JP2009076907A5 - - Google Patents

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JP2009076907A5
JP2009076907A5 JP2008237865A JP2008237865A JP2009076907A5 JP 2009076907 A5 JP2009076907 A5 JP 2009076907A5 JP 2008237865 A JP2008237865 A JP 2008237865A JP 2008237865 A JP2008237865 A JP 2008237865A JP 2009076907 A5 JP2009076907 A5 JP 2009076907A5
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recess
semiconductor
stressor
silicon
blanket
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JP5382642B2 (ja
JP2009076907A (ja
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JP2008237865A 2007-09-19 2008-09-17 チャンネルに対して設計されたひずみを与えるストレッサー Active JP5382642B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/858,054 2007-09-19
US11/858,054 US7759199B2 (en) 2007-09-19 2007-09-19 Stressor for engineered strain on channel

Publications (3)

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JP2009076907A JP2009076907A (ja) 2009-04-09
JP2009076907A5 true JP2009076907A5 (enExample) 2011-10-20
JP5382642B2 JP5382642B2 (ja) 2014-01-08

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US (1) US7759199B2 (enExample)
JP (1) JP5382642B2 (enExample)
KR (1) KR101548013B1 (enExample)
TW (1) TWI509699B (enExample)

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