DE69315544T2 - Integrierter Beschleunigungsmesser mit zum Substrat paralleler Messachse - Google Patents

Integrierter Beschleunigungsmesser mit zum Substrat paralleler Messachse

Info

Publication number
DE69315544T2
DE69315544T2 DE69315544T DE69315544T DE69315544T2 DE 69315544 T2 DE69315544 T2 DE 69315544T2 DE 69315544 T DE69315544 T DE 69315544T DE 69315544 T DE69315544 T DE 69315544T DE 69315544 T2 DE69315544 T2 DE 69315544T2
Authority
DE
Germany
Prior art keywords
substrate
axis parallel
measuring axis
integrated accelerometer
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69315544T
Other languages
English (en)
Other versions
DE69315544D1 (de
Inventor
Bernard Diem
France Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69315544D1 publication Critical patent/DE69315544D1/de
Publication of DE69315544T2 publication Critical patent/DE69315544T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
DE69315544T 1992-12-28 1993-12-23 Integrierter Beschleunigungsmesser mit zum Substrat paralleler Messachse Expired - Lifetime DE69315544T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9215770A FR2700012B1 (fr) 1992-12-28 1992-12-28 Accéléromètre intégré à axe sensible parallèle au substrat.

Publications (2)

Publication Number Publication Date
DE69315544D1 DE69315544D1 (de) 1998-01-15
DE69315544T2 true DE69315544T2 (de) 1998-06-04

Family

ID=9437152

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69315544T Expired - Lifetime DE69315544T2 (de) 1992-12-28 1993-12-23 Integrierter Beschleunigungsmesser mit zum Substrat paralleler Messachse

Country Status (5)

Country Link
US (1) US5495761A (de)
EP (1) EP0605303B1 (de)
JP (1) JP3457037B2 (de)
DE (1) DE69315544T2 (de)
FR (1) FR2700012B1 (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3367113B2 (ja) 1992-04-27 2003-01-14 株式会社デンソー 加速度センサ
US5565625A (en) * 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
DE19503236B4 (de) * 1995-02-02 2006-05-24 Robert Bosch Gmbh Sensor aus einem mehrschichtigen Substrat
FR2732467B1 (fr) * 1995-02-10 1999-09-17 Bosch Gmbh Robert Capteur d'acceleration et procede de fabrication d'un tel capteur
KR100374804B1 (ko) * 1995-05-25 2003-05-09 삼성전자주식회사 진동형자이로스코프
DE19519488B4 (de) * 1995-05-27 2005-03-10 Bosch Gmbh Robert Drehratensensor mit zwei Beschleunigungssensoren
US5824565A (en) * 1996-02-29 1998-10-20 Motorola, Inc. Method of fabricating a sensor
US5880369A (en) * 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
US5747353A (en) * 1996-04-16 1998-05-05 National Semiconductor Corporation Method of making surface micro-machined accelerometer using silicon-on-insulator technology
US6250156B1 (en) 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
EP0822415B1 (de) * 1996-07-31 2003-03-26 STMicroelectronics S.r.l. Integrierter kapazitiver Halbleiter-Beschleunigungsmessaufnehmer sowie Verfahren zu seiner Herstellung
US5996411A (en) * 1996-11-25 1999-12-07 Alliedsignal Inc. Vibrating beam accelerometer and method for manufacturing the same
DE19719779A1 (de) * 1997-05-10 1998-11-12 Bosch Gmbh Robert Beschleunigungssensor
FR2764706B1 (fr) * 1997-06-17 1999-07-09 Commissariat Energie Atomique Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication
JP4003326B2 (ja) 1998-02-12 2007-11-07 株式会社デンソー 半導体力学量センサおよびその製造方法
US5948982A (en) * 1998-02-23 1999-09-07 Alliedsignal Inc. Vibrating beam accelerometers and methods of forming vibrating beam accelerometers
DE19819458A1 (de) * 1998-04-30 1999-11-04 Bosch Gmbh Robert Verfahren zur Herstellung eines mikromechanischen Bauelements und mikromechanisches Bauelement
US5920012A (en) * 1998-06-16 1999-07-06 Boeing North American Micromechanical inertial sensor
US6291875B1 (en) 1998-06-24 2001-09-18 Analog Devices Imi, Inc. Microfabricated structures with electrical isolation and interconnections
JP2000206142A (ja) 1998-11-13 2000-07-28 Denso Corp 半導体力学量センサおよびその製造方法
US6105428A (en) * 1998-12-10 2000-08-22 Motorola, Inc. Sensor and method of use
JP4238437B2 (ja) 1999-01-25 2009-03-18 株式会社デンソー 半導体力学量センサとその製造方法
US6433401B1 (en) 1999-04-06 2002-08-13 Analog Devices Imi, Inc. Microfabricated structures with trench-isolation using bonded-substrates and cavities
US7051590B1 (en) 1999-06-15 2006-05-30 Analog Devices Imi, Inc. Structure for attenuation or cancellation of quadrature error
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
US6703679B1 (en) 1999-08-31 2004-03-09 Analog Devices, Imi, Inc. Low-resistivity microelectromechanical structures with co-fabricated integrated circuit
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US6440766B1 (en) 2000-02-16 2002-08-27 Analog Devices Imi, Inc. Microfabrication using germanium-based release masks
JP3666370B2 (ja) * 2000-07-06 2005-06-29 株式会社村田製作所 外力検知センサ
US20030048036A1 (en) * 2001-08-31 2003-03-13 Lemkin Mark Alan MEMS comb-finger actuator
TW574128B (en) * 2002-11-29 2004-02-01 Lightuning Tech Inc Thermal bubble type micro-machined inertial sensor
FR2852111B1 (fr) * 2003-03-05 2005-06-24 Univ Franche Comte Dispositif d'horloge utilisant la technologie mems
FR2874907B1 (fr) * 2004-09-03 2006-11-24 Silmach Soc Par Actions Simpli Dispositif d'entrainement, notamment pour mecanisme horloger
FR2881568B1 (fr) * 2005-02-03 2011-01-14 Commissariat Energie Atomique Condensateur a capacite variable et a forme specifique, gyrometre comportant un tel condensateur et accelerometre comportant un tel condensateur
FR2924856B1 (fr) 2007-12-11 2012-02-10 Memscap Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur
JP2009216693A (ja) * 2008-02-13 2009-09-24 Denso Corp 物理量センサ
FR2945835B1 (fr) 2009-05-25 2016-01-22 Commissariat Energie Atomique Microsystemes de transformation de pressions et de compression, capteur, roue, puce, micromoteur, pile incorporant ce microsysteme et procede de fabrication de ce microsysteme
JP2013205162A (ja) * 2012-03-28 2013-10-07 Toyota Central R&D Labs Inc 静電容量式センサ
CN102897704B (zh) * 2012-10-17 2015-03-04 东南大学 一种静电力调变齿间隙的微机电梳齿机构
CN107188108B (zh) * 2017-05-23 2023-07-21 深迪半导体(绍兴)有限公司 一种mems器件及其防吸附方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2541775B1 (fr) * 1983-02-28 1985-10-04 Onera (Off Nat Aerospatiale) Accelerometres a suspension electrostatique
FR2558263B1 (fr) * 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
US4999735A (en) * 1990-03-08 1991-03-12 Allied-Signal Inc. Differential capacitive transducer and method of making
WO1992003740A1 (en) * 1990-08-17 1992-03-05 Analog Devices, Inc. Monolithic accelerometer
US5337606A (en) * 1992-08-10 1994-08-16 Motorola, Inc. Laterally sensitive accelerometer and method for making

Also Published As

Publication number Publication date
JPH075194A (ja) 1995-01-10
DE69315544D1 (de) 1998-01-15
FR2700012A1 (fr) 1994-07-01
US5495761A (en) 1996-03-05
EP0605303A1 (de) 1994-07-06
EP0605303B1 (de) 1997-12-03
JP3457037B2 (ja) 2003-10-14
FR2700012B1 (fr) 1995-03-03

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