation | Organic vapor jet printing system |
US20220271241A1 (en) | 2021-02-03 | 2022-08-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP4060758A3 (en) | 2021-02-26 | 2023-03-29 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP4059915A3 (en) | 2021-02-26 | 2022-12-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220298192A1 (en) | 2021-03-05 | 2022-09-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220298190A1 (en) | 2021-03-12 | 2022-09-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220298193A1 (en) | 2021-03-15 | 2022-09-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220340607A1 (en) | 2021-04-05 | 2022-10-27 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP4075531A1 (en) | 2021-04-13 | 2022-10-19 | Universal Display Corporation | Plasmonic oleds and vertical dipole emitters |
US20220352478A1 (en) | 2021-04-14 | 2022-11-03 | Universal Display Corporation | Organic eletroluminescent materials and devices |
US20230006149A1 (en) | 2021-04-23 | 2023-01-05 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20220407020A1 (en) | 2021-04-23 | 2022-12-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20230133787A1 (en) | 2021-06-08 | 2023-05-04 | University Of Southern California | Molecular Alignment of Homoleptic Iridium Phosphors |
EP4151699A1 (en) | 2021-09-17 | 2023-03-22 | Universal Display Corporation | Organic electroluminescent materials and devices |
US12048169B2 (en) | 2021-09-22 | 2024-07-23 | The Regents Of The University Of Michigan | High efficiency, color neutral, semi-transparent organic photovoltaics for energy harvesting windows |
US20230124304A1 (en) * | 2021-10-14 | 2023-04-20 | Applied Materials, Inc. | Controlled delivery of low-vapor-pressure precursor into a chamber |
US20230157058A1 (en) | 2021-11-12 | 2023-05-18 | Universal Display Corporation | Organic electroluminescent devices |
EP4212539A1 (en) | 2021-12-16 | 2023-07-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP4231804A3 (en) | 2022-02-16 | 2023-09-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP4286555A1 (en) | 2022-02-23 | 2023-12-06 | Universal Display Corporation | Organic vapor jet printing system |
US20230292592A1 (en) | 2022-03-09 | 2023-09-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20230292605A1 (en) | 2022-03-09 | 2023-09-14 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20230337516A1 (en) | 2022-04-18 | 2023-10-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20230363244A1 (en) | 2022-05-09 | 2023-11-09 | Universal Display Corporation | Organic vapor jet printing system |
US20230357918A1 (en) | 2022-05-09 | 2023-11-09 | Universal Display Corporation | Organic vapor jet printing system |
US20230389421A1 (en) | 2022-05-24 | 2023-11-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP4293001A1 (en) | 2022-06-08 | 2023-12-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20230413590A1 (en) | 2022-06-17 | 2023-12-21 | Universal Display Corporation | Organic electroluminescent devices |
US20240016051A1 (en) | 2022-06-28 | 2024-01-11 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20240107880A1 (en) | 2022-08-17 | 2024-03-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20240188316A1 (en) | 2022-10-27 | 2024-06-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20240188319A1 (en) | 2022-10-27 | 2024-06-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20240180025A1 (en) | 2022-10-27 | 2024-05-30 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20240188419A1 (en) | 2022-10-27 | 2024-06-06 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20240206208A1 (en) | 2022-10-27 | 2024-06-20 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20240196730A1 (en) | 2022-10-27 | 2024-06-13 | Universal Display Corporation | Organic electroluminescent materials and devices |
EP4383990A1 (en) | 2022-12-08 | 2024-06-12 | The Regents Of The University Of Michigan | Materials for optoelectronic applications |
US20240247017A1 (en) | 2022-12-14 | 2024-07-25 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20240268139A1 (en) | 2023-01-30 | 2024-08-08 | The Regents Of The University Of Michigan | Organic electroluminescent devices |
Family Cites Families (98)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3379803A (en) | 1964-05-04 | 1968-04-23 | Union Carbide Corp | Coating method and apparatus for deposition of polymer-forming vapor under vacuum |
US3901182A (en) * | 1972-05-18 | 1975-08-26 | Harris Corp | Silicon source feed process |
CH626407A5 (en) * | 1977-07-08 | 1981-11-13 | Balzers Hochvakuum | |
US4321299A (en) * | 1977-09-15 | 1982-03-23 | Nasa | Strong thin membrane structure for use as solar sail comprising substrate with reflective coating on one surface and an infra red emissivity increasing coating on the other surface |
US4389973A (en) * | 1980-03-18 | 1983-06-28 | Oy Lohja Ab | Apparatus for performing growth of compound thin films |
US4681773A (en) | 1981-03-27 | 1987-07-21 | American Telephone And Telegraph Company At&T Bell Laboratories | Apparatus for simultaneous molecular beam deposition on a plurality of substrates |
JPS582294A (en) * | 1981-06-29 | 1983-01-07 | Fujitsu Ltd | Vapor phase growing method |
EP0110882A1 (en) * | 1982-06-01 | 1984-06-20 | Massachusetts Institute Of Technology | Maskless growth of patterned films |
US4454835A (en) * | 1982-09-13 | 1984-06-19 | The United States Of America As Represented By The Secretary Of The Navy | Internal photolysis reactor |
JPS59113174A (en) * | 1982-12-17 | 1984-06-29 | Matsushita Electric Ind Co Ltd | Method and device for forming thin film |
US4508760A (en) * | 1983-06-10 | 1985-04-02 | Nova Tran Corporation | Method and apparatus for microencapsulation |
US4569829A (en) * | 1983-11-10 | 1986-02-11 | Texas Instruments Incorporated | MBE Source bakeout system |
ATE75167T1 (en) * | 1984-02-13 | 1992-05-15 | Jerome J Schmitt Iii | METHOD AND APPARATUS FOR GAS JET DEPOSITION OF CONDUCTIVE AND DIELECTRIC THIN SOLID FILMS AND PRODUCTS SO MANUFACTURED. |
JPH0642456B2 (en) * | 1984-11-21 | 1994-06-01 | 株式会社日立製作所 | Surface light treatment method |
JPS61280610A (en) | 1985-06-06 | 1986-12-11 | Toshiba Corp | Molecular beam epitaxial growing device |
US4773355A (en) * | 1985-06-10 | 1988-09-27 | Massachusetts Institute Of Technology | Growth of epitaxial films by chemical vapor deposition |
EP0209403B1 (en) * | 1985-07-15 | 1991-10-23 | Research Development Corporation of Japan | Process for preparing ultrafine particles of organic compounds |
JPS6251028A (en) * | 1985-08-28 | 1987-03-05 | Hitachi Maxell Ltd | Production of magnetic recording medium |
US4796562A (en) * | 1985-12-03 | 1989-01-10 | Varian Associates, Inc. | Rapid thermal cvd apparatus |
JPH0691020B2 (en) * | 1986-02-14 | 1994-11-14 | 日本電信電話株式会社 | Vapor growth method and apparatus |
JPS6345362A (en) * | 1986-08-11 | 1988-02-26 | Matsushita Electric Ind Co Ltd | Production of thin phthalocyanine compound film |
US4769292A (en) | 1987-03-02 | 1988-09-06 | Eastman Kodak Company | Electroluminescent device with modified thin film luminescent zone |
JPS63307255A (en) * | 1987-06-08 | 1988-12-14 | Oki Electric Ind Co Ltd | Method and apparatus for producing thin organic functional material film |
JPS6411320A (en) * | 1987-07-06 | 1989-01-13 | Toshiba Corp | Photo-cvd device |
GB2211209A (en) | 1987-10-16 | 1989-06-28 | Philips Electronic Associated | A method of forming a defect mixed oxide |
JP2654490B2 (en) * | 1987-10-30 | 1997-09-17 | 日本化成株式会社 | Paste for forming light emitting layer and insulator layer of dispersion type EL element and EL element using the paste |
US5174881A (en) | 1988-05-12 | 1992-12-29 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for forming a thin film on surface of semiconductor substrate |
EP0429536A4 (en) | 1988-08-19 | 1993-12-15 | Regents Of The University Of Minnesota | Preparation of superconductive ceramic oxides using ozone |
JPH0360493A (en) * | 1989-07-26 | 1991-03-15 | Furukawa Electric Co Ltd:The | Bubbler and its temperature control method |
JP2648211B2 (en) * | 1989-08-10 | 1997-08-27 | 日本電信電話株式会社 | Preparation method of oxide thin film |
GB2234988B (en) * | 1989-08-16 | 1993-12-08 | Qpl Limited | Improvements in vacuum deposition machines |
JPH03104857A (en) * | 1989-09-18 | 1991-05-01 | Central Glass Co Ltd | Sheet-like kbr body coated with fluorine-containing resin and its production |
JPH0818902B2 (en) | 1989-11-02 | 1996-02-28 | シャープ株式会社 | Vapor phase growth equipment |
JPH0421780A (en) * | 1990-05-14 | 1992-01-24 | Sharp Corp | Vapor growth device |
US5104684A (en) * | 1990-05-25 | 1992-04-14 | Massachusetts Institute Of Technology | Ion beam induced deposition of metals |
JPH0445259A (en) * | 1990-06-11 | 1992-02-14 | Ulvac Japan Ltd | Film forming device |
US5080928A (en) * | 1990-10-05 | 1992-01-14 | Gte Laboratories Incorporated | Method for making moisture insensitive zinc sulfide based luminescent materials |
US5356673A (en) * | 1991-03-18 | 1994-10-18 | Jet Process Corporation | Evaporation system and method for gas jet deposition of thin film materials |
JPH05132763A (en) * | 1991-11-12 | 1993-05-28 | Ulvac Japan Ltd | Omnidirectional and simultaneous vapor-deposition polymerization device |
US5431958A (en) | 1992-03-09 | 1995-07-11 | Sharp Kabushiki Kaisha | Metalorganic chemical vapor deposition of ferroelectric thin films |
JPH05323400A (en) * | 1992-03-26 | 1993-12-07 | Toray Ind Inc | Vapor growth method for thin film of organic nonlinear optical crystal |
JP2917694B2 (en) * | 1992-04-02 | 1999-07-12 | 日本電気株式会社 | Compound semiconductor vapor deposition method and apparatus therefor |
FR2691922B1 (en) * | 1992-06-03 | 1994-07-22 | Snecma | METHOD AND DEVICE FOR MOLDING A PART OF COMPOSITE MATERIAL CONSISTING OF TWO SECTORS. |
JP2780216B2 (en) * | 1992-06-30 | 1998-07-30 | 関西日本電気株式会社 | Electroluminescent lamp |
DE4223762B4 (en) * | 1992-07-18 | 2009-07-23 | Khd Humboldt Wedag Gmbh | Classifying device for sifting granular material and circulation grinding plant with the involvement of such a sifting device |
JP3300069B2 (en) * | 1992-11-19 | 2002-07-08 | パイオニア株式会社 | Organic electroluminescence device |
JP3134137B2 (en) | 1993-01-13 | 2001-02-13 | 東京エレクトロン株式会社 | Vertical processing equipment |
JPH06223970A (en) * | 1993-01-25 | 1994-08-12 | Idemitsu Kosan Co Ltd | Manufacture of organic electroluminescence element |
JP3015221B2 (en) * | 1993-03-24 | 2000-03-06 | 三菱電機株式会社 | Organic thin film manufacturing method |
JP3305047B2 (en) * | 1993-07-13 | 2002-07-22 | 三菱重工業株式会社 | DeNOx reactor |
JPH0762526A (en) * | 1993-08-19 | 1995-03-07 | Mitsubishi Chem Corp | Production of organic electroluminescence element |
US5679152A (en) * | 1994-01-27 | 1997-10-21 | Advanced Technology Materials, Inc. | Method of making a single crystals Ga*N article |
US5650197A (en) * | 1994-03-11 | 1997-07-22 | Jet Process Corporation | Jet vapor deposition of organic molecule guest-inorganic host thin films |
EP0714557B1 (en) * | 1994-05-18 | 1998-11-25 | Koninklijke Philips Electronics N.V. | Method of providing a film of conjugated, substituted or unsubstituted poly(p-phenylene vinylene) on a substrate by chemical vapour deposition (cvd), as well as a method of manufacturing an electroluminescent (el) device |
US5534314A (en) * | 1994-08-31 | 1996-07-09 | University Of Virginia Patent Foundation | Directed vapor deposition of electron beam evaporant |
US6143433A (en) | 1994-09-14 | 2000-11-07 | Mitsui Chemicals, Inc. | Organic electroluminescent device and process for producing the same |
US5703436A (en) | 1994-12-13 | 1997-12-30 | The Trustees Of Princeton University | Transparent contacts for organic devices |
US6358631B1 (en) | 1994-12-13 | 2002-03-19 | The Trustees Of Princeton University | Mixed vapor deposited films for electroluminescent devices |
US5707745A (en) * | 1994-12-13 | 1998-01-13 | The Trustees Of Princeton University | Multicolor organic light emitting devices |
KR0158780B1 (en) * | 1994-12-22 | 1998-11-16 | 가네꼬 히사시 | Method and apparatus for film formation by chemical vapor deposition |
US5554450A (en) * | 1995-03-08 | 1996-09-10 | Eastman Kodak Company | Organic electroluminescent devices with high thermal stability |
EP0738788B1 (en) * | 1995-04-20 | 2003-08-13 | Ebara Corporation | Thin-Film vapor deposition apparatus |
US5554220A (en) * | 1995-05-19 | 1996-09-10 | The Trustees Of Princeton University | Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities |
DE69612377T2 (en) * | 1995-06-06 | 2001-11-08 | Tyco Electronics Corp | ELECTRODED BENDABLE ITEM |
JP3061255B2 (en) | 1995-08-18 | 2000-07-10 | キヤノン販売株式会社 | Film formation method |
US5734893A (en) * | 1995-09-28 | 1998-03-31 | Ibm Corporation | Progressive content-based retrieval of image and video with adaptive and iterative refinement |
US6066358A (en) * | 1995-11-21 | 2000-05-23 | Applied Materials, Inc. | Blanket-selective chemical vapor deposition using an ultra-thin nucleation layer |
US6663713B1 (en) * | 1996-01-08 | 2003-12-16 | Applied Materials Inc. | Method and apparatus for forming a thin polymer layer on an integrated circuit structure |
US5958510A (en) * | 1996-01-08 | 1999-09-28 | Applied Materials, Inc. | Method and apparatus for forming a thin polymer layer on an integrated circuit structure |
AU2990097A (en) | 1996-01-11 | 1997-08-20 | Trustees Of Princeton University, The | Organic luminescent coating for light detectors |
JPH09256142A (en) * | 1996-03-15 | 1997-09-30 | Sony Corp | Film forming device |
EP0958617A1 (en) | 1996-06-12 | 1999-11-24 | The Trustees Of Princeton University | Patterning of thin films for the fabrication of organic multi-color displays |
AU3715997A (en) | 1996-06-12 | 1998-01-07 | Trustees Of Princeton University, The | Plasma treatment of conductive layers |
US7750175B2 (en) * | 1996-06-25 | 2010-07-06 | Northwestern University | Organic light-emitting diodes and related hole transport compounds |
US20050158579A1 (en) * | 1996-06-25 | 2005-07-21 | Marks Tobin J. | Organic light-emitting diodes and methods for assembly and enhanced charge injection |
US6048630A (en) | 1996-07-02 | 2000-04-11 | The Trustees Of Princeton University | Red-emitting organic light emitting devices (OLED's) |
US5844363A (en) | 1997-01-23 | 1998-12-01 | The Trustees Of Princeton Univ. | Vacuum deposited, non-polymeric flexible organic light emitting devices |
US5834893A (en) | 1996-12-23 | 1998-11-10 | The Trustees Of Princeton University | High efficiency organic light emitting devices with light directing structures |
US6045930A (en) | 1996-12-23 | 2000-04-04 | The Trustees Of Princeton University | Materials for multicolor light emitting diodes |
US5861219A (en) | 1997-04-15 | 1999-01-19 | The Trustees Of Princeton University | Organic light emitting devices containing a metal complex of 5-hydroxy-quinoxaline as a host material |
US5981306A (en) | 1997-09-12 | 1999-11-09 | The Trustees Of Princeton University | Method for depositing indium tin oxide layers in organic light emitting devices |
US6125226A (en) | 1997-04-18 | 2000-09-26 | The Trustees Of Princeton University | Light emitting devices having high brightness |
US5874803A (en) | 1997-09-09 | 1999-02-23 | The Trustees Of Princeton University | Light emitting device with stack of OLEDS and phosphor downconverter |
US6013982A (en) | 1996-12-23 | 2000-01-11 | The Trustees Of Princeton University | Multicolor display devices |
US6091195A (en) | 1997-02-03 | 2000-07-18 | The Trustees Of Princeton University | Displays having mesa pixel configuration |
US5811833A (en) | 1996-12-23 | 1998-09-22 | University Of So. Ca | Electron transporting and light emitting layers based on organic free radicals |
US6046543A (en) | 1996-12-23 | 2000-04-04 | The Trustees Of Princeton University | High reliability, high efficiency, integratable organic light emitting devices and methods of producing same |
US5998803A (en) | 1997-05-29 | 1999-12-07 | The Trustees Of Princeton University | Organic light emitting device containing a hole injection enhancement layer |
US5986401A (en) | 1997-03-20 | 1999-11-16 | The Trustee Of Princeton University | High contrast transparent organic light emitting device display |
US5757139A (en) | 1997-02-03 | 1998-05-26 | The Trustees Of Princeton University | Driving circuit for stacked organic light emitting devices |
US5917280A (en) | 1997-02-03 | 1999-06-29 | The Trustees Of Princeton University | Stacked organic light emitting devices |
US6111902A (en) | 1997-05-09 | 2000-08-29 | The Trustees Of Princeton University | Organic semiconductor laser |
US5932895A (en) | 1997-05-20 | 1999-08-03 | The Trustees Of Princeton University | Saturated full color stacked organic light emitting devices |
US6242115B1 (en) | 1997-09-08 | 2001-06-05 | The University Of Southern California | OLEDs containing thermally stable asymmetric charge carrier materials |
US5869135A (en) * | 1997-10-03 | 1999-02-09 | Massachusetts Institute Of Technology | Selective chemical vapor deposition of polymers |
US6030715A (en) | 1997-10-09 | 2000-02-29 | The University Of Southern California | Azlactone-related dopants in the emissive layer of an OLED |
US6165554A (en) * | 1997-11-12 | 2000-12-26 | Jet Process Corporation | Method for hydrogen atom assisted jet vapor deposition for parylene N and other polymeric thin films |
US6337102B1 (en) * | 1997-11-17 | 2002-01-08 | The Trustees Of Princeton University | Low pressure vapor phase deposition of organic thin films |
-
1997
- 1997-11-17 US US08/972,156 patent/US6337102B1/en not_active Expired - Lifetime
-
1998
- 1998-11-16 JP JP2000521253A patent/JP2001523768A/en not_active Withdrawn
- 1998-11-16 AU AU14124/99A patent/AU1412499A/en not_active Abandoned
- 1998-11-16 WO PCT/US1998/024424 patent/WO1999025894A1/en active IP Right Grant
- 1998-11-16 EP EP19980957997 patent/EP1032722B1/en not_active Expired - Lifetime
- 1998-11-16 KR KR1020007005399A patent/KR100585286B1/en not_active IP Right Cessation
- 1998-11-16 KR KR1020067004695A patent/KR100606325B1/en not_active IP Right Cessation
- 1998-11-16 DE DE1998627293 patent/DE69827293T2/en not_active Expired - Lifetime
- 1998-11-17 TW TW87118943A patent/TW575699B/en not_active IP Right Cessation
-
2000
- 2000-12-13 US US09/736,090 patent/US20010002279A1/en not_active Abandoned
-
2002
- 2002-04-19 US US10/125,400 patent/US6558736B2/en not_active Expired - Lifetime
-
2003
- 2003-05-02 US US10/427,933 patent/US20040007178A1/en not_active Abandoned
-
2007
- 2007-01-19 US US11/655,258 patent/US20070131172A1/en not_active Abandoned
-
2009
- 2009-06-09 JP JP2009138382A patent/JP4890592B2/en not_active Expired - Lifetime
- 2009-08-27 US US12/548,555 patent/US20100104753A1/en not_active Abandoned
-
2010
- 2010-03-08 JP JP2010050397A patent/JP5371837B2/en not_active Expired - Lifetime
-
2013
- 2013-04-05 US US13/857,218 patent/US20150114296A1/en not_active Abandoned
- 2013-05-17 JP JP2013104840A patent/JP2013177692A/en not_active Withdrawn
-
2016
- 2016-02-26 JP JP2016035497A patent/JP2016104913A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI382098B (en) * | 2004-11-09 | 2013-01-11 | Global Oled Technology Llc | Controlling the application of vaporized organic material |
TWI596233B (en) * | 2011-06-22 | 2017-08-21 | 愛思強歐洲公司 | Vapor deposition system and supply head |
Also Published As
Publication number | Publication date |
---|---|
JP4890592B2 (en) | 2012-03-07 |
WO1999025894A1 (en) | 1999-05-27 |
US6558736B2 (en) | 2003-05-06 |
US20150114296A1 (en) | 2015-04-30 |
US20040007178A1 (en) | 2004-01-15 |
KR20060034312A (en) | 2006-04-21 |
JP5371837B2 (en) | 2013-12-18 |
US20020155230A1 (en) | 2002-10-24 |
US6337102B1 (en) | 2002-01-08 |
JP2001523768A (en) | 2001-11-27 |
KR20010024652A (en) | 2001-03-26 |
EP1032722A1 (en) | 2000-09-06 |
EP1032722A4 (en) | 2001-09-12 |
DE69827293T2 (en) | 2006-02-02 |
KR100585286B1 (en) | 2006-05-30 |
US20070131172A1 (en) | 2007-06-14 |
JP2009238756A (en) | 2009-10-15 |
US20010002279A1 (en) | 2001-05-31 |
JP2010159497A (en) | 2010-07-22 |
JP2013177692A (en) | 2013-09-09 |
DE69827293D1 (en) | 2004-12-02 |
KR100606325B1 (en) | 2006-07-31 |
EP1032722B1 (en) | 2004-10-27 |
JP2016104913A (en) | 2016-06-09 |
US20100104753A1 (en) | 2010-04-29 |
AU1412499A (en) | 1999-06-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW575699B (en) | Low pressure vapor phase deposition of organic thin films | |
US7238389B2 (en) | Vaporizing fluidized organic materials | |
Baldo et al. | Organic vapor phase deposition | |
Shtein et al. | Material transport regimes and mechanisms for growth of molecular organic thin films using low-pressure organic vapor phase deposition | |
Baldo et al. | Low pressure organic vapor phase deposition of small molecular weight organic light emitting device structures | |
EP1727922B1 (en) | High thickness uniformity vaporization source | |
JP4906018B2 (en) | Film forming method, light emitting device manufacturing method, and film forming apparatus | |
JP2001523768A5 (en) | ||
US20110017283A1 (en) | Method and apparatus for deposition of a layer of an indium chalcogenide onto a substrate | |
EP2137335B1 (en) | Fine control of vaporized organic material | |
JP5244932B2 (en) | Organic compound purification method, film formation method, or light emitting device manufacturing method | |
Navarro et al. | Metal deposition for optoelectronic devices using a low vacuum vapor phase deposition (VPD) system | |
Schwambera | Optimizing OVPD technology towards lowest OLED manufacturing cost |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |