FR2732467B1 - Capteur d'acceleration et procede de fabrication d'un tel capteur - Google Patents

Capteur d'acceleration et procede de fabrication d'un tel capteur

Info

Publication number
FR2732467B1
FR2732467B1 FR9601504A FR9601504A FR2732467B1 FR 2732467 B1 FR2732467 B1 FR 2732467B1 FR 9601504 A FR9601504 A FR 9601504A FR 9601504 A FR9601504 A FR 9601504A FR 2732467 B1 FR2732467 B1 FR 2732467B1
Authority
FR
France
Prior art keywords
sensor
manufacturing
acceleration
acceleration sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9601504A
Other languages
English (en)
Other versions
FR2732467A1 (fr
Inventor
Horst Muenzel
Dietrich Schubert
Alexandra Bohringer
Michael Offenberg
Klaus Heyers
Markus Lutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19530736A external-priority patent/DE19530736B4/de
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2732467A1 publication Critical patent/FR2732467A1/fr
Application granted granted Critical
Publication of FR2732467B1 publication Critical patent/FR2732467B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/135—Removal of substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/159—Strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
FR9601504A 1995-02-10 1996-02-07 Capteur d'acceleration et procede de fabrication d'un tel capteur Expired - Lifetime FR2732467B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19504151 1995-02-10
DE19530736A DE19530736B4 (de) 1995-02-10 1995-08-22 Beschleunigungssensor und Verfahren zur Herstellung eines Beschleunigungssensors

Publications (2)

Publication Number Publication Date
FR2732467A1 FR2732467A1 (fr) 1996-10-04
FR2732467B1 true FR2732467B1 (fr) 1999-09-17

Family

ID=26012252

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9601504A Expired - Lifetime FR2732467B1 (fr) 1995-02-10 1996-02-07 Capteur d'acceleration et procede de fabrication d'un tel capteur

Country Status (3)

Country Link
US (3) US5723353A (fr)
JP (2) JPH08248058A (fr)
FR (1) FR2732467B1 (fr)

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JP4665942B2 (ja) * 1998-02-12 2011-04-06 株式会社デンソー 半導体力学量センサ
JP4003326B2 (ja) 1998-02-12 2007-11-07 株式会社デンソー 半導体力学量センサおよびその製造方法
JP3846094B2 (ja) 1998-03-17 2006-11-15 株式会社デンソー 半導体装置の製造方法
DE19817311B4 (de) * 1998-04-18 2007-03-22 Robert Bosch Gmbh Herstellungsverfahren für mikromechanisches Bauelement
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US6761829B2 (en) * 2001-04-26 2004-07-13 Rockwell Automation Technologies, Inc. Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
US6815243B2 (en) * 2001-04-26 2004-11-09 Rockwell Automation Technologies, Inc. Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
US6756310B2 (en) * 2001-09-26 2004-06-29 Rockwell Automation Technologies, Inc. Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques
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JP4890689B2 (ja) * 2001-07-24 2012-03-07 オリンパス株式会社 三次元構造体の製造方法及び揺動体の製造方法
US6792804B2 (en) * 2001-10-19 2004-09-21 Kionix, Inc. Sensor for measuring out-of-plane acceleration
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US6925710B1 (en) 2002-03-27 2005-08-09 Analog Devices, Inc. Method for manufacturing microelectromechanical combdrive device
JP3652671B2 (ja) * 2002-05-24 2005-05-25 沖電気工業株式会社 測定用配線パターン及びその測定方法
DE60333756D1 (de) * 2002-06-28 2010-09-23 Sumitomo Precision Prod Co Leiter für eine bewegliche elektrische schaltung und kreisel des vibrationstyps
FR2849014B1 (fr) * 2002-12-20 2005-06-10 Commissariat Energie Atomique Microstruture encapsulee et procede de fabrication d'une telle microstructure
US6916728B2 (en) * 2002-12-23 2005-07-12 Freescale Semiconductor, Inc. Method for forming a semiconductor structure through epitaxial growth
US7122395B2 (en) * 2002-12-23 2006-10-17 Motorola, Inc. Method of forming semiconductor devices through epitaxy
US6770506B2 (en) * 2002-12-23 2004-08-03 Motorola, Inc. Release etch method for micromachined sensors
US7514283B2 (en) * 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere
US6975193B2 (en) * 2003-03-25 2005-12-13 Rockwell Automation Technologies, Inc. Microelectromechanical isolating circuit
US8912174B2 (en) * 2003-04-16 2014-12-16 Mylan Pharmaceuticals Inc. Formulations and methods for treating rhinosinusitis
US7075160B2 (en) 2003-06-04 2006-07-11 Robert Bosch Gmbh Microelectromechanical systems and devices having thin film encapsulated mechanical structures
US6936491B2 (en) 2003-06-04 2005-08-30 Robert Bosch Gmbh Method of fabricating microelectromechanical systems and devices having trench isolated contacts
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US7102467B2 (en) * 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
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US7210352B2 (en) * 2005-06-14 2007-05-01 Innovative Micro Technology MEMS teeter-totter apparatus with curved beam and method of manufacture
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US20070170528A1 (en) * 2006-01-20 2007-07-26 Aaron Partridge Wafer encapsulated microelectromechanical structure and method of manufacturing same
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JP4952346B2 (ja) * 2007-04-06 2012-06-13 株式会社デンソー 半導体力学量センサ
JP5105968B2 (ja) 2007-06-22 2012-12-26 株式会社日立製作所 角速度検出装置
JP5790297B2 (ja) * 2011-08-17 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
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Also Published As

Publication number Publication date
US6055858A (en) 2000-05-02
US5959208A (en) 1999-09-28
JPH08248058A (ja) 1996-09-27
US5723353A (en) 1998-03-03
JP4448845B2 (ja) 2010-04-14
JP2007127658A (ja) 2007-05-24
FR2732467A1 (fr) 1996-10-04

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