SG162733A1 - Circuit structure and fabrication method thereof - Google Patents

Circuit structure and fabrication method thereof

Info

Publication number
SG162733A1
SG162733A1 SG201003764-6A SG2010037646A SG162733A1 SG 162733 A1 SG162733 A1 SG 162733A1 SG 2010037646 A SG2010037646 A SG 2010037646A SG 162733 A1 SG162733 A1 SG 162733A1
Authority
SG
Singapore
Prior art keywords
over
circuit structure
semiconductor substrate
metallic posts
fabrication method
Prior art date
Application number
SG201003764-6A
Other languages
English (en)
Inventor
Lin Mou-Shiung
Chou Chien-Kang
Chen Ke-Hung
Original Assignee
Megica Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Megica Corp filed Critical Megica Corp
Publication of SG162733A1 publication Critical patent/SG162733A1/en

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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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