JP3143307B2 - インクジェット記録ヘッドの製造方法 - Google Patents

インクジェット記録ヘッドの製造方法

Info

Publication number
JP3143307B2
JP3143307B2 JP06010078A JP1007894A JP3143307B2 JP 3143307 B2 JP3143307 B2 JP 3143307B2 JP 06010078 A JP06010078 A JP 06010078A JP 1007894 A JP1007894 A JP 1007894A JP 3143307 B2 JP3143307 B2 JP 3143307B2
Authority
JP
Japan
Prior art keywords
ink
resin layer
coating
coating resin
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP06010078A
Other languages
English (en)
Japanese (ja)
Other versions
JPH06286149A (ja
Inventor
典夫 大熊
環樹 佐藤
昌士 宮川
源次 稲田
博彰 戸島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP06010078A priority Critical patent/JP3143307B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to AT94101556T priority patent/ATE166836T1/de
Priority to KR1019940001857A priority patent/KR0152452B1/ko
Priority to EP94101556A priority patent/EP0609860B1/fr
Priority to DE69410648T priority patent/DE69410648T2/de
Priority to CN94102753A priority patent/CN1080645C/zh
Priority to ES94101556T priority patent/ES2116478T3/es
Publication of JPH06286149A publication Critical patent/JPH06286149A/ja
Priority to US08/392,686 priority patent/US5478606A/en
Application granted granted Critical
Publication of JP3143307B2 publication Critical patent/JP3143307B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/07—Ink jet characterised by jet control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP06010078A 1993-02-03 1994-01-31 インクジェット記録ヘッドの製造方法 Expired - Lifetime JP3143307B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP06010078A JP3143307B2 (ja) 1993-02-03 1994-01-31 インクジェット記録ヘッドの製造方法
KR1019940001857A KR0152452B1 (ko) 1993-02-03 1994-02-02 잉크 제트 기록 헤드 제조 방법
EP94101556A EP0609860B1 (fr) 1993-02-03 1994-02-02 Méthode pour la fabrication d'une tête à jet d'encre
DE69410648T DE69410648T2 (de) 1993-02-03 1994-02-02 Herstellungsverfahren für einen Tintenstrahlaufzeichnungskopf
AT94101556T ATE166836T1 (de) 1993-02-03 1994-02-02 Herstellungsverfahren für einen tintenstrahlaufzeichnungskopf
CN94102753A CN1080645C (zh) 1993-02-03 1994-02-02 喷墨记录头的制造方法
ES94101556T ES2116478T3 (es) 1993-02-03 1994-02-02 Metodo para la fabricacion de un cabezal para impresion por chorros de tinta.
US08/392,686 US5478606A (en) 1993-02-03 1995-02-23 Method of manufacturing ink jet recording head

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1623893 1993-02-03
JP5-16238 1993-02-03
JP06010078A JP3143307B2 (ja) 1993-02-03 1994-01-31 インクジェット記録ヘッドの製造方法

Publications (2)

Publication Number Publication Date
JPH06286149A JPH06286149A (ja) 1994-10-11
JP3143307B2 true JP3143307B2 (ja) 2001-03-07

Family

ID=26345271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06010078A Expired - Lifetime JP3143307B2 (ja) 1993-02-03 1994-01-31 インクジェット記録ヘッドの製造方法

Country Status (8)

Country Link
US (1) US5478606A (fr)
EP (1) EP0609860B1 (fr)
JP (1) JP3143307B2 (fr)
KR (1) KR0152452B1 (fr)
CN (1) CN1080645C (fr)
AT (1) ATE166836T1 (fr)
DE (1) DE69410648T2 (fr)
ES (1) ES2116478T3 (fr)

Cited By (15)

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US6951380B2 (en) 2002-07-10 2005-10-04 Canon Kabushiki Kaisha Method of manufacturing microstructure, method of manufacturing liquid discharge head, and liquid discharge head
US6960424B2 (en) 2001-07-11 2005-11-01 Canon Kabushiki Kaisha Method for manufacturing microstructure, method for manufacturing liquid discharge head, and liquid discharge head
US7063799B2 (en) 2002-12-27 2006-06-20 Canon Kabushiki Kaisha Ink jet recording head, manufacturing method therefor, and substrate for ink jet recording head manufacture
US7575851B2 (en) 2004-06-28 2009-08-18 Canon Kabushiki Kaisha Cationic photopolymerizable epoxy resin composition, minute structural member using the same and method for manufacturing minute structural member
US7592131B2 (en) 2002-07-10 2009-09-22 Canon Kabushiki Kaisha Method for producing fine structured member, method for producing fine hollow structured member and method for producing liquid discharge head
US7629111B2 (en) 2004-06-28 2009-12-08 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
US7658469B2 (en) 2003-07-22 2010-02-09 Canon Kabushiki Kaisha Ink jet head and its manufacture method
US8211719B2 (en) 2009-09-24 2012-07-03 Canon Kabushiki Kaisha Method of processing substrate and method of manufacturing substrate for use in liquid ejection head
US8227043B2 (en) 2004-06-28 2012-07-24 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
WO2013115393A1 (fr) 2012-01-31 2013-08-08 Canon Kabushiki Kaisha Composition de résine négative photosensible, structure fine, procédé de production d'une structure fine et tête de sortie de liquide
US8945818B2 (en) 2013-05-02 2015-02-03 Canon Kabushiki Kaisha Method of manufacturing liquid ejection head
US9096063B2 (en) 2012-01-24 2015-08-04 Canon Kabushiki Kaisha Liquid ejection head and method of manufacturing same
US9102145B2 (en) 2012-04-10 2015-08-11 Canon Kabushiki Kaisha Liquid ejecting head and method for producing the same
US9205654B2 (en) 2013-06-06 2015-12-08 Canon Kabushiki Kaisha Method of manufacturing a liquid ejection head
US9707757B2 (en) 2013-04-10 2017-07-18 Canon Kabushiki Kaisha Photosensitive negative resin composition

Families Citing this family (166)

* Cited by examiner, † Cited by third party
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JP3283979B2 (ja) * 1993-11-12 2002-05-20 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JP3143308B2 (ja) 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3236458B2 (ja) * 1994-11-22 2001-12-10 キヤノン株式会社 インクジェット記録ヘッド
DE69509862T2 (de) * 1994-12-05 2000-03-09 Canon K.K. Verfahren zur Herstellung eines Tintenstrahlkopfes
JP3229146B2 (ja) * 1994-12-28 2001-11-12 キヤノン株式会社 液体噴射ヘッドおよびその製造方法
US5983486A (en) * 1995-03-10 1999-11-16 Canon Kabushiki Kaisha Process for producing ink jet head
US6461798B1 (en) * 1995-03-31 2002-10-08 Canon Kabushiki Kaisha Process for the production of an ink jet head
JP3368094B2 (ja) * 1995-04-21 2003-01-20 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3459703B2 (ja) * 1995-06-20 2003-10-27 キヤノン株式会社 インクジェットヘッドの製造方法、およびインクジェットヘッド
JP3361916B2 (ja) * 1995-06-28 2003-01-07 シャープ株式会社 微小構造の形成方法
JP3343875B2 (ja) * 1995-06-30 2002-11-11 キヤノン株式会社 インクジェットヘッドの製造方法
US5790154A (en) * 1995-12-08 1998-08-04 Hitachi Koki Co., Ltd. Method of manufacturing an ink ejection recording head and a recording apparatus using the recording head
US6123863A (en) * 1995-12-22 2000-09-26 Canon Kabushiki Kaisha Process for producing liquid-jet recording head, liquid-jet recording head produced thereby, and recording apparatus equipped with recording head
JP3372739B2 (ja) 1996-01-12 2003-02-04 キヤノン株式会社 液体噴射記録ヘッドの製造方法
DE69724875T2 (de) * 1996-06-26 2004-07-22 Canon K.K. Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat
US5820771A (en) * 1996-09-12 1998-10-13 Xerox Corporation Method and materials, including polybenzoxazole, for fabricating an ink-jet printhead
US6137510A (en) * 1996-11-15 2000-10-24 Canon Kabushiki Kaisha Ink jet head
US5907333A (en) * 1997-03-28 1999-05-25 Lexmark International, Inc. Ink jet print head containing a radiation curable resin layer
CN1080646C (zh) * 1997-10-21 2002-03-13 研能科技股份有限公司 形成喷墨头电阻层的方法
CN1073938C (zh) * 1997-10-21 2001-10-31 研能科技股份有限公司 快速粘合喷墨头的喷孔片的方法
JP3619036B2 (ja) 1997-12-05 2005-02-09 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US6409931B1 (en) 1998-01-26 2002-06-25 Canon Kabushiki Kaisha Method of producing ink jet recording head and ink jet recording head
US6303274B1 (en) * 1998-03-02 2001-10-16 Hewlett-Packard Company Ink chamber and orifice shape variations in an ink-jet orifice plate
US6379571B1 (en) 1998-06-11 2002-04-30 Canon Kabushiki Kaisha Etching method for processing substrate, dry etching method for polyetheramide resin layer, production method of ink-jet printing head, ink-jet head and ink-jet printing apparatus
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JP4497633B2 (ja) 1999-03-15 2010-07-07 キヤノン株式会社 撥液体層の形成方法及び液体吐出ヘッドの製造方法
EP1057642B1 (fr) 1999-06-04 2003-11-19 Canon Kabushiki Kaisha Procédé de fabrication d'une tête d'éjection de liquide, tête résultante, et procédé de fabrication d'un appareil mécanique minuscule
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US6364455B1 (en) * 1999-06-29 2002-04-02 Wisertek International Corporation Printhead of ink jet printing apparatus and manufacturing method therefor
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CN1111117C (zh) * 2000-01-12 2003-06-11 威硕科技股份有限公司 用于打印装置的喷墨头的制造方法
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JP2004181901A (ja) 2002-12-06 2004-07-02 Fuji Xerox Co Ltd インクジェット記録ヘッド及びその製造方法
JP4078295B2 (ja) 2002-12-27 2008-04-23 キヤノン株式会社 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
CN100581824C (zh) 2003-02-13 2010-01-20 佳能株式会社 喷墨记录喷头用基板的制造方法
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US7029099B2 (en) * 2003-10-30 2006-04-18 Eastman Kodak Company Method of producing ink jet chambers using photo-imageable materials
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JP4522086B2 (ja) 2003-12-15 2010-08-11 キヤノン株式会社 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法
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CN1080645C (zh) 2002-03-13
DE69410648D1 (de) 1998-07-09
EP0609860A3 (en) 1995-08-16
EP0609860A2 (fr) 1994-08-10
KR0152452B1 (ko) 1998-12-01
US5478606A (en) 1995-12-26
KR940019477A (ko) 1994-09-14
ES2116478T3 (es) 1998-07-16
EP0609860B1 (fr) 1998-06-03
JPH06286149A (ja) 1994-10-11
ATE166836T1 (de) 1998-06-15
CN1104585A (zh) 1995-07-05

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