DE69127801T2 - Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf - Google Patents

Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf

Info

Publication number
DE69127801T2
DE69127801T2 DE69127801T DE69127801T DE69127801T2 DE 69127801 T2 DE69127801 T2 DE 69127801T2 DE 69127801 T DE69127801 T DE 69127801T DE 69127801 T DE69127801 T DE 69127801T DE 69127801 T2 DE69127801 T2 DE 69127801T2
Authority
DE
Germany
Prior art keywords
ink
material layer
photosensitive material
forming
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69127801T
Other languages
English (en)
Other versions
DE69127801D1 (de
Inventor
Masashi Miyagawa
Masanori Takenouchi
Katsuhiro Shirota
Norio Ohkuma
Yoshihisa Takizawa
Toshiharu Inui
Kazuhiro Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP41176990A external-priority patent/JPH04219249A/ja
Priority claimed from JP41174990A external-priority patent/JPH04216954A/ja
Priority claimed from JP2411595A external-priority patent/JP2781466B2/ja
Priority claimed from JP41174590A external-priority patent/JPH04216953A/ja
Priority claimed from JP41174090A external-priority patent/JP2694054B2/ja
Priority claimed from JP41175990A external-priority patent/JPH04216955A/ja
Priority claimed from JP3286272A external-priority patent/JP2925816B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69127801D1 publication Critical patent/DE69127801D1/de
Application granted granted Critical
Publication of DE69127801T2 publication Critical patent/DE69127801T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
DE69127801T 1990-12-19 1991-12-18 Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf Expired - Fee Related DE69127801T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP41174990A JPH04216954A (ja) 1990-12-19 1990-12-19 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置
JP2411595A JP2781466B2 (ja) 1990-12-19 1990-12-19 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置
JP41174590A JPH04216953A (ja) 1990-12-19 1990-12-19 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置
JP41174090A JP2694054B2 (ja) 1990-12-19 1990-12-19 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置
JP41175990A JPH04216955A (ja) 1990-12-19 1990-12-19 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置
JP41176990A JPH04219249A (ja) 1990-12-19 1990-12-19 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置
JP3286272A JP2925816B2 (ja) 1991-10-31 1991-10-31 液体噴射記録ヘッド、その製造方法、及び同ヘッドを具備した記録装置

Publications (2)

Publication Number Publication Date
DE69127801D1 DE69127801D1 (de) 1997-11-06
DE69127801T2 true DE69127801T2 (de) 1998-02-05

Family

ID=27566824

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69127801T Expired - Fee Related DE69127801T2 (de) 1990-12-19 1991-12-18 Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf

Country Status (4)

Country Link
US (1) US5331344A (de)
EP (1) EP0491560B1 (de)
AT (1) ATE158754T1 (de)
DE (1) DE69127801T2 (de)

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JP2960608B2 (ja) * 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
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JP3143308B2 (ja) * 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
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JP3372739B2 (ja) * 1996-01-12 2003-02-04 キヤノン株式会社 液体噴射記録ヘッドの製造方法
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US6180723B1 (en) * 1999-04-27 2001-01-30 Donald J. Keehan Epoxy resin prepared by reacting poly-p-hydroxystyrene with epichlorohydrin
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US6520627B2 (en) 2000-06-26 2003-02-18 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
US6682187B2 (en) * 2000-09-13 2004-01-27 Tomomi Yoshizawa Ink-jet recording method
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US6409312B1 (en) 2001-03-27 2002-06-25 Lexmark International, Inc. Ink jet printer nozzle plate and process therefor
US6684504B2 (en) * 2001-04-09 2004-02-03 Lexmark International, Inc. Method of manufacturing an imageable support matrix for printhead nozzle plates
JP4532785B2 (ja) 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
US6986982B2 (en) * 2002-02-20 2006-01-17 Canon Kabushiki Kaisha Resist material and method of manufacturing inkjet recording head using the same
KR20040099103A (ko) * 2002-04-10 2004-11-26 소니 가부시끼 가이샤 액체 토출 헤드, 액체 토출 장치 및 액체 토출 헤드의제조 방법
JP2004042389A (ja) * 2002-07-10 2004-02-12 Canon Inc 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド
JP4298414B2 (ja) * 2002-07-10 2009-07-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP4280574B2 (ja) * 2002-07-10 2009-06-17 キヤノン株式会社 液体吐出ヘッドの製造方法
FR2849222B1 (fr) * 2002-12-20 2005-10-21 Commissariat Energie Atomique Microstructure comportant une couche d'adherence et procede de fabrication d'une telle microstructure
US6773869B1 (en) * 2003-04-24 2004-08-10 Lexmark International, Inc. Inkjet printhead nozzle plate
DE10353767B4 (de) * 2003-11-17 2005-09-29 Infineon Technologies Ag Vorrichtung zur Häusung einer mikromechanischen Struktur und Verfahren zur Herstellung derselben
CN1977219B (zh) 2004-06-28 2011-12-28 佳能株式会社 制造微细结构的方法、制造排液头的方法以及排液头
JP4480141B2 (ja) 2004-06-28 2010-06-16 キヤノン株式会社 インクジェット記録ヘッドの製造方法
TWI289511B (en) * 2004-11-22 2007-11-11 Canon Kk Method of manufacturing liquid discharge head, and liquid discharge head
JP5027991B2 (ja) * 2004-12-03 2012-09-19 キヤノン株式会社 インクジェットヘッドおよびその製造方法
KR100654802B1 (ko) * 2004-12-03 2006-12-08 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
US7254890B2 (en) * 2004-12-30 2007-08-14 Lexmark International, Inc. Method of making a microfluid ejection head structure
US7735965B2 (en) * 2005-03-31 2010-06-15 Lexmark International Inc. Overhanging nozzles
JP2006347072A (ja) * 2005-06-17 2006-12-28 Canon Inc 液体吐出ヘッドの製造方法、液体吐出ヘッド、および液体吐出記録装置
US20080088673A1 (en) * 2006-10-17 2008-04-17 Sexton Richard W Method of producing inkjet channels using photoimageable materials and inkjet printhead produced thereby
JP5501167B2 (ja) * 2010-09-08 2014-05-21 キヤノン株式会社 インクジェットヘッドの製造方法
US8382239B2 (en) * 2011-01-31 2013-02-26 Xerox Corporation Apparatus for removing ink from surfaces of components in a printer
JP5546504B2 (ja) 2011-07-14 2014-07-09 キヤノン株式会社 記録ヘッドの製造方法
US8684506B2 (en) * 2011-08-29 2014-04-01 Xerox Corporation Apparatus and method for collecting and expelling phase change ink in a printer
JP6270363B2 (ja) 2012-09-11 2018-01-31 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6112809B2 (ja) 2012-09-21 2017-04-12 キヤノン株式会社 液滴吐出ヘッドの製造方法
US10460330B1 (en) 2018-08-09 2019-10-29 Capital One Services, Llc Intelligent face identification

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Also Published As

Publication number Publication date
EP0491560A2 (de) 1992-06-24
EP0491560A3 (en) 1992-12-23
US5331344A (en) 1994-07-19
ATE158754T1 (de) 1997-10-15
EP0491560B1 (de) 1997-10-01
DE69127801D1 (de) 1997-11-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee