JP5701119B2 - 液体吐出ヘッドの製造方法 - Google Patents
液体吐出ヘッドの製造方法 Download PDFInfo
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- JP5701119B2 JP5701119B2 JP2011064162A JP2011064162A JP5701119B2 JP 5701119 B2 JP5701119 B2 JP 5701119B2 JP 2011064162 A JP2011064162 A JP 2011064162A JP 2011064162 A JP2011064162 A JP 2011064162A JP 5701119 B2 JP5701119 B2 JP 5701119B2
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- forming
- Prior art date
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- 239000007788 liquid Substances 0.000 title claims description 98
- 238000000034 method Methods 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000428 dust Substances 0.000 claims description 63
- 239000000463 material Substances 0.000 claims description 46
- 239000011347 resin Substances 0.000 claims description 40
- 229920005989 resin Polymers 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 35
- 238000000576 coating method Methods 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 10
- 239000010410 layer Substances 0.000 description 111
- 238000000206 photolithography Methods 0.000 description 9
- 239000000470 constituent Substances 0.000 description 6
- 238000004528 spin coating Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005187 foaming Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N isopropyl alcohol Natural products CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 229940057867 methyl lactate Drugs 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- XIXADJRWDQXREU-UHFFFAOYSA-M lithium acetate Chemical compound [Li+].CC([O-])=O XIXADJRWDQXREU-UHFFFAOYSA-M 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Description
液体を吐出するためのエネルギーを発生するエネルギー発生素子、および該液体流路に連通する液体供給口を有する基板と
を含むノズルチップを備える液体吐出ヘッドであって、
該液体供給口と該液体流路との間にフィルター層が形成されており、
該フィルター層が、
液体流量を確保するための、吐出口径以下の開口径を有する貫通孔と、
液体中のゴミを捕獲するための、先端を液体供給口側にして該貫通孔よりも液体供給口側に配置される先細状構造体からなるゴミ捕集用突起体と
を有する液体吐出ヘッドを製造する方法であって、
(1)エネルギー発生素子を有する基板上に、前記ゴミ捕集用突起体の形状を決定するための樹脂パターンを形成する工程と、
(2)該樹脂パターンに材料層を被覆し、該材料層に前記貫通孔を形成して、前記フィルター層を形成する工程と、
(3)該フィルター層上に、前記液体流路を形成するための型材を形成する工程と、
(4)該型材上に感光性樹脂層を被覆し、該感光性樹脂層に前記吐出口を形成する工程と、
(5)該液体流路を形成するための型材を除去する工程と、
(6)前記基板に前記液体供給口を形成する工程と
を有することを特徴とする。
以下、本発明の実施例について図3および図4をもとに具体的に説明する。
1a・・吐出口
1b・・インク流路
2・・・インク吐出用駆動回路が形成された基板
3・・・ゴミ捕集用突起体
4・・・ゴミ捕集用突起体形成用レジスト層
5・・・ゴミ捕集用突起体形成用レジストパターン
7・・・貫通孔形成用レジスト層
7a・・貫通孔形成用レジストパターン
8・・・貫通孔
9・・・インク流路を形成するための型材
10・・インク中に混入しているゴミの代表例
11・・フィルター層
11a・貫通孔が形成されたゴミ捕集用突起体側の面
12・・インク供給口
13・・材料層
Claims (3)
- 液体を吐出するための複数の吐出口、および各吐出口に連通する液体流路を有する被覆樹脂層と、
液体を吐出するためのエネルギーを発生するエネルギー発生素子、および該液体流路に連通する液体供給口を有する基板と
を含むノズルチップを備える液体吐出ヘッドであって、
該液体供給口と該液体流路との間にフィルター層が形成されており、
該フィルター層が、
液体流量を確保するための、吐出口径以下の開口径を有する貫通孔と、
液体中のゴミを捕獲するための、先端を液体供給口側にして該貫通孔よりも液体供給口側に配置される先細状構造体からなるゴミ捕集用突起体と
を有する液体吐出ヘッドを製造する方法であって、
(1)エネルギー発生素子を有する基板上に、前記ゴミ捕集用突起体の形状を決定するための樹脂パターンを形成する工程と、
(2)該樹脂パターンに材料層を被覆し、該材料層に前記貫通孔を形成して、前記フィルター層を形成する工程と、
(3)該フィルター層上に、前記液体流路を形成するための型材を形成する工程と、
(4)該型材上に感光性樹脂層を被覆し、該感光性樹脂層に前記吐出口を形成する工程と、
(5)該液体流路を形成するための型材を除去する工程と、
(6)前記基板に前記液体供給口を形成する工程と
を有することを特徴とする液体吐出ヘッドの製造方法。 - 前記ゴミ捕集用突起体が、前記貫通孔1つに対して3つ以上配置され、各突起体が該貫通孔を取り囲むように形成されていることを特徴とする請求項1記載の液体吐出ヘッドの製造方法。
- 前記ゴミ捕集用突起体の側面と、前記貫通孔が形成された該ゴミ捕集用突起体側のフィルター層の面とが、該ゴミ捕集用突起体の外部になす角度が、鈍角であることを特徴とする請求項1または2に記載の液体吐出ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011064162A JP5701119B2 (ja) | 2011-03-23 | 2011-03-23 | 液体吐出ヘッドの製造方法 |
US13/420,834 US8544997B2 (en) | 2011-03-23 | 2012-03-15 | Liquid ejection head and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011064162A JP5701119B2 (ja) | 2011-03-23 | 2011-03-23 | 液体吐出ヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012196944A JP2012196944A (ja) | 2012-10-18 |
JP5701119B2 true JP5701119B2 (ja) | 2015-04-15 |
Family
ID=46877007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011064162A Expired - Fee Related JP5701119B2 (ja) | 2011-03-23 | 2011-03-23 | 液体吐出ヘッドの製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8544997B2 (ja) |
JP (1) | JP5701119B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6230279B2 (ja) * | 2013-06-06 | 2017-11-15 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP7066418B2 (ja) * | 2018-01-17 | 2022-05-13 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
JP7150500B2 (ja) * | 2018-07-04 | 2022-10-11 | キヤノン株式会社 | 液体吐出ヘッドおよび液体吐出ヘッドの製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3143307B2 (ja) | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
US6309054B1 (en) * | 1998-10-23 | 2001-10-30 | Hewlett-Packard Company | Pillars in a printhead |
CN1162276C (zh) * | 1999-10-06 | 2004-08-18 | 精工爱普生株式会社 | 具有自动消除过滤器中所捕获气泡的连接部件的喷墨打印机 |
US6199980B1 (en) * | 1999-11-01 | 2001-03-13 | Xerox Corporation | Efficient fluid filtering device and an ink jet printhead including the same |
JP2001150676A (ja) * | 1999-11-30 | 2001-06-05 | Ricoh Co Ltd | インクジェットヘッド |
JP4455282B2 (ja) | 2003-11-28 | 2010-04-21 | キヤノン株式会社 | インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ |
JP4845692B2 (ja) * | 2005-12-02 | 2011-12-28 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP2007203623A (ja) * | 2006-02-02 | 2007-08-16 | Canon Inc | インクジェット記録ヘッド及びその製造方法 |
US7959277B2 (en) * | 2008-11-18 | 2011-06-14 | Xerox Corporation | Air filter for use with a liquid ink umbilical interface in a printer |
-
2011
- 2011-03-23 JP JP2011064162A patent/JP5701119B2/ja not_active Expired - Fee Related
-
2012
- 2012-03-15 US US13/420,834 patent/US8544997B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US8544997B2 (en) | 2013-10-01 |
JP2012196944A (ja) | 2012-10-18 |
US20120242747A1 (en) | 2012-09-27 |
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