DE4000903C1 - - Google Patents

Info

Publication number
DE4000903C1
DE4000903C1 DE4000903A DE4000903A DE4000903C1 DE 4000903 C1 DE4000903 C1 DE 4000903C1 DE 4000903 A DE4000903 A DE 4000903A DE 4000903 A DE4000903 A DE 4000903A DE 4000903 C1 DE4000903 C1 DE 4000903C1
Authority
DE
Germany
Prior art keywords
tongue
electrode
carrier
etching
upper layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE4000903A
Other languages
German (de)
English (en)
Inventor
Jiri Dr. Dr.-Ing. Marek
Dietmar Dr. Dr.-Ing. 7410 Reutlingen De Haack
Martin Dipl.-Min. 7052 Schwaikheim De Warth
Frank Dr.Rer.Nat. Dipl.-Phys. 7257 Ditzingen De Bantien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE4000903A priority Critical patent/DE4000903C1/de
Application granted granted Critical
Publication of DE4000903C1 publication Critical patent/DE4000903C1/de
Priority to FR9015300A priority patent/FR2657170B1/fr
Priority to GB9027366A priority patent/GB2240178B/en
Priority to US07/631,623 priority patent/US5151763A/en
Priority to JP00213491A priority patent/JP3149196B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
DE4000903A 1990-01-15 1990-01-15 Expired - Lifetime DE4000903C1 (enExample)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE4000903A DE4000903C1 (enExample) 1990-01-15 1990-01-15
FR9015300A FR2657170B1 (fr) 1990-01-15 1990-12-06 Capteur d'acceleration destine a la mesure d'oscillations, et procede pour sa mise en óoeuvre.
GB9027366A GB2240178B (en) 1990-01-15 1990-12-18 Acceleration sensor
US07/631,623 US5151763A (en) 1990-01-15 1990-12-21 Acceleration and vibration sensor and method of making the same
JP00213491A JP3149196B2 (ja) 1990-01-15 1991-01-11 振動又は加速度測定センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4000903A DE4000903C1 (enExample) 1990-01-15 1990-01-15

Publications (1)

Publication Number Publication Date
DE4000903C1 true DE4000903C1 (enExample) 1990-08-09

Family

ID=6398064

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4000903A Expired - Lifetime DE4000903C1 (enExample) 1990-01-15 1990-01-15

Country Status (5)

Country Link
US (1) US5151763A (enExample)
JP (1) JP3149196B2 (enExample)
DE (1) DE4000903C1 (enExample)
FR (1) FR2657170B1 (enExample)
GB (1) GB2240178B (enExample)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2704949A1 (fr) * 1993-05-06 1994-11-10 Bosch Gmbh Robert Procédé pour la fabrication de capteurs et capteur fabriqué selon ce procédé.
DE4417132A1 (de) * 1994-05-17 1995-11-23 Ibm Resonanter Meßwertaufnehmer
DE4421337A1 (de) * 1994-06-17 1995-12-21 Telefunken Microelectron Ätzverfahren zur Herstellung von quasiplanaren, freitragenden Strukturen in Silizium
DE4431232A1 (de) * 1994-09-02 1996-03-14 Hahn Schickard Ges Integrierbares Feder-Masse-System
DE4439238A1 (de) * 1994-11-03 1996-05-09 Telefunken Microelectron Kapazitiver Beschleunigungssensor
US5802479A (en) * 1994-09-23 1998-09-01 Advanced Safety Concepts, Inc. Motor vehicle occupant sensing systems
DE4022464C2 (de) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Beschleunigungssensor
FR2802637A1 (fr) * 1999-12-18 2001-06-22 Bosch Gmbh Robert Capteur de detection du cliquetis d'un moteur a combustion interne
DE4331798B4 (de) * 1993-09-18 2004-08-26 Robert Bosch Gmbh Verfahren zur Herstellung von mikromechanischen Bauelementen
DE4318466B4 (de) * 1993-06-03 2004-12-09 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Sensors
US7335650B2 (en) 2000-01-14 2008-02-26 Sterix Limited Composition
DE102004013583B4 (de) * 2003-03-20 2013-01-31 Denso Corporation Sensor für eine physikalische Grösse mit einem Balken
DE102018220936A1 (de) 2018-12-04 2020-06-04 Robert Bosch Gmbh Verfahren zur Überprüfung eines Sensorwertes eines MEMS-Sensors

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US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
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US5959200A (en) * 1997-08-27 1999-09-28 The Board Of Trustees Of The Leland Stanford Junior University Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beams
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US6389899B1 (en) 1998-06-09 2002-05-21 The Board Of Trustees Of The Leland Stanford Junior University In-plane micromachined accelerometer and bridge circuit having same
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US6872984B1 (en) 1998-07-29 2005-03-29 Silicon Light Machines Corporation Method of sealing a hermetic lid to a semiconductor die at an angle
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JP4238437B2 (ja) 1999-01-25 2009-03-18 株式会社デンソー 半導体力学量センサとその製造方法
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US8623710B1 (en) 2000-11-28 2014-01-07 Knowles Electronics, Llc Methods of manufacture of bottom port multi-part surface mount silicon condenser microphone packages
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US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
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FR2876795B1 (fr) * 2004-10-19 2006-12-29 Univ Reims Champagne Ardenne Dispositif de detection de defauts des machines tournantes
DE102005008511B4 (de) 2005-02-24 2019-09-12 Tdk Corporation MEMS-Mikrofon
DE102005008512B4 (de) 2005-02-24 2016-06-23 Epcos Ag Elektrisches Modul mit einem MEMS-Mikrofon
DE102005053767B4 (de) 2005-11-10 2014-10-30 Epcos Ag MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau
DE102005053765B4 (de) 2005-11-10 2016-04-14 Epcos Ag MEMS-Package und Verfahren zur Herstellung
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Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022464C2 (de) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Beschleunigungssensor
US5616523A (en) * 1993-05-06 1997-04-01 Robert Bosch Gmbh Method of manufacturing sensor
DE4315012B4 (de) * 1993-05-06 2007-01-11 Robert Bosch Gmbh Verfahren zur Herstellung von Sensoren und Sensor
FR2704949A1 (fr) * 1993-05-06 1994-11-10 Bosch Gmbh Robert Procédé pour la fabrication de capteurs et capteur fabriqué selon ce procédé.
DE4318466B4 (de) * 1993-06-03 2004-12-09 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Sensors
DE4331798B4 (de) * 1993-09-18 2004-08-26 Robert Bosch Gmbh Verfahren zur Herstellung von mikromechanischen Bauelementen
DE4417132A1 (de) * 1994-05-17 1995-11-23 Ibm Resonanter Meßwertaufnehmer
DE4421337A1 (de) * 1994-06-17 1995-12-21 Telefunken Microelectron Ätzverfahren zur Herstellung von quasiplanaren, freitragenden Strukturen in Silizium
DE4431232A1 (de) * 1994-09-02 1996-03-14 Hahn Schickard Ges Integrierbares Feder-Masse-System
DE4431232C2 (de) * 1994-09-02 1999-07-08 Hahn Schickard Ges Integrierbares Feder-Masse-System
US5802479A (en) * 1994-09-23 1998-09-01 Advanced Safety Concepts, Inc. Motor vehicle occupant sensing systems
US6014602A (en) * 1994-09-23 2000-01-11 Advanced Safety Concepts, Inc. Motor vehicle occupant sensing systems
US5623099A (en) * 1994-11-03 1997-04-22 Temic Telefunken Microelectronic Gmbh Two-element semiconductor capacitive acceleration sensor
DE4439238A1 (de) * 1994-11-03 1996-05-09 Telefunken Microelectron Kapazitiver Beschleunigungssensor
FR2802637A1 (fr) * 1999-12-18 2001-06-22 Bosch Gmbh Robert Capteur de detection du cliquetis d'un moteur a combustion interne
DE19961299B4 (de) * 1999-12-18 2009-04-30 Robert Bosch Gmbh Sensor zur Erkennung des Klopfens bei einer Brennkraftmaschine
US7335650B2 (en) 2000-01-14 2008-02-26 Sterix Limited Composition
DE102004013583B4 (de) * 2003-03-20 2013-01-31 Denso Corporation Sensor für eine physikalische Grösse mit einem Balken
DE102004013583B8 (de) * 2003-03-20 2013-05-02 Denso Corporation Sensor für eine physikalische Grösse mit einem Balken
DE102018220936A1 (de) 2018-12-04 2020-06-04 Robert Bosch Gmbh Verfahren zur Überprüfung eines Sensorwertes eines MEMS-Sensors
US11396449B2 (en) 2018-12-04 2022-07-26 Robert Bosch Gmbh Method for checking a sensor value of a MEMS sensor

Also Published As

Publication number Publication date
GB2240178A (en) 1991-07-24
GB9027366D0 (en) 1991-02-06
JPH04313031A (ja) 1992-11-05
FR2657170A1 (fr) 1991-07-19
JP3149196B2 (ja) 2001-03-26
US5151763A (en) 1992-09-29
FR2657170B1 (fr) 1995-09-01
GB2240178B (en) 1994-05-04

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