JP2011228695A5 - - Google Patents
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- Publication number
- JP2011228695A5 JP2011228695A5 JP2011079327A JP2011079327A JP2011228695A5 JP 2011228695 A5 JP2011228695 A5 JP 2011228695A5 JP 2011079327 A JP2011079327 A JP 2011079327A JP 2011079327 A JP2011079327 A JP 2011079327A JP 2011228695 A5 JP2011228695 A5 JP 2011228695A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor film
- drain electrode
- source electrode
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 claims 32
- 229910044991 metal oxide Inorganic materials 0.000 claims 14
- 150000004706 metal oxides Chemical class 0.000 claims 14
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 6
- 229910052733 gallium Inorganic materials 0.000 claims 6
- 229910052760 oxygen Inorganic materials 0.000 claims 6
- 239000001301 oxygen Substances 0.000 claims 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 2
- 229910052725 zinc Inorganic materials 0.000 claims 2
- 239000011701 zinc Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011079327A JP5450498B2 (ja) | 2010-04-02 | 2011-03-31 | 半導体装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010086407 | 2010-04-02 | ||
| JP2010086407 | 2010-04-02 | ||
| JP2011079327A JP5450498B2 (ja) | 2010-04-02 | 2011-03-31 | 半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013266447A Division JP5819393B2 (ja) | 2010-04-02 | 2013-12-25 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011228695A JP2011228695A (ja) | 2011-11-10 |
| JP2011228695A5 true JP2011228695A5 (enExample) | 2013-08-08 |
| JP5450498B2 JP5450498B2 (ja) | 2014-03-26 |
Family
ID=44708582
Family Applications (10)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011079327A Active JP5450498B2 (ja) | 2010-04-02 | 2011-03-31 | 半導体装置 |
| JP2013266447A Active JP5819393B2 (ja) | 2010-04-02 | 2013-12-25 | 半導体装置 |
| JP2015193604A Active JP6049833B2 (ja) | 2010-04-02 | 2015-09-30 | 半導体装置 |
| JP2016226758A Withdrawn JP2017055134A (ja) | 2010-04-02 | 2016-11-22 | 半導体装置 |
| JP2018121896A Expired - Fee Related JP6537680B2 (ja) | 2010-04-02 | 2018-06-27 | 半導体装置 |
| JP2019104618A Expired - Fee Related JP6771618B2 (ja) | 2010-04-02 | 2019-06-04 | 半導体装置 |
| JP2020163227A Withdrawn JP2020205453A (ja) | 2010-04-02 | 2020-09-29 | 半導体装置 |
| JP2022107508A Active JP7416867B2 (ja) | 2010-04-02 | 2022-07-04 | 半導体装置 |
| JP2024000075A Active JP7659091B2 (ja) | 2010-04-02 | 2024-01-04 | 半導体装置 |
| JP2025052861A Active JP7804809B2 (ja) | 2010-04-02 | 2025-03-27 | 半導体装置 |
Family Applications After (9)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013266447A Active JP5819393B2 (ja) | 2010-04-02 | 2013-12-25 | 半導体装置 |
| JP2015193604A Active JP6049833B2 (ja) | 2010-04-02 | 2015-09-30 | 半導体装置 |
| JP2016226758A Withdrawn JP2017055134A (ja) | 2010-04-02 | 2016-11-22 | 半導体装置 |
| JP2018121896A Expired - Fee Related JP6537680B2 (ja) | 2010-04-02 | 2018-06-27 | 半導体装置 |
| JP2019104618A Expired - Fee Related JP6771618B2 (ja) | 2010-04-02 | 2019-06-04 | 半導体装置 |
| JP2020163227A Withdrawn JP2020205453A (ja) | 2010-04-02 | 2020-09-29 | 半導体装置 |
| JP2022107508A Active JP7416867B2 (ja) | 2010-04-02 | 2022-07-04 | 半導体装置 |
| JP2024000075A Active JP7659091B2 (ja) | 2010-04-02 | 2024-01-04 | 半導体装置 |
| JP2025052861A Active JP7804809B2 (ja) | 2010-04-02 | 2025-03-27 | 半導体装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (7) | US8502221B2 (enExample) |
| JP (10) | JP5450498B2 (enExample) |
| KR (7) | KR101391964B1 (enExample) |
| CN (3) | CN102834922B (enExample) |
| TW (5) | TWI524523B (enExample) |
| WO (1) | WO2011122364A1 (enExample) |
Families Citing this family (122)
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| US9190522B2 (en) | 2010-04-02 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor |
| US9147768B2 (en) | 2010-04-02 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor and a metal oxide film |
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