JP4532827B2 - 小型シリコンコンデンサマイクロフォンおよびその製造方法 - Google Patents

小型シリコンコンデンサマイクロフォンおよびその製造方法 Download PDF

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Publication number
JP4532827B2
JP4532827B2 JP2002546465A JP2002546465A JP4532827B2 JP 4532827 B2 JP4532827 B2 JP 4532827B2 JP 2002546465 A JP2002546465 A JP 2002546465A JP 2002546465 A JP2002546465 A JP 2002546465A JP 4532827 B2 JP4532827 B2 JP 4532827B2
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layer
conductive material
housing
microphone package
transducer
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Expired - Fee Related
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Japanese (ja)
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JP2004537182A (ja
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アンソニー ディー． ミナービーニ，
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ノウレス エレクトロニクス， リミテッド ライアビリティ カンパニー
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0064—Packages or encapsulation for protecting against electromagnetic or electrostatic interferences
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/4908—Acoustic transducer

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
JP2002546465A 2000-11-28 2001-10-22 小型シリコンコンデンサマイクロフォンおよびその製造方法 Expired - Fee Related JP4532827B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25354300P 2000-11-28 2000-11-28
US09/886,854 US7166910B2 (en) 2000-11-28 2001-06-21 Miniature silicon condenser microphone
PCT/US2001/049462 WO2002045463A2 (en) 2000-11-28 2001-10-22 Miniature silicon condenser microphone and method for producing same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007250745A Division JP2008099271A (ja) 2000-11-28 2007-09-27 小型シリコンコンデンサマイクロフォンおよびその製造方法

Publications (2)

Publication Number Publication Date
JP2004537182A JP2004537182A (ja) 2004-12-09
JP4532827B2 true JP4532827B2 (ja) 2010-08-25

Family

ID=26943352

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2002546465A Expired - Fee Related JP4532827B2 (ja) 2000-11-28 2001-10-22 小型シリコンコンデンサマイクロフォンおよびその製造方法
JP2007250745A Pending JP2008099271A (ja) 2000-11-28 2007-09-27 小型シリコンコンデンサマイクロフォンおよびその製造方法
JP2009184808A Expired - Lifetime JP5216717B2 (ja) 2000-11-28 2009-08-07 小型シリコンコンデンサマイクロフォンおよびその製造方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2007250745A Pending JP2008099271A (ja) 2000-11-28 2007-09-27 小型シリコンコンデンサマイクロフォンおよびその製造方法
JP2009184808A Expired - Lifetime JP5216717B2 (ja) 2000-11-28 2009-08-07 小型シリコンコンデンサマイクロフォンおよびその製造方法

Country Status (6)

Country Link
US (3) US7166910B2 (enExample)
EP (2) EP1346601B1 (enExample)
JP (3) JP4532827B2 (enExample)
AT (1) ATE510415T1 (enExample)
AU (1) AU2002229116A1 (enExample)
WO (1) WO2002045463A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190070618A (ko) * 2017-12-13 2019-06-21 현대자동차주식회사 멤스 마이크로폰

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