DE69329359T2 - Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes - Google Patents

Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes

Info

Publication number
DE69329359T2
DE69329359T2 DE69329359T DE69329359T DE69329359T2 DE 69329359 T2 DE69329359 T2 DE 69329359T2 DE 69329359 T DE69329359 T DE 69329359T DE 69329359 T DE69329359 T DE 69329359T DE 69329359 T2 DE69329359 T2 DE 69329359T2
Authority
DE
Germany
Prior art keywords
resin layer
ink
photosensitive resin
jet recording
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69329359T
Other languages
English (en)
Other versions
DE69329359D1 (de
Inventor
Masashi Miyagawa
Norio Ohkuma
Genji Inada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14068292A external-priority patent/JPH05330068A/ja
Priority claimed from JP14559092A external-priority patent/JPH05338181A/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69329359D1 publication Critical patent/DE69329359D1/de
Publication of DE69329359T2 publication Critical patent/DE69329359T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0015—Production of aperture devices, microporous systems or stamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
DE69329359T 1992-06-01 1993-05-28 Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes Expired - Fee Related DE69329359T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14068292A JPH05330068A (ja) 1992-06-01 1992-06-01 液体噴射記録ヘッドおよびその製造方法
JP14559092A JPH05338181A (ja) 1992-06-05 1992-06-05 液体噴射記録ヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE69329359D1 DE69329359D1 (de) 2000-10-12
DE69329359T2 true DE69329359T2 (de) 2001-03-08

Family

ID=26473124

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69329359T Expired - Fee Related DE69329359T2 (de) 1992-06-01 1993-05-28 Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes

Country Status (4)

Country Link
US (1) US5730889A (de)
EP (1) EP0572948B1 (de)
AT (1) ATE196199T1 (de)
DE (1) DE69329359T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3143308B2 (ja) 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
EP0734866B1 (de) * 1995-03-31 1999-08-11 Canon Kabushiki Kaisha Verfahren zum Herstellen eines Tintenstrahlkopfes
BR9809732A (pt) * 1997-06-06 2000-07-11 Minnesota Mining & Mfg Estrutura de caneta impressora a jato de tinta, processo de prover um sistema de união em uma caneta impressora de jato de tinta, impressora a jato de tinta, e, sistema impressor
CA2253409C (en) * 1998-11-04 2003-06-17 Microjet Technology Co., Ltd. Method and device for manufacturing ink jet printhead
US6441349B1 (en) * 2000-04-26 2002-08-27 Advanced Micro Devices System for facilitating uniform heating temperature of photoresist
JP4532785B2 (ja) * 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
JP4182329B2 (ja) * 2001-09-28 2008-11-19 セイコーエプソン株式会社 圧電体薄膜素子およびその製造方法、ならびにこれを用いた液体吐出ヘッド及び液体吐出装置
JP4298414B2 (ja) * 2002-07-10 2009-07-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2004042389A (ja) * 2002-07-10 2004-02-12 Canon Inc 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド
US6773869B1 (en) * 2003-04-24 2004-08-10 Lexmark International, Inc. Inkjet printhead nozzle plate
JP4424750B2 (ja) * 2003-07-22 2010-03-03 キヤノン株式会社 インクジェットヘッドおよびその製造方法
US7658469B2 (en) * 2003-07-22 2010-02-09 Canon Kabushiki Kaisha Ink jet head and its manufacture method
KR100538230B1 (ko) * 2003-09-27 2005-12-21 삼성전자주식회사 모놀리틱 잉크젯 프린트헤드의 제조방법
US7325309B2 (en) 2004-06-08 2008-02-05 Hewlett-Packard Development Company, L.P. Method of manufacturing a fluid ejection device with a dry-film photo-resist layer
CN1977219B (zh) * 2004-06-28 2011-12-28 佳能株式会社 制造微细结构的方法、制造排液头的方法以及排液头
KR100641358B1 (ko) * 2004-09-23 2006-11-01 삼성전자주식회사 광경화성 수지 조성물을 사용한 잉크젯 프린트 헤드의제조방법
JP4614383B2 (ja) * 2004-12-09 2011-01-19 キヤノン株式会社 インクジェット記録ヘッドの製造方法、及びインクジェット記録ヘッド
JP4667028B2 (ja) * 2004-12-09 2011-04-06 キヤノン株式会社 構造体の形成方法及びインクジェット記録ヘッドの製造方法
US7654637B2 (en) * 2005-09-30 2010-02-02 Lexmark International, Inc Photoimageable nozzle members and methods relating thereto
US7571979B2 (en) * 2005-09-30 2009-08-11 Lexmark International, Inc. Thick film layers and methods relating thereto
US7523553B2 (en) * 2006-02-02 2009-04-28 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
JP2008023715A (ja) * 2006-07-18 2008-02-07 Canon Inc 液体吐出ヘッドおよびその製造方法
US20080259134A1 (en) * 2007-04-20 2008-10-23 Hewlett-Packard Development Company Lp Print head laminate
CN104441995B (zh) * 2013-09-22 2016-08-10 珠海赛纳打印科技股份有限公司 液体喷墨头的制造方法、液体喷墨头和打印设备

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JPH0698755B2 (ja) * 1986-04-28 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法
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JPH04312854A (ja) * 1991-04-10 1992-11-04 Canon Inc 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置

Also Published As

Publication number Publication date
EP0572948A1 (de) 1993-12-08
US5730889A (en) 1998-03-24
ATE196199T1 (de) 2000-09-15
DE69329359D1 (de) 2000-10-12
EP0572948B1 (de) 2000-09-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee