JP2016195263A - 線路デバイスの製造方法 - Google Patents
線路デバイスの製造方法 Download PDFInfo
- Publication number
- JP2016195263A JP2016195263A JP2016119070A JP2016119070A JP2016195263A JP 2016195263 A JP2016195263 A JP 2016195263A JP 2016119070 A JP2016119070 A JP 2016119070A JP 2016119070 A JP2016119070 A JP 2016119070A JP 2016195263 A JP2016195263 A JP 2016195263A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- layer
- metal column
- pad
- line device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 109
- 229910052751 metal Inorganic materials 0.000 claims abstract description 505
- 239000002184 metal Substances 0.000 claims abstract description 505
- 239000000758 substrate Substances 0.000 claims abstract description 55
- 239000010410 layer Substances 0.000 claims description 749
- 229920000642 polymer Polymers 0.000 claims description 168
- 239000004065 semiconductor Substances 0.000 claims description 155
- 239000000463 material Substances 0.000 claims description 66
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 57
- 229910052802 copper Inorganic materials 0.000 claims description 57
- 239000010949 copper Substances 0.000 claims description 57
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 50
- 229910052737 gold Inorganic materials 0.000 claims description 50
- 239000010931 gold Substances 0.000 claims description 50
- 239000011241 protective layer Substances 0.000 claims description 43
- 239000004642 Polyimide Substances 0.000 claims description 27
- 229920001721 polyimide Polymers 0.000 claims description 27
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 20
- 229910000679 solder Inorganic materials 0.000 claims description 14
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- -1 silicon nitride compound Chemical class 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 85
- 230000008569 process Effects 0.000 abstract description 19
- 230000005764 inhibitory process Effects 0.000 description 57
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 53
- 229920002120 photoresistant polymer Polymers 0.000 description 44
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 42
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 41
- 238000009713 electroplating Methods 0.000 description 36
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 32
- 229910052710 silicon Inorganic materials 0.000 description 32
- 239000010703 silicon Substances 0.000 description 32
- 229910052759 nickel Inorganic materials 0.000 description 26
- 238000005229 chemical vapour deposition Methods 0.000 description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 24
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 23
- 239000010409 thin film Substances 0.000 description 23
- 229910052709 silver Inorganic materials 0.000 description 22
- 239000004332 silver Substances 0.000 description 22
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 21
- 229910052763 palladium Inorganic materials 0.000 description 21
- 229910052702 rhenium Inorganic materials 0.000 description 21
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 21
- 235000012431 wafers Nutrition 0.000 description 21
- 229910052697 platinum Inorganic materials 0.000 description 20
- 229910052703 rhodium Inorganic materials 0.000 description 20
- 239000010948 rhodium Substances 0.000 description 20
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 20
- 229910052707 ruthenium Inorganic materials 0.000 description 20
- 239000003990 capacitor Substances 0.000 description 17
- 238000002161 passivation Methods 0.000 description 17
- 238000005530 etching Methods 0.000 description 15
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 14
- 229910052814 silicon oxide Inorganic materials 0.000 description 14
- 238000013461 design Methods 0.000 description 13
- 238000001459 lithography Methods 0.000 description 13
- 229920002635 polyurethane Polymers 0.000 description 13
- 239000004814 polyurethane Substances 0.000 description 13
- 239000010408 film Substances 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 11
- 238000004528 spin coating Methods 0.000 description 11
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 10
- 239000013013 elastic material Substances 0.000 description 10
- 229910052719 titanium Inorganic materials 0.000 description 10
- 239000010936 titanium Substances 0.000 description 10
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 8
- 239000003822 epoxy resin Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 229920000647 polyepoxide Polymers 0.000 description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 8
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 8
- 229910001080 W alloy Inorganic materials 0.000 description 7
- 230000006378 damage Effects 0.000 description 7
- 239000003989 dielectric material Substances 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- 229910052715 tantalum Inorganic materials 0.000 description 7
- 229920001169 thermoplastic Polymers 0.000 description 7
- 229920001187 thermosetting polymer Polymers 0.000 description 7
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 7
- 238000003466 welding Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 6
- 238000005498 polishing Methods 0.000 description 6
- 238000007650 screen-printing Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 229910052740 iodine Inorganic materials 0.000 description 4
- 239000011630 iodine Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- PQIJHIWFHSVPMH-UHFFFAOYSA-N [Cu].[Ag].[Sn] Chemical compound [Cu].[Ag].[Sn] PQIJHIWFHSVPMH-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- ZTXONRUJVYXVTJ-UHFFFAOYSA-N chromium copper Chemical compound [Cr][Cu][Cr] ZTXONRUJVYXVTJ-UHFFFAOYSA-N 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000004416 thermosoftening plastic Substances 0.000 description 3
- 229910000969 tin-silver-copper Inorganic materials 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229920000412 polyarylene Polymers 0.000 description 2
- 229920002577 polybenzoxazole Polymers 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910021426 porous silicon Inorganic materials 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910001174 tin-lead alloy Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- HIVGXUNKSAJJDN-UHFFFAOYSA-N [Si].[P] Chemical compound [Si].[P] HIVGXUNKSAJJDN-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000005383 fluoride glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000002938 p-xylenes Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76885—By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5223—Capacitor integral with wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/0347—Manufacturing methods using a lift-off mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04073—Bonding areas specifically adapted for connectors of different types
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05173—Rhodium [Rh] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05176—Ruthenium [Ru] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05183—Rhenium [Re] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05541—Structure
- H01L2224/05548—Bonding area integrally formed with a redistribution layer on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05571—Disposition the external layer being disposed in a recess of the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05571—Disposition the external layer being disposed in a recess of the surface
- H01L2224/05572—Disposition the external layer being disposed in a recess of the surface the external layer extending out of an opening
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05639—Silver [Ag] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05644—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05647—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05663—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05664—Palladium [Pd] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05663—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05669—Platinum [Pt] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/1147—Manufacturing methods using a lift-off mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1302—Disposition
- H01L2224/13022—Disposition the bump connector being at least partially embedded in the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45139—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45155—Nickel (Ni) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/45164—Palladium (Pd) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/45169—Platinum (Pt) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/45173—Rhodium (Rh) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/45176—Ruthenium (Ru) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/45183—Rhenium (Re) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48638—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/48639—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48638—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/48644—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48638—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/48647—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48663—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/48664—Palladium (Pd) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48663—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/48669—Platinum (Pt) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48799—Principal constituent of the connecting portion of the wire connector being Copper (Cu)
- H01L2224/488—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48838—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/48839—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48799—Principal constituent of the connecting portion of the wire connector being Copper (Cu)
- H01L2224/488—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48838—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/48844—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48799—Principal constituent of the connecting portion of the wire connector being Copper (Cu)
- H01L2224/488—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48838—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/48847—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48799—Principal constituent of the connecting portion of the wire connector being Copper (Cu)
- H01L2224/488—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48863—Principal constituent of the connecting portion of the wire connector being Copper (Cu) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/48864—Palladium (Pd) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/049—Nitrides composed of metals from groups of the periodic table
- H01L2924/0494—4th Group
- H01L2924/04941—TiN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/049—Nitrides composed of metals from groups of the periodic table
- H01L2924/0495—5th Group
- H01L2924/04953—TaN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/049—Nitrides composed of metals from groups of the periodic table
- H01L2924/0504—14th Group
- H01L2924/05042—Si3N4
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1032—III-V
- H01L2924/10329—Gallium arsenide [GaAs]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15788—Glasses, e.g. amorphous oxides, nitrides or fluorides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19042—Component type being an inductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19043—Component type being a resistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/30105—Capacitance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/30107—Inductance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Wire Bonding (AREA)
- Semiconductor Integrated Circuits (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
R:シリコン基板が熱で湾曲する曲率半径
Ys:シリコン基板のヤング率
vsi:シリコン基板のポアソン比
xSi:シリコン基板の厚さ
xppt:ポストパッシベーション薄膜的厚さ
上記の方程式より、シリコン基板のポアソン比が上昇する以外に、二種類の方法で双せん断応力を降下させることができる。
(a)xSiを低下させる。これはシリコン基板をもっと薄く置くことを意味する。或いは(b)xpptを増大する。これはポストパッシベーション構造の厚さを増加させることを意味する。
第一実施例の線路デバイス構造の製作過程は図2に示す。まず一つの半導体基部30を提供し、この半導体基部30の形式はシリコン基部やガリウム砒素基部(GAAS)あるいはシリコンゲルマニウム基部であって、シリコン・オン・インシュレーター(silicon-on-insulator,SOI)の基部で、半導体基部30はこの実施例の中では円形の一つの半導体ウェハであり、かつこの半導体ウェハ30は一つの主動表面があって、半導体ウェハ30の主動表面は、5価や3価イオン(例えばホウ素イオンやリンイオン等)と通して、数個の電子デバイス32を形成させ、この電子デバイス32は金属酸化物半導体はMOSデバイス(MOS devices)やPチャンネルMOSデバイス(p-channel MOS devices)或いはnチャンネルMOSデバイス(n-channel MOS devices)またはBICMOSデバイス(BICMOS devices)やバイポーラトランジスタ(Bipolar Junction Transistor, BJT)や拡散区(Diffusion area)やレジスター(resistor)やキャパシタ(capacitor)及びCMOS等である。
本実施例は第一実施例の図8cからの延伸である。図15aを参照すると、この実施例の中の金属柱体68頂部は一つの金層102であって、この金層102の厚さ1μmから30μm、この金属柱体68の金属102上に、ワイヤー製作過程で一つのワイヤー104を形成させ、外部回路と接続する。ここで注意することは、金層102以下の金属は銅層104・ニッケル層106(銅・ニッケル・金構造)、この銅層104の厚さ10μmから100μm、このニッケル層106の厚さ1μmから30μm、或いは図15bで示すように、この金層102は銅層104の上層にあり、この金層102の厚さ1μmから30μm、或いは図15cで示すように、金属柱体68全体の材質は金である、この金属柱体68厚さ10μmから100μm。
本実施例は第一実施例の図8cからの延伸である。図16aを参照すると、一つの第三粘着/阻害層105を第二重合物層70上に形成する、その第三粘着/阻害層105の上に形成シード層させる、図16bで示すように、一つの第四図案化ハードンフォトレジスト層110を第三粘着/阻害層105上に形成させ、この第四図案化ハードンフォトレジスト層110内には多数開口112があって、その中少なくとも一つの開口112が金属柱体68の上方に位置し、かつこの開口112は図16cで示すように、コイル状を電気めっきして、一つの第四金属層114を第四図案化ハードンフォトレジスト層110の開口112内に形成する、その第四金属層114の材質は金・銅・銀・パラジウム・プラチナ・ロジウム・ルテニウム・レニウムで、この第四金属層114のの厚さ1μmから30μm、その第四金属層114は複合の金属層使用される、電気めっきで形成されした厚さ1μmから30μmの一つの銅層であり、続いて電気めっきで形成されした厚さ1μmから10μmの一つのニッケル層は銅層の上層にあり、最後電気めっきで形成されした厚さ1μmから10μmの一つの金はニッケル層の上層にある。
本実施例は第一実施例の図8bの延伸であって、図17aで示すように、一つの第四粘着/阻害層122を第二重合物層70上に形成させ、この第四粘着/阻害層122の材質はチタン・チタンタングステン合金・タンタル或いは窒化タンタル等であって、このシード層の材質は金・銅・銀・パラジウム・プラチナ・ロジウム・ルテニウム・レニウムで、図17bで示すように、一つの第五図案化ハードンフォトレジスト層126を第四粘着/阻害層122上に形成させ、この第五四図案化ハードンフォトレジスト層126内に多数開口128があって、その中の二つの開口128が金属柱体68の上方に位置し、図17cで示すように、電気めっきで形成された厚さμmから30μmの一つの第五金属層130を第五図案化ハードンフォトレジスト層126の開口128内の第四粘着/阻害/シード層122上に形成させ、かつこの第五金属層130は低抵抗で、例えば金・銀或いは銅等である。次は図17dで示すように、第五図案化ハードンフォトレジスト層126を除去し、また同じように過酸化水素やヨード含有エッチング液を使用して、第五図案化ハードンフォトレジスト層110下の第四粘着/阻害層122を除去した後、この第五金属層130を二つの金属柱体68に接続し、この第五金属層130は二つの金属柱体68の電流通路であって、またダメージや水気の浸入から保護するために、一つの保護層132を第二重合物層70及び第五金属層130上に形成することができる、この第五金属層130のの厚さ1μmから30μm、その第五金属層130は複合の金属層使用される、電気めっきで形成されした厚さ1μmから30μmの一つの銅層、続いて電気めっきで形成されした厚さ1μmから10μmの一つのニッケル層は銅層の上層にあり、最後は電気めっきで形成されした厚さ1μmから10μmの一つの金層はニッケル層の上層にある。
本実施例は第一実施例の図8bの延伸であって、かつ本実施例は第四実施例と似て、図18で示すように、本実施例の形成方式は第四実施例と同じて、異なる点は第四実施例の中の第五金属層130は低抵抗材質であるので、第五金属層130の電流は速やかに流通することができるが、第五実施例(図18参照)の第七金属層146は高抵抗材質で、例えばクロム/ニッケル合金(Cr/Ni)・チタン・タングステン等であって、かつ第七金属層146の厚さは1μmから3μmであるので、第七金属層146は本実施例において、抵抗デバイスとして用いられる。
上記の第一から第五実施例は図8b及び図8c構造の延伸であるが、本実施例は図8a構造の延伸である。図19a及び図19bで示すように、本実施例はエッチング方式を利用し、一部分の第二重合物層70を高さ1μmから150μmの金属柱体68が露出するまで除去し、この露出高さは金属柱体頂面から第二重合物層70頂面までの距離であって、もし金属柱体68の材質は金・銅・銀・パラジウム・プラチナ・ロジウム・ルテニウム・レニウムである時、金属柱体68のより良い露出高さは15μmから30μmの間である。この金属柱体68は突出塊として使用され、図19cで示すように、同じカットステップを行ない、この半導体基部30を複数半導体ユーニット88にカットし、同じように各半導体ユーニット88上の突出塊86はACFの形成によって、一つの外部回路と接続できる。
本実施例の構造は図8cの構造と似て、異なる点は金属柱体68及び第二重合物層70の製作過程が違うだけで、図20aで示すように、この第一RDL層60を半導体基部30に形成後、一つの第九図案化ハードンフォトレジスト層158をこの第一RDL層60上及び第一粘着/阻害/シード層50上に形成させ、この第九図案化ハードンフォトレジスト層158の多数開口を第一RDL層60に露出させ、かつ第九図案化ハードンフォトレジスト層158の開口深度は20μmから300μmの間である。
Claims (23)
- 線路デバイス構造であって、
基板と、第一金属柱体と、第二金属柱体と、を備え、
第一金属柱体は、基板上に位置し、前記第一金属柱体の最大幅を第一金属柱体の高さで割ると4より小さく、かつ第一金属柱体の高さが20μmから300μmの間であって、
第二金属柱体は、基板上に位置し、前記第二金属柱体の最大幅を第二金属柱体の高さで割ると4より小さく、かつ第一金属柱体の高さが20μmから300μmの間であって、かつ前記第一金属柱体の中心点から前記第二金属柱体の中心点までの距離が10μmから250μmの間であることを特徴とする線路デバイス構造。 - 厚さ20μmから300μmの第一重合物層を前記基板上に形成させ、かつ前記第一金属柱体及び前記第二金属柱体を被覆することを特徴とする請求項1に記載の線路デバイス構造。
- 前記第一金属柱体は厚さ30μmから100μmの金層を備えることを特徴とする請求項1に記載の線路デバイス構造。
- 前記第一金属柱体は厚さ30μmから100μmの銅層を備えることを特徴とする請求項1に記載の線路デバイス構造。
- 金属接続線路で第一金属柱体と第二金属柱体とを接続することを特徴とする請求項1に記載の線路デバイス構造。
- 前記基板は、半導体基板、前記半導体基板上に位置する第一金属構造、金属線路上に位置しかつ窒化シリコン化合物含有の保護層、前記保護層上に位置する第二金属構造、及び前記保護層内に位置する開口が第一金属構造を露出する第一パッドを備え、
前記第二金属構造は第一パッドと接続する第二パッドを備え、かつ前記第一パッドの見下ろし図から見た位置は、前記第二パッドの見下ろし図から見た位置とは違って、前記第一金属柱体は第二パッド上に位置することを特徴とする請求項1に記載の線路デバイス構造。 - 前記第一金属柱体上に位置する突出塊を備え、前記突出塊は事前に形成した外部回路と接続し、突出塊は厚さ10μmから30μmの金層を備えることを特徴とする請求項1に記載の線路デバイス構造。
- 前記第一金属柱体上に位置する突出塊を備え、前記突出塊は事前に形成した外部回路と接続し、突出塊は厚さ10μmから150μmの錫はんだ層を備えることを特徴とする請求項1に記載の線路デバイス構造。
- 前記第一金属柱体上に位置するパッドを備え、前記パッドの最大幅は、前記第一金属柱の最大幅より大きく、前記パッドはワイヤー製作過程で製作したワイヤーとの接続に用いられることを特徴とする請求項1に記載の線路デバイス構造。
- 前記第一金属柱体の頂面はワイヤー製作過程で製作したワイヤーとの接続に用いられることを特徴とする請求項1に記載の線路デバイス構造。
- 前記第一金属柱体及び前記第二金属柱体を接続する金属コイルを備えることを特徴とする請求項1に記載の線路デバイス構造。
- 第二金属構造及び突出塊を備え、前記第二金属構造は前記第一金属柱体と接続するパッドを備え、かつ前記パッドの見下ろし図から見た位置は、前記第一金属柱体の見下ろし図から見た位置とは違って、前記突出塊はパッド上に位置し、事前に形成した外部回路と接続し、前記突出塊は厚さ10μmから30μmの金層を備えることを特徴とする請求項1に記載の線路デバイス構造。
- 第二金属構造及び突出塊を備え、前記第二金属構造は基板上に位置し、前記第二金属構造は前記第一金属柱体と接続するパッドを備え、かつ前記パッドの見下ろし図から見た位置は、前記第一金属柱体の見下ろし図から見た位置とは違って、前記突出塊はパッド上に位置し、事前に形成した外部回路と接続し、前記突出塊は厚さ10μmから30μmの錫はんだ層を備えることを特徴とする請求項1に記載の線路デバイス構造。
- 基板上に位置する第二金属構造を備え、前記第二金属構造は前記第一金属柱体と接続するパッドを備え、かつ前記パッドの見下ろし図から見た位置は、前記第一金属柱体の見下ろし図から見た位置とは違って、前記パッドはワイヤー製作過程で製作したワイヤーとの接続に用いられることを特徴とする請求項1に記載の線路デバイス構造。
- 線路デバイス構造であって、
半導体基板と、第一金属柱体と、第二金属柱体と、絶縁層と、第一突出塊と、第一突出塊と、を備え、
第一金属柱体は、前記半導体基板上に位置し、前記第一金属柱体の最大幅を第一金属柱体の高さで割ると4より小さく、かつ第一金属柱体の高さが20μmから300μmの間であり、
第二金属柱体は、前記半導体基板上に位置し、前記第二金属柱体の最大幅を第二金属柱体の高さで割ると4より小さく、かつ第一金属柱体の高さが20μmから300μmの間であり、
絶縁層は、前記半導体基板上に位置し、かつ第一金属柱体及び第二金属柱体を被覆し、
第一突出塊は、前記第一金属柱体や前記絶縁層に位置し、かつ事前に形成した外部回路との接続に適し、
第二突出塊は、前記第二金属柱体や前記絶縁層に位置し、かつ事前に形成した外部回路との接続に適し、前記第一突出塊の中心点から第二突出塊の中心点までの距離は10μmから250μmの間であることを特徴とする線路デバイス構造。 - 前記第一突出塊の中心点から前記第二突出塊の中心点までの距離が100μmから200μmの間であることを特徴とする請求項15に記載の線路デバイス構造。
- 前記第一金属柱体は厚さ20μmから300μmの間の金層を備えることを特徴とする請求項15に記載の線路デバイス構造。
- 前記第一金属柱体は厚さ20μmから300μmの間の銅層を備えることを特徴とする請求項15に記載の線路デバイス構造。
- 前記第一金属柱体は厚さ10μmから30μmの間の金層を供えることを特徴とする請求項15に記載の線路デバイス構造。
- 前記第一金属柱体は厚さ10μmから150μmの間の錫はんだ層を備えることを特徴とする請求項15に記載の線路デバイス構造。
- 第一絶縁層の材質はポリイミドを含むことを特徴とする請求項15に記載の線路デバイス構造。
- 導体基部上に位置する第一金属構造、前記第一金属構造上に位置する窒化シリコン化合物含有の保護層、前記保護層上に位置する第二金属構造、及び前記保護層内に位置する開口が第一金属構造を露出する第一パッドを備え、前記第二金属構造は第一パッドと接続する第二パッドを備え、かつ前記第一パッドの見下ろし図から見た位置は、前記第二パッドの見下ろし図から見た位置とは違って、前記第一金属柱体は第二パッド上に位置することを特徴とする請求項15に記載の線路デバイス構造。
- 前記第一絶縁層上及び前記第一金属柱体上に位置する第一金属構造を備え、金属構造は第一金属柱体と接続するパッドを備え、かつ前記パッドの見下ろし図から見た位置は、前記第二パッドの見下ろし図から見た位置とは違って、前記第一突出塊は前記パッド上に位置することを特徴とする請求項15に記載の線路デバイス構造。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US69354905P | 2005-06-24 | 2005-06-24 | |
US60/693,549 | 2005-06-24 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014007143A Division JP2014103411A (ja) | 2005-06-24 | 2014-01-17 | 線路デバイスの製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018207349A Division JP2019047129A (ja) | 2005-06-24 | 2018-11-02 | 線路デバイスの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016195263A true JP2016195263A (ja) | 2016-11-17 |
JP6700111B2 JP6700111B2 (ja) | 2020-05-27 |
Family
ID=37189408
Family Applications (9)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006173775A Withdrawn JP2007005809A (ja) | 2005-06-24 | 2006-06-23 | 線路デバイスの製造方法 |
JP2006173778A Active JP5435524B2 (ja) | 2005-06-24 | 2006-06-23 | 線路デバイスの製造方法 |
JP2006173769A Withdrawn JP2007005808A (ja) | 2005-06-24 | 2006-06-23 | 線路デバイスの製造方法 |
JP2013141588A Active JP5908437B2 (ja) | 2005-06-24 | 2013-07-05 | 線路デバイスの製造方法 |
JP2014007143A Withdrawn JP2014103411A (ja) | 2005-06-24 | 2014-01-17 | 線路デバイスの製造方法 |
JP2016119070A Active JP6700111B2 (ja) | 2005-06-24 | 2016-06-15 | 線路デバイスの製造方法 |
JP2018207349A Pending JP2019047129A (ja) | 2005-06-24 | 2018-11-02 | 線路デバイスの製造方法 |
JP2021191889A Pending JP2022019819A (ja) | 2005-06-24 | 2021-11-26 | 線路デバイスの製造方法 |
JP2023021229A Pending JP2023057129A (ja) | 2005-06-24 | 2023-02-15 | 線路デバイスの製造方法 |
Family Applications Before (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006173775A Withdrawn JP2007005809A (ja) | 2005-06-24 | 2006-06-23 | 線路デバイスの製造方法 |
JP2006173778A Active JP5435524B2 (ja) | 2005-06-24 | 2006-06-23 | 線路デバイスの製造方法 |
JP2006173769A Withdrawn JP2007005808A (ja) | 2005-06-24 | 2006-06-23 | 線路デバイスの製造方法 |
JP2013141588A Active JP5908437B2 (ja) | 2005-06-24 | 2013-07-05 | 線路デバイスの製造方法 |
JP2014007143A Withdrawn JP2014103411A (ja) | 2005-06-24 | 2014-01-17 | 線路デバイスの製造方法 |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018207349A Pending JP2019047129A (ja) | 2005-06-24 | 2018-11-02 | 線路デバイスの製造方法 |
JP2021191889A Pending JP2022019819A (ja) | 2005-06-24 | 2021-11-26 | 線路デバイスの製造方法 |
JP2023021229A Pending JP2023057129A (ja) | 2005-06-24 | 2023-02-15 | 線路デバイスの製造方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7468545B2 (ja) |
EP (3) | EP1737038B1 (ja) |
JP (9) | JP2007005809A (ja) |
CN (4) | CN100573846C (ja) |
SG (2) | SG162733A1 (ja) |
TW (3) | TWI398903B (ja) |
Families Citing this family (121)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI245402B (en) | 2002-01-07 | 2005-12-11 | Megic Corp | Rod soldering structure and manufacturing process thereof |
CN100468792C (zh) * | 2004-11-24 | 2009-03-11 | 杨秋忠 | 整合型发光二极管及其制造方法 |
US7468545B2 (en) * | 2005-05-06 | 2008-12-23 | Megica Corporation | Post passivation structure for a semiconductor device and packaging process for same |
US7582556B2 (en) * | 2005-06-24 | 2009-09-01 | Megica Corporation | Circuitry component and method for forming the same |
CN1901163B (zh) * | 2005-07-22 | 2011-04-13 | 米辑电子股份有限公司 | 连续电镀制作线路组件的方法及线路组件结构 |
US8791006B2 (en) | 2005-10-29 | 2014-07-29 | Stats Chippac, Ltd. | Semiconductor device and method of forming an inductor on polymer matrix composite substrate |
US8158510B2 (en) | 2009-11-19 | 2012-04-17 | Stats Chippac, Ltd. | Semiconductor device and method of forming IPD on molded substrate |
US8409970B2 (en) * | 2005-10-29 | 2013-04-02 | Stats Chippac, Ltd. | Semiconductor device and method of making integrated passive devices |
KR100763224B1 (ko) * | 2006-02-08 | 2007-10-04 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
US8420520B2 (en) * | 2006-05-18 | 2013-04-16 | Megica Corporation | Non-cyanide gold electroplating for fine-line gold traces and gold pads |
US7960825B2 (en) * | 2006-09-06 | 2011-06-14 | Megica Corporation | Chip package and method for fabricating the same |
TWI370515B (en) | 2006-09-29 | 2012-08-11 | Megica Corp | Circuit component |
US8749021B2 (en) * | 2006-12-26 | 2014-06-10 | Megit Acquisition Corp. | Voltage regulator integrated with semiconductor chip |
JP5387407B2 (ja) * | 2007-07-25 | 2014-01-15 | 富士通セミコンダクター株式会社 | 半導体装置 |
US8030775B2 (en) | 2007-08-27 | 2011-10-04 | Megica Corporation | Wirebond over post passivation thick metal |
US8946873B2 (en) * | 2007-08-28 | 2015-02-03 | Micron Technology, Inc. | Redistribution structures for microfeature workpieces |
US8587124B2 (en) | 2007-09-21 | 2013-11-19 | Teramikros, Inc. | Semiconductor device having low dielectric insulating film and manufacturing method of the same |
TWI419268B (zh) * | 2007-09-21 | 2013-12-11 | Teramikros Inc | 半導體裝置及其製造方法 |
US20090079072A1 (en) * | 2007-09-21 | 2009-03-26 | Casio Computer Co., Ltd. | Semiconductor device having low dielectric insulating film and manufacturing method of the same |
US7863742B2 (en) * | 2007-11-01 | 2011-01-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Back end integrated WLCSP structure without aluminum pads |
JP4666028B2 (ja) * | 2008-03-31 | 2011-04-06 | カシオ計算機株式会社 | 半導体装置 |
US7932170B1 (en) | 2008-06-23 | 2011-04-26 | Amkor Technology, Inc. | Flip chip bump structure and fabrication method |
US8058163B2 (en) * | 2008-08-07 | 2011-11-15 | Flipchip International, Llc | Enhanced reliability for semiconductor devices using dielectric encasement |
US7709956B2 (en) * | 2008-09-15 | 2010-05-04 | National Semiconductor Corporation | Copper-topped interconnect structure that has thin and thick copper traces and method of forming the copper-topped interconnect structure |
KR101003678B1 (ko) * | 2008-12-03 | 2010-12-23 | 삼성전기주식회사 | 웨이퍼 레벨 패키지와 그 제조방법 및 칩 재활용방법 |
US7982311B2 (en) * | 2008-12-19 | 2011-07-19 | Intel Corporation | Solder limiting layer for integrated circuit die copper bumps |
JP2010278040A (ja) * | 2009-05-26 | 2010-12-09 | Renesas Electronics Corp | 半導体装置の製造方法および半導体装置 |
WO2010145712A1 (en) * | 2009-06-19 | 2010-12-23 | Imec | Crack reduction at metal/organic dielectric interface |
US8313659B2 (en) * | 2009-07-10 | 2012-11-20 | Seagate Technology Llc | Fabrication of multi-dimensional microstructures |
US8227916B2 (en) * | 2009-07-22 | 2012-07-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package structure and method for reducing dielectric layer delamination |
US7977783B1 (en) * | 2009-08-27 | 2011-07-12 | Amkor Technology, Inc. | Wafer level chip size package having redistribution layers |
TW201113993A (en) * | 2009-10-01 | 2011-04-16 | Anpec Electronics Corp | Pre-packaged structure |
EP2312641A1 (en) * | 2009-10-13 | 2011-04-20 | Ecole Polytechnique Fédérale de Lausanne (EPFL) | Device comprising electrical contacts and its production process |
US8502394B2 (en) * | 2009-12-31 | 2013-08-06 | Stmicroelectronics Pte Ltd. | Multi-stacked semiconductor dice scale package structure and method of manufacturing same |
US20110156240A1 (en) * | 2009-12-31 | 2011-06-30 | Stmicroelectronics Asia Pacific Pte. Ltd. | Reliable large die fan-out wafer level package and method of manufacture |
US8884422B2 (en) | 2009-12-31 | 2014-11-11 | Stmicroelectronics Pte Ltd. | Flip-chip fan-out wafer level package for package-on-package applications, and method of manufacture |
US8466997B2 (en) | 2009-12-31 | 2013-06-18 | Stmicroelectronics Pte Ltd. | Fan-out wafer level package for an optical sensor and method of manufacture thereof |
US8659170B2 (en) | 2010-01-20 | 2014-02-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device having conductive pads and a method of manufacturing the same |
US8610270B2 (en) | 2010-02-09 | 2013-12-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and semiconductor assembly with lead-free solder |
US9177926B2 (en) | 2011-12-30 | 2015-11-03 | Deca Technologies Inc | Semiconductor device and method comprising thickened redistribution layers |
US9576919B2 (en) | 2011-12-30 | 2017-02-21 | Deca Technologies Inc. | Semiconductor device and method comprising redistribution layers |
US8922021B2 (en) | 2011-12-30 | 2014-12-30 | Deca Technologies Inc. | Die up fully molded fan-out wafer level packaging |
US8237272B2 (en) * | 2010-02-16 | 2012-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Conductive pillar structure for semiconductor substrate and method of manufacture |
US10373870B2 (en) | 2010-02-16 | 2019-08-06 | Deca Technologies Inc. | Semiconductor device and method of packaging |
US8587119B2 (en) | 2010-04-16 | 2013-11-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Conductive feature for semiconductor substrate and method of manufacture |
CN203536403U (zh) * | 2010-08-18 | 2014-04-09 | 株式会社村田制作所 | Esd保护器件 |
FR2965659B1 (fr) * | 2010-10-05 | 2013-11-29 | Centre Nat Rech Scient | Procédé de fabrication d'un circuit intégré |
US8987897B2 (en) * | 2010-11-24 | 2015-03-24 | Mediatek Inc. | Semiconductor package |
US8513814B2 (en) | 2011-05-02 | 2013-08-20 | International Business Machines Corporation | Buffer pad in solder bump connections and methods of manufacture |
CN102412143A (zh) * | 2011-05-23 | 2012-04-11 | 上海华力微电子有限公司 | 一种聚酰亚胺基底上覆阻挡层的铝垫制造工艺 |
US8963334B2 (en) * | 2011-08-30 | 2015-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Die-to-die gap control for semiconductor structure and method |
US9142502B2 (en) | 2011-08-31 | 2015-09-22 | Zhiwei Gong | Semiconductor device packaging having pre-encapsulation through via formation using drop-in signal conduits |
US8916421B2 (en) | 2011-08-31 | 2014-12-23 | Freescale Semiconductor, Inc. | Semiconductor device packaging having pre-encapsulation through via formation using lead frames with attached signal conduits |
US9013037B2 (en) * | 2011-09-14 | 2015-04-21 | Stmicroelectronics Pte Ltd. | Semiconductor package with improved pillar bump process and structure |
US8779601B2 (en) | 2011-11-02 | 2014-07-15 | Stmicroelectronics Pte Ltd | Embedded wafer level package for 3D and package-on-package applications, and method of manufacture |
US8916481B2 (en) | 2011-11-02 | 2014-12-23 | Stmicroelectronics Pte Ltd. | Embedded wafer level package for 3D and package-on-package applications, and method of manufacture |
US8597983B2 (en) * | 2011-11-18 | 2013-12-03 | Freescale Semiconductor, Inc. | Semiconductor device packaging having substrate with pre-encapsulation through via formation |
US20130146345A1 (en) * | 2011-12-12 | 2013-06-13 | Kazuki KAJIHARA | Printed wiring board and method for manufacturing the same |
US10672624B2 (en) | 2011-12-30 | 2020-06-02 | Deca Technologies Inc. | Method of making fully molded peripheral package on package device |
US9613830B2 (en) | 2011-12-30 | 2017-04-04 | Deca Technologies Inc. | Fully molded peripheral package on package device |
WO2013102146A1 (en) | 2011-12-30 | 2013-07-04 | Deca Technologies, Inc. | Die up fully molded fan-out wafer level packaging |
US9831170B2 (en) | 2011-12-30 | 2017-11-28 | Deca Technologies, Inc. | Fully molded miniaturized semiconductor module |
US10050004B2 (en) | 2015-11-20 | 2018-08-14 | Deca Technologies Inc. | Fully molded peripheral package on package device |
US8912087B2 (en) * | 2012-08-01 | 2014-12-16 | Infineon Technologies Ag | Method of fabricating a chip package |
US8952530B2 (en) * | 2012-09-14 | 2015-02-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Post passivation interconnect structures and methods for forming the same |
US9343442B2 (en) | 2012-09-20 | 2016-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Passive devices in package-on-package structures and methods for forming the same |
JP2014086651A (ja) * | 2012-10-26 | 2014-05-12 | Ibiden Co Ltd | プリント配線板及びプリント配線板の製造方法 |
JP5796692B2 (ja) * | 2013-02-28 | 2015-10-21 | 株式会社村田製作所 | Esd保護デバイス |
CN105051887B (zh) * | 2013-02-28 | 2018-04-17 | 株式会社村田制作所 | 半导体装置 |
CN205508776U (zh) | 2013-02-28 | 2016-08-24 | 株式会社村田制作所 | 半导体装置 |
US9368460B2 (en) * | 2013-03-15 | 2016-06-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fan-out interconnect structure and method for forming same |
JP5826782B2 (ja) * | 2013-03-19 | 2015-12-02 | 株式会社東芝 | 半導体装置の製造方法 |
CN205104477U (zh) | 2013-04-05 | 2016-03-23 | 株式会社村田制作所 | Esd保护器件 |
US9583424B2 (en) | 2013-05-23 | 2017-02-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit structure and method for reducing polymer layer delamination |
KR101488606B1 (ko) * | 2013-07-17 | 2015-02-03 | 앰코 테크놀로지 코리아 주식회사 | 반도체 디바이스 및 그 제조 방법 |
US9263405B2 (en) * | 2013-12-05 | 2016-02-16 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device |
CN103762182B (zh) * | 2013-12-11 | 2017-08-01 | 上海交通大学 | 基于水玻璃‑陶瓷复合介质的tsv封装再分布层制备方法 |
US20150187728A1 (en) * | 2013-12-27 | 2015-07-02 | Kesvakumar V.C. Muniandy | Emiconductor device with die top power connections |
US9642261B2 (en) * | 2014-01-24 | 2017-05-02 | Zhuhai Advanced Chip Carriers & Electronic Substrate Solutions Technologies Co. Ltd. | Composite electronic structure with partially exposed and protruding copper termination posts |
JP2015142009A (ja) * | 2014-01-29 | 2015-08-03 | サンケン電気株式会社 | 半導体装置 |
KR20150091932A (ko) * | 2014-02-04 | 2015-08-12 | 앰코 테크놀로지 코리아 주식회사 | 반도체 디바이스의 제조 방법 및 이에 따른 반도체 디바이스 |
US20150276945A1 (en) | 2014-03-25 | 2015-10-01 | Oy Ajat Ltd. | Semiconductor bump-bonded x-ray imaging device |
CN104124205B (zh) * | 2014-07-18 | 2018-03-16 | 华进半导体封装先导技术研发中心有限公司 | 一种rdl布线层的制备方法 |
US9606142B2 (en) * | 2014-09-24 | 2017-03-28 | International Business Machines Corporation | Test probe substrate |
TWI569365B (zh) * | 2014-09-30 | 2017-02-01 | 欣興電子股份有限公司 | 封裝基板與其製造方法 |
US9515111B2 (en) * | 2014-10-20 | 2016-12-06 | Semiconductor Components Industries, Llc | Circuitry for biasing light shielding structures and deep trench isolation structures |
US9583462B2 (en) * | 2015-01-22 | 2017-02-28 | Qualcomm Incorporated | Damascene re-distribution layer (RDL) in fan out split die application |
CN104851860B (zh) | 2015-04-30 | 2018-03-13 | 华为技术有限公司 | 一种集成电路管芯及制造方法 |
US9847287B2 (en) | 2015-06-17 | 2017-12-19 | Semiconductor Components Industries, Llc | Passive tunable integrated circuit (PTIC) and related methods |
CN105261611B (zh) * | 2015-10-15 | 2018-06-26 | 矽力杰半导体技术(杭州)有限公司 | 芯片的叠层封装结构及叠层封装方法 |
JP6862087B2 (ja) * | 2015-12-11 | 2021-04-21 | 株式会社アムコー・テクノロジー・ジャパン | 配線基板、配線基板を有する半導体パッケージ、およびその製造方法 |
US20170373032A1 (en) * | 2016-06-24 | 2017-12-28 | Qualcomm Incorporated | Redistribution layer (rdl) fan-out wafer level packaging (fowlp) structure |
CN108122820B (zh) * | 2016-11-29 | 2020-06-02 | 中芯国际集成电路制造(上海)有限公司 | 互连结构及其制造方法 |
CN108807295A (zh) * | 2017-04-28 | 2018-11-13 | 中芯长电半导体(江阴)有限公司 | 一种封装结构及封装方法 |
CN107424978A (zh) * | 2017-05-16 | 2017-12-01 | 杭州立昂东芯微电子有限公司 | 一种化合物半导体层间介电导线及其制备方法 |
US20190035715A1 (en) * | 2017-07-31 | 2019-01-31 | Innolux Corporation | Package device and manufacturing method thereof |
US10420211B2 (en) * | 2017-08-09 | 2019-09-17 | Advanced Semiconductor Engineering, Inc. | Semiconductor package device |
US10818584B2 (en) * | 2017-11-13 | 2020-10-27 | Dyi-chung Hu | Package substrate and package structure |
US10522501B2 (en) * | 2017-11-17 | 2019-12-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and method of forming the same |
KR102511543B1 (ko) * | 2018-03-09 | 2023-03-17 | 삼성디스플레이 주식회사 | 표시 장치 |
CN108807290B (zh) * | 2018-06-15 | 2019-11-01 | 南通鸿图健康科技有限公司 | 一种半导体功率器件封装模块及其制造方法 |
US10665523B2 (en) * | 2018-07-17 | 2020-05-26 | Advance Semiconductor Engineering, Inc. | Semiconductor substrate, semiconductor package, and method for forming the same |
CN108663865A (zh) * | 2018-07-24 | 2018-10-16 | 武汉华星光电技术有限公司 | Tft阵列基板及其制造方法与柔性液晶显示面板 |
JP7147517B2 (ja) * | 2018-11-30 | 2022-10-05 | 富士通オプティカルコンポーネンツ株式会社 | 光部品、及びこれを用いた光モジュール |
CN109994438B (zh) * | 2019-03-29 | 2021-04-02 | 上海中航光电子有限公司 | 芯片封装结构及其封装方法 |
US11721657B2 (en) | 2019-06-14 | 2023-08-08 | Stmicroelectronics Pte Ltd | Wafer level chip scale package having varying thicknesses |
US11056453B2 (en) | 2019-06-18 | 2021-07-06 | Deca Technologies Usa, Inc. | Stackable fully molded semiconductor structure with vertical interconnects |
CN112234030B (zh) * | 2019-07-15 | 2023-07-21 | 珠海格力电器股份有限公司 | 一种三相逆变功率芯片及其制备方法 |
CN110544679B (zh) * | 2019-08-30 | 2021-05-18 | 颀中科技(苏州)有限公司 | 芯片重布线结构及其制备方法 |
CN110373693A (zh) * | 2019-08-30 | 2019-10-25 | 上海戴丰科技有限公司 | 一种晶圆级封装滤波器电极的制备方法 |
US11088141B2 (en) * | 2019-10-03 | 2021-08-10 | Nanya Technology Corporation | Semiconductor device and method for fabricating the same |
KR20210073809A (ko) | 2019-12-11 | 2021-06-21 | 삼성전자주식회사 | 반도체 패키지 및 그 제조방법 |
US20210257290A1 (en) * | 2020-02-19 | 2021-08-19 | Nanya Technology Corporation | Semiconductor device with connecting structure and method for fabricating the same |
CN111370375A (zh) * | 2020-03-23 | 2020-07-03 | 苏州晶方半导体科技股份有限公司 | 封装结构、半导体器件和封装方法 |
JP7424157B2 (ja) * | 2020-03-25 | 2024-01-30 | Tdk株式会社 | 電子部品及びその製造方法 |
TWI734545B (zh) * | 2020-07-03 | 2021-07-21 | 財團法人工業技術研究院 | 半導體封裝結構 |
KR20220030051A (ko) | 2020-09-02 | 2022-03-10 | 삼성전자주식회사 | 배선 구조체 및 이를 포함하는 반도체 패키지 |
TWI780500B (zh) * | 2020-10-12 | 2022-10-11 | 龍華科技大學 | 感應加熱應用於重佈線路的方法 |
US11670594B2 (en) | 2021-01-14 | 2023-06-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Redistribution layer features |
TWI785566B (zh) * | 2021-04-19 | 2022-12-01 | 欣興電子股份有限公司 | 封裝結構及其製作方法 |
US11710690B2 (en) | 2021-04-19 | 2023-07-25 | Unimicron Technology Corp. | Package structure and manufacturing method thereof |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02220440A (ja) * | 1989-02-22 | 1990-09-03 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH0496254A (ja) * | 1990-08-03 | 1992-03-27 | Fujitsu Ltd | 薄膜多層回路基板とその製造方法 |
JP2000183089A (ja) * | 1998-12-10 | 2000-06-30 | Sanyo Electric Co Ltd | チップサイズパッケージ及びその製造方法 |
JP2000183090A (ja) * | 1998-12-10 | 2000-06-30 | Sanyo Electric Co Ltd | チップサイズパッケージ及びその製造方法 |
JP2003017622A (ja) * | 2001-04-27 | 2003-01-17 | Ibiden Co Ltd | 半導体チップの製造方法及び半導体チップ |
JP2004071998A (ja) * | 2002-08-09 | 2004-03-04 | Casio Comput Co Ltd | 半導体装置およびその製造方法 |
WO2004049436A1 (en) * | 2002-11-26 | 2004-06-10 | Freescale Semiconductor, Inc. | Semiconductor device having a bond pad and method for its fabrication |
JP2004273591A (ja) * | 2003-03-06 | 2004-09-30 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JP2004296904A (ja) * | 2003-03-27 | 2004-10-21 | Toshiba Corp | 半導体装置、半導体装置の製造方法 |
JP2004363250A (ja) * | 2003-06-03 | 2004-12-24 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
Family Cites Families (122)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5421290A (en) * | 1977-07-19 | 1979-02-17 | Mitsubishi Electric Corp | Integrated circuit device and its manufacture |
US5226232A (en) * | 1990-05-18 | 1993-07-13 | Hewlett-Packard Company | Method for forming a conductive pattern on an integrated circuit |
TW256013B (en) * | 1994-03-18 | 1995-09-01 | Hitachi Seisakusyo Kk | Installation board |
JP3361881B2 (ja) * | 1994-04-28 | 2003-01-07 | 株式会社東芝 | 半導体装置とその製造方法 |
US5615824A (en) * | 1994-06-07 | 1997-04-01 | Tessera, Inc. | Soldering with resilient contacts |
US6828668B2 (en) * | 1994-07-07 | 2004-12-07 | Tessera, Inc. | Flexible lead structures and methods of making same |
IL110261A0 (en) * | 1994-07-10 | 1994-10-21 | Schellcase Ltd | Packaged integrated circuit |
US5542174A (en) * | 1994-09-15 | 1996-08-06 | Intel Corporation | Method and apparatus for forming solder balls and solder columns |
JPH08191104A (ja) * | 1995-01-11 | 1996-07-23 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
JP3400164B2 (ja) * | 1995-01-23 | 2003-04-28 | 三井金属鉱業株式会社 | 多層プリント配線板およびその製造方法 |
US5801446A (en) * | 1995-03-28 | 1998-09-01 | Tessera, Inc. | Microelectronic connections with solid core joining units |
US5745984A (en) * | 1995-07-10 | 1998-05-05 | Martin Marietta Corporation | Method for making an electronic module |
JPH0945691A (ja) | 1995-07-27 | 1997-02-14 | Oki Electric Ind Co Ltd | チップ部品用ハンダバンプ及びその製造方法 |
US6020220A (en) * | 1996-07-09 | 2000-02-01 | Tessera, Inc. | Compliant semiconductor chip assemblies and methods of making same |
US5883435A (en) * | 1996-07-25 | 1999-03-16 | International Business Machines Corporation | Personalization structure for semiconductor devices |
US5960316A (en) * | 1997-03-31 | 1999-09-28 | Intel Corporation | Method to fabricate unlanded vias with a low dielectric constant material as an intraline dielectric |
US6162661A (en) * | 1997-05-30 | 2000-12-19 | Tessera, Inc. | Spacer plate solder ball placement fixture and methods therefor |
US6144100A (en) * | 1997-06-05 | 2000-11-07 | Texas Instruments Incorporated | Integrated circuit with bonding layer over active circuitry |
US6013571A (en) * | 1997-06-16 | 2000-01-11 | Motorola, Inc. | Microelectronic assembly including columnar interconnections and method for forming same |
US6335222B1 (en) * | 1997-09-18 | 2002-01-01 | Tessera, Inc. | Microelectronic packages with solder interconnections |
US6064114A (en) * | 1997-12-01 | 2000-05-16 | Motorola, Inc. | Semiconductor device having a sub-chip-scale package structure and method for forming same |
US6253992B1 (en) * | 1998-03-18 | 2001-07-03 | Tessera, Inc. | Solder ball placement fixtures and methods |
US6324754B1 (en) * | 1998-03-25 | 2001-12-04 | Tessera, Inc. | Method for fabricating microelectronic assemblies |
US6329605B1 (en) * | 1998-03-26 | 2001-12-11 | Tessera, Inc. | Components with conductive solder mask layers |
US6642136B1 (en) | 2001-09-17 | 2003-11-04 | Megic Corporation | Method of making a low fabrication cost, high performance, high reliability chip scale package |
US6077726A (en) * | 1998-07-30 | 2000-06-20 | Motorola, Inc. | Method and apparatus for stress relief in solder bump formation on a semiconductor device |
US6284656B1 (en) * | 1998-08-04 | 2001-09-04 | Micron Technology, Inc. | Copper metallurgy in integrated circuits |
US6103552A (en) | 1998-08-10 | 2000-08-15 | Lin; Mou-Shiung | Wafer scale packaging scheme |
JP3420076B2 (ja) * | 1998-08-31 | 2003-06-23 | 新光電気工業株式会社 | フリップチップ実装基板の製造方法及びフリップチップ実装基板及びフリップチップ実装構造 |
US6187680B1 (en) * | 1998-10-07 | 2001-02-13 | International Business Machines Corporation | Method/structure for creating aluminum wirebound pad on copper BEOL |
JP4462664B2 (ja) * | 1998-11-27 | 2010-05-12 | 三洋電機株式会社 | チップサイズパッケージ型の半導体装置 |
JP3416545B2 (ja) * | 1998-12-10 | 2003-06-16 | 三洋電機株式会社 | チップサイズパッケージ及びその製造方法 |
US6383916B1 (en) * | 1998-12-21 | 2002-05-07 | M. S. Lin | Top layers of metal for high performance IC's |
US6495442B1 (en) * | 2000-10-18 | 2002-12-17 | Magic Corporation | Post passivation interconnection schemes on top of the IC chips |
US7381642B2 (en) * | 2004-09-23 | 2008-06-03 | Megica Corporation | Top layers of metal for integrated circuits |
US6479900B1 (en) * | 1998-12-22 | 2002-11-12 | Sanyo Electric Co., Ltd. | Semiconductor device and method of manufacturing the same |
TW444288B (en) * | 1999-01-27 | 2001-07-01 | Shinko Electric Ind Co | Semiconductor wafer and semiconductor device provided with columnar electrodes and methods of producing the wafer and device |
JP2000228423A (ja) * | 1999-02-05 | 2000-08-15 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
JP3465617B2 (ja) * | 1999-02-15 | 2003-11-10 | カシオ計算機株式会社 | 半導体装置 |
US6707159B1 (en) * | 1999-02-18 | 2004-03-16 | Rohm Co., Ltd. | Semiconductor chip and production process therefor |
US6326701B1 (en) * | 1999-02-24 | 2001-12-04 | Sanyo Electric Co., Ltd. | Chip size package and manufacturing method thereof |
JP3677409B2 (ja) * | 1999-03-05 | 2005-08-03 | 京セラ株式会社 | 弾性表面波装置及びその製造方法 |
US6492251B1 (en) * | 1999-03-10 | 2002-12-10 | Tessera, Inc. | Microelectronic joining processes with bonding material application |
US6495916B1 (en) * | 1999-04-06 | 2002-12-17 | Oki Electric Industry Co., Ltd. | Resin-encapsulated semiconductor device |
EP1050905B1 (en) * | 1999-05-07 | 2017-06-21 | Shinko Electric Industries Co. Ltd. | Method of producing a semiconductor device with insulating layer |
US6828510B1 (en) * | 1999-06-02 | 2004-12-07 | Ibiden Co., Ltd. | Multilayer printed wiring board and method of manufacturing multilayer printed wiring board |
US6387734B1 (en) * | 1999-06-11 | 2002-05-14 | Fujikura Ltd. | Semiconductor package, semiconductor device, electronic device and production method for semiconductor package |
EP2265101B1 (en) * | 1999-09-02 | 2012-08-29 | Ibiden Co., Ltd. | Printed circuit board and method of manufacturing printed circuit board |
JP2001110828A (ja) * | 1999-10-13 | 2001-04-20 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JP3455762B2 (ja) * | 1999-11-11 | 2003-10-14 | カシオ計算機株式会社 | 半導体装置およびその製造方法 |
US6154366A (en) * | 1999-11-23 | 2000-11-28 | Intel Corporation | Structures and processes for fabricating moisture resistant chip-on-flex packages |
JP3287346B2 (ja) * | 1999-11-29 | 2002-06-04 | カシオ計算機株式会社 | 半導体装置 |
JP2001168126A (ja) * | 1999-12-06 | 2001-06-22 | Sanyo Electric Co Ltd | 半導体装置とその製造方法 |
US6303486B1 (en) * | 2000-01-28 | 2001-10-16 | Advanced Micro Devices, Inc. | Method of fabricating copper-based semiconductor devices using a sacrificial dielectric layer and an unconstrained copper anneal |
US6909054B2 (en) * | 2000-02-25 | 2005-06-21 | Ibiden Co., Ltd. | Multilayer printed wiring board and method for producing multilayer printed wiring board |
JP2001244372A (ja) * | 2000-03-01 | 2001-09-07 | Seiko Epson Corp | 半導体装置およびその製造方法 |
US6380060B1 (en) * | 2000-03-08 | 2002-04-30 | Tessera, Inc. | Off-center solder ball attach and methods therefor |
US6387793B1 (en) * | 2000-03-09 | 2002-05-14 | Hrl Laboratories, Llc | Method for manufacturing precision electroplated solder bumps |
JP3772066B2 (ja) * | 2000-03-09 | 2006-05-10 | 沖電気工業株式会社 | 半導体装置 |
JP3548082B2 (ja) * | 2000-03-30 | 2004-07-28 | 三洋電機株式会社 | 半導体装置及びその製造方法 |
JP3968554B2 (ja) * | 2000-05-01 | 2007-08-29 | セイコーエプソン株式会社 | バンプの形成方法及び半導体装置の製造方法 |
JP4480108B2 (ja) * | 2000-06-02 | 2010-06-16 | 大日本印刷株式会社 | 半導体装置の作製方法 |
US6580170B2 (en) * | 2000-06-22 | 2003-06-17 | Texas Instruments Incorporated | Semiconductor device protective overcoat with enhanced adhesion to polymeric materials |
US6683380B2 (en) * | 2000-07-07 | 2004-01-27 | Texas Instruments Incorporated | Integrated circuit with bonding layer over active circuitry |
JP3440070B2 (ja) * | 2000-07-13 | 2003-08-25 | 沖電気工業株式会社 | ウェハー及びウェハーの製造方法 |
US6678952B2 (en) * | 2000-08-03 | 2004-01-20 | Tessera, Inc. | Method of making a microelectronic package including a component having conductive elements on a top side and a bottom side thereof |
SG99939A1 (en) * | 2000-08-11 | 2003-11-27 | Casio Computer Co Ltd | Semiconductor device |
JP4394266B2 (ja) * | 2000-09-18 | 2010-01-06 | カシオ計算機株式会社 | 半導体装置および半導体装置の製造方法 |
JP2002198374A (ja) * | 2000-10-16 | 2002-07-12 | Sharp Corp | 半導体装置およびその製造方法 |
EP1207555A1 (en) * | 2000-11-16 | 2002-05-22 | Texas Instruments Incorporated | Flip-chip on film assembly for ball grid array packages |
JP2002158312A (ja) * | 2000-11-17 | 2002-05-31 | Oki Electric Ind Co Ltd | 3次元実装用半導体パッケージ、その製造方法、および半導体装置 |
US20020070443A1 (en) * | 2000-12-08 | 2002-06-13 | Xiao-Chun Mu | Microelectronic package having an integrated heat sink and build-up layers |
SG99877A1 (en) * | 2001-01-04 | 2003-11-27 | Inst Materials Research & Eng | Forming an electrical contact on an electronic component |
US6291268B1 (en) * | 2001-01-08 | 2001-09-18 | Thin Film Module, Inc. | Low cost method of testing a cavity-up BGA substrate |
US6426281B1 (en) * | 2001-01-16 | 2002-07-30 | Taiwan Semiconductor Manufacturing Company | Method to form bump in bumping technology |
US6818545B2 (en) | 2001-03-05 | 2004-11-16 | Megic Corporation | Low fabrication cost, fine pitch and high reliability solder bump |
JP3939504B2 (ja) * | 2001-04-17 | 2007-07-04 | カシオ計算機株式会社 | 半導体装置並びにその製造方法および実装構造 |
JP2002343861A (ja) * | 2001-05-21 | 2002-11-29 | Mitsubishi Electric Corp | 半導体集積回路およびその製造方法 |
JP4092890B2 (ja) * | 2001-05-31 | 2008-05-28 | 株式会社日立製作所 | マルチチップモジュール |
US6547124B2 (en) * | 2001-06-14 | 2003-04-15 | Bae Systems Information And Electronic Systems Integration Inc. | Method for forming a micro column grid array (CGA) |
US20030006062A1 (en) * | 2001-07-06 | 2003-01-09 | Stone William M. | Interconnect system and method of fabrication |
JP2003078006A (ja) * | 2001-09-04 | 2003-03-14 | Ibiden Co Ltd | 半導体チップおよびその製造方法 |
US6853076B2 (en) * | 2001-09-21 | 2005-02-08 | Intel Corporation | Copper-containing C4 ball-limiting metallurgy stack for enhanced reliability of packaged structures and method of making same |
US6762122B2 (en) * | 2001-09-27 | 2004-07-13 | Unitivie International Limited | Methods of forming metallurgy structures for wire and solder bonding |
US6864565B1 (en) * | 2001-12-06 | 2005-03-08 | Altera Corporation | Post-passivation thick metal pre-routing for flip chip packaging |
US6798073B2 (en) * | 2001-12-13 | 2004-09-28 | Megic Corporation | Chip structure and process for forming the same |
US6673698B1 (en) * | 2002-01-19 | 2004-01-06 | Megic Corporation | Thin film semiconductor package utilizing a glass substrate with composite polymer/metal interconnect layers |
TW503496B (en) * | 2001-12-31 | 2002-09-21 | Megic Corp | Chip packaging structure and manufacturing process of the same |
TWI245402B (en) * | 2002-01-07 | 2005-12-11 | Megic Corp | Rod soldering structure and manufacturing process thereof |
JP3775499B2 (ja) * | 2002-01-08 | 2006-05-17 | 株式会社リコー | 半導体装置及びその製造方法、並びにdc−dcコンバータ |
US6709897B2 (en) * | 2002-01-15 | 2004-03-23 | Unimicron Technology Corp. | Method of forming IC package having upward-facing chip cavity |
US6864118B2 (en) * | 2002-01-28 | 2005-03-08 | Hewlett-Packard Development Company, L.P. | Electronic devices containing organic semiconductor materials |
TW577160B (en) * | 2002-02-04 | 2004-02-21 | Casio Computer Co Ltd | Semiconductor device and manufacturing method thereof |
JP2003243394A (ja) * | 2002-02-19 | 2003-08-29 | Fuji Electric Co Ltd | 半導体装置の製造方法 |
US6740577B2 (en) * | 2002-05-21 | 2004-05-25 | St Assembly Test Services Pte Ltd | Method of forming a small pitch torch bump for mounting high-performance flip-flop devices |
US20030218246A1 (en) * | 2002-05-22 | 2003-11-27 | Hirofumi Abe | Semiconductor device passing large electric current |
US6770971B2 (en) * | 2002-06-14 | 2004-08-03 | Casio Computer Co., Ltd. | Semiconductor device and method of fabricating the same |
US20040007779A1 (en) * | 2002-07-15 | 2004-01-15 | Diane Arbuthnot | Wafer-level method for fine-pitch, high aspect ratio chip interconnect |
JP3580803B2 (ja) * | 2002-08-09 | 2004-10-27 | 沖電気工業株式会社 | 半導体装置 |
JP4100227B2 (ja) * | 2002-09-06 | 2008-06-11 | 日立電線株式会社 | 半導体装置及び配線板 |
JP2004140037A (ja) * | 2002-10-15 | 2004-05-13 | Oki Electric Ind Co Ltd | 半導体装置、及びその製造方法 |
US7285867B2 (en) * | 2002-11-08 | 2007-10-23 | Casio Computer Co., Ltd. | Wiring structure on semiconductor substrate and method of fabricating the same |
JP4170735B2 (ja) * | 2002-11-13 | 2008-10-22 | 信越化学工業株式会社 | ゼオライトゾルとその製造方法、多孔質膜形成用組成物、多孔質膜とその製造方法、層間絶縁膜及び半導体装置 |
US20050176233A1 (en) * | 2002-11-15 | 2005-08-11 | Rajeev Joshi | Wafer-level chip scale package and method for fabricating and using the same |
JP3808030B2 (ja) * | 2002-11-28 | 2006-08-09 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
US6924551B2 (en) * | 2003-05-28 | 2005-08-02 | Intel Corporation | Through silicon via, folded flex microelectronic package |
JP3983205B2 (ja) * | 2003-07-08 | 2007-09-26 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
US7158425B2 (en) * | 2003-07-28 | 2007-01-02 | Mosaic Systems, Inc. | System and method for providing a redundant memory array in a semiconductor memory integrated circuit |
JP4623949B2 (ja) * | 2003-09-08 | 2011-02-02 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
WO2005024912A2 (en) * | 2003-09-09 | 2005-03-17 | Intel Corporation | Methods of processing thick ild layers using spray coating or lamination for c4 wafer level thick metal integrated flow |
JP4012496B2 (ja) * | 2003-09-19 | 2007-11-21 | カシオ計算機株式会社 | 半導体装置 |
JP4442181B2 (ja) * | 2003-10-07 | 2010-03-31 | カシオ計算機株式会社 | 半導体装置およびその製造方法 |
JP2005129862A (ja) * | 2003-10-27 | 2005-05-19 | Fujikura Ltd | 半導体パッケージの製造方法、半導体パッケージ |
JP4232613B2 (ja) * | 2003-11-20 | 2009-03-04 | カシオ計算機株式会社 | 半導体装置の製造方法 |
JP3929966B2 (ja) * | 2003-11-25 | 2007-06-13 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
EP1536469A1 (en) | 2003-11-28 | 2005-06-01 | EM Microelectronic-Marin SA | Semiconductor device with connecting bumps |
CN1560911B (zh) | 2004-02-23 | 2010-05-12 | 威盛电子股份有限公司 | 电路载板的制造方法 |
KR100619367B1 (ko) * | 2004-08-26 | 2006-09-08 | 삼성전기주식회사 | 고유전율을 갖는 커패시터를 내장한 인쇄회로기판 및 그제조 방법 |
US7196014B2 (en) * | 2004-11-08 | 2007-03-27 | International Business Machines Corporation | System and method for plasma induced modification and improvement of critical dimension uniformity |
JP2006179570A (ja) * | 2004-12-21 | 2006-07-06 | Renesas Technology Corp | 半導体装置の製造方法 |
US7468545B2 (en) | 2005-05-06 | 2008-12-23 | Megica Corporation | Post passivation structure for a semiconductor device and packaging process for same |
US8836146B2 (en) * | 2006-03-02 | 2014-09-16 | Qualcomm Incorporated | Chip package and method for fabricating the same |
-
2006
- 2006-05-08 US US11/430,513 patent/US7468545B2/en active Active
- 2006-06-23 CN CNB2006100901215A patent/CN100573846C/zh active Active
- 2006-06-23 SG SG201003764-6A patent/SG162733A1/en unknown
- 2006-06-23 JP JP2006173775A patent/JP2007005809A/ja not_active Withdrawn
- 2006-06-23 CN CNB2006100901200A patent/CN100511639C/zh active Active
- 2006-06-23 EP EP06013044A patent/EP1737038B1/en active Active
- 2006-06-23 TW TW097146146A patent/TWI398903B/zh not_active IP Right Cessation
- 2006-06-23 TW TW095122894A patent/TWI371059B/zh active
- 2006-06-23 EP EP06012984A patent/EP1737037B1/en active Active
- 2006-06-23 JP JP2006173778A patent/JP5435524B2/ja active Active
- 2006-06-23 CN CN2010105080771A patent/CN102054788B/zh active Active
- 2006-06-23 CN CN200610090122XA patent/CN1885532B/zh active Active
- 2006-06-23 TW TW095122893A patent/TWI336098B/zh active
- 2006-06-23 JP JP2006173769A patent/JP2007005808A/ja not_active Withdrawn
- 2006-06-23 EP EP11003815.5A patent/EP2421036B1/en active Active
- 2006-06-23 SG SG200604348A patent/SG128640A1/en unknown
-
2008
- 2008-11-04 US US12/264,271 patent/US8558383B2/en active Active
-
2013
- 2013-07-05 JP JP2013141588A patent/JP5908437B2/ja active Active
-
2014
- 2014-01-17 JP JP2014007143A patent/JP2014103411A/ja not_active Withdrawn
-
2016
- 2016-06-15 JP JP2016119070A patent/JP6700111B2/ja active Active
-
2018
- 2018-11-02 JP JP2018207349A patent/JP2019047129A/ja active Pending
-
2021
- 2021-11-26 JP JP2021191889A patent/JP2022019819A/ja active Pending
-
2023
- 2023-02-15 JP JP2023021229A patent/JP2023057129A/ja active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02220440A (ja) * | 1989-02-22 | 1990-09-03 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH0496254A (ja) * | 1990-08-03 | 1992-03-27 | Fujitsu Ltd | 薄膜多層回路基板とその製造方法 |
JP2000183089A (ja) * | 1998-12-10 | 2000-06-30 | Sanyo Electric Co Ltd | チップサイズパッケージ及びその製造方法 |
JP2000183090A (ja) * | 1998-12-10 | 2000-06-30 | Sanyo Electric Co Ltd | チップサイズパッケージ及びその製造方法 |
JP2003017622A (ja) * | 2001-04-27 | 2003-01-17 | Ibiden Co Ltd | 半導体チップの製造方法及び半導体チップ |
JP2004071998A (ja) * | 2002-08-09 | 2004-03-04 | Casio Comput Co Ltd | 半導体装置およびその製造方法 |
WO2004049436A1 (en) * | 2002-11-26 | 2004-06-10 | Freescale Semiconductor, Inc. | Semiconductor device having a bond pad and method for its fabrication |
JP2006507686A (ja) * | 2002-11-26 | 2006-03-02 | フリースケール セミコンダクター インコーポレイテッド | ボンディングパッドを有する半導体装置及びその形成方法 |
JP2004273591A (ja) * | 2003-03-06 | 2004-09-30 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JP2004296904A (ja) * | 2003-03-27 | 2004-10-21 | Toshiba Corp | 半導体装置、半導体装置の製造方法 |
JP2004363250A (ja) * | 2003-06-03 | 2004-12-24 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5435524B2 (ja) | 線路デバイスの製造方法 | |
US8884433B2 (en) | Circuitry component and method for forming the same | |
US9153555B2 (en) | Method of wire bonding over active area of a semiconductor circuit | |
TWI552297B (zh) | 半導體裝置及其製造方法 | |
TWI490993B (zh) | 半導體裝置 | |
CN103050461A (zh) | 钝化后互连结构 | |
TWI763849B (zh) | 半導體裝置及形成其的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160712 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160712 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170420 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170425 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170630 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20171128 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180226 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20180717 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191203 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200430 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6700111 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |