FR2657170B1 - Capteur d'acceleration destine a la mesure d'oscillations, et procede pour sa mise en óoeuvre. - Google Patents

Capteur d'acceleration destine a la mesure d'oscillations, et procede pour sa mise en óoeuvre.

Info

Publication number
FR2657170B1
FR2657170B1 FR9015300A FR9015300A FR2657170B1 FR 2657170 B1 FR2657170 B1 FR 2657170B1 FR 9015300 A FR9015300 A FR 9015300A FR 9015300 A FR9015300 A FR 9015300A FR 2657170 B1 FR2657170 B1 FR 2657170B1
Authority
FR
France
Prior art keywords
implementation
acceleration sensor
measuring oscillations
oscillations
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9015300A
Other languages
English (en)
Other versions
FR2657170A1 (fr
Inventor
Marek Jiri
Bantien Frank
Haack Dietmar
Warth Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2657170A1 publication Critical patent/FR2657170A1/fr
Application granted granted Critical
Publication of FR2657170B1 publication Critical patent/FR2657170B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
FR9015300A 1990-01-15 1990-12-06 Capteur d'acceleration destine a la mesure d'oscillations, et procede pour sa mise en óoeuvre. Expired - Fee Related FR2657170B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4000903A DE4000903C1 (fr) 1990-01-15 1990-01-15

Publications (2)

Publication Number Publication Date
FR2657170A1 FR2657170A1 (fr) 1991-07-19
FR2657170B1 true FR2657170B1 (fr) 1995-09-01

Family

ID=6398064

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9015300A Expired - Fee Related FR2657170B1 (fr) 1990-01-15 1990-12-06 Capteur d'acceleration destine a la mesure d'oscillations, et procede pour sa mise en óoeuvre.

Country Status (5)

Country Link
US (1) US5151763A (fr)
JP (1) JP3149196B2 (fr)
DE (1) DE4000903C1 (fr)
FR (1) FR2657170B1 (fr)
GB (1) GB2240178B (fr)

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022464C2 (de) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Beschleunigungssensor
US6903084B2 (en) 1991-08-29 2005-06-07 Sterix Limited Steroid sulphatase inhibitors
US5707077A (en) * 1991-11-18 1998-01-13 Hitachi, Ltd. Airbag system using three-dimensional acceleration sensor
JP2773495B2 (ja) * 1991-11-18 1998-07-09 株式会社日立製作所 三次元加速度センサ
JP3367113B2 (ja) 1992-04-27 2003-01-14 株式会社デンソー 加速度センサ
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
JP3151956B2 (ja) * 1992-09-04 2001-04-03 株式会社村田製作所 加速度センサ
US5734105A (en) 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
DE4309206C1 (de) * 1993-03-22 1994-09-15 Texas Instruments Deutschland Halbleitervorrichtung mit einem Kraft- und/oder Beschleunigungssensor
DE4315012B4 (de) * 1993-05-06 2007-01-11 Robert Bosch Gmbh Verfahren zur Herstellung von Sensoren und Sensor
US5616514A (en) * 1993-06-03 1997-04-01 Robert Bosch Gmbh Method of fabricating a micromechanical sensor
DE4318466B4 (de) * 1993-06-03 2004-12-09 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Sensors
DE4331798B4 (de) * 1993-09-18 2004-08-26 Robert Bosch Gmbh Verfahren zur Herstellung von mikromechanischen Bauelementen
DE4417132C2 (de) * 1994-05-17 1996-08-14 Ibm Resonanter Meßwertaufnehmer und dessen Verwendung
JP2920868B2 (ja) * 1994-06-15 1999-07-19 株式会社センサー技術研究所 地震レベル判定方法およびガスメータ
DE4421337A1 (de) * 1994-06-17 1995-12-21 Telefunken Microelectron Ätzverfahren zur Herstellung von quasiplanaren, freitragenden Strukturen in Silizium
JP3114006B2 (ja) * 1994-08-29 2000-12-04 セイコーインスツルメンツ株式会社 半導体装置、及び、その製造方法
DE4431338C2 (de) * 1994-09-02 2003-07-31 Bosch Gmbh Robert Beschleunigungssensor
DE4431232C2 (de) * 1994-09-02 1999-07-08 Hahn Schickard Ges Integrierbares Feder-Masse-System
US5802479A (en) * 1994-09-23 1998-09-01 Advanced Safety Concepts, Inc. Motor vehicle occupant sensing systems
DE4439238A1 (de) * 1994-11-03 1996-05-09 Telefunken Microelectron Kapazitiver Beschleunigungssensor
US5640039A (en) * 1994-12-01 1997-06-17 Analog Devices, Inc. Conductive plane beneath suspended microstructure
US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
US5627316A (en) * 1995-03-24 1997-05-06 Sigma-Delta N.V. Capacitive inclination and acceleration sensor
US5824565A (en) * 1996-02-29 1998-10-20 Motorola, Inc. Method of fabricating a sensor
US5870482A (en) * 1997-02-25 1999-02-09 Knowles Electronics, Inc. Miniature silicon condenser microphone
US5959200A (en) * 1997-08-27 1999-09-28 The Board Of Trustees Of The Leland Stanford Junior University Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beams
JPH1194873A (ja) * 1997-09-18 1999-04-09 Mitsubishi Electric Corp 加速度センサ及びその製造方法
EP0913921B1 (fr) * 1997-10-29 2006-05-03 STMicroelectronics S.r.l. Procédé de fabrication de microactionneur à semiconducteur, en particulier pour tête de lecture/écriture de disque dur, et le microactionneur ainsi obtenu
DE69826242D1 (de) 1998-05-05 2004-10-21 St Microelectronics Srl Herstellungsverfahren für eine Festplatten-Lese/Schreibeinheit, mit mikrometrischer Betätigung
US6389899B1 (en) 1998-06-09 2002-05-21 The Board Of Trustees Of The Leland Stanford Junior University In-plane micromachined accelerometer and bridge circuit having same
DE69828960D1 (de) 1998-07-22 2005-03-17 St Microelectronics Srl Integrierte Anordnung mit einer Vorrichtung für den elektrostatischen Transport von dielektrischen Teilchen, die in einer Vorrichtung zum Betätigen von Festplatten erzeugt werden, und elektrostatisches Transportverfahren
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
EP0977180B1 (fr) 1998-07-30 2005-02-09 STMicroelectronics S.r.l. Méthode pour l'assemblage d'un actuateur pour disque dur, comprenant un transducteur pour lire et enregistrer, un microactuateur et une suspension et l'actuateur ainsi obtenu
EP0977349B1 (fr) 1998-07-30 2005-07-06 STMicroelectronics S.r.l. Microactionneur intégré actionné à distance, en particulier pour un transducteur de lecture/écriture dans un dispositif à disque dur
DE69831237D1 (de) 1998-09-30 2005-09-22 St Microelectronics Srl Integrierter Hochleistungs-Microantrieb insbesondere für einen Lese/Schreib-Kopf in Festplattenlaufwerken
JP4238437B2 (ja) 1999-01-25 2009-03-18 株式会社デンソー 半導体力学量センサとその製造方法
DE19961299B4 (de) * 1999-12-18 2009-04-30 Robert Bosch Gmbh Sensor zur Erkennung des Klopfens bei einer Brennkraftmaschine
US7335650B2 (en) 2000-01-14 2008-02-26 Sterix Limited Composition
US6535460B2 (en) 2000-08-11 2003-03-18 Knowles Electronics, Llc Miniature broadband acoustic transducer
US6987859B2 (en) 2001-07-20 2006-01-17 Knowles Electronics, Llc. Raised microstructure of silicon based device
US8629005B1 (en) 2000-11-28 2014-01-14 Knowles Electronics, Llc Methods of manufacture of bottom port surface mount silicon condenser microphone packages
US7439616B2 (en) 2000-11-28 2008-10-21 Knowles Electronics, Llc Miniature silicon condenser microphone
US7166910B2 (en) * 2000-11-28 2007-01-23 Knowles Electronics Llc Miniature silicon condenser microphone
US7434305B2 (en) 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6930364B2 (en) * 2001-09-13 2005-08-16 Silicon Light Machines Corporation Microelectronic mechanical system and methods
US7023066B2 (en) * 2001-11-20 2006-04-04 Knowles Electronics, Llc. Silicon microphone
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6767751B2 (en) * 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6781231B2 (en) * 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US7004027B2 (en) * 2003-03-03 2006-02-28 Yamaha Corporation Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith
US7150192B2 (en) * 2003-03-03 2006-12-19 Yamaha Corporation Acceleration measurement method using electrostatic-capacity-type acceleration sensor
JP4085854B2 (ja) * 2003-03-20 2008-05-14 株式会社デンソー 半導体力学量センサの製造方法
FR2876795B1 (fr) * 2004-10-19 2006-12-29 Univ Reims Champagne Ardenne Dispositif de detection de defauts des machines tournantes
DE102005008511B4 (de) 2005-02-24 2019-09-12 Tdk Corporation MEMS-Mikrofon
DE102005008512B4 (de) 2005-02-24 2016-06-23 Epcos Ag Elektrisches Modul mit einem MEMS-Mikrofon
DE102005053767B4 (de) 2005-11-10 2014-10-30 Epcos Ag MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau
DE102005053765B4 (de) 2005-11-10 2016-04-14 Epcos Ag MEMS-Package und Verfahren zur Herstellung
US20080042223A1 (en) * 2006-08-17 2008-02-21 Lu-Lee Liao Microelectromechanical system package and method for making the same
US20080075308A1 (en) * 2006-08-30 2008-03-27 Wen-Chieh Wei Silicon condenser microphone
US20080083957A1 (en) * 2006-10-05 2008-04-10 Wen-Chieh Wei Micro-electromechanical system package
US7894622B2 (en) 2006-10-13 2011-02-22 Merry Electronics Co., Ltd. Microphone
WO2008137934A1 (fr) 2007-05-07 2008-11-13 Raytheon Sarcos, Llc Système numérique de détection de blessure
US8191421B2 (en) 2007-05-07 2012-06-05 Raytheon Company Digital ballistic impact detection system
EP2774390A4 (fr) 2011-11-04 2015-07-22 Knowles Electronics Llc Membrane diélectrique intégrée en vue de servir de barrière dans un dispositif acoustique, et procédé pour sa fabrication
US9121785B2 (en) 2012-04-24 2015-09-01 Sarcos Lc Non-powered impact recorder
US9078063B2 (en) 2012-08-10 2015-07-07 Knowles Electronics, Llc Microphone assembly with barrier to prevent contaminant infiltration
DE102013106353B4 (de) * 2013-06-18 2018-06-28 Tdk Corporation Verfahren zum Aufbringen einer strukturierten Beschichtung auf ein Bauelement
US9794661B2 (en) 2015-08-07 2017-10-17 Knowles Electronics, Llc Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package
DE102018220936A1 (de) 2018-12-04 2020-06-04 Robert Bosch Gmbh Verfahren zur Überprüfung eines Sensorwertes eines MEMS-Sensors

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS5938621A (ja) * 1982-08-27 1984-03-02 Nissan Motor Co Ltd 振動分析装置
JPS6055655A (ja) * 1983-09-07 1985-03-30 Nissan Motor Co Ltd 梁構造体を有する半導体装置
US4783237A (en) * 1983-12-01 1988-11-08 Harry E. Aine Solid state transducer and method of making same
FR2558263B1 (fr) * 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
JPS61234064A (ja) * 1985-04-10 1986-10-18 Nissan Motor Co Ltd 半導体振動検出装置
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
FI81915C (fi) * 1987-11-09 1990-12-10 Vaisala Oy Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
DE3814952A1 (de) * 1988-05-03 1989-11-23 Bosch Gmbh Robert Sensor
US4951510A (en) * 1988-07-14 1990-08-28 University Of Hawaii Multidimensional force sensor
US4945773A (en) * 1989-03-06 1990-08-07 Ford Motor Company Force transducer etched from silicon
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer

Also Published As

Publication number Publication date
US5151763A (en) 1992-09-29
GB2240178A (en) 1991-07-24
JPH04313031A (ja) 1992-11-05
GB2240178B (en) 1994-05-04
DE4000903C1 (fr) 1990-08-09
GB9027366D0 (en) 1991-02-06
JP3149196B2 (ja) 2001-03-26
FR2657170A1 (fr) 1991-07-19

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