Classifications

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Definitions

• the field relates to integrated device packages and methods for forming the same.
• SIPs system- in-package
• some packages include different types of active chips or integrated device dies spaced apart from one another along a package substrate.
• 3D integration techniques often utilize packages in which two or more integrated device dies are stacked on top of and electrically connected to one another.
• a molding compound or encapsulant can be provided over the integrated device dies, which can generate stresses in the package. Accordingly, there remains a continuing need for improved integrated device packages.
• Figures 1A-1C schematically illustrates the use of a sacrificial carrier in various direct bonding processes.
• Figure 2 illustrates a plurality of elements directly bonded to a carrier.
• Figures 3A-3C show various examples in which elements are directly bonded to a carrier without an adhesive.
• Figure 4A is a schematic side view of a plurality of elements directly bonded to a carrier and with a protective material applied over the elements and within gaps between the elements.
• Figure 4B is a schematic side view of a plurality of elements that include one or more dummy elements directly bonded to a carrier.
• Figures 5A-5C illustrate a series of processing steps for forming a reconstituted wafer.
• Figure 6 is a schematic side sectional view of a reconstituted wafer having a bonding layer configured to directly bond to another reconstituted wafer or substrate.
• Figure 7A illustrates two opposing reconstituted wafers prior to direct bonding.
• Figure 7B illustrates the two opposing reconstituted wafers after being directly bonded to one another.
• Figure 8A-8B illustrate methods and structures for stacking more than two reconstituted wafers, according to various embodiments.
• Figures 9A-9F illustrate various face up bonded structures, according to various embodiments.
• Figures 10A-10E illustrate various face down bonded structures, according to various embodiments.
• Figure 11 illustrates another embodiment in which an additional filler material can serve as a second protective material and may be provided over a conformal protective material in the gaps between adjacent elements.
• Figures 12A-12C illustrate a method for forming a reconstituted wafer according to various embodiments.
• Figures 13A-13B illustrate a method for forming a reconstituted wafer according to various embodiments.
• Figures 14A- 14C illustrate another embodiment in which a mold compound can be provided between adjacent elements directly bonded to a carrier, and a metal can be provided on the mold compound.
• Figures 15A-15C illustrate another embodiment in which a mold compound can be provided between adjacent elements directly bonded to a carrier, and a metal can be provided on both sides of the mold compound.
• Figures 16A-16C illustrate another embodiment in which a protective coating or layer can be provided between the mold compound and the carrier.
• Figures 17A-17D illustrates additional bonded structures that can be provided with the methods disclosed herein.
• Figure 18A is a schematic side sectional view of an integrated device package, according to another embodiment.
• Figure 18B is a schematic top plan view of the integrated device package of Figure 18 A, with the molding compound hidden for ease of illustration.
• Figure 18C is a schematic top plan view of an integrated device package that includes increased lateral overlap among stress compensation elements.
• Figure 19 is a schematic diagram of a system incorporating one or more bonded structures, according to various embodiments.
• a bonded structure comprising a first element (e.g ., a first integrated device die) having a first side and a second side opposite the first side.
• the bonded structure can include a second element (e.g., a second integrated device die) having a first side and a second side opposite the first side.
• the first side of the second integrated device die can be directly bonded to the first side of the first integrated device die without an intervening adhesive along a bonding interface.
• a protective material can be disposed about a periphery ( e.g. respective sidewalls) of the first and second integrated device dies. The protective material can extend from the second side of the first integrated device die to the second side of the second integrated device die.
• portions of the protective material can be disposed within gaps between adjacent first integrated device dies or elements.
• the protective material can comprise an inorganic dielectric, such as silicon dioxide, silicon nitride, polysilicon, amorphous silicon, etc.
• the embodiments disclosed herein can comprise wafer-level processes in which wafers or substrates, serving as carriers, are provided with a plurality of integrated device dies and a protective material (which can comprise one or a plurality of protective layers) over the integrated device dies.
• the die(s) and protective material can form at least a portion of a reconstituted wafer which can be bonded ( e.g ., directly bonded without an adhesive) to another reconstituted wafer formed by a similar process.
• the bonded reconstituted wafers can be singulated to form a plurality of bonded structures, for example after removal of the carriers.
• the bonded structures can comprise packaging structures in some embodiments.
• direct bond interconnects can comprise bonded structures in which densely dispersed conductive contacts are bonded to one another without an intervening adhesive.
• the surrounding dielectric or nonconductive materials can also be directly bonded without an intervening adhesive.
• a ZiBond ® process can comprise a direct bond between nonconductive materials without an intervening adhesive. Examples of DBI and ZiBond processes and structures may be found throughout at least U.S. Patent Nos. 9,391,143; 10,141,218; 10,147,641; 9,431,368; and 7,126,212, the entire contents of each of which are incorporated by reference herein in their entireties and for all purposes.
• Each of the singulated dies mounted on the carriers can be tested prior to mounting, such that all dies in the reconstituted wafer can be Known Good Dies (KGD).
• FIGS 1A-1C schematically illustrate the use of a sacrificial carrier 3 in various direct bonding processes.
• an element 2 can be directly bonded to a carrier 3 without an adhesive.
• the element 2 (or any of the other elements described herein) can comprise any suitable type of element, such as a semiconductor element (e.g., an integrated device die), an optical element, etc.
• the carrier 3 can comprise any suitable type of carrier, such as a carrier with one or more logic or processing devices, and/or a sacrificial carrier (e.g., a carrier without active processing circuitry) that is to be removed at some point during processing.
• the element 2 can comprise a front side 9 and a back side 10 opposite the front side 9.
• the front side 9 can comprise a surface nearest to active circuitry or devices formed in the element 2.
• a first front bonding layer 4 can be provided at the front side 9 of the element 2.
• the bonding layer 4 is shown at the front side 9 of the element 2, a bonding layer may also or alternatively be provided on the back side 10 for bonding.
• the bonding layer 4 can comprise one or a plurality of contact pads 6 disposed within or surrounded by a nonconductive field region 5.
• the contact pads can comprise copper, although other conductive materials are suitable.
• the nonconductive field region can comprise a dielectric such as silicon oxide, silicon nitride, etc.
• the back side 10 may or may not include active circuitry or devices.
• the element 2 can comprise a singulated element (such as a singulated device die) having a side surface 8.
• the side surface 8 can comprise markings indicative of a singulation process, for example, saw markings, etch patterns, etc.
• the element 2 e.g., a die
• the front bonding layer 4 can be prepared for bonding, as explained above.
• the front bonding layer 4 can be polished to a very low surface roughness and processed so as to enhance dielectric-to-dielectric direct bonding.
• the surfaces to be bonded may be terminated with a suitable species and activated prior to bonding.
• the surfaces to be bonded may be very lightly etched for activation and exposed to a nitrogen-containing solution and terminated with a nitrogen-containing species.
• the surfaces to be bonded may be exposed to an ammonia dip after a very slight etch, and/or a nitrogen-containing plasma (with or without a separate etch).
• the nonconductive field region 5 of the element 2 can be brought into contact with corresponding nonconductive regions of the carrier 3.
• the interaction of the activated surfaces can cause the nonconductive region 5 of the element 2 to directly bond with the corresponding nonconductive regions of the carrier 3 without an intervening adhesive, without application of external pressure, without application of voltage, and at room temperature.
• the bonding forces of the nonconductive regions can be covalent bonds that are greater than Van der Waals bonds.
• only nonconductive field regions of the element 2 are directly bonded to corresponding nonconductive regions of the carrier 3.
• a protective material 7 can be applied over at least a portion of the element 2, including about at least a periphery or side surface 8 of the element 2. In some embodiments, the protective material 7 can be deposited along the side surface 8 and over an upper surface of the carrier 3.
• the protective material 7 can comprise one or more protective layers, including one or more inorganic layers, such as silicon oxide, silicon nitride, polysilicon, amorphous silicon, a metal, etc.
• the carrier 3 can be removed from the element 2 and the protective material 7 in any suitable manner.
• the carrier 3 can comprise a silicon substrate or element with a nano oxide layer 11, which as used herein can include at least one of a native silicon oxide layer and a thermal silicon oxide layer.
• the carrier 3 in the carrier removal process can be selectively etched using the silicon nano oxide layer 11 as an etch stop.
• at least a portion of the nano oxide 11 layer can remain after removing the silicon base material of the carrier 3.
• the entirety of the carrier 3 (e.g ., the silicon base material and the nano oxide layer 11) can be removed.
• the element 2 can be planarized for bonding, but the carrier 3 may not be planarized prior to direct bonding.
• both the element 2 and carrier 3 can be planarized for direct bonding.
• Direct bonding and subsequent removal of the carrier 3 as described herein can advantageously leave a planar surface for a reconstituted wafer for further processing as desired, including for additional direct bonding processes.
• reconstituted wafers formed on sacrificial or temporary adhesive layers do not reliably provide planar surfaces and thus can lead to subsequent alignment issues, e.g., for subsequent direct bonding of dies for stacking.
• Such stacking with direct bonding could be by way of direct bonding individual second dies on a first reconstituted wafer, or simultaneously bonding multiple second dies in a second reconstituted wafer.
• Figures 1A-1C can enable the reconstitution of wafers for direct bonding with improved alignment accuracy.
• an array of multiple dies can be provided, and as shown below.
• the elements 2 or dies may become misaligned relative to the carrier 3 due to movement or migration of the adhesive, for example, during or after heating or during placement for bonding.
• Such misalignments can result in misalignment for subsequently bonded structures and negatively affect the performance of the bonded structures.
• the embodiments disclosed herein can beneficially reduce misalignment by providing a direct bond interconnection with the carrier 3, which can serve to effectively fix the element 2 or die relative to the carrier 3 for subsequent processing, such as providing a protective material 7 (inorganic or organic) over the element 2, or any other suitable processing.
• Figure 2 illustrates a plurality of elements 2 directly bonded to a carrier 3, such as a wafer.
• a carrier 3 such as a wafer.
• reference numerals in Figure 2 may represent components that are the same as or generally similar to like-numbered components of Figures 1A-1C.
• each element 2 can include one or more conductive vias 13 connected to back side(s) of corresponding contact pads 6.
• the conductive vias may initially extend upwardly from the contact pad and terminate within the body of the element 2.
• the dies or elements 2 can be diced or singulated into a plurality of diced or singulated elements 2.
• the removal of a silicon substrate using the nano oxide layer 11 may leave a substantially smooth surface for subsequent direct bonding.
• Figures 3 A-3C show various examples in which elements 2 (e.g . , integrated device dies) are directly bonded to a carrier 3 (e.g., a silicon substrate with nano oxide layer 11) without an intervening adhesive.
• Figure 3 A illustrates a relatively wide separation or gap G between elements 2
• Figure 3B illustrates a relatively narrow separation or gap G between elements 2.
• Figure 3C illustrates additional dummy elements 2’ or dies disposed between active elements 2 or dies, with relatively narrow gaps G therebetween.
• Providing the narrow gaps G in Figures 3B and 3C can beneficially reduce the amount of protective material 7 used to fill the gaps G in subsequent steps and can enable conformal filling of the gaps G.
• one or more alignment feature(s) 14 can be provide on the upper surface of the carrier 3.
• the alignment features 14 can be selectively positioned on the carrier 3 to assist in accurate placement of the elements 2.
• Figure 4A is a schematic side view of a plurality of elements 2 directly bonded to a carrier 3 and with a protective material 7 applied over the elements 2 and within the gaps G between the elements 2.
• the elements 2 are illustrated as being all active integrated device dies.
• some of the elements comprise dummy elements 2’, such as inactive blocks of semiconductor material (e.g ., silicon).
• a protective layer 7 (such as an inorganic protective layer) can be provided over portions of the elements 2, including around a portion of the periphery (e.g., the side surface 8) within the gaps G and over upper surfaces (which are the back sides 10 in Figures 4A-4B) of the elements 2. Seams 15 such as voids or discontinuities may be present in the protective material 7.
• the protective layer 7 can include one or a plurality of protective layers, including, e.g., inorganic or organic protective layer(s).
• the protective layer 7 can comprise inorganic layer(s) such as silicon oxide, silicon nitride, polysilicon, amorphous silicon, or a metal.
• at least a portion of the protective material 7 can comprise an organic material, such as a molding compound or epoxy.
• the protective material 7 comprises both a conformal layer and a gap-fill layer.
• the protective material 7 can assist in affixing the elements 2 to the carrier 3 such that the elements 2 do not shift during subsequent direct bonding processes.
• the protective material 7 can also assist in protecting the elements 2 during polishing and other processing techniques to prevent damage to the dies (e.g., chipping).
• Examples of structures and processes for providing protective material 7 on and between adjacent directly bonded dies over a carrier, for use in conjunction with post-bonding thinning and/or singulation processes, are disclosed in U.S. Patent No. 10,204,893, the entire contents of which are hereby incorporated by reference herein in their entirety and for all purposes.
• Figures 5A-5C illustrate a series of processing steps for forming a reconstituted wafer 20.
• the reconstituted wafer 20 can be bonded (e.g., directly bonded) to another reconstituted wafer 20 or to other substrates in subsequent steps.
• the upper surfaces of the conformal protective material 7 can be removed, e.g., by etching, lapping, grinding, polishing, etc.
• the removal of the protective material 7 can also remove a portion of the back side 10 of the elements 2.
• the removal step can terminate at the back side 10 of the element 2.
• a portion of the element 2 from the back side 10 can be removed by etching, lapping, chemical mechanical polishing (CMP), or any other suitable method, to form a thinned back side 10’ of the element 2.
• this removal step can expose the conductive through substrate vias (TSVs) 13 or other electrical interconnects formed within the elements.
• the removal step can also form a cavity 16 defined at least in part by the thinned back side 10’ of the element 2 and side walls of the protective material 7.
• a nonconductive layer 18 (e.g., a second oxide layer) can be provided (e.g., deposited) over the thinned back sides 10’ of the elements 2 and around the exposed vias 13.
• the provided nonconductive layer 18 for example, silicon oxide
• the provided nonconductive layer 18 can be lapped or polished to generate a planar surface and to ensure that the nonconductive layer 18 is generally planar relative to the exposed ends of the vias 13 and the protective material.
• the reconstituted wafer 20 can comprise a front surface 22 configured to be bonded (e.g., direct bonded) to another reconstituted wafer or other type of substrate.
• the reconstituted wafer 20 can also comprise a back surface 23.
• the protective material 7 can be disposed between adjacent elements 2 and can extend from the front surface 22 of the reconstituted wafer 20 to the upper surface of the carrier 3.
• a vertical interface 19 can be defined between the nonconductive layer 18 over the element 2 and the protective material 7.
• a vertical interface 21 can be defined between the bonding layer 4 and the protective material 7.
• Figure 6 is a schematic side sectional view of a reconstituted wafer having a second bonding layer 4b configured to directly bond to another reconstituted wafer or substrate.
• the first bonding layer 4, the contacts 6, and the nonconductive field region 5 of Figures 1A-5 have been renumbered as reference numerals 4a, 6a, and 5a, respectively, in Figure 6.
• the second bonding layer 4b e.g., a DBI layer having alternating conductive contacts 6b and nonconductive bonding portions (e.g., field regions 5b)
• the nonconductive layer 18 e.g., a second oxide layer
• the second bonding layer 4b can extend across multiple (e.g., all) of the elements 2 of the reconstituted wafer 20.
• a horizontal interface 19 can be formed between the second bonding layer 4b and the nonconductive layer 18, and between the second bonding layer 4b and the underlying protective material 7.
• FIGs 7A-7B two opposing reconstituted wafers 20a, 20b can be provided and can be directly bonded to form a pair of bonded reconstituted wafers 1 ’ .
• the reference numerals have been appended with “a” or “b” to denote their respective associations with the reconstituted wafers 20a or 20b.
• Figure 7A illustrates the two opposing reconstituted wafers 20a, 20b prior to direct bonding.
• Figure 7B illustrates the two opposing reconstituted wafers 20a, 20b after being directly bonded to one another.
• Use of direct bonding on the carriers 3 a, 3b provides the planarity desired at the die bonding surfaces for die-to-die direct bonding of conductive and non-conductive surfaces.
• the carriers may not be used and instead the reconstituted wafers may comprise elements (e.g ., dies) at least partially embedded in a molding compound or encapsulant without the use of a carrier.
• the nonconductive protective layers can be directly bonded to one another without an adhesive along the bond interface 12.
• Other non-conductive field regions of the reconstituted wafers 20a, 20b can also be bonded to one another by an adhesive.
• the conductive contacts 6a, 6b can be directly bonded without an adhesive.
• some or all of the conductive contacts 6a, 6b can be initially recessed relative to the bonding surfaces.
• the bonded wafers 20a, 20b can be heated to cause the contacts 6a, 6b to expand and form an electrical contact. After heating, the interface between the contacts 6a and 6b may not be in the same plane as the bond interface 12.
• Additional reconstituted wafers 20a, 20b can be provided as shown in Figures 8A-8B to provide any number of stacked reconstituted wafers 1’.
• the stacked reconstituted wafers 1’ can be singulated along singulation streets S to provide a plurality of bonded structures 1.
• Any suitable number of reconstituted wafers 20a, 20b can be provided to form the stacked reconstituted wafers 1’, which can also be singulated to form any suitable number of bonded structures 1.
• the singulation can be before removal of the carriers 3 as shown (if sacrificial), or after singulation. In some embodiments, as shown in Figure 8A, both carriers 3a, 3b may not be removed prior to singulation.
• one carrier 3a can be removed prior to singulation.
• both carriers 3a, 3b can be removed prior to singulation.
• removal of the carriers 3a and/or 3b using, for example, an etch process may leave behind a nano oxide layer 11 to facilitate additional direct bonding.
• Figures 9A-9F and 10A-10E illustrate various face up or face down bonded structures 1 that can result from the methods described herein.
• the bonded structures 1 shown in Figures 9A-9F and 10A-10E can comprise singulated reconstituted elements 24, such as singulated reconstituted integrated device dies.
• the singulated reconstituted elements 24 are shown in Figures 9A, 9E and 9F for illustrative purposes to show what structures may result from a singulated reconstituted wafer 20, according to various embodiments.
• the surfaces nearest to active circuitry or devices can be the front surfaces 22 of the bonded structures 1, while the surfaces opposite the front surfaces 22 can be the back surfaces 23.
• the directly bonded reconstituted elements 24 of the illustrated embodiments can have coplanar side surfaces as well as a direct bonding interface 12 between conductive (e.g., metal) and nonconductive (e.g., inorganic dielectrics such as oxides, including nitrogen and/or fluorine content to aid direct bonding) surfaces of the reconstituted elements 24, with no intervening adhesives.
• conductive e.g., metal
• nonconductive e.g., inorganic dielectrics such as oxides, including nitrogen and/or fluorine content to aid direct bonding
• Figures 9A-9F illustrate examples of face down bonded structures.
• the singulated reconstituted element 24 can comprise the element 2, the nonconductive layer 18 disposed on the thinned back side 10’ of the element 2, and bonding layers 4a, 4b at the front and back surfaces 22, 23, respectively.
• the protective material 7 can extend from the back side 23 to the front side 22 of the reconstituted element 24.
• the singulated reconstituted element 24 can have a sidewall 25 defined by the outer exposed surface of the protective material.
• a vertical interface 26 can be defined between the protective material 7 and the element 2, the nonconductive layer 8, and the first and second bonding layers 4a, 4b.
• the protective material 7 accordingly abuts the bonding layers 4a, 4b, which may be applied before the protective material 7 is provided.
• one or more of the bonding layers 4a, 4b can extend over the protective material 7 such that the sidewall 25 includes the protective material 7 and a side edge of the bonding layers 4a and/or 4b.
• Figure 9B illustrates a front-to-back bonding arrangement in which the front surface 22a of the reconstituted element 24a is directly bonded to the back surface 23b of the reconstituted element 24b without an intervening adhesive to form the bonded structure 1.
• a first portion 7a of protective material can extend from the back surface 23 a of the reconstituted element 24a to the bonding interface 12.
• a second portion 7b of protective material can extend from the bonding interface 12 to the front surface 22b of the reconstituted element 24b.
• Figure 9C illustrates a front-to-front bonding arrangement in which the front surface 22a of the reconstituted element 24a is directly bonded to the front surface 23 a of the reconstituted element 24b without an intervening adhesive to form the bonded structure 1.
• the first portion 7a of protective material can extend from the back surface 23a of the reconstituted element 24a to the bonding interface 12.
• the second portion 7b of protective material can extend from the bonding interface 12 to the back surface 23b of the reconstituted element 24b.
• Figure 9D illustrates a back-to-back bonding arrangement in which the back surface 23a of the reconstituted element 24a is directly bonded to the back surface 23b of the reconstituted element 24b without an intervening adhesive to form the bonded structure 1.
• the first portion 7a of protective material can extend from the front surface 22a of the reconstituted element 24a to the bonding interface 12.
• the second portion 7b of protective material can extend from the bonding interface 12 to the front surface 22b of the reconstituted element 24b.
• Figures 9E and 9F illustrate additional examples of singulated reconstituted elements 24 that utilize a second protective layer 40. Additional details regarding methods of forming the reconstituted element 24 of Figures 9E and 9F may be found below in, for example, Figures 11-12C.
• the second protective material 40 can be applied over the protective material 7.
• the second protective material 40 may be exposed at the back surface 23 of the reconstituted element 24 adjacent the bonding layer 4b.
• the protective material 7 can be exposed at the front surface 22 adjacent the bonding layer 4a and underlying the second protective layer 40.
• the sidewall 25 can include a horizontal interface 42 between the first and second protective materials 7, 25.
• a vertical interface 41 can be provided between the first and second protective materials 7, 25.
• the second protective material 40 can also be applied over the protective material 7.
• a third protective layer 43 can be provided over the second protective material 40.
• the third protective layer 43 may be exposed at the back surface 23 of the reconstituted element 24.
• a vertical interface 45 can be provided between the protective material 7 and the third protective material 43.
• a horizontal interface 46 can be provided between the second protective material 40 and the third protective material 43.
• Figures 10A-10E illustrate examples of face up bonded structures 1. Unless otherwise noted, reference numerals in Figures 10A-10E may refer to the same or generally similar components as reference numerals in Figures 9A-9F.
• Figure 10A a singulated reconstituted element 24 is shown in a face up orientation.
• Figures 10B-10D respective reconstituted elements 24a, 24b are directly bonded to one another to form bonded structures.
• Figure 10B illustrates a front-to-back bonding arrangement in which the front surface 22a of the reconstituted element 24a is directly bonded to the back surface 23b of the reconstituted element 24b without an intervening adhesive to form the bonded structure 1.
• a first portion 7 a of protective material can extend from the back surface 23a of the reconstituted element 24a to the bonding interface 12.
• a second portion 7b of protective material can extend from the bonding interface 12 to the front surface 22b of the reconstituted element 24b.
• Figure IOC illustrates a back-to-back bonding arrangement in which the back surface 23a of the reconstituted element 24a is directly bonded to the back surface 23b of the reconstituted element 24b without an intervening adhesive to form the bonded structure 1.
• the first portion 7a of protective material can extend from the front surface 22a of the reconstituted element 24a to the bonding interface 12.
• the second portion 7b of protective material can extend from the bonding interface 12 to the front surface 22b of the reconstituted element 24b.
• Figure 10D illustrates a front-to-front bonding arrangement in which the front surface 22a of the reconstituted element 24a is directly bonded to the front surface 22b of the reconstituted element 24b without an intervening adhesive to form the bonded structure 1.
• the first portion 7a of protective material can extend from the back surface 23a of the reconstituted element 24a to the bonding interface 12.
• the second portion 7b of protective material can extend from the bonding interface 12 to the back surface 23b of the reconstituted element 24b.
• the bonding layers 4a can extend over the protective material 7a, 7b and can be exposed on the sidewall 25.
• the bonding layer 4a can be provided across the wafer over the protective material 7 such that, when the reconstituted wafer is singulated, the bonding layer 4a is exposed at the sidewall and flush with the protective material 7 at the sidewall 25.
• Figure 10E illustrates a singulated reconstituted element 24 that has a second protective material 40 disposed over side and upper surfaces of the protective material 7.
• the first front bonding layer 4a can be coplanar or flush with the second protective material 40.
• the second back bonding layer 4b can be coplanar or flush with the protective material 7.
• Figure 11 illustrates another embodiment similar to those described above, except an additional filler material can serve as a second protective material 40 and may be provided over a conformal protective material 7 in the gaps G between adjacent elements 2.
• the protective material 7 can be deposited conformally over the back sides 10 and side surface 8 of the elements 2 and over the upper surface of the carrier 3.
• the conformal protective material 7 can have gaps G between portions of the protective material 7 disposed on the side surfaces 8 of the elements 2.
• the second protective material 40 can serve to fill the gaps G.
• the second filler protective material 40 can comprise any suitable material, including organic or inorganic materials.
• Figures 12A-12C illustrate a method for forming a reconstituted wafer 20 according to various embodiments.
• Figure 12A is generally similar to Figure 11, except additional portions of the second protective material 40 are provided on the ends of the outer elements 2.
• a portion of the protective material 7 and a portion of the second filler protective material 40 can be removed to provide a generally planar surface.
• the respective portions of the filler and conformal protective materials 40, 7 can be removed by etching, lapping, grinding, chemical mechanical polishing (CMP), etc.
• a portion of the bulk semiconductor material of the elements 2 or dies can be removed to form a cavity 16, for example, by etching, lapping, CMP, etc., to expose the conductive vias 13.
• the conformal and/or gap-fill protective materials may have coefficient(s) of thermal expansion that is (are) within 5 ppm/°C of a coefficient of thermal expansion of the elements 2 (e.g., integrated device dies).
• the second filler protective material 40 can be removed from the structure shown in Figure 12C, and an additional protective material 48 can be provided over the elements 2 and the exposed vias 13.
• the provided additional protective material 48 and a portion of the protective material 7 can be removed or planarized to form a bonding surface 49 with the vias exposed on the upper surface.
• Figures 14A- 14C illustrate another embodiment in which a mold compound
• the vias 13 are shown as being exposed on the back side, but in other embodiments, the vias 13 can be buried as illustrated above. As shown in Figure 14B, a metal
• the metal 51 (such as copper) can be provided over the mold compound 51 as shown in Figure 14B.
• the metal 51 can be provided using an electroless plating process, a sputtering process, or any other suitable method.
• the metal 51 can be planarized, for example, by chemical mechanical polishing (CMP), or any other suitable method.
• CMP chemical mechanical polishing
• structures that utilize an organic material for the mold compound may be challenging to planarize using CMP to sufficient smoothness (e.g ., less than 5 nm, etc.).
• CMP chemical mechanical polishing
• Figures 15A-15C are generally similar to Figures 14A-14C, except in Figures 15A-15C, a second metal 52 can be provided over the carrier 3 between the carrier 3 and the mold compound 50.
• Figures 16A-16C illustrate another embodiment in which a protective coating 53 or layer (e.g. , silicon oxide) can be provided between the mold compound 50 and the carrier 3.
• a protective coating can also be provided after die placement and before metal deposition in various embodiments.
• the protective coating 53 can conformally coat the upper surface of the carrier 3 and upper and side surfaces of the elements 3.
• the mold compound 50 can be provided over the protective coating 53 and between the elements 2.
• the metal 51 can be provided over the mold compound 50 as explained above.
• the portions of the protective coating 53 that overlie the elements 2 can be removed using a polishing, grinding, or lapping process to expose the vias 13.
• the metal 51 and element 2 can be planarized to form a smooth surface for bonding.
• FIGs 17A-17D illustrates additional bonded structures 1 that can be provided with the methods disclosed herein.
• the bonded structure 1 can include a plurality of elements 2, which can include combinations of integrated device dies and interposers. Thus, the methods disclosed herein can be used for active and/or inactive devices.
• an insulating column 55 can be provided to separate the adjacent elements 2 in the upper reconstituted element.
• the bonded structure 1 can include one or more redistribution layers (RDLs) 57 which can include lateral conductive routing traces to carry signals laterally inward or outward.
• the RDLs 57 can enable fan-in or fan-out arrangements for connecting to an external package substrate.
• a conductive via 56 can be provided in the insulating column 56 to carry signals from the lower element 2 to the upper surface of the bonded structure 1.
• the bonded structure 1 can include both the via 56 in the insulating column 56 and the RDL(s) 57. Skilled artisans will understand that additional combinations may be suitable.
• Integrated device packages can include one or multiple integrated device dies (e.g . , chips) that have active circuitry, such as transistors and other types of active devices.
• the integrated device dies can be mounted to a carrier, such as a semiconductor interposer, a semiconductor or dielectric (e.g. , glass) substrate, another integrated device die, a reconstituted wafer or element, etc.
• a molding compound or encapsulant can be provided over the integrated device dies and exposed surfaces of the package substrate.
• the molding compound can comprise a polymer material, such as an epoxy or potting compound.
• the material of the molding compound can have a coefficient of thermal expansion (CTE) that differs from the CTE of the carrier and/or of the integrated device die(s).
• CTE coefficient of thermal expansion
• the CTE mismatch between the molding compound and the carrier (and/or integrated device die(s)) may induce stresses in the carrier and/or integrated device die(s).
• the stresses induced by CTE mismatch can cause cracking and/or warpage of the carrier and/or integrated device die(s), which can reduce package yield and/or affect system performance. Accordingly, there remains a continuing need for improved packages that reduce stresses due to CTE mismatch between molding compound and the carrier (and/or integrated device die(s)).
• Figure 18A is a schematic side sectional view of an integrated device package 82, according to various embodiments.
• Figure 18B is a schematic top plan view of the integrated device package 82 of Figure 18 A.
• the package 82 can comprise a carrier 103 and a plurality of integrated device dies 102 mounted to an upper surface of the carrier 103.
• the integrated device dies 102 can comprise active circuitry.
• the integrated device dies 102 can comprise processor die(s), memory die(s), sensor die(s), microelectromechanical systems (MEMS) dies, or any other suitable device that includes active circuitry (such as transistors or other active devices).
• MEMS microelectromechanical systems
• Three integrated device dies 102 are shown in the top view of Figure 18B, but it should be appreciated that any suitable number of device dies 102 can be provided.
• one or two integrated device dies 102 can be mounted to the carrier 103, or more than three integrated device dies 102 can be mounted to the carrier.
• the integrated device dies 102 are spaced apart laterally along the carrier 103.
• integrated device dies 102 can be stacked vertically in order to reduce package footprint.
• the carrier 103 can comprise any suitable support structure for the integrated device dies 102.
• the carrier 103 can comprise an interposer (such as a semiconductor interposer), a semiconductor or dielectric (e.g ., glass) substrate, another integrated device die (e.g., an active chip with active electronic circuitry), a reconstituted wafer or element, etc.
• the carrier 103 can comprise a material (e.g., a semiconductor material, a dielectric material, etc.) having a first CTE.
• the integrated device dies 102 can have a CTE that is substantially similar to the first CTE of the carrier 103.
• bulk material of one or more of the dies 102 may be the same material as corresponding bulk material of the carrier 103.
• the carrier 103 can comprise silicon, glass, or any other suitable material.
• the carrier 103 can comprise an integrated device die (such as a processor die) that has a larger lateral footprint than the dies 102.
• the integrated device dies 102 can be mounted to the carrier 103 in any suitable manner.
• the dies 102 can be directly hybrid bonded to the carrier 103 without an adhesive, as explained herein.
• nonconductive field regions of the dies 102 can be directly bonded to corresponding nonconductive field regions of the carrier 103 without an adhesive.
• conductive contacts of the dies 102 can be directly bonded to corresponding conductive contacts of the carrier 103 without an adhesive.
• the dies 102 can be mounted to the carrier 103 with an adhesive.
• the carrier 103 can remain coupled to the dies 102 such that the carrier 103 remains present in the larger electronic system.
• the carrier 103 can comprise a temporary structure (such as a mounting tape or sacrificial substrate) that is removed ( e.g ., lifted off or etched away) and not present in the final electronic package or system.
• a molding compound 108 can be provided over the integrated device dies 102 and over an exposed upper surface of the carrier 103.
• the molding compound 108 is hidden in the top view of Figure 18B for ease of illustration.
• the integrated device dies 102 can be at least partially embedded (e.g., completely embedded or buried) within the molding compound 108.
• the molding compound 108 can comprise a polymer material (such as an epoxy or potting compound) that has a second CTE that is different from the first CTE of the carrier 103 (and/or of the dies 102).
• the second CTE of the molding compound 108 can differ from the first CTE of the carrier 103 (and/or of the dies 102) by an amount that is sufficiently large so as cause CTE- induced stresses on the carrier 103 and/or dies 102 (e.g., the CTE mismatch can be up to about 12 ppm in some cases).
• the CTE mismatch between the molding compound 108 and the carrier 103 (and/or dies 102) can induce stresses that cause warpage, cracks, or other types of damage to the components of the package 82.
• the package 82 can include one or a plurality of stress compensation elements 104a- 104d mounted to the upper surface of the carrier 103.
• the stress compensation elements 104a- 104d can be disposed around the integrated device dies 102, such that the integrated device dies 102 are disposed within an interior region of the package 82 surrounded by the stress compensation elements 104a- 104d.
• the molding compound 108 can also be provided or applied over the stress compensation elements 104a- 104d, such that the stress compensation elements 104a- 104d are at least partially embedded in the molding compound 108.
• the stress compensation elements 104a- 104d can be spaced apart from one another and from the dies 102 by intervening portions of the molding compound 108.
• the stress compensation elements 104a- 104d can comprise a semiconductor material (e.g., silicon), an insulating material (e.g., glass), or any other suitable material type that has a CTE that substantially matches (or is close to) the second CTE of the carrier 103 and/or the dies 102.
• the stress compensation elements 104a- 104d can comprise the same material as the carrier 103 and/or the dies 102.
• the stress compensation elements 104a- 104d can comprise a material that is different from that of the carrier 103 and/or the dies 102.
• Each stress compensation element 104a- 104d can comprise the same material, or some (or all) can comprise different materials.
• the CTE of the stress compensation elements 104a- 104d can be within 10% of the second CTE of the carrier 103 and/or of the integrated device dies 102, within 5% of the second CTE, or within 1% of the second CTE.
• the CTE of the stress compensation elements 104a- 104d can be less than 10 ppm, less than 8 ppm, or less than 7 ppm.
• the CTE of the stress compensation elements 104a- 104d can be in a range of 3 ppm to 7 ppm.
• the stress compensation elements 104a- 104d can reduce the stresses imparted to the carrier 103 and/or the dies 102, since the material composition of the stress compensation elements 104a- 104d is selected to have a CTE that substantially matches that of the carrier 103 and/or the dies 102.
• the CTE-matched stress compensation elements 104a- 104d can be provided over a large area of the carrier 103 so as to serve as a stress-matched filler that compensates or reduces any stresses induced by the CTE mismatch between the molding compound 108 and the carrier 103 and/or dies 102.
• the stress compensation elements 104a- 104d can be mounted so as to cover most of an unoccupied area of the carrier 103 (e.g., regions of the carrier 103 that do not support the dies 102 or other electronic components or devices), e.g., at least 20%, at least 50%, at least 75%, at least 85%, or at least 90% of the unoccupied area of the carrier 103.
• the stress compensation elements 104a-104d can be mounted so as to cover a range of 20% to 90% of the unoccupied area of the carrier 103, a range of 35% to 90% of the unoccupied area of the carrier 103, or a range of 50% to 90% of the unoccupied area of the carrier 103.
• the stress compensation elements 104a- 104d can laterally overlap such that all lines perpendicular to opposing side edges 105a, 105b can pass through or intersect at least one stress compensation element 104a- 104d. In such arrangements, the stress compensation elements 104a- 104d can serve to prevent or arrest cracks from propagating through the carrier 103.
• the stress compensation elements 104a-104d can be disposed between the outer side edges 105a-105d of the package 82 and the integrated device dies 102 such that at least one lateral side edge 109 of each integrated device die 102 lies in a corresponding plane that intersects at least one stress compensation element 104a- 104d.
• a majority (or all) of the side edges 109 of the dies 102 can lie in respective planes that intersect at least one stress compensation element 104a- 104d.
• Figure 18C is a schematic top plan view of an integrated device package 82, that includes increased lateral overlap among the stress compensation elements 104a- 104d. Unless otherwise noted, the components of Figure 18C may be the same as or generally similar to like-numbered components of Figures 18A-18B.
• stress compensation element 104b is vertically (as shown in the top view) shortened, and stress compensation element 104d is horizontally (as shown in the top view) lengthened as compared to Figure 18B.
• stress compensation element 104d can extend to and be exposed along side edge 105b.
• all lines perpendicular to each side edge 105a-105d can pass through or intersect with at least one stress compensation element 104a- 104d, which can prevent or arrest crack propagation.
• the stress compensation elements 104a- 104d can comprise dummy stress compensation elements that are devoid of active circuitry, e.g., there are no active devices in the dummy stress compensation elements.
• the dummy stress compensation elements can comprise dummy pieces or blocks of a semiconductor material (such as silicon) or a dielectric material (such as glass) without any active circuitry.
• the use of dummy elements can provide further benefits because no circuitry or devices need be patterned or formed in the elements 104a- 104d, which can reduce processing costs and complexity.
• one or more of the stress compensation elements 104a- 104d may comprise an active integrated device die with active circuitry or devices.
• the use of multiple stress compensation elements 104a- 104d can beneficially enable the package assembler to pick and place the elements 104a- 104d at desired locations, e.g., at locations with high susceptibility to cracking and/or in targeted spaces over the carrier 103.
• the stress compensation elements 104a- 104d can be mounted to the carrier 103 in any suitable manner.
• the stress compensation elements 104a- 104d can be directly bonded to the carrier 103 without an adhesive.
• the stress compensation elements 104a- 104d can comprise dummy stress compensation elements without active circuitry.
• the stress compensation elements 104a- 104d can comprise nonconductive field regions that are directly bonded to corresponding nonconductive field regions of the carrier 103 along a bond interface without an adhesive.
• the stress compensation elements 104a- 104d may be directly bonded such that the bond interface between the elements 104a- 104d and the carrier 103 includes only nonconductive-to-nonconductive direct bonds (e.g., the bond interface is devoid of conductor-to-conductor or metal-to-metal direct bonds).
• the stress compensation elements 104a- 104d can be directly bonded to the carrier 103 utilizing only nonconductive-to-nonconductive direct bonds, e.g., a nonconductive or dielectric bonding layer of the elements 104a- 104d can be directly bonded to a corresponding nonconductive or dielectric bonding layer of the carrier 103 without an adheisve.
• the nonconductive-to-nonconductive direct bonds can comprise one type or multiple different types of nonconductive material(s) along the bond interface.
• one or more elements such as dies
• the carrier 103 can be hybrid direct bonded to the carrier 103 along a bond interface without an adhesive such that nonconductive field regions and conductive contact pads of the one or more elements (e.g., dies 102) are directly bonded to corresponding nonconductive field regions and conductive contacts of the carrier 103.
• One or more other elements can be directly bonded to the carrier 103 without an adhesive along the bond interface such that the bond interface between the stress compensation elements 104a- 104d and the carrier 103 includes only nonconductive-to-nonconductive direct bonds (e.g., directly bonded dielectric bonding layers of the elements 104a- 104d and carrier
• the nonconductive field regions of the dies 102, stress compensation elements 104a- 104d, and/or carrier 103 can comprise an inorganic dielectric material (e.g., silicon oxide).
• the nonconductive field regions can comprise unpatterned portions of the dies 102, stress compensation elements 104a- 104d, and/or carrier 103.
• the bond interface can include signature indicative of direct nonconductive bonds, such as nitrogen terminated surfaces, fluorine peak(s) at the bond interface and at upper and/or lower interfaces of dielectric bonding layers of the elements.
• both nonconductive field regions and contact pads of the stress compensation elements 104a- 104d can be directly bonded to corresponding nonconductive field regions and contact pads of the carrier 103.
• the stress compensation elements 104a- 104d can be bonded to the carrier 103 with an adhesive.
• the carrier 103 can be mounted to an external device, such as a system motherboard, or to another structure.
• the carrier 103 can comprise a temporary support structure that can be removed after the molding compound 108 is applied.
• Four stress compensation elements 104a-104d are shown in Figure 18B, but it should be appreciated that fewer than four, or more than four, stress compensation elements 104a- 104d can be provided.
• the package 82 can comprise outer side edges 105a-105d.
• the package 82 can be formed from a singulation process by which a larger wafer or reconstituted wafer is singulated along singulation streets S to yield a plurality of singulated packages 82.
• singulation can comprise a sawing process, an etching process, or any other suitable process by which packages 82 can be formed from a larger wafer or reconstituted wafer.
• the outer side edges 105a- 105d can comprise singulation markings indicative of the singulation process.
• the singulation markings can comprise saw markings, such as striations in the singulated surface.
• the singulation markings can comprise marks or microstmctures indicative of the etch pathway.
• the outer side edge 105b can include an outer edge of stress compensation element 104d, an edge of the carrier 103 and the molding compound, each of which may include markings indicative of the singulation process.
• the stress compensation elements 104a-104d can be positioned anywhere along the carrier 103.
• some or all of the stress compensation elements 104a-104d can be positioned laterally inset relative to the outer side edges 105a- 105d of the package 82 such that the stress compensation elements 104a- 104d are embedded in the molding compound 108.
• the singulation streets S can pass through one or more of the stress compensation elements 104a- 104d such that, upon singulation, the molding compound 108 and one or more stress compensation elements 104a- 104d can be exposed along one or more outer side edges 105a- 105d of the package 82.
• stress compensation elements 104a, 104c can comprise side edges 106a, 106c that are exposed at the corresponding outer side edges 105a, 105c of the package 82.
• side edges 107 of the molding compound 108 can be exposed along the outer side edges 105a- 105d of the package 82.
• the exposed side edges 106a, 106c of the stress compensation elements 104a, 104c can be flush with the side edges 107 of the molding compound 108, including portions of the molding compound 108 that are over the stress compensation elements 104a, 104c and portions of the molding compound 108 that are laterally adjacent the stress compensation elements 104a, 104c.
• some stress compensation elements 104b, 104d can be laterally inset relative to the outer side edges 105b, 105d of the package 82, such that the elements 104b, 104d may be completely embedded in the molding compound 108. In some embodiments, all of the stress compensation elements 104a- 104d can be laterally inset relative to the outer side edges 105a- 105d.
• FIG 19 is a schematic diagram of a system 80 incorporating one or more integrated device packages 82, according to various embodiments.
• the system 80 can comprise any suitable type of electronic device, such as a mobile electronic device (e.g ., a smartphone, a tablet computing device, a laptop computer, etc.), a desktop computer, an automobile or components thereof, a stereo system, a medical device, a camera, or any other suitable type of system.
• the electronic device can comprise a microprocessor, a graphics processor, an electronic recording device, or digital memory.
• the system 80 can include one or more device packages 82 which are mechanically and electrically connected to the system 80, e.g., by way of one or more motherboards.
• Each package 82 can comprise one or more integrated device dies and/or bonded structures 1.
• the integrated device dies and/or bonded structures can comprise any of the integrated device packages and/or bonded structures shown and described above in connection with Figures 1A-18B.
• an integrated device package can comprise a carrier an a molding compound over a portion of an upper surface of the carrier.
• the integrated device package can comprise an integrated device die mounted to the carrier and at least partially embedded in the molding compound, the integrated device die comprising active circuitry.
• the integrated device package can comprise a stress compensation element mounted to the carrier and at least partially embedded in the molding compound, the stress compensation element spaced apart from the integrated device die, the stress compensation element comprising a dummy stress compensation element devoid of active circuitry. At least one of the stress compensation element and the integrated device die can be directly bonded to the carrier without an adhesive.
• an integrated device package in another embodiment, can include a molding compound and an integrated device die at least partially embedded in the molding compound, the integrated device die comprising active circuitry.
• the integrated device package can include a plurality of dummy stress compensation elements at least partially embedded in the molding compound, the plurality of dummy stress compensation elements devoid of active circuitry, the plurality of dummy stress compensation element spaced apart from one another by the molding compound.
• a method of forming an integrated device package can include providing a molding compound over an integrated device die and a plurality of dummy stress compensation elements, the plurality of dummy stress compensation elements spaced apart from one another by the molding compound.
• the integrated device die can comprise active circuitry.
• the plurality of dummy stress compensation elements can be devoid of active circuitry.
• an integrated device package in another embodiment, can comprise a molding compound and an integrated device die at least partially embedded in the molding compound,, the integrated device die comprising active circuitry.
• the integrated device package can comprise a stress compensation element at least partially embedded in the molding compound and spaced apart from the integrated device die. The molding compound and the stress compensation element can be exposed at an outer side edge of the integrated device package.
• an electronic component in another embodiment, can comprise a carrier having a first nonconductive field region and a first conductive contact.
• the electronic component can comprise a first element directly hybrid bonded to the carrier without an adhesive, a second nonconductive field region of the first element directly bonded to the first nonconductive field region of the carrier without an adhesive and a second conductive contact of the first element directly bonded to the first conductive contact of the carrier.
• the electronic component can comprise a second element directly bonded to the carrier without an adhesive such that only a third nonconductive field region of the second element is directly bonded to the first nonconductive field region of the carrier.
• an electronic component in another embodiment, can include a carrier having a first nonconductive field region and a first conductive contact.
• the electronic component can include a first element directly hybrid bonded to the carrier without an adhesive, a second nonconductive field region of the first element directly bonded to the first nonconductive field region of the carrier without an adhesive and a second conductive contact of the first element directly bonded to the first conductive contact of the carrier.
• the electronic component can include a second element directly bonded to the carrier without an adhesive, wherein the second element does not include any conductive contacts that are directly bonded to the carrier.
• a bonded structure can include a first reconstituted element comprising a first element and having a first side comprising a first bonding surface and a second side opposite the first side.
• the first reconstituted element can comprise a first protective material disposed about a first sidewall surface of the first element.
• the bonded structure can comprise a second reconstituted element comprising a second element and having a first side comprising a second bonding surface and a second side opposite the first side.
• the first reconstituted element can comprise a second protective material disposed about a second sidewall surface of the second element.
• the second bonding surface of the first side of the second reconstituted element can be directly bonded to the first bonding surface of the first side of the first reconstituted element without an intervening adhesive along a bonding interface.
• the first protective material can be flush with the first bonding surface and the second protective material can be flush with the second bonding surface.
• a bonded structure in another embodiment, can include a first reconstituted element comprising a first element and having a first side and a second side opposite the first side.
• the bonded structure can include a second reconstituted element comprising a second element and having a first side and a second side opposite the first side, the first side of the second reconstituted element directly bonded to the first side of the first reconstituted element without an intervening adhesive along a bonding interface.
• the bonded structure can include a protective material disposed about respective first and second side surfaces of the first and second elements.
• the bonded structure can include a nonconductive layer disposed between the first and second elements, the nonconductive layer flush with at least one of the first and second side surfaces of the first and second elements such that an interface is provided between the protective material and the nonconductive layer.
• a bonded structure in another embodiment, can include a first reconstituted wafer comprising a plurality of first elements.
• the bonded structure can comprise a second reconstituted wafer comprising a plurality of second elements.
• the first and second reconstituted wafers can be directly bonded to one another without an adhesive.
• a bonding method can include applying a first protective material over a plurality of first elements to form a first reconstituted wafer.
• the bonding method can include applying a second protective material over a plurality of second elements to form a second reconstituted wafer.
• the bonding method can include directly bonding the first reconstituted wafer to the second reconstituted wafer without an adhesive.
• a bonding method can include directly bonding a first element to a carrier without an adhesive.
• the carrier can comprise a silicon carrier with a silicon oxide layer disposed directly onto a surface of the silicon carrier.
• the silicon oxide layer can be directly bonded to the first element.
• the silicon oxide layer can comprise a native oxide layer or a thermal oxide layer.

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