JP2011109118A5 - - Google Patents

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Publication number
JP2011109118A5
JP2011109118A5 JP2010291513A JP2010291513A JP2011109118A5 JP 2011109118 A5 JP2011109118 A5 JP 2011109118A5 JP 2010291513 A JP2010291513 A JP 2010291513A JP 2010291513 A JP2010291513 A JP 2010291513A JP 2011109118 A5 JP2011109118 A5 JP 2011109118A5
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JP
Japan
Prior art keywords
layer
metal layer
diode
reflective
semiconductor
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JP2010291513A
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Japanese (ja)
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JP5723146B2 (ja
JP2011109118A (ja
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Priority claimed from US10/118,317 external-priority patent/US8294172B2/en
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Publication of JP2011109118A publication Critical patent/JP2011109118A/ja
Publication of JP2011109118A5 publication Critical patent/JP2011109118A5/ja
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Publication of JP5723146B2 publication Critical patent/JP5723146B2/ja
Anticipated expiration legal-status Critical
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JP2010291513A 2002-04-09 2010-12-28 金属支持膜を使用した縦方向デバイスの製作方法 Expired - Lifetime JP5723146B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/118,317 US8294172B2 (en) 2002-04-09 2002-04-09 Method of fabricating vertical devices using a metal support film
US10/118,317 2002-04-09

Related Parent Applications (1)

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JP2003585155A Division JP2005522875A (ja) 2002-04-09 2003-03-31 金属支持膜を使用した縦方向デバイスの製作方法

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JP2014081148A Division JP5859053B2 (ja) 2002-04-09 2014-04-10 金属支持膜を使用した縦方向デバイスの製作方法

Publications (3)

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JP2011109118A JP2011109118A (ja) 2011-06-02
JP2011109118A5 true JP2011109118A5 (enExample) 2012-12-13
JP5723146B2 JP5723146B2 (ja) 2015-05-27

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JP2003585155A Pending JP2005522875A (ja) 2002-04-09 2003-03-31 金属支持膜を使用した縦方向デバイスの製作方法
JP2010291513A Expired - Lifetime JP5723146B2 (ja) 2002-04-09 2010-12-28 金属支持膜を使用した縦方向デバイスの製作方法
JP2014081148A Expired - Fee Related JP5859053B2 (ja) 2002-04-09 2014-04-10 金属支持膜を使用した縦方向デバイスの製作方法

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JP2003585155A Pending JP2005522875A (ja) 2002-04-09 2003-03-31 金属支持膜を使用した縦方向デバイスの製作方法

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JP2014081148A Expired - Fee Related JP5859053B2 (ja) 2002-04-09 2014-04-10 金属支持膜を使用した縦方向デバイスの製作方法

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US (15) US8294172B2 (enExample)
EP (4) EP1502284B1 (enExample)
JP (3) JP2005522875A (enExample)
KR (1) KR100880631B1 (enExample)
AU (1) AU2003233447A1 (enExample)
WO (1) WO2003088320A2 (enExample)

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