KR102456130B1 - 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들 - Google Patents

애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들 Download PDF

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Publication number
KR102456130B1
KR102456130B1 KR1020177013333A KR20177013333A KR102456130B1 KR 102456130 B1 KR102456130 B1 KR 102456130B1 KR 1020177013333 A KR1020177013333 A KR 1020177013333A KR 20177013333 A KR20177013333 A KR 20177013333A KR 102456130 B1 KR102456130 B1 KR 102456130B1
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South Korea
Prior art keywords
polishing
precursor
polishing pad
agent
pad
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Korean (ko)
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KR20170071558A (ko
Inventor
라지브 바자즈
다니엘 레드필드
마헨드라 씨. 오리랄
보이 푸
아니루드 자그디쉬 칸나
제이슨 지. 풍
마리오 코르네호
애쉬윈 초컬링검
마유 펠리시아 야마무라
라가바 카키레디
아샤바니 쿠마르
벤카타찰람 하리하란
그레고리 이. 멩크
프레드 씨. 레데커
나그 비. 파티반들라
호우 테 응
롭 데이븐포트
암리탄슈 싱하
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Priority to KR1020227035729A priority Critical patent/KR102599583B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0045—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by stacking sheets of abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0018—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by electrolytic deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/22—Rubbers synthetic or natural
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/112—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using individual droplets, e.g. from jetting heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
KR1020177013333A 2014-10-17 2015-10-16 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들 Active KR102456130B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020227035729A KR102599583B1 (ko) 2014-10-17 2015-10-16 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201462065193P 2014-10-17 2014-10-17
US201462065270P 2014-10-17 2014-10-17
US62/065,193 2014-10-17
US62/065,270 2014-10-17
US14/695,299 US9873180B2 (en) 2014-10-17 2015-04-24 CMP pad construction with composite material properties using additive manufacturing processes
US14/695,299 2015-04-24
PCT/US2015/056077 WO2016061544A1 (en) 2014-10-17 2015-10-16 Polishing pads produced by an additive manufacturing process

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020227035729A Division KR102599583B1 (ko) 2014-10-17 2015-10-16 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들

Publications (2)

Publication Number Publication Date
KR20170071558A KR20170071558A (ko) 2017-06-23
KR102456130B1 true KR102456130B1 (ko) 2022-10-19

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KR1020177013333A Active KR102456130B1 (ko) 2014-10-17 2015-10-16 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들
KR1020227035729A Active KR102599583B1 (ko) 2014-10-17 2015-10-16 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들
KR1020227036851A Active KR102600388B1 (ko) 2014-10-17 2015-10-19 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들
KR1020177013345A Active KR102459409B1 (ko) 2014-10-17 2015-10-19 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들

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KR1020227035729A Active KR102599583B1 (ko) 2014-10-17 2015-10-16 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들
KR1020227036851A Active KR102600388B1 (ko) 2014-10-17 2015-10-19 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들
KR1020177013345A Active KR102459409B1 (ko) 2014-10-17 2015-10-19 애디티브 제조 프로세스에 의해 제조되는 폴리싱 패드들

Country Status (8)

Country Link
US (3) US9873180B2 (enExample)
EP (2) EP3712926A1 (enExample)
JP (5) JP6673912B2 (enExample)
KR (4) KR102456130B1 (enExample)
CN (8) CN111633555B (enExample)
SG (4) SG11201703113RA (enExample)
TW (9) TWI838251B (enExample)
WO (1) WO2016061544A1 (enExample)

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