RU2000124872A - Генератор рисунков, использующий куф излучение - Google Patents

Генератор рисунков, использующий куф излучение

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Publication number
RU2000124872A
RU2000124872A RU2000124872/28A RU2000124872A RU2000124872A RU 2000124872 A RU2000124872 A RU 2000124872A RU 2000124872/28 A RU2000124872/28 A RU 2000124872/28A RU 2000124872 A RU2000124872 A RU 2000124872A RU 2000124872 A RU2000124872 A RU 2000124872A
Authority
RU
Russia
Prior art keywords
modulator
spatial light
paragraphs
light modulator
workpiece
Prior art date
Application number
RU2000124872/28A
Other languages
English (en)
Other versions
RU2257603C2 (ru
Inventor
Торбьерн САНДСТРЕМ
Original Assignee
Микроник Лазер Системз Аб
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE9800665A external-priority patent/SE9800665D0/xx
Application filed by Микроник Лазер Системз Аб filed Critical Микроник Лазер Системз Аб
Publication of RU2000124872A publication Critical patent/RU2000124872A/ru
Application granted granted Critical
Publication of RU2257603C2 publication Critical patent/RU2257603C2/ru

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Claims (10)

1. Устройство для создания рисунка с чрезвычайно высоким разрешением на заготовке, например, такого, как рисунок на полупроводниковом чипе с линиями шириной 50 нм, содержит источник для испускания электромагнитного излучения в КУФ диапазоне длин волн, пространственный модулятор, имеющий множество модулирующих элементов (пикселей), адаптированных для их освещения упомянутым излучением, проекционную систему, формирующую изображение модулятора на заготовке, электронную систему обработки и подачи данных, принимающую цифровое описание рисунка, подлежащего записи, выделяющую из него последовательность частичных рисунков, преобразующую упомянутые частичные рисунки в сигналы модулятора и подающую упомянутые сигналы в модулятор, прецизионную механическую систему для перемещения упомянутой заготовки и/или проекционной системы друг относительно друга, электронную систему управления, координирующую перемещение заготовки, подачу сигналов в модулятор и интенсивность излучения, так чтобы упомянутый рисунок сшивался вместе от частичных изображений, созданных последовательностью частичных рисунков.
2. Устройство по п. 1, отличающееся тем, что пространственный модулятор света является отражающим.
3. Устройство по одному из п. 1 или 2, отличающееся тем, что пространственный модулятор света имеет многозначные пиксели.
4. Устройство по одному из пп. 1-3, отличающееся тем, что оптический путь сформирован с отражающей оптикой.
5. Устройство по одному из пп. 1-4, отличающееся тем, что линза, формирующая изображение, имеет кольцеобразное поле, а пространственный модулятор света имеет кольцеобразную апертуру.
6. Устройство по одному из пп. 1-5, отличающееся тем, что оптическая схема является вакуумированной.
7. Устройство по одному из пп. 1-6, отличающееся тем, что пространственный модулятор света работает посредством явления дифракции.
8. Устройство по одному из пп. 1-7, отличающееся тем, что пространственный модулятор света представляет собой твердую пластинку из пьезоэлектрического материала с отражающей фронтальной поверхностью, которая деформируется в ответ на электрические напряжения адресации, таким образом создавая модуляцию волнового фронта.
9. Устройство по п. 8, отличающееся тем, что пространственный модулятор света подключен к активному полупроводниковому чипу.
10. Устройство по одному из пп. 1-9, отличающееся тем, что излучение составляет наклонный угол с пространственным модулятором света.
RU2000124872/28A 1998-03-02 1999-03-02 Устройство для формирования рисунков RU2257603C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9800665A SE9800665D0 (sv) 1998-03-02 1998-03-02 Improved method for projection printing using a micromirror SLM
SE9800665-3 1998-03-02

Publications (2)

Publication Number Publication Date
RU2000124872A true RU2000124872A (ru) 2002-09-27
RU2257603C2 RU2257603C2 (ru) 2005-07-27

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
RU2000124871/28A RU2232411C2 (ru) 1998-03-02 1999-03-02 Усовершенствованный генератор рисунков
RU2000124872/28A RU2257603C2 (ru) 1998-03-02 1999-03-02 Устройство для формирования рисунков

Family Applications Before (1)

Application Number Title Priority Date Filing Date
RU2000124871/28A RU2232411C2 (ru) 1998-03-02 1999-03-02 Усовершенствованный генератор рисунков

Country Status (12)

Country Link
US (16) US6687041B1 (ru)
EP (6) EP1600817B1 (ru)
JP (12) JP2002506232A (ru)
KR (2) KR100451026B1 (ru)
CN (3) CN1550902A (ru)
AT (5) ATE309557T1 (ru)
AU (7) AU3284299A (ru)
DE (6) DE69938895D1 (ru)
ES (1) ES2357473T3 (ru)
RU (2) RU2232411C2 (ru)
SE (1) SE9800665D0 (ru)
WO (7) WO1999045435A1 (ru)

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