KR101291434B1 - 반도체 디바이스 및 그 형성 방법 - Google Patents

반도체 디바이스 및 그 형성 방법 Download PDF

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KR101291434B1
KR101291434B1 KR1020127006922A KR20127006922A KR101291434B1 KR 101291434 B1 KR101291434 B1 KR 101291434B1 KR 1020127006922 A KR1020127006922 A KR 1020127006922A KR 20127006922 A KR20127006922 A KR 20127006922A KR 101291434 B1 KR101291434 B1 KR 101291434B1
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layer
insulating layer
oxide
electrode layer
gate
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KR20120045052A (ko
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？뻬이 야마자끼
미유끼 호소바
준이찌로 사까따
히데아끼 구와바라
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가부시키가이샤 한도오따이 에네루기 켄큐쇼
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    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
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    • H10D86/0221—Manufacture or treatment of multiple TFTs comprising manufacture, treatment or patterning of TFT semiconductor bodies
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    • G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0264—Details of driving circuits
    • G09G2310/0286—Details of a shift registers arranged for use in a driving circuit
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/08—Details of timing specific for flat panels, other than clock recovery
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/344—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on particles moving in a fluid or in a gas, e.g. electrophoretic devices
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3674—Details of drivers for scan electrodes
    • G09G3/3677—Details of drivers for scan electrodes suitable for active matrices only

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
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  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Geometry (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Shift Register Type Memory (AREA)
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TW201727923A (zh) 2017-08-01
JP5420778B2 (ja) 2014-02-19
JP2024097801A (ja) 2024-07-19
KR20220048050A (ko) 2022-04-19
US20220043314A1 (en) 2022-02-10
US8772093B2 (en) 2014-07-08
JP6757782B2 (ja) 2020-09-23
TWI647855B (zh) 2019-01-11
WO2011013522A1 (en) 2011-02-03
KR20200003940A (ko) 2020-01-10
US9142570B2 (en) 2015-09-22
JP5618675B2 (ja) 2014-11-05
JP2011049548A (ja) 2011-03-10
US20130175526A1 (en) 2013-07-11
KR20210055804A (ko) 2021-05-17
US20190019895A1 (en) 2019-01-17
US20130130437A1 (en) 2013-05-23
KR102057299B1 (ko) 2019-12-18
TWI594441B (zh) 2017-08-01
US10680111B2 (en) 2020-06-09
JP2015159298A (ja) 2015-09-03
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US20170084750A1 (en) 2017-03-23
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US20200335632A1 (en) 2020-10-22
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US11106101B2 (en) 2021-08-31
JP2017102465A (ja) 2017-06-08
TWI525832B (zh) 2016-03-11
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JP7715871B2 (ja) 2025-07-30
US8384079B2 (en) 2013-02-26
US9515192B2 (en) 2016-12-06
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JP2017069575A (ja) 2017-04-06
TW201613111A (en) 2016-04-01
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KR102386147B1 (ko) 2022-04-14
US10079306B2 (en) 2018-09-18
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JP6437512B2 (ja) 2018-12-12
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